JP3469731B2 - Manufacturing method of magnetic head - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic head used in a magnetic recording / reproducing apparatus such as a hard disk drive.

[0002]

2. Description of the Related Art In a hard disk drive as an external storage device for a computer or the like, it is required to improve the recording density, and the magnetic head used therefor has an electromagnetic conversion characteristic that can be applied to a recording medium having a high coercive force. , Low inductance characteristics to support high frequency recording / reproducing signals,
There is a demand for a gap length accuracy that can correspond to a recording / reproducing signal of a short wavelength. In order to respond to such a trend, a so-called MIG in which a narrow gap has been formed between a pair of core halves and a ferromagnetic metal thin film is formed on each of the abutting surfaces of the core halves, respectively. A (Metal In Gap) type magnetic head has been proposed (see Japanese Patent Publication No. 7-78853).
The applicant previously disclosed the one shown in FIG. 1 as an improvement of this MIG type magnetic head (Japanese Patent Application No. 8-2.
34901, this invention has not been published).

FIG. 1 shows a magnetic head previously proposed by the applicant.
FIG. 3 is a perspective view of (3), FIG. 2 is a cutaway view of FIG. 1 taken along line AA, and FIGS. 3A and 3B are left and right sides of the magnetic head (3) taken along line BB, respectively. FIG. Magnetic head
(3) is a first having a coil winding groove (15) with an open front surface
A second butting half body (2) having a non-magnetic material exposed on the upper surface is butted to the butting half body (1), and passes through the coil winding groove (15) to form a coil in the second butting half body (2). (30) is rolled up. The upper surface of the magnetic head (3) faces a hard disk, which is a recording medium. In the following description, the core half means a constituent member of the magnetic head (3) arranged on both sides via the gap spacer (4).

The first butting half (1) is a coil winding groove.
On the front surface of the first core half (13) having (15), a layer of a second ferromagnetic thin film (12) made of a non-magnetic gap spacer (4) (40) and FeAlSi alloy or the like is formed by sputtering or the like. Consists of The gap spacer is divided into an opposing surface side gap spacer (4) located above the coil winding groove (15) and a back side gap spacer (40) located below the coil winding groove (15). The first core half body (13) is a protrusion (10) protruding from the top of the core half body member (14) made of a ferromagnetic material such as Mn-Zn ferrite.
Is a front surface of which a slope is formed, and a layer of the first ferromagnetic thin film (11) made of FeAlSi alloy or the like is formed on the slope.

The tip surface of the projection (10) is inclined inward, and the first ferromagnetic thin film (11) formed on the tip surface is a vertical surface whose upper end is exposed on the surface facing the hard disk. (11a)
And an inclined surface extending obliquely inward from the lower end of the vertical surface (11a)
It has (11b) in one. On the inclined surface (11b), a layer of the second glass (16) whose front surface is aligned with the vertical surface (11a) is formed. The upper surface of the first core half body (13) is covered with the first glass (31) having a melting point higher than that of the second glass (16), so that the circulating magnetic flux leaks from the upper surface of the first butting half body (1). prevent.

The second butting half (2) comprises a base (25) made of a non-magnetic material and a first butting half (1) of the base (25).
And a third ferromagnetic thin film (20) provided in the surface opposite to. The third ferromagnetic thin film (20) is made of FeAlSi alloy or FeTaN.
The third ferromagnetic thin film (20) is made of an alloy or the like, and the upper and lower ends of the third ferromagnetic thin film (20) are bonded to the second ferromagnetic thin film (12), and the upper end is located inside the surface facing the hard disk. Here, as shown in FIG. 3B, the second ferromagnetic thin film (12) has a narrow portion (12a) having a width substantially equal to the track width and a wide portion (12b) in contact with the third ferromagnetic thin film (20). ). As shown in Figure 1,
The side surfaces of the first ferromagnetic thin film (11), the facing surface side and the back side gap spacers (4) (40), the second ferromagnetic thin film (12), and the first butting half body (1) are exposed to external impact. Second glass for protection from
(16) Covered by a third glass (17) having a lower melting point. Figure 2
In the above, the thickness of the gap spacer (4) is set to the gap length,
The depth from the upper surface of the first butting half body (1) to the upper end of the inclined surface (11b) of the first ferromagnetic thin film (11) is called the gap depth, respectively. Also, the gap spacer (4) and the gap spacer
The magnetic materials sandwiching (4) are collectively referred to as a gap portion.

