JP3374008B2 - Magnetic head - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a magnetic recording / reproducing apparatus such as a hard disk drive and a manufacturing method thereof.

[0002]

2. Description of the Related Art In a hard disk drive as an external storage device for a computer or the like, it is required to improve the recording density, and the magnetic head used therefor has an electromagnetic conversion characteristic that can be applied to a recording medium having a high coercive force. , Low inductance characteristics to support high frequency recording / reproducing signals,
There is a demand for a gap length accuracy that can correspond to a recording / reproducing signal of a short wavelength. In order to respond to such a trend, a so-called MIG in which a narrow gap has been formed between a pair of core halves and a ferromagnetic metal thin film is formed on each of the abutting surfaces of the core halves, respectively. A (Metal In Gap) type magnetic head has been proposed (see Japanese Patent Publication No. 7-78853). The applicant has previously disclosed an improved MIG type magnetic head shown in FIG. 49 (see Japanese Patent Laid-Open No. 6-259718).

This is a pair of first and second core halves (13) (52) each made of a magnetic material such as Mn-Zn ferrite.
Are abutted against each other through a non-magnetic gap spacer (4) made of SiO2 or the like, and the upper surface faces a hard disk as a recording medium. Layers of reinforcing glass (54) (54) are provided on both sides of the second core half (52), and gaps are formed by the recesses (55) (55) formed on the upper surface facing the hard disk. The width W is defined. The gap width W is set to be substantially equal to the track width on the hard disk.

FIG. 50 is a cutaway view of FIG. 49 taken along the line Q-Q. A coil winding groove (15) having an open front surface is provided in the first core half body (13), and an obliquely inner portion is formed on the front side of the first core half body (13) above the coil winding groove (15). A base surface (19) inclined in the direction is formed. On the base surface (19), a vertical surface (11a) protruding to the upper surface of the first core half body (13) and the vertical surface (11a)
An inclined surface (11a) continuous from the lower end of (11a) and parallel to the base surface (19)
A first ferromagnetic thin film (11) integrally formed with b) is formed. A second ferromagnetic thin film (12) is formed on a surface of the second core half body (52) facing the first ferromagnetic thin film (11), and the first glass is formed through the gap spacer (4). Both core halves (13) and (52) are joined by (16). First and second ferromagnetic thin film (1
1) and 12) are both made of FeAlSi-based alloy, and the magnetic flux during recording / reproducing of the hard disk is the second ferromagnetic thin film (12), the core halves (13) (52), and the first ferromagnetic thin film (11). Go around.

In FIG. 50, the gap spacer (4)
Thickness t is the gap length, from the top of the first core half (13) to the first
The depth d to the upper end of the inclined surface (11b) of the ferromagnetic thin film (11) is called the gap depth, respectively. The gap spacer (4) and the magnetic material sandwiching the gap spacer (4) are collectively referred to as a gap portion. To form the gap spacer (4) on the magnetic head (3), a so-called butt gap method is used. The butt gap method, as shown in FIG. 51, is a pair of substrates to be core halves (13) (52).
(6) and (8) are prepared, and a non-magnetic layer to be the gap spacer (4) is formed on the abutting surfaces of both substrates (6) and (8) in advance, and both substrates (6) and (8) are added. In this method, the gap spacers (4) are formed by pressing them together. Both bonded substrates
(6) The magnetic head (3) is obtained by slicing (8).

[0006]

With respect to the above magnetic head, the applicant has found the following points to be improved. 1. In the conventional magnetic head (3), the magnetic material is exposed on the surface facing the hard disk even at a position apart from the gap on the second core half (52). However, the magnetic material in such a place is not necessary for recording / reproducing, and conversely, the magnetic head
This is a factor that the inductance of (3) becomes large.
Further, in order for the magnetic flux to smoothly pass through the second core half body (52), it is necessary to reduce the magnetic resistance inside the second core half body (52). 2. In any of the above methods of forming the gap spacer (4), when pressing the substrates (6) and (8), the substrates (6) and (8) are pressed.
It is difficult to uniformly adhere and press all the points in the longitudinal direction of the. Therefore, when the bonded substrates (6) and (8) are sliced to form the magnetic head (3), the thickness of the gap spacer (4), that is, the gap length t varies. It goes without saying that the variation in the gap length has a great influence on the magnetic characteristics. 3. The depth of the gap depth d has a great influence on the magnetic characteristics. Therefore, it is desirable that the gap depth d can be easily confirmed during the manufacture of the magnetic head (3). An object of the present invention is to provide a magnetic head that allows a magnetic flux to smoothly pass through the magnetic head without increasing the inductance value. A further object of the present invention is to provide a magnetic head in which variations in gap length are reduced and magnetic characteristics do not vary during mass production. A further object of the present invention is to provide a magnetic head that can easily confirm the gap depth in the manufacturing process.

[0007]

A magnetic head includes a first butting half body (1) having a coil winding groove (15) having an opening on one surface.
And a second butting half (2) that faces the opening of the coil winding groove (15) and is to be joined to the first butting half (1), wherein the first butting half (1) is , The first core half
A first core half body member (14), which constitutes a part of (13) and is made of a ferromagnetic material, and a first ferromagnetic thin film (11) which constitutes the rest of the first core half body (13); A second ferromagnetic thin film (12) forming a part of the core half body (52), a first ferromagnetic thin film (11) and a second ferromagnetic thin film
With a gap spacer (4) interposed between (12),
The gap spacer (4) comprises a first ferromagnetic thin film (11) and a first glass (16) formed inside the first ferromagnetic thin film (11).
The second butt half (2) is formed on the layer of the magnetic field and is joined to the second ferromagnetic thin film (12) to allow the magnetic flux to pass around, thereby forming the remaining part of the second core half (52). A surface of the second butting half (2) facing the recording medium is formed of a non-magnetic material. Also, the second ferromagnetic thin film (12) has a second
It has a wide portion (12b) joined to the butt half (2), and the wide portion (12b) is exposed on the side surface of the first butt half (1). Further, the magnetic head (3) has a first butting half.
A large ferromagnetic substrate (6) to be a part of (1) is prepared, and first pre-processed grooves (60) (60) perpendicular to the track width direction and the first large substrate (6) are provided on the large substrate (6). A step of forming a depth end groove (61) orthogonal to the pre-processed groove (60), a first ferromagnetic thin film (11) is deposited on the entire upper surface of the large substrate (6), and a first glass is formed thereon.
Filling (16), grinding and polishing the upper surface, the first ferromagnetic thin film
The step of exposing the cross section of (11) to the upper surface, the non-magnetic thin film to be the gap spacer (4) and the second ferromagnetic thin film (12) are overlaid on the upper surface of the large substrate (6), and then the etching is performed. After processing, the narrow portion (4a) (12
a) and a wide part (4b) continuous with the inner ends of the narrow parts (4a) (12a)
(12b) is integrally formed, and the first ferromagnetic thin film (11) is formed to have the same width as the narrow portions (4a) and (12a).

