JPH05274638A - Magnetic head slider and manufacture of it - Google Patents

Abstract

PURPOSE:To deal with to high recording density by providing a coating consisting of nonmagnetic material on one surface or both surfaces of a yoke when a magnetic head slider is constituted of a slider body having an air bearing consisting of ferromagnetic oxide and the yoke for a winding wire joined to the slider body. CONSTITUTION:Both surfaces of the yoke 13 constituted of the magnetic head slider are coated by glass 4 and the width CW of a winding wire part 16 is made large and the glass 4 on a side surface is fused to the slider body 12. By such a manner, joining strength between the yoke 13 and the body 12 is enlarged and the width YW of the yoke 13 itself is reduced. Then, the width of the ferromagnetic oxide occupying in the winding wire 16 is reduced as well and inductance is reduced thus obtaining high recording density.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flying type magnetic head used in a hard disk drive (HDD) device, in which a slider main body having an air bearing portion and a winding yoke projecting from the main body are strong. The present invention relates to a so-called monolithic head slider made of a magnetic oxide and a manufacturing method thereof.

[0002]

2. Description of the Related Art As shown in FIG. 19, such head sliders are flat slider bodies made of ferromagnetic oxide.
(12) and a yoke (1
3) and (13), which have parallel air bearing portions (7) and (7) of a predetermined height extending in the sliding direction on the sliding surface with the recording medium. Track part at the joint
(8) and winding groove (5) are formed.

The manufacturing process of the above conventional head slider is shown in FIGS. First, as shown in FIG. 15, of the two large and small ferromagnetic oxide substrates (1a) and (1b) processed into the main body (12) and the yoke (13), respectively, the large substrate (1a) to be the main body (12) is formed. )
The depth end regulating groove (2) is formed on the butting surface (10) of the glass, and the glass (41) is melt-filled in the groove. The winding groove (5) is formed on the large substrate (1a) in contact with the glass (41), and the abutting surface (10) is mirror-polished.

On the other small substrate (1b), the abutting surface (11) is mirror-polished and then the gap spacer (6) is formed by sputtering.

As shown in FIG. 16, two large and small substrates (1a) (1b)
Are welded to form a welded wafer (1).

As shown in FIG. 17, a groove for regulating the track width of the track portion (8) is formed on the upper surface of the welded wafer (1).
(14) The (14) is hung from the front surface of the small substrate (1b) to the large substrate (1a), and the groove (1
The glass (9) having a low melting point is melt-filled in 4) and the surface is polished.

As shown in FIG. 18, a notch (15) vertically penetrating the small substrate (1b) side of the wafer (1) is opened by grinding, leaving a portion corresponding to the width YW of the yoke. Further, the air bearing portions (7) and (7) and the air inflow end portion are formed by etching or the like, and the welded wafer (1) is sliced into one slider unit as shown by a chain line L to show the head slider shown in FIG. To get

In the above magnetic head slider, the width YW of the winding yoke (13) is substantially equal to the width (ABS) of the air bearing portions (7), (7). Air bearing part (7)
Is about 400 μm, the width YW of the yoke, that is, the width of the ferromagnetic oxide forming the yoke is too large, and the inductance of the magnetic head increases. In order to improve the high frequency characteristics in response to the higher recording density, it is necessary to reduce the inductance as much as possible, and the conventional yoke shape cannot handle it.

As shown in FIG. 20, the air bearing portion (7)
A slider in which the width YW of the yoke (13) is smaller than the width ABS of (7) is also proposed (Japanese Patent Laid-Open No. 24-24912).
0). However, in this way, the width A of the air bearing part (7) is
When the width YW of the yoke (13) is made smaller than that of BS, the width YW of the yoke is limited to about 200 μm in terms of the strength of the yoke (13). There is a problem that cracks and cracks easily enter the joint with the slider body, and the yield is significantly reduced.

[0010]

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
By forming 6) with a yoke (13) made of a ferromagnetic oxide and a non-magnetic material coated on one or both surfaces of the yoke, the mechanical strength of the yoke is sufficiently maintained and the inductance is reduced. A magnetic head slider that can be lowered to accommodate a high recording density and a manufacturing method thereof will be clarified.