The magnetic head (3) is manufactured as follows. First, as shown in FIG. 26, after forming a first glass filling groove (60) on the upper surface of a large substrate (6) made of Mn-Zn ferrite and serving as the first butting half body (1), the first glass filling groove (60) is formed. The first glass filling groove (60) is filled with the first glass (31). Next, the depth end groove (61) having a triangular cross section is formed by cutting the blade so as to partially overlap the first glass filling groove (60). Next, the first substrate is formed on the entire upper surface of the large substrate (6)
A ferromagnetic thin film (11) is deposited, and a second glass (16) having a melting point lower than that of the first glass (31) is filled thereon, as shown in FIG. After filling the second glass (16), grinding and polishing the upper surface,
The cross section of the first ferromagnetic thin film (11) is exposed in the same plane as the cross section of the second glass (16).

Next, as shown in FIG. 28, the non-magnetic thin film to be the gap spacers (4) and (40) and the second ferromagnetic thin film (12) are superposed on the upper surface of the large substrate (6) by sputtering or the like. After the formation, a resist pattern is formed and an etching process is performed to leave portions to be the facing surface side gap spacer (4) and the back side gap spacer (40). Each of the gap spacers (4) and (40) is formed in the same shape as the second ferromagnetic thin film (12) which is overlaid thereon. Opposing side gap spacer (4)
Includes a narrow portion (4a) and a wide portion (4b) located inside the narrow portion (4a) integrally. In addition, the tip portion of the first ferromagnetic thin film (11) is narrowed by the etching process.
(4a) It is formed to have the same width as (12a). After this, as shown in FIG. 29, the facing side gap spacers (4) (40)
In between, a coil winding groove (15) is opened.

On the other hand, the second butting halves (2) which butt against the first butting halves (1) are provided as follows. As shown in FIG. 30, on the upper surface of a small substrate (8) made of alumina-based ceramic or the like, a groove (80) in which a third ferromagnetic thin film (20) is to be formed and a groove deeper than the groove (80) are formed. Second pre-machined groove (8
Form 1). Next, as shown in FIG. 31, a small substrate (8)
A third ferromagnetic thin film (20) is formed on the entire upper surface of the above by sputtering or the like, and a third glass (17) is filled on it. After that, the upper surface is ground and polished to be flattened, and the third ferromagnetic thin film (2
The cross section of (0) is exposed in the same plane as the third glass (17).

Thereafter, the large substrate (6) and the small substrate (8) are butted against each other as shown in FIG. 32 and heated to heat the third glass (17).
Only melt. The third filled in the second pre-processed groove (81)
The glass (17) flows to the side of the gap due to surface tension, and joins the large substrate (6) and the small substrate (8). After that,
Each block is cut along the line PP. FIG. 33 is a central cross-sectional view of the cut blocks, and in this state, CC
Cutting unnecessary points along the line, DD line, XX line.
The magnetic head (3) is prepared by polishing.

[0011]

In the method of manufacturing a magnetic head described above, the first glass (31) filled in the first glass filling groove (60) is formed by the blade forming the depth end groove (61) in FIG. ) Is also scraped off. That is, with the same blade, the small substrate 6 made of ferrite and the layer of the first glass 31 are ground by the same length. However, with ferrite and glass, glass has a higher processing resistance, and it is difficult to select a blade suitable for cutting both glass and ferrite. According to the experimental results of the applicant, when ferrite was processed with a blade suitable for shaving the first glass (31), chipping and tearing of ferrite occurred. Also, if the layer of the first glass (31) is processed with a blade suitable for scraping ferrite,
There is a problem that the cut portion of (31) is clogged and the first glass (31) cannot be processed smoothly. An object of the present invention is to smoothly process a small substrate made of ferrite and a layer of the first glass filled in the depth end groove with the same blade.