[0008]

FUNCTION AND EFFECT The present invention has the following effects. 1. The first ferromagnetic thin film (1
1), the first butting half body (1) in which the gap portion composed of the gap spacer (4) and the second ferromagnetic thin film (12) is exposed,
A second butting half (2) whose surface facing the recording medium is made of a non-magnetic material is butted and joined. Since the magnetic material unnecessary for recording and reproduction is not exposed on the surface of the second butting half (2) facing the recording medium, the inductance value of the magnetic head (3) is reduced and the magnetic characteristics are improved. It 2. The second ferromagnetic thin film (12) and the gap spacer (4) are formed on the first ferromagnetic thin film after being formed by sputtering or the like.
It is formed by etching and the like including (11). Therefore,
The gap length t and the gap width, which are the thickness of the gap spacer (4), have little variation, and the variation in the magnetic characteristics of the magnetic head (3) is small. 3. If the second ferromagnetic thin film 12 is exposed on the side surface of the magnetic head 3, the gap depth can be easily confirmed during the manufacturing of the magnetic head 3.

[0009]

DETAILED DESCRIPTION OF THE INVENTION A magnetic head according to the present invention will be described below. The same reference numerals are used for the same configurations as the conventional one, and the description is omitted. The magnetic heads shown below are all used in a hard disk drive, and the hard disk drive has a plurality of hard disks (71) in the main body (7) as shown in FIG.
(71) are vertically arranged in parallel and rotated by a rotation mechanism (not shown). Corresponding to each hard disk (71), a head support mechanism (7
2) is installed in the device body (7), and the magnetic head slider (9) is levitated by several tens of nm due to the air pressure caused by the high speed rotation of the hard disk (71), and the hard disk (71)
Recording / reproduction of a signal to / from is performed. Magnetic head slider
As shown in FIG. 48, (9) is provided with a fitting groove (92) in the slider body (90) having an air bearing portion (91) on the upper surface, and the fitting groove (92) is formed as follows. It is formed by fitting and fixing each magnetic head (3) shown. The magnetic heads (3) in the following embodiments are all MIG type magnetic heads (3),
It is characterized by the structure near the gap.

(First Embodiment) FIG. 1 is a perspective view of a magnetic head (3), FIG. 2 is a cutaway view taken along line AA of FIG. 1, and FIGS. 3A and 3B are FIG. 3 is a left and right side view of the magnetic head (3) taken along the line BB, respectively. The magnetic head (3) has a first butting half (1) having a coil winding groove (15) having an open front surface, and a second butting half (2) having a non-magnetic material exposed on the upper surface thereof. Then, the coil (31) is wound around the second butting half body (2) through the coil winding groove (15).
As in the conventional case, the upper surface of the magnetic head (3) faces the hard disk as the recording medium. First butt half (1)
Is a non-magnetic gap spacer (4) (40) and FeAlS on the front surface of the first core half (13) having a coil winding groove (15).
A second ferromagnetic thin film (12) layer made of an i alloy, FeTaN alloy, or the like is formed by sputtering or the like. The gap spacer is separated into a facing gap spacer (4) located at the upper part and a deep gap spacer (40) located at the lower part with the coil winding groove (15) sandwiched therebetween.

The first core half body (13) is made of a ferromagnetic material such as Mn-Zn ferrite.
This is formed by forming a layer of a first ferromagnetic thin film (11) made of an alloy or the like. Notches (18) (18) filled with the first glass (16) are formed on both sides of the protrusion (10). The tip surface of the projection (10) is inclined inward, and the first ferromagnetic thin film (11) formed on the tip surface has a vertical surface (11a) whose upper end is exposed to the surface facing the hard disk. And an inclined surface (11b) extending obliquely inward from the lower end of the vertical surface (11a). On the inclined surface (11b), a layer of the first glass (16) whose front surface coincides with the vertical surface (11a) is formed.

The second butting half (2) comprises a base (25) made of a non-magnetic material, and the first butting half (1) of the base (25).
And a third ferromagnetic thin film (20) provided in the surface opposite to. The third ferromagnetic thin film (20) is made of FeAlSi alloy or FeTaN.
The third ferromagnetic thin film (20) is made of an alloy or the like, and the upper and lower ends of the third ferromagnetic thin film (20) are joined to the second ferromagnetic thin film (12), and the upper ends are located inside the surface facing the hard disk. Where the second ferromagnetic thin film
As shown in FIG. 3, (12) is integrally provided with a narrow portion (12a) having a width substantially equal to the track width and a wide portion (12b) in contact with the third ferromagnetic thin film (20). . Therefore, the third ferromagnetic thin film
The upper end of (20) is not exposed on the surface facing the hard disk near the gap, and is a non-magnetic base (25).
The upper surface of is exposed.

As shown in FIG. 1, the first ferromagnetic thin film (1
1), the facing surface side and the back side gap spacers (4) (40), the second ferromagnetic thin film (12), and the side surfaces of the first butting half body (1),
It is covered with a second glass (17) having a lower melting point than the first glass (16). The thickness of the third ferromagnetic thin film (20) is set to several μm, and the thickness of the second butting half body (2) is set to hundred and several tens μm. In the following description, the core half refers to one of the constituent members of the magnetic head (3) which is arranged on both sides via the gap spacer (4), and the second butting half in this example.
The magnetic material portion of (2) and the second ferromagnetic thin film (12) are
Corresponds to the core half (52).