[0011]

A magnetic head slider according to the present invention is made of a ferromagnetic oxide and has an air bearing portion.
In a magnetic head slider comprising a slider body (12) having (7) and a winding yoke (13) made of a ferromagnetic oxide and joined to the slider body, one side surface of the yoke (13) , Or both sides are yoke (13) and slider body (12)
It is characterized in that it is covered with a non-magnetic material that is integrally bonded to.

The method of manufacturing the magnetic head slider according to the present invention is a ferromagnetic oxide substrate (1a) processed into a slider body.
And a pair of large and small substrates of a ferromagnetic oxide substrate (1b), which is processed into a winding yoke after being glass-bonded to the substrate,
A winding groove (5) is formed on the abutting surface of at least one of the substrates, and the substrates (1a) and (1b) are joined together via a gap spacer (6) to form a welded wafer (1), and then the yoke. In the manufacturing method of the flying type magnetic head slider, which performs external processing such as notching through the front and back sides of the small substrate (1b) side of the wafer (1) leaving the corresponding part, air bearing part processing, track part processing , The butt surface (11) of the small board (1b) to be processed into the winding yoke is orthogonal to the winding groove (5) and has an interval smaller than the processing width of the winding portion (16) including the yoke. To open the groove-shaped notches (3) and (3), fill the notches (3) with glass (4), join the large and small substrates (1a) and (1b), and then cut the front face of the small substrate (1b). It includes a step of scraping until the glass (4) at the bottom of (3) is exposed.

[0013]

[Operation and effect] Since one or both side surfaces of the yoke to which the winding is applied are covered with the non-magnetic material, even if the width of the yoke is reduced, the yoke can be covered with the non-magnetic material and reinforced. Strength can be obtained. In addition, the width of the yoke, that is, the width of the ferromagnetic oxide can be reduced to reduce the inductance, and high recording density can be supported.

[0014]

EXAMPLES A method of manufacturing the magnetic head slider of the present invention will be described below. As shown in Fig. 1, one of a pair of large and small substrates (1a) (1b) made of ferromagnetic oxide such as ferrite
The depth end control groove (2) is ground on the abutting surface (10) of (1a) with a diamond grindstone, etc., and the abutting surface (11) of the small substrate (1b) is orthogonal to the depth end controlling groove (2). Then, the groove-shaped notch (3) is formed with a gap narrower than the working width of the winding part (16) described later and deeper than the thickness t of the yoke (13) after the final working. It remains between the notches (3) and (3).
The width YW of the ferromagnetic oxide forming the yoke 12 is determined by the required inductance.

Next, as shown in FIG. 2, glass is placed in the grooves (2) and (3).
(41) (4) is melted and filled, then the abutting surface (10) of the large substrate (1a)
, A winding groove (5) is formed so as to partially overlap the depth end restriction groove (2), and the butting surfaces (10) (1) of both substrates (1a) (1b) are formed.
1) Polish the mirror surface.

Next, as shown in FIG. 3, a pair of substrates (1a) (1b)
Weld the wafer through the gap spacer (6)
Form (1). The gap spacer (6) is formed on both substrates (1
a) A non-magnetic film such as SiO ₂ is formed on the abutting surface of either (1b) or one of the substrates by sputtering or the like.

Next, as shown in FIG. 4, the front surface of the welded wafer (1) on the side of the small substrate (1b) is ground and removed leaving a predetermined yoke thickness t to expose the glass (4). Further, in order to regulate the width CW of the winding part (16) including the yoke (13), the wafer
Cutouts (15) and (15) are formed on the small substrate (1b) side of (1) so as to penetrate the upper and lower surfaces.

Next, as shown in FIG. 5, the air bearing portion
(7) (7) and the air inflow end (71) and the outflow end (72) are ground to be inclined.

Next, as shown in FIG. 6, patterning is performed by photolithography on the portion to be the track portion (8), and then the track portion is formed by ion milling or the like.
The track width is regulated by scraping both sides of (8). As indicated by the one-dot chain line L, the wafer (1) is sliced in units of one slider to obtain the head slider shown in FIG.

In the magnetic head slider obtained by the above manufacturing method, both sides of the yoke (13) are covered with glass (4) (4) to increase the width CW of the winding portion, and the side glass (4) is a slider. Since it is welded to the main body (12), the joining strength between the yoke (13) and the slider main body (12) is increased, and since both sides of the yoke are covered with glass, sufficient mechanical strength of the yoke should be secured. You can Further, since the width YW of the yoke itself can be made small, the width of the ferromagnetic oxide occupying the winding portion (16) can be made small, so that the inductance can be lowered and high recording density can be dealt with.