[0012]

A magnetic head (3) has a large ferromagnetic substrate (6) to be a part of the first butting half (1).
And a small board that should be part of the second butt half (2)
(8) is prepared, a first glass filling groove (60) is formed on the large substrate (6) along the track width direction of the recording medium, and the first glass (60) is formed in the first glass filling groove (60). 31), a step of partially filling the first glass filling groove (60) with a portion of the first glass (31) filling the side of the portion to be the gap portion, and the large substrate. (6) First, along the track width direction
A step of forming a depth end groove (61) that partially hangs on the glass filling groove (60) by cutting, and a first ferromagnetic thin film (11) is deposited on the entire upper surface of the large substrate (6). On the first glass (3
1) Fill the second glass (16) with lower melting point and grind the upper surface,
The step of polishing to expose the cross section of the first ferromagnetic thin film (11) on the upper surface, and the gap spacer (4) on the upper surface of the large substrate (6).
After forming the non-magnetic thin film and the second ferromagnetic thin film (12) which are to be formed on each other, an etching process is performed to form narrow portions (4a) (12a) substantially equal to the track width of the recording medium, and 1. Forming the ferromagnetic thin film (11) in the same width as the narrow portions (4a), (12a), and the third substrate having a lower melting point than the second glass (16) on the small substrate (8).
Filling the glass (17) and exposing a magnetic material that allows the passage of magnetic flux on the abutting surface with the large substrate (6),
The large board (6) and the small board (8) are butt-joined to each other to form a small board.
The magnetic material exposed from (8) and the second ferromagnetic thin film (12) of the large substrate (6) are brought into contact with each other and sliced along the plane orthogonal to the track width.

[0013]

In the method of manufacturing a magnetic head according to the present invention, when the depth end groove (61) is formed by cutting,
The first glass (31) that does not require cutting is removed in advance,
The glass (31) is the first glass to be cut by the blade used for cutting, since only the gap part is left.
The layer length of (31) is shorter than that of the conventional magnetic head.
Therefore, the processing resistance applied to the blade is also reduced, and the small substrate (8) and the first glass (31) layer can be cut smoothly.

[0014]

DETAILED DESCRIPTION OF THE INVENTION A magnetic head according to the present invention will be described below. The same reference numerals are used for the same configurations as the conventional one, and the description is omitted. The magnetic head shown below is used in a hard disk drive device, and the hard disk drive device has a plurality of hard disks (71) (71) arranged vertically in parallel in the device body (7) as shown in FIG. And is rotated by a rotating mechanism (not shown). A head support mechanism (72) having a magnetic head slider (9) attached to the tip end of the magnetic head slider (9) is provided corresponding to each hard disk (71).
Is floated by several tens of nm by the air pressure caused by the high-speed rotation of the hard disk (71), and the signal is recorded / reproduced on / from the hard disk (71). The magnetic head slider (9)
As shown in FIG. 25, a fitting groove (92) is formed in a slider body (90) having an air bearing portion (91) on its upper surface, and the magnetic head (3) shown below is formed in the fitting groove (92). ) Is fitted and fixed. As shown in FIG. 17, when recording, on the hard disk (71), a track (73) concentric with the disk center
Is recorded without gaps. During reproduction, as is well known, the magnetic head (3) traces the track (73).