When reproducing the hard disk, the counterclockwise magnetic flux passes through the second ferromagnetic thin film (12) and the third ferromagnetic thin film (20), as shown by the alternate long and short dash line in FIG. It circulates in the half member (14) and escapes from the first ferromagnetic thin film (11) to the hard disk. Since the area of the perpendicular surface (11a) of the first ferromagnetic thin film (11) facing the second ferromagnetic thin film (12) via the facing surface side gap spacer (4) is small, the magnetic resistance is large,
The magnetic flux does not pass through the facing side gap spacer (4). Further, since the magnetic flux passes through the wide portion (12b) which is the contact portion between the second ferromagnetic thin film (12) and the third ferromagnetic thin film (20), the magnetic resistance is small and the magnetic flux is the third ferromagnetic thin film (20). ) Pass through smoothly.

Further, the back side gap spacer (40) and the second
Since the area facing the ferromagnetic thin film (12) is large, the magnetic resistance is small, and the magnetic flux smoothly passes through the inner gap spacer (40). The reproduction output due to the passage of such magnetic flux is the coil
Taken out from (31). In FIG. 1, the remaining portions (200) (110) of the third ferromagnetic thin film (20) and the first ferromagnetic thin film (11) are shown.
Is exposed on the top and side surfaces of the magnetic head (3).
This is because of the manufacturing convenience of the magnetic head (3) and does not form the technical feature of the present application. Also, the remaining portion (200) of the third ferromagnetic thin film (20) is exposed on the upper surface of the magnetic head (3) shown in FIG. 1, that is, on the surface facing the hard disk. Since it is separated from 4), it does not affect the magnetic characteristics of the magnetic head 3.

The magnetic head (3) is manufactured as follows. First, as shown in FIG. 4, first pre-processed grooves (60) (60) are formed at a constant pitch on the upper surface of a large substrate (6) which is made of Mn-Zn ferrite and should be the first butting half (1).
After forming, the depth end groove (61) having a triangular cross section is formed so as to be orthogonal to the first pre-processed groove (60). Next, the first ferromagnetic thin film (11) is deposited on the entire upper surface of the large substrate (6), and the first glass (16) is filled thereon. After the glass is filled, the upper surface is ground and polished to expose the cross section of the first ferromagnetic thin film (11) in the same plane as the first glass (16) as shown in FIG.

Next, a non-magnetic thin film to be the gap spacers (4) and (40) and a second ferromagnetic thin film (12) are superposed on the upper surface of the large substrate (6) and formed by sputtering or the like, and then a resist pattern is formed. It is formed and subjected to an etching process, and as shown in FIG. 6, the portions to be the facing surface side gap spacer (4) and the back side gap spacer (40) are left. An ion beam etching method is generally used for the etching process. The back side gap spacer (40) has a larger area than the facing surface side gap spacer (4), and each gap spacer (4)
(40) is formed in the same shape as the second ferromagnetic thin film (12) overlying it. That is, the facing side gap spacer (4)
Includes a narrow portion (4a) and a wide portion (4b) located inside the narrow portion (4a) integrally. In addition, the etching step causes the tip of the first ferromagnetic thin film (11) to become a narrow portion.
It is formed to have the same width as (4a) and (12a) (see FIG. 7).

Gap spacer (4) and second ferromagnetic thin film
By forming the narrow portions (4a) and (12a) of (12) together with the first ferromagnetic thin film (11) by etching, the narrow portion (4a)
The widths of a) (12a) and the first ferromagnetic thin film (11) are accurately determined according to the track width. Further, as shown by the alternate long and short dash line in FIG. 7, in the etching process, a redundant portion (12c) wider than the narrow portion (12a) is provided at the tip of the narrow portion (12a), and the redundant portion is formed in a later step. It has been confirmed that the width dimension of the narrow portion (12a) can be accurately formed by removing (12c). After this, as shown in FIG. 8, the facing side gap spacer (4)
A coil winding groove (15) is opened between (40).

On the other hand, the second butting half (2) to be butted with the first butting half (1) is provided as follows. As shown in FIG. 9, a groove (80) on which a third ferromagnetic thin film (20) is formed, and a groove (80) formed on the upper surface of a small substrate (8) made of alumina-based ceramic or the like. Deep second pre-machined groove
(81) is formed. Next, as shown in FIG.
A third ferromagnetic thin film (20) is formed on the entire upper surface of (8) by sputtering or the like, and a second glass (17) is filled thereover.
After that, the upper surface is ground and polished to be flattened, and the cross section of the third ferromagnetic thin film (20) is exposed in the same plane as the second glass (17). Thereafter, the large substrate (6) and the small substrate (8) are butted against each other as shown in FIG. 11 and heated to melt only the second glass (17). Second glass filled with second pre-processed groove (81)
(17) flows into the side of the gap and joins the large substrate (6) and the small substrate (8). After that, PP for each block
Cut with a line. FIG. 12 is a central cross-sectional view of the cut blocks, and in this state, unnecessary portions are cut along the lines CC and DD to form the magnetic head (3).

A magnetic head (3) formed through the above steps
Means that the non-magnetic surface of the second butting half body (2) is exposed on the surface facing the hard disk, and the third ferromagnetic thin film (20) is
Since it is not exposed on the surface facing the hard disk in the vicinity of the gap, the area of the magnetic material exposed on the surface facing the hard disk is smaller than that of the conventional magnetic head (3). Therefore, on the second butting half body (2), the magnetic material unnecessary for recording and reproduction is not exposed on the surface facing the recording medium, and the inductance value of the magnetic head (3) becomes small. That is, the magnetic characteristics are improved. Furthermore, since the surface of the second butting half (2) facing the recording medium is made of a non-magnetic material, stray magnetic flux may be generated near the gap on the second butting half (2). Absent. Here, the stray magnetic flux is a magnetic flux other than the main magnetic flux that rotationally passes through the magnetic head (3) (see FIG. 39).