(First Embodiment) In the present embodiment, as will be described later, the method of manufacturing the magnetic head (3) is characteristic, and the structure of the magnetic head (3) is the same as that of FIG. Third ferromagnetic thin film
The thickness of (20) is set to several μm, and the thickness of the second butting half (2) is set to several hundred tens μm. Also, the gap depth is 2
It is formed around μm. During reproduction from the hard disk, the counterclockwise magnetic flux passes through the second ferromagnetic thin film (12) and the third ferromagnetic thin film (20), as shown by the alternate long and short dash line in FIG. Orbiting inside 14), the first ferromagnetic thin film (11)
To the hard disk. By making the gap depth shallow and providing a small area for the vertical surface (11a) of the first ferromagnetic thin film (11) facing the second ferromagnetic thin film (12), the magnetic resistance increases and the magnetic flux is on the opposite surface side. It prevents the second ferromagnetic thin film (12) from directly reaching the first ferromagnetic thin film (11) through the gap spacer (4).

Further, the back side gap spacer (40) and the second
Since the area facing the ferromagnetic thin film (12) is large, the magnetic resistance is small, and the magnetic flux smoothly passes through the inner gap spacer (40). The reproduction output due to the passage of such magnetic flux is the coil
Taken out from (30). In FIG. 1, the remaining portion (200) of the third ferromagnetic thin film (20) is exposed on the top and side surfaces of the magnetic head (3) for the convenience of manufacturing the magnetic head (3). It is due to the above, and does not form the technical feature of the present application. The remaining portion (200) is a gap spacer (4).
The magnetic characteristics of the magnetic head (3) are not affected because the magnetic head (3) is separated from and is surrounded by a non-magnetic material.

The magnetic head (3) is manufactured as follows. First, as in the conventional case, as shown in FIG.
Consisting of n-Zn ferrite, the first butting half (1)
After forming the first glass filling groove (60) on the upper surface of the large substrate (6) to be formed, the first glass filling groove (60) is formed in the first glass filling groove (60).
Fill (31). The subsequent process is different from the conventional one. next,
As shown by the dashed line in FIG. 4, resists (35) and (35) are formed on the first glass (31). The resists (35) and (35) are formed only on the portions that will become the gaps when the magnetic head (3) is formed, and the width r of each resist (35) is about 90 μm. After that, as shown in FIG. 5, etching treatment is performed using a mixed solution of hydrofluoric acid and ammonium fluoride, and the resist (3
5) The first glass (31) filled in the place where (35) is not provided
Are partially removed. By the etching process, the first glass
Recesses (36) and (36) are formed on the layer of (31). Each recess (36)
Has a depth of about 20 μm and a width r1 of about 180 μm. Note that sandblasting may be performed instead of etching.

Next, as shown in FIGS. 6 to 8, a depth end groove (61) having a triangular cross section is formed by using a blade (37) so as to partially hang on the first glass filling groove (60). . Figure 7
6 is a side view of FIG. 6, and FIG. 8 is a perspective view of FIG. 6 viewed from the Y direction. At this time, the blade (37) scrapes the large substrate (6) made of ferrite and the layer of the first glass (31), but the unnecessary first glass (31) is removed by etching in advance, and the first glass (31) is removed. Since the glass (31) is left only at the gap portion, the length of the layer of the first glass (31) to be cut by the blade (37) is shorter than that of the conventional one. Therefore, the blade
The processing resistance applied to (37) is also small, and the layer of the small substrate (8) and the first glass (31) can be cut smoothly as will be described later.

Next, the first ferromagnetic thin film (11) is deposited on the entire upper surface of the large substrate (6), and the first ferromagnetic thin film (11) is formed on the first ferromagnetic thin film (11) as shown in FIG.
A second glass (16) having a melting point lower than that of the glass (31) is filled. After filling the second glass (16), the upper surface is ground and polished to expose the cross section of the first ferromagnetic thin film (11) in the same plane as the second glass (16). Since the concave portion is formed on the layer of the first glass (31), the film-forming underlayer surface of the first ferromagnetic thin film (11) is divided into small partial areas in the vicinity thereof, and the first ferromagnetic thin film ( The residual stress in 11) is dispersed, and peeling of the first ferromagnetic thin film 11 is prevented. Here, the second glass (16) is the first glass (31)
The second glass (16) has a lower melting point than the first glass.
If the melting point is higher than or the same as that of (31), the second glass (1
6) At the time of filling, the first glass (31) may melt and the first ferromagnetic thin film (11) on the depth end groove (61) may collapse.