The second ferromagnetic thin film (12) and the gap spacer (4) are both formed by sputtering or the like,
The first ferromagnetic thin film (11) is formed by etching or the like. Therefore, the gap length varies little, and the magnetic characteristics of the magnetic head (3) vary little. Further, since the second ferromagnetic thin film (12) and the third ferromagnetic thin film (20) are joined inside the surface facing the hard disk, the area of the joined portion, that is, the second ferromagnetic thin film (12) The wide part (12b) of () can be provided large. Therefore, the magnetic resistance of the second butting half (2) does not increase, and the magnetic flux is
It flows smoothly from 2) to the third ferromagnetic thin film (20). Furthermore,
The thickness of the second butting half (2) is the same as the conventional second core half.
Equal to (52) and also the base (25) of the second butt half (2)
Since it is made of ceramic or the like, its mechanical strength is not inferior to that of the conventional magnetic head (3).

In order to strengthen the bond between the third ferromagnetic thin film (20) and the wide portion (12b) of the second ferromagnetic thin film (12), the process before the bonding process shown in FIG. 11 is performed. In this case, it is advisable to form a film of SiO2 having a thickness of about 20 nm and a film of glass having a thickness of about 45 nm on the abutting surfaces of at least one of the thin films (20) and (12) in an overlapping manner. . In this case, it is considered that the magnetic resistance is increased by forming the film. However, the second ferromagnetic thin film (12) joined to the third ferromagnetic thin film (20)
Since the wide part (12b) of is sufficiently wider than the narrow part (12a),
It has been confirmed by the applicant that the magnetic resistance does not increase so much and that there is no problem in practical use. Further molten second glass (1
Since the side surfaces of the first and second ferromagnetic thin films (11) and (12) are not eroded by 7), the thickness between the film made of SiO ₂ and glass and the second ferromagnetic thin film (12) is increased. A Cr film with a thickness of about 10 nm may be interposed.

The applicant has applied the magnetic head shown in this embodiment.
As an application example of (3), the one shown in FIG. 43 is proposed. This is one in which the upper surface of the second butting half (2) is covered with a layer of the second glass (17).
As shown in FIG. 45, the second pre-processed grooves (81) and (81) are formed at the front and rear ends of the small substrate (8) made of a non-magnetic material as shown in FIG. After filling the second pre-processing groove (81) with the second glass (17), the upper surface is ground and polished,
The third ferromagnetic thin film (20) is formed by sputtering.
After this, etching treatment is applied to the third ferromagnetic thin film (2
Expose 0). This small substrate (8) is a gap spacer
(4) and the large ferromagnetic film (12) on which the second ferromagnetic thin film (12) is formed are butt-joined and sliced, and as shown in FIG. 46, unnecessary along the lines CC and DD. The magnetic head (3) shown in FIG. 43 is obtained by cutting various portions.

(Second Embodiment) FIG. 13 is a partial modification of the magnetic head (3) shown in FIG. 1, and FIG.
FIG. 4 is a right side view of the magnetic head (3) of FIG. 3 taken along the line FF. A left side view of the magnetic head (3) taken along line FF is the same as FIG. 3A. Magnetic head shown in FIG.
The difference from (3) is that the second ferromagnetic thin film (12) and the wide portions (12b) and (4b) of the gap spacer (4) are exposed on the side surface of the magnetic head (3). The gap depth d can be easily confirmed during the manufacture of the head (3). Also, the first
The line of intersection of the vertical surface (11a) and the inclined surface (11b) of the ferromagnetic thin film (11) is called the depth end line, and the depth end line is
It cannot be observed directly from the side surface of the coil winding groove (15) after the magnetic head (3) is completed. However, the second ferromagnetic thin film (1
When forming 2), if the relative position between the wide end (12b) exposed on the side of the coil winding groove (15) and the depth end line is set accurately, the magnetic head (3 By observing the wide portion (12b) from the side of the coil winding groove (15) of (1), the depth end line of the magnetic head (3) can be indirectly detected.

The manufacturing process of the magnetic head (3) is almost the same as the manufacturing process of the magnetic head (3), except that the large substrate (6) is used.
In the etching step of FIG. 14, as shown in FIG. 14, the facing surface side gap spacer (4) and the wide portion (4b) of the second ferromagnetic thin film (12) formed in parallel on the large substrate (6). ) (12b) is extended in the track width direction and is connected by the connecting rod (41). In this state, after forming the coil winding groove (15), as shown in FIG. 16, the large substrate (6) and the small substrate (8) are butted against each other, glass-welded, and then sliced. After that, when unnecessary portions are cut in the same manner as above, the magnetic head (3) shown in FIG.
Is obtained.

(Third Embodiment) FIG. 17 shows another magnetic head.
FIG. 18 is a perspective view showing (3), and FIG. 18 is a magnetic head of FIG.
It is sectional drawing which cut | disconnected (3) by the GG line. Magnetic head
(3) is the first butting half body as in the first embodiment.
A second butting half (2) is butted against the front surface of (1), and the second butting half (2) is a base made of a magnetic material.
The surface of (5) facing the hard disk is covered with a second glass (17) which is a non-magnetic material and has a melting point lower than that of the first glass (16). When reproducing the hard disk, the magnetic flux in the counterclockwise direction is the second ferromagnetic thin film (12), the second butting half body (2), the core half body member (14), as shown by the alternate long and short dash line in FIG. ,
It passes through the first ferromagnetic thin film (11). In this example, the base body (5) which is the magnetic material portion of the second butting half body (2) and the second ferromagnetic thin film (12) correspond to the conventional second core half body (52). The difference from the first embodiment is that the second butting half body (2)
Since the first butting half body (1) is the same as the first butting half body (1) of the first embodiment, the magnetic head (3) of FIG. The cut right sectional view is the same as FIG. 3B. A filling groove (50) for filling the second glass (17) is opened in the center of the surface facing the first butting half (1), and the second glass (17) in the filling groove (50).
Melts and flows into the side of the gap portion to join the butt halves (1) and (2).

The manufacturing method of the magnetic head (3) is the nineteenth method.
Shown in FIGS. The first butting half body (1) is the same as that of the first embodiment, and the manufacturing method is also the same, so the description thereof is omitted. In order to prepare the second butting half body (2), first, as shown in FIG. 19, a ferromagnetic small substrate (8) made of Mn-Zn ferrite or the like is prepared, and the ferromagnetic small substrate (8) is prepared. A filling groove (50) is formed at the center of the upper surface, and abutting grooves (83) (83) deeper than the filling groove (50) are formed on both sides of the filling groove (50). The abutting grooves (83) (83) are respectively the upper end portions of the facing surface side gap spacers (4) of the first abutting half body (1),
It faces the lower end of the inner gap spacer (40). Next, as shown in FIG. 20, a filling groove (50) and a butt groove
(83) (83) is filled with the second glass (17), and then the upper surface is ground and polished so that the upper surface of the second glass (17) and the ferromagnetic small substrate
Match the upper surfaces of (8).

Next, as shown in FIG. 21, the ferromagnetic small substrate (8) and the large substrate (6) to be the first butting half body (1) are butted against each other and placed in a heating furnace (not shown). Heated and second glass
Only (17) is melted. The second glass (17) flowing out from the filling groove (50) joins the ferromagnetic small substrate (8) and the large substrate (6).
Actually, if the ferromagnetic small substrate (8) is placed on the lower side and the inside of the heating furnace is set to a predetermined pressure, the molten second glass (17) will flow to the side of the gap due to surface tension. . After that, as shown in FIG. 22, the magnetic head (3) shown in FIG. 17 is obtained by cutting along the lines CC and DD. still,
The film composed of the SiO ₂ film and the glass film shown in the first embodiment is
It may be formed in advance on at least one of the abutting surfaces of the second ferromagnetic thin film (12) or the second abutting half (2) to increase the bonding strength.

Since the surface of the second butting half body (2) facing the hard disk is covered with a non-magnetic material, the hard disk is different from the conventional magnetic head (3) as in the first embodiment. The area of the magnetic material exposed on the surface opposite to is small. Therefore, the inductance value of the magnetic head (3) is reduced and the magnetic characteristics are improved. The second ferromagnetic thin film (12)
The gap spacer (4) and the gap spacer (4) are both formed by sputtering or the like, and then by etching or the like including the first ferromagnetic thin film (11). Therefore, the gap length varies little, and the magnetic characteristics of the magnetic head (3) vary little. Furthermore, the second ferromagnetic thin film (12) and the second butt half
Since the joint portion (2) is recessed from the facing surface of the hard disk, the area of the joint portion can be increased. Therefore, the magnetic resistance inside the second butting half (2) does not increase, and the magnetic flux can smoothly pass from the second ferromagnetic thin film (12) to the second butting half (2).

The first pre-processed groove formed on the large substrate (6)
If the bottom surface of (60) is processed into a V shape as shown in FIG. 23, the first ferromagnetic thin film (11) formed on the large substrate (6) is located at a position facing the small substrate (8). Then, since it is exposed as shown by the dotted line in FIG. 21, as shown in FIG.
The first ferromagnetic thin film (11c) exposed on the upper surface side of (3) is formed to be inclined with respect to the gap width. As a result, when the magnetic head (3) is loaded on the slider body (90) and a signal is reproduced from the hard disk, crosstalk from adjacent tracks can be prevented. That is, as shown in FIG. 25, a track (73) concentric with the center of the disk is formed on the hard disk (71) without a gap, but the overall width of the magnetic head (3) is larger than the track width. , There is a risk of reproducing the crosstalk component of the signal from the adjacent track (73). However, if the first ferromagnetic thin film (11c) exposed on the side surface of the magnetic head (3) is inclined with respect to the track width direction, the first ferromagnetic thin film (11c) is adjacent to the track (7).
It is possible to prevent the crosstalk component from being reproduced from 3).

Further, in the etching process shown in FIG. 6, the opposing surface side gap spacer (4) and the second ferromagnetic thin film are formed.
(12) is formed into a shape in which the narrow portion and the wide portion are integrated,
Moreover, when the first ferromagnetic thin film (11) is formed to have the same width as the narrow portion, as shown in FIG. 26, due to a so-called shading effect, the gap spacer ( There is a case in which a slightly inclined surface (62) is formed by being hung on 4). This minute inclined surface (62) is the 24th surface after the magnetic head (3) is completed.
Although it appears on the inclined line (51) shown in the figure, the formation of the inclined line (51) also has an effect of preventing crosstalk between adjacent tracks (73).

(Fourth Embodiment) FIG. 27 shows a part of the magnetic head (3) shown in FIG. The difference from the magnetic head (3) shown in FIG. 17 is the same as in the second embodiment.
The wide portion (1) of the second ferromagnetic thin film (12) and the gap spacer (4)
The points 2b and 4b are exposed on the side surface of the magnetic head 3. As a result, the magnetic head (3) is similar to the second embodiment.
The gap depth can be easily confirmed during manufacturing. The manufacturing process of the magnetic head (3) is almost the same as the manufacturing process of the magnetic head (3) in the third embodiment. However, in the etching process, as shown in FIG. 14, the large substrate (6)
Upper facing surface side gap spacer (4) and second ferromagnetic thin film
The difference is that the wide portions (4b) and (12b) of (12) are connected by a connecting rod (41). In this state, after forming the coil winding groove (15), the large substrate (6) and the small substrate (8) are butted against each other, glass-welded, and sliced to obtain the magnetic head (3) shown in FIG. . As shown in FIG. 24, in the magnetic head (3) in which the first ferromagnetic thin film (11c) exposed on the upper surface side of the magnetic head (3) is inclined with respect to the track width direction, The wide portion (12) of the magnetic thin film (12) and the facing side gap spacer (4)
b) and (4b) may be exposed on the side surface of the magnetic head (3).

(Fifth Embodiment) FIG. 28 shows another magnetic head.
29 is a perspective view of (3), FIG. 29 is a cutaway view of FIG. 28 taken along the line JJ, and FIGS. 30A and 30B are magnetic heads (3) cut along the line I-I of FIG. FIG. 3 is a view seen from the right side. The magnetic head (3) has a facing side gap spacer (4) and a second ferromagnetic thin film (12) on the side surface, as in the fourth embodiment.
The first butting half (1) having the exposed surface is butt-joined to the second butting half (2) whose surface facing the hard disk is covered with the non-magnetic second glass (17). The second butting half (2) covers the upper and lower surfaces and both side surfaces of the base body (5) made of a magnetic material with the second glass (17), whereby the mechanical strength of the second butting half (2) is improved. Is improving.