Next, as shown in FIG. 10, a non-magnetic thin film to be the gap spacers (4) and (40) and a second ferromagnetic thin film (12) are superposed on the upper surface of the large substrate (6) by sputtering or the like. After the formation, a resist pattern is formed on the upper surface and an etching process is performed to leave a portion to be the facing surface side gap spacer (4) and the back side gap spacer (40). At this time, the surfaces of the layers of the first glass (31) and the second glass (16) may be partially removed (see FIG. 12). As in the conventional case, each gap spacer (4) (40) is formed in the same shape as the second ferromagnetic thin film (12) overlying it. The facing surface side gap spacer (4) integrally includes a narrow portion (4a) and a wide portion (4b) located inside the narrow portion (4a). By the etching process, the tip portion of the first ferromagnetic thin film (11) is formed to have the same width as the narrow portions (4a) and (12a).

Gap spacer (4) and second ferromagnetic thin film
By forming the narrow portions (4a) and (12a) of (12) simultaneously with the first ferromagnetic thin film (11) by etching, the narrow portions (4a)
The widths of (12a) and the first ferromagnetic thin film (11) are accurately determined according to the track width. In addition, as shown by the alternate long and short dash line in FIG. 13, in the etching process, a redundant portion (12c) wider than the narrow portion (12a) is provided at the tip of the narrow portion (12a), and the redundant portion ( It has been confirmed that the width dimension of the narrow portion (12a) can be accurately formed by removing 12c). After this, FIG.
Further, as shown in FIG. 12, a coil winding groove (15) is provided between the facing surface side and the back side gap spacers (4) and (40).

Since the first butting half body (1) and the second butting half body (2) to be butted are formed through the steps shown in FIGS. 30 to 31 as in the conventional case, detailed description thereof will be omitted. . Next, the large substrate (6) and the small substrate (8) are butted against each other as shown in FIG. 14 and heated to melt only the third glass (17). The third glass (1) filled with the second pre-processed groove (81)
7) flows into the side of the gap due to surface tension, and joins the large substrate (6) and the small substrate (8). Then, each block is cut along the line P-P and the side surface is polished to obtain the magnetic head (3) shown in FIG. FIG. 15 is a central cross-sectional view of each of the cut blocks, and in this state, the line CC and the line DD
A magnetic head (3) is created by cutting unnecessary portions along the line and the XX line. FIG. 16 shows the first butting half
FIG. 3 is an enlarged perspective view of the gap portion of (1), showing a top end fracture surface of the first ferromagnetic thin film (11) and a narrow portion (12) of the second ferromagnetic thin film (12).
The upper surface of a) is exposed on the surface facing the recording medium.

In the method of manufacturing the magnetic head (3) according to this example, as described above, the processing resistance applied to the blade (37) is reduced, and the small substrate (8) and the first glass (31) layer are formed. The purpose is to cut smoothly. The applicant confirmed the effect of this example by observing the conventional first butting half (1) (see FIG. 26) and the first butting half (1) produced by such a manufacturing method. FIG. 34 is a view showing the observing means, and for convenience of explanation, the small substrate (6) is drawn larger than it actually is. Small substrate (6) after cutting the depth end groove (61)
Is tilted at about 45 ° and a microscope (97) with a video camera (96) is installed on the fracture surface of the first glass (31) after the cutting. The image of the video camera (96) is displayed on the monitor (98), and the image is further printed by the video printer (99). Also, the microscope (97) has a Nikon M Plan 40 attached to the eyepiece.
/0.40 SLWD was used for the objective lens, Nikon CF PL2.5X was used for the objective lens, Victor TK-1280 was used for the video camera (96), and Mitsubishi SCT-CP700 was used for the video printer (99).