As shown in FIG. 29, the second butting half body (2) is provided with a filling groove (50) facing the coil winding groove (15), and the filling groove (50) is provided with a filling groove (50). It is filled with a second glass (17) which joins the butt halves (1) (2). Both butt halves
The fact that the amount of the second glass (17) connecting (1) and (2) is smaller than that of the magnetic head of the third embodiment (see FIG. 18) is convenient for the magnetic head manufacture and is a technical feature. Absent. As shown in FIG. 28, the upper surface of the second ferromagnetic thin film (12) exposed on the surface facing the hard disk is curved in an arc shape toward the second butting half body (2). Is one of the features of this embodiment, as will be described later.

The magnetic head (3) is manufactured through the following steps. First, as shown in FIG. 5, a large substrate (6) having a cross section of the first ferromagnetic thin film (11) exposed in the same plane as the first glass (16) is prepared. The steps up to this point are the same as in the first embodiment. Next, on the upper surface of the large substrate (6), the non-magnetic thin film to be the gap spacers (4) and (40) and the second ferromagnetic thin film (12).
Then, a resist pattern is formed and etched to form a gap portion including the facing surface side gap spacer (4) and the back side gap spacer (40) as shown in FIG. Leave the part that becomes. The second ferromagnetic thin film (12) is formed by each gap spacer (4) (4
It is formed in the same shape as 0). The wide portions (12b) (4b) of the second ferromagnetic thin film (12) and the facing-side gap spacer (4) and the back-side gap spacer (40) extend laterally to form a magnetic head.
(3) When forming, the wide portions (4b) (12b) and the back side gap spacer (40) are exposed from the side surface of the magnetic head (3).

Next, a photoresist (65) made of a photosensitive material is applied to the entire upper surface of the large substrate (6), and then an ion beam is irradiated. FIG. 32 is a cross-sectional view seen from the Z direction after ion beam irradiation on the large substrate (6) of FIG.
Since the narrow portion (12a) of the second ferromagnetic thin film (12) projects from the upper surface of the large substrate (6), the photoresist (65) covering the narrow portion (12a) covers the other portions. Thin compared to the overlying photoresist (65). Therefore, if you continue to irradiate the ion beam,
Although the photoresist (65) covering the other portions remains, the photoresist (6) covering the tip of the narrow portion (12a) is
5) disappears and the second ferromagnetic thin film (12) begins to be scraped. After that, the ion beam irradiation was stopped and the photoresist
When (65) is removed, as shown in FIG. 33, the upper surface of the narrow portion (12a) of the second ferromagnetic thin film (12) is formed in an arc shape with its bulge facing upward. Next, similarly to each of the above-mentioned embodiments, the coil winding groove (15) is formed between the gap spacers (4) and (40) on the large substrate (6) (see FIG. 37).

On the other hand, as shown in FIG. 34, Mn--Zn
Butt groove on small ferromagnetic board (8) made of ferrite
(83) (83) is formed and the butt groove (83) (83)
A concave groove (84) is formed at right angles to. Butt Groove (83)
The reference numerals (83) face the facing surface side gap spacer (4) and the back side gap spacer (40) of the first butting half body (1), respectively. After this, as shown in FIG. 35, the butt groove (83)
(83) After filling the concave groove (84) with the second glass (17), the upper surface is ground and polished to be flat. Next, as shown in FIG. 36, an adjustment groove (85) facing the coil winding groove (15) of the large substrate (6) is formed. The adjustment groove (85) is formed in order to adjust the amount of the second glass (17) that joins the two butting halves (1) and (2), and reduces the inductance of the magnetic head (3). It is also for the purpose.

Next, as shown in FIG. 37, both substrates (6)
The (8) is butted against and heated to melt the second glass (17). The second glass (17) has a butt groove (83) and a recess groove (84).
And flow out of the substrate to bond the two substrates (6) and (8) together. At this time, as in the third embodiment, the second glass (17) is poured to the side of the gap portion with the small substrate (8) facing down. After cutting both substrates (6) and (8) joined at last into each block along the line P-P, each block is cut along line C-C and line D-D shown in FIG. Magnetic head shown in FIG. 28
Get (3). Incidentally, the film composed of the SiO ₂ film and the glass film shown in the first embodiment is previously formed on at least one of the abutting surfaces of the second ferromagnetic thin film (12) or the second abutting half body (2), and bonded. Strength may be increased. In the magnetic head (3) manufactured through the above steps, as in the magnetic head (3) in each of the above-described embodiments, in addition to the effect of reducing the inductance value, the second ferromagnetic thin film is obtained. The front shape of (12) is
By bending in an arc shape, the so-called contour effect (con
This has the effect of reducing the distortion of the playback output waveform due to the tour effect.

Here, the contour effect will be described. FIG. 39 is a diagram showing the relationship between the magnetic poles on the hard disk and the magnetic head (3). Generally, when rotating a hard disk,
When the magnetic pole and the facing surface side gap spacer (4) face each other, in addition to the main magnetic flux φ1 rotating in the magnetic head (3), there is a boundary between the second ferromagnetic thin film (12) and the second glass (17). There is also a stray magnetic flux φ2. The distortion of the reproduced output waveform due to the superposition of the magnetic flux is called the contour effect. Here, the magnitude of the influence of the stray magnetic flux φ2 is proportional to the length of the boundary portion and the magnetic pole of the hard disk facing each other. In other words, if the boundary portion extends linearly along the track width direction, the effect of the stray magnetic flux φ2 is great.
Therefore, if the boundary between the second ferromagnetic thin film (12) and the second glass (17) is curved with respect to the track width, the boundary does not face the part facing the same magnetic pole of the hard disk. Since there is a part, the second ferromagnetic thin film (12) and the second glass
The influence of the stray magnetic flux φ2 is smaller than that when the boundary of (17) extends along the track width. Therefore, in the magnetic head 3 according to the present embodiment, the distortion of the reproduced output waveform due to the contour effect is small.

FIG. 40 is a perspective view showing another magnetic head (3) for reducing the reproduced output waveform distortion by the contour effect. Second ferromagnetic thin film facing the second glass (17)
The front surface of (12) is wavy. This magnetic head
To form (3), in the photoresist removing step after the etching treatment, as shown in FIG. 41, a photomask (66 having a plurality of slits (67) extending orthogonally to the track width direction is used. Is placed above the photoresist (65) and exposed. The narrow part (12a) of the second ferromagnetic thin film (12)
As shown in FIG. 42, the photoresist (65) that covers is curved in a wavy shape. When the ion beam is irradiated in this state, the upper surface of the narrow portion (12a) is formed in a wavy shape and finally As a result, the magnetic head (3) shown in FIG. 40 is obtained. In addition, in order to bend the upper surface of the narrow portion (12a) into a wavy shape,
After the etching process, the region other than the second ferromagnetic thin film (12) may be covered with photoresist and sandblasted to form it.

As for the magnetic head (3) shown in FIG. 28, as shown in FIG. 24, the first ferromagnetic thin film (11) exposed on the upper surface side of the magnetic head (3) has a track width of You may form so that it may become diagonal with respect to a direction. Furthermore, regarding the magnetic head (3) shown in FIG. 1, the second ferromagnetic thin film (12)
Even if the front end portion of is formed in an arc shape, the distortion of the reproduced output waveform due to the contour effect can be reduced.

As described above, the common effect of the magnetic heads (3) of the respective examples is that the area of the magnetic body facing the hard disk as the recording medium is smaller than that of the conventional one, so that the inductance value is reduced and the magnetic characteristics are improved. The first ferromagnetic thin film is formed on the first core half body (13) after the opposite side gap spacer (4) and the second ferromagnetic thin film (12) are coated together.
It is the point that the gap length t accuracy is improved by being formed by etching together with (11). The present invention is not limited to the configuration of the above example, and various modifications can be made within the scope of the claims.

The above description of the embodiments is for explaining the present invention, and should not be construed as limiting the invention described in the claims or limiting the scope. The configuration of each part of the present invention is not limited to the above-mentioned embodiment, and it goes without saying that various modifications can be made within the technical scope described in the claims.

[Brief description of drawings]

FIG. 1 is a perspective view of a magnetic head according to a first embodiment.

FIG. 2 is a cutaway view of FIG. 1 taken along the line AA.

FIG. 3 is a left side view of FIG. 1 taken along line BB, and FIG. 3B is a right side view of the same.

FIG. 4 is a perspective view of a large substrate on which a first preliminary processing groove and a depth end groove are formed.

FIG. 5 is a perspective view of the large substrate of FIG. 4 filled with a first glass.

FIG. 6 is a perspective view of a large substrate after an etching process.

FIG. 7 is a perspective view of a main portion of a large substrate on which a redundant portion is formed.

8 is a perspective view showing a state in which a coil winding groove is formed on the large substrate of FIG.

FIG. 9 is a perspective view of a small substrate on which a second preliminary processing groove and a concave groove are formed.

FIG. 10 is a perspective view of the small substrate of FIG. 9 filled with a second glass.

FIG. 11 is a perspective view showing a butted state of a small substrate and a large substrate.

12 is a central cross-sectional view of a block obtained by cutting the large substrate and the small substrate shown in FIG. 11 along the line P-P.

FIG. 13 is a perspective view of a magnetic head of a second embodiment.

14 is a perspective view of a large substrate used in the magnetic head of FIG. 13 after etching.

FIG. 15 is a right side view of the magnetic head of FIG. 13 taken along line FF.

FIG. 16 is a perspective view showing a butted state of a small board and a large board.

FIG. 17 is a perspective view of a magnetic head of a third embodiment.

18 is a sectional view of the magnetic head of FIG. 17 taken along the line GG.

FIG. 19 is a perspective view of a small substrate having a butt groove and a filling groove formed therein.

20 is a perspective view of the small substrate of FIG. 19 filled with a second glass.

FIG. 21 is a perspective view showing a butted state of a small board and a large board.

22 is a central cross-sectional view of a block obtained by cutting the large substrate and the small substrate shown in FIG. 21 along the line P-P.

FIG. 23 is a perspective view of a large substrate in which a first glass is filled in a first pre-processing groove having a V-shaped bottom surface.

FIG. 24 is a perspective view of a magnetic head formed using the large substrate shown in FIG. 23.

FIG. 25 is a plan view showing tracks on a hard disk.

FIG. 26 is a partially enlarged view of a large substrate provided with a minute inclined surface.

FIG. 27 is a perspective view of a magnetic head according to a fourth embodiment.

FIG. 28 is a perspective view of a magnetic head of a fifth embodiment.

29 is a cross-sectional view of the magnetic head of FIG. 28 taken along the line JJ.

30 is a left side view of the magnetic head of FIG. 28 taken along line I-I, and FIG. 30 is a right side view of the same.

FIG. 31 is a perspective view of a large substrate used in the magnetic head of the fifth embodiment after the etching process.

32 is a diagram showing a state in which a photoresist is applied to the large substrate of FIG. 31 as seen from the Z direction.

FIG. 33 is a diagram showing a large substrate after ion beam irradiation.

FIG. 34 is a perspective view of a small board used in the fifth embodiment.

FIG. 35 is a perspective view showing a state where the small substrate of FIG. 34 is filled with the second glass.

FIG. 36 is a perspective view showing a state where an adjustment groove is formed on the small board of FIG. 35.

FIG. 37 is a perspective view showing a butted state of a small substrate and a large substrate.

38 is a center cross-sectional view of a block obtained by cutting the large substrate and the small substrate shown in FIG. 37 along the line P-P.

FIG. 39 is a diagram showing a main magnetic flux φ1 and a stray magnetic flux φ2 when reproducing a hard disk.

FIG. 40 is a perspective view showing a magnetic head that is an application example of the fifth embodiment.

FIG. 41 is a diagram showing an exposure process in which a photomask is arranged above a photoresist.

FIG. 42 is a view showing a photoresist having a corrugated upper surface.

FIG. 43 is a perspective view showing a magnetic head that is an application example of the first embodiment.

44 is a perspective view of a small substrate used in the magnetic head of FIG. 43. FIG.

45 is a perspective view showing a state where the small substrate of FIG. 44 is filled with the second glass and the third ferromagnetic thin film.

46 is a sectional view showing a state in which a magnetic head is formed using the small substrate of FIG. 45.

FIG. 47 is a perspective view showing the inside of the apparatus main body provided with a hard disk.

FIG. 48 is a perspective view of a slider body.

FIG. 49 is a perspective view of a conventional magnetic head.