The Applicant firstly found that with a blade (37) suitable for cutting the first glass (31), a conventional first butt half was used.
The depth end groove (61) of (1) was processed. The blade (37) used had a metal # 1500 count. Then, peeling and chipping occurred on the small substrate (6) made of ferrite. Then a blade suitable for cutting ferrite
At (37), the depth end groove (6
1) was processed. The blade (37) was a metal # 3000. The small substrate (6) made of ferrite was cut smoothly, but the first glass (31) layer was clogged with cutting chips.

The Applicant has found that with a blade (37) suitable for cutting ferrites, the first butting half according to this example
The depth end groove (61) of (1) was processed. The blade (37) was a metal # 3000. The small substrate (6) made of ferrite was cut smoothly, and no clogging or the like occurred on the layer of the first glass (31). Therefore,
If the magnetic head 3 is manufactured by the manufacturing method according to the present invention, the small substrate 6 made of ferrite and the depth end groove are formed.
It was demonstrated that the layer of the first glass (31) filled in (61) could be processed smoothly with the same blade (37).

In order to strengthen the bond between the third ferromagnetic thin film (20) and the wide portion (12b) of the second ferromagnetic thin film (12), the process before the bonding process shown in FIG. 14 is performed. Then, it is advisable to form a film made of SiO2 having a thickness of about 20 nm and a film made of glass having a thickness of about 45 nm in an overlapping manner on the abutting surfaces of at least one of the thin films (20) and (12). In this case, it is considered that the magnetic resistance is increased by forming the film. But,
Since the wide portion (12b) of the second ferromagnetic thin film (12) joined to the third ferromagnetic thin film (20) is sufficiently wider than the narrow portion (12a), the magnetic resistance does not increase so much and it is practically used. The applicant has confirmed that there is no problem. Further, since the side surfaces of the first and second ferromagnetic thin films (11) and (12) are not eroded by the melted third glass (17), the film composed of SiO ₂ and glass and the second ferromagnetic thin film (12) A Cr film having a thickness of about 10 nm may be interposed between the and.

As shown in FIG. 18, the second ferromagnetic thin film
(12) and the wide portions (12b) (4b) of the gap spacer (4) may be exposed on the side surface of the magnetic head (3). This allows the gap depth to be easily confirmed during the manufacture of the magnetic head (3). The manufacturing process of the magnetic head (3) is the same as the above magnetic head.
Although it is almost the same as the manufacturing process of (3), in the etching process of the large substrate (6), as shown in FIG.
Opposing gap spacers (4) formed in parallel on top
Also, the wide portions (4b) (12b) of the second ferromagnetic thin film (12) are extended in the track width direction and connected by the connecting rod (41). In this state, after forming the coil winding groove (15), the large substrate (6) and the small substrate (8)
Butt, weld glass, and slice. After this, if unnecessary portions are cut in the same manner as above, the magnetic head (3) shown in FIG. 18 is obtained.

(Second Embodiment) A magnetic head (3) shown in FIG. 20 is obtained by using the same first butt half (1) as in FIG. 11 and replacing the second butt half (2). You can 21 is a cross-sectional view of the magnetic head (3) of FIG. 20 taken along the line GG. The magnetic head (3) comprises a second butting half (2) butted against the front surface of the first butting half (1) as in the first embodiment. Is formed by coating the surface of the base body (5) made of a magnetic material facing the hard disk with a third glass (17) which is a non-magnetic material and has a melting point lower than that of the second glass (16).

When reproducing the hard disk, the counterclockwise magnetic flux has a second ferromagnetic thin film (12), a second butting half body (2), and a core half body member, as shown by a chain line in FIG.
(14) Passes through the first ferromagnetic thin film (11). A filling groove (50) for filling the third glass (17) is formed in the center of the surface facing the first butting half (1), and the third glass (17) in the filling groove (50) is opened. ) Melts and flows into the side of the gap portion, and joins the two butt halves (1) and (2). The first butting half (1) is the same as that of the first embodiment, and only the second butting half (2) is different from that of the first embodiment. The method of manufacturing the second butting half body (2) of the magnetic head (3) according to this example has been shown by the applicant in Japanese Patent Application No. 8-234901 (not yet published), and detailed description thereof will be omitted. .