FIG. 50 is a cross-sectional view of the above magnetic head taken along line QQ.

FIG. 51 is a diagram showing a gap spacer forming method in a conventional magnetic head.

[Explanation of symbols]

(1) First butt half (2) Second butt half (4) Gap spacer (6) Large substrate (8) Small board (11) First ferromagnetic thin film (12) Second ferromagnetic thin film (15) Coil winding groove (16) First glass (17) Second glass (20) Third ferromagnetic thin film

─────────────────────────────────────────────────── ─── Continuation of the front page (31) Priority claim number Japanese Patent Application No. 8-77377 (32) Priority date March 29, 1996 (March 29, 1996) (33) Country of priority claim Japan (JP) (72) Kiyotaka Ito, 2-5-5 Keihan Hondori, Moriguchi City, Osaka Prefecture Sanyo Electric Co., Ltd. (72) Kozo Ishihara, 2-5-5 Keihan Hondori, Moriguchi City, Osaka Sanyo Electric Co., Ltd. (72) Inventor Kazuhiko Koga 2-5-5 Keihan Hondori, Moriguchi-shi, Osaka Sanyo Electric Co., Ltd. (72) Inventor Fukumoto 2-5-5 Keihan-hondori, Moriguchi-shi, Osaka Sanyo Electric Co., Ltd. (72) Inventor Atsushi Furusawa 2-5-5 Keihan Hondori, Moriguchi-shi, Osaka Sanyo Electric Co., Ltd. (72) Inventor Toshiyuki Urano 2-5-5 Keihan-hondori, Moriguchi-shi, Osaka Sanyo Electric Co., Ltd. (72) Inventor Takahiro Ogawa 2-5-5 Keihan Hondori, Moriguchi-shi, Osaka Sanyo Electric Co., Ltd. (72) Inventor Hiroyuki Okuda 2-5-5 Keihan Hondori, Moriguchi-shi, Osaka Sanyo Electric Co., Ltd. (56) Reference JP-A-62-267911 (JP, A) JP-A-63-31007 (JP, A) JP-A-63-31010 (JP, A) JP-A-60-179906 (JP, A) JP-A-1-91308 (JP , A) JP-A-1-91310 (JP, A) JP-A-5-266413 (JP, A) Actual Kaihei 7-26904 (JP, U) (58) Fields investigated (Int.Cl. ⁷ , DB) Name) G11B 5/127-5/255

Claims (11)

(57) [Claims] 1. A magnetic head for recording / reproducing facing a recording medium, comprising: a first butting half (1) having a coil winding groove (15) whose one surface is open; and a coil winding groove (15). ) First facing the opening
Second butt halves joined to butt halves (1)
The first butting half body (1) constitutes a part of the first core half body (13), and comprises a first core half body member (14) made of a ferromagnetic material, and First ferromagnetic thin film (11) that composes the rest of the core half (13)
And a second ferromagnetic thin film forming part of the second core half (52)
(12) and a gap spacer (4) interposed between the first core half (13) and the second core half (52), the first ferromagnetic thin film (11) is recorded at the upper end. A vertical surface (11a) exposed on the surface facing the medium and an inclined surface (11b) extending obliquely downward from the lower end of the vertical surface (11a) and connected to the coil winding groove (15), The magnetic thin film (12) is separated into the recording medium facing surface side and the inner side by the coil winding groove (15), and the upper end of the second ferromagnetic thin film (12) facing the recording medium is the recording medium. And a narrow portion (12a) exposed on the facing surface of the
a) and a wide portion (12b) connected to the lower end of the first ferromagnetic thin film (11) perpendicular surface (11b) and the second ferromagnetic thin film (1b).
A gap spacer (4) is interposed between the narrow portion (12a) of (2) and the inclined surface (11b) of the first ferromagnetic thin film (11) and the second ferromagnetic thin film (1).
The first glass (16) is disposed between the wide part (12b) of 2), and the second butting half (2) is located on the side of the second ferromagnetic thin film (12) facing the recording medium and at the back. Part of the second core half (5
The portion of the second butt half (2) facing the recording medium, which comprises the magnetic material portion constituting the remainder of 2), is in contact with the narrow portion (12a) of the second ferromagnetic thin film (12),
A magnetic head comprising a non-magnetic material. 2. The gap spacer (4) is provided between the wide portion (11b) of the second ferromagnetic thin film (12) and the first glass (16) and on the inner side of the second ferromagnetic thin film (12). 2. The magnetic head according to claim 1, wherein the magnetic head is also interposed between the first core half member (14). 3. The gap spacer of the first ferromagnetic thin film (11)
The portion in contact with (4) is the narrow portion (12) of the second ferromagnetic thin film (12).
The magnetic head according to claim 1, having the same width as a). 4. The wide portion (12b) of the second ferromagnetic thin film (12) comprises:
Exposed to the side surface of the first butting half (1).
The magnetic head described in 1. 5. The first glass (16) on the side of the first ferromagnetic thin film (11), the gap spacer (4) and the second ferromagnetic thin film (12) exposed on the surface facing the recording medium. The magnetic head according to claim 3, wherein a second glass (17) having a lower melting point is arranged. 6. The magnetic head according to claim 1, wherein the magnetic material portion of the second butting half body (2) comprises a third ferromagnetic thin film (20). 7. The third ferromagnetic thin film (20) comprises a non-magnetic base (2
The magnetic head according to claim 6, which is embedded in (5). 8. The third ferromagnetic thin film (20) comprises a non-magnetic base (2
The magnetic head according to claim 6, wherein the second glass (17) is formed on the third ferromagnetic thin film (20) and is disposed on the recording medium facing surface side of the third ferromagnetic thin film (20). 9. The magnetic material portion of the second butting half body (2) is a base body (5) made of a ferromagnetic material, and the second butting half body (2) and a recording medium of the base body (5). The magnetic head according to claim 1, wherein the opposite surface is covered with the second glass (17). 10. The magnetic head according to claim 2, wherein a surface of the narrow portion (12a) of the second ferromagnetic thin film (12) facing the second butting half (2) has a curved shape. 11. The boundary line between the first core half body (13) and the second glass (17) exposed on the surface facing the recording medium has a portion inclined with respect to the track width direction. The magnetic head described.