(Third Embodiment) FIG. 22 shows another magnetic head.
FIG. 23A and FIG. 23B are perspective views of the magnetic head (3).
FIG. 3 is a side view as seen from the left and right sides, respectively, taken along line I-I. The cross section of the magnetic head (3) is almost the same as that shown in FIG. 21, but the amount of the third glass (17) in the filling groove (50) is smaller than that in FIG. This is a magnetic head manufacturing convenience and is not a technical feature. The magnetic head (3)
Opposing gap spacer (4) and second ferromagnetic thin film on the side surface
The first butt half body (1) exposing the (12) is butt-joined with the second butt half body (2) whose non-magnetic third glass (17) covers the surface facing the hard disk. .

The second butting half (2) is coated with the third glass (17) on the upper and lower surfaces and both side surfaces of the base body (5) made of a magnetic material, whereby the second butting half (2) is machined. It improves the physical strength. In this example, the first butting half
(1) is the same as that shown in FIG. 18, but the second butting half (2) is different. The Applicant has also described the method for producing the second butting half (2) in Japanese Patent Application No. 8-234901.
(Unpublished) and detailed description is omitted.

The above description of the embodiments is for explaining the present invention and should not be construed as limiting the invention described in the claims or reducing the scope. The configuration of each part of the present invention is not limited to the above-mentioned embodiment, and it goes without saying that various modifications can be made within the technical scope described in the claims.

[Brief description of drawings]

FIG. 1 is a perspective view of a magnetic head.

FIG. 2 is a cutaway view of FIG. 1 taken along the line AA.

3 is a cross-sectional view of the magnetic head of FIG. 1 taken along line BB, where A is a left side view and B is a right side view.

FIG. 4 is a perspective view of a large substrate on which a resist is formed after filling a first glass in a first glass filling groove.

5 is a perspective view showing a state where the large substrate of FIG. 4 is subjected to etching processing.

FIG. 6 is a perspective view of a large substrate having a depth end groove formed by a blade.

FIG. 7 is a side view of the large substrate of FIG.

FIG. 8 is a diagram of the large substrate of FIG. 6 viewed from the Y direction.

FIG. 9 is a perspective view of a large substrate filled with a second glass after forming a first ferromagnetic thin film.

FIG. 10 is a perspective view of a large substrate on which a gap spacer and a second ferromagnetic thin film have been formed by performing an etching process.

11 is a perspective view showing a state in which a coil winding groove is formed on the large substrate of FIG.

12 is a sectional view of the large substrate of FIG. 11 taken along line MM.

FIG. 13 is a perspective view of a main portion of a large substrate on which a redundant portion is formed.

FIG. 14 is a perspective view showing a butted state of a small board and a large board.

15 is a central cross-sectional view of a block obtained by cutting the large substrate and the small substrate shown in FIG. 14 along the line P-P.

FIG. 16 is a perspective view of a gap portion of a first butting half body.

FIG. 17 is a plan view showing the relationship between tracks on a hard disk and a magnetic head.

FIG. 18 is a perspective view of a magnetic head in which a gap spacer and a second ferromagnetic thin film are laterally exposed.

FIG. 19 is a perspective view of a large substrate used in the magnetic head of FIG. 18 after etching processing.

FIG. 20 is a perspective view of a magnetic head of a second embodiment.

21 is a cross-sectional view of the magnetic head of FIG. 20 taken along line GG.

FIG. 22 is a perspective view of a magnetic head of a third embodiment.

23 is a sectional view of the magnetic head of FIG. 22 taken along the line I-I, in which A is a left side view and B is a right side view.

FIG. 24 is a perspective view of the inside of the apparatus main body provided with a hard disk.

FIG. 25 is a perspective view of a slider body.

FIG. 26 is a perspective view of a large substrate in which a depth end groove is formed in a conventional method of manufacturing a magnetic head.

FIG. 27 is a perspective view of a large substrate having a depth end groove filled with a second glass.

FIG. 28 is a perspective view of a large substrate after an etching process.

FIG. 29 is a perspective view of the large substrate after forming the coil winding groove.

FIG. 30 is a perspective view of a small substrate on which a second preliminary processing groove and a concave groove are formed.

31 is a perspective view showing a state where the small substrate of FIG. 31 is filled with the second glass. FIG.

FIG. 32 is a perspective view showing a butted state of a small substrate and a large substrate.

33 is a central cross-sectional view of a block obtained by cutting the large substrate and the small substrate of FIG. 32 along the line P-P.

FIG. 34 is a diagram showing an observation device of a first butting half body.

[Explanation of symbols]

(1) First butt half (2) Second butt half (4) Gap spacer (6) Large substrate (8) Small board (11) First ferromagnetic thin film (12) Second ferromagnetic thin film (15) Coil winding groove (16) Second glass (17) Third glass (20) Third ferromagnetic thin film (31) First glass (80) Groove (81) Second pre-machined groove

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Claims (2)

(57) [Claims] 1. A second butting half body (2) containing a magnetic material is butted to a first butting half body (1) having a gap spacer (4) which is to be a gap portion on the front surface thereof, and a second butting half body (2) containing a magnetic material is formed. A method of manufacturing a magnetic head that allows circular passage of magnetic flux between two magnetic fields, comprising a large ferromagnetic substrate (6) to be a part of the first butting half (1) and a second butting half (2). A small substrate (8) to be a part is prepared, and a first substrate along the track width direction of the recording medium is provided on the large substrate (6).
A step of forming a glass filling groove (60) and filling the first glass filling groove (60) with the first glass (31); and a portion to be a gap in the first glass filling groove (60) A step of forming recesses (36) (36) on the layer of the first glass (31) by partially removing the first glass (31) filled in the area except for the large substrate (6) A step of forming a depth end groove (61) which partially hangs on the first glass filling groove (60) along the track width direction by cutting, and a first strength on the entire upper surface of the large substrate (6). A magnetic thin film (11) is adhered, and a second glass (1) having a melting point lower than that of the first glass (31) is deposited thereon.
6) to fill the first glass filling groove (60) and the depth end groove (61), and grind and polish the upper surface to form the first ferromagnetic thin film.
The step of exposing the cross section of (11) to the upper surface, and etching after the non-magnetic thin film to be the gap spacer (4) and the second ferromagnetic thin film (12) are superposed and formed on the upper surface of the large substrate (6). A narrow portion (4a) (12a) having a width substantially equal to the track width of the recording medium is formed, and the first ferromagnetic thin film (11) is formed to have the same width as the narrow portion (4a) (12a). A step of filling the small substrate (8) with the third glass (17) having a melting point lower than that of the second glass (16) and allowing the passage of magnetic flux on the abutting surface with the large substrate (6). The process of exposing
A method of manufacturing a magnetic head, wherein the magnetic material exposed from (8) is brought into contact with the second ferromagnetic thin film (12) of the large substrate (6) and sliced along a plane orthogonal to the track width. 2. The small substrate (8) is made of a non-magnetic material, and has a groove (80) parallel to the track width direction and a second pre-processing groove (81) orthogonal to the groove (80), After forming the third ferromagnetic thin film (20) to be in contact with the second ferromagnetic thin film (12) on the upper surface of the small substrate (8), the concave groove (80) and the second
The method of manufacturing a magnetic head according to claim 1, wherein the third glass (17) is filled in the pre-processed groove (81) and the upper surface is polished to expose the third ferromagnetic thin film (20).