FIG. 8 shows that only the inside of the yoke (13) is made of glass.
Another embodiment of the winding part (16) covering (4) is shown in FIG.
Shows an example of another winding part (16) in which the glass (4) is coated only on the outer side of the yoke (13). In these cases, the width YW of the yoke itself can be made small, so that the inductance is reduced. It is possible to support high recording density by lowering the height of the yoke and to prevent damage to the yoke by reinforcing one side of the yoke with glass (4).

FIG. 10 shows another embodiment in which the winding groove (51) is also provided on the yoke (13) side. Winding groove is large board (1a)
And the small board (1b), or conversely to the above, the winding groove may be provided on the small board (1a) side and the winding groove on the large board side may be omitted. Similarly, the depth end regulating groove (2) can be formed in both the substrates (1a) and (1b) or only in the small substrate (1b).

Further, before joining the large and small substrates (1a) and (1b), a ferromagnetic metal thin film such as sendust is formed on the abutting surface of either one or both substrates by sputtering or the like. Then, by joining the two substrates through the gap spacer (6), it is possible to form a so-called MIG head slider having a high recording density and having a ferromagnetic metal thin film on one side or both sides of the gap portion.

11 to 13 show a method of adopting the same means as the conventional means for regulating the track width in the present invention. After completing the steps of FIG. 1 to FIG.
As shown in FIG. 11, the track regulating grooves (14) and (14) are formed on the abutting surface (11) of the small substrate (1b) after the dry grinding such as diamond grindstone, chemical etching, and ion beam etching is performed. Glass (9) having a lower melting point than (4) is melt-filled and the surface is polished.

Next, as shown in FIG. 12, the welded wafer (1)
The front surface of the small substrate (1b) side is ground and removed, leaving a predetermined yoke thickness t, to expose the glass (4). Also, the yoke (13)
In order to control the width CW of the winding part (16) including
Cutouts (15) and (15) are formed on the small substrate (1b) side of (1) so as to penetrate the upper and lower surfaces.

Next, the air bearing portions 7 and 7 and the air inflow end 71 and outflow end 72 are ground to be a slope. Next, as shown by the chain line L, the head slider shown in FIG. 7 is obtained by slicing in slider units.

In the magnetic head slider thus obtained, the width CW of the winding portion (16) is large in the same manner as described above.
The side surface of the yoke (13) is covered with the glass (4) (41). In the same manner as above, the joining strength between the yoke (13) and the slider body (12) is large, and the mechanical strength of the yoke is sufficiently secured. You can Further, since the width YW of the yoke itself can be made small, the inductance can be lowered and a high recording density can be dealt with.

FIG. 14 shows another embodiment in which the glass (4) is coated only on the inner surface of the yoke (13) in the manufacturing process of FIGS. 11 to 13.

As described above, one or both side surfaces of the magnetic head slider forming the winding are covered with the glass (4) which is a non-magnetic material, and the width CW of the winding (13) is larger than the width CW. By narrowing the width (YW) of the yoke (13), that is, the ferromagnetic oxide, it is possible to reduce the inductance while having sufficient mechanical strength, so that it is possible to produce with high yield and to cope with high recording density. .. In the embodiment, the winding portion is formed at each of the air outflow ends of the two air bearing portions (7) and (7), but the winding portion may be formed at only one of them. is there. The present invention is not limited to the configuration of the above embodiment, and various modifications can be made within the scope of the claims.

[Brief description of drawings]

FIG. 1 is a perspective view showing a state in which a pair of substrates is grooved in a manufacturing process of a magnetic head of the present invention.

FIG. 2 is a perspective view showing a state in which a groove is filled with glass in the same as above.

FIG. 3 is a perspective view showing a state in which a pair of substrates are joined together in the above.

FIG. 4 is a perspective view showing a state in which a notch for determining the width of the winding portion is provided in the above.

FIG. 5 is a perspective view showing a state where an air bearing portion is formed.

FIG. 6 is a perspective view showing a state in which a track portion is formed in the above.

FIG. 7 is a perspective view of the slider of the present invention.

FIG. 8 is a perspective view of a slider according to a second embodiment.

FIG. 9 is a perspective view of a slider according to a third embodiment.

FIG. 10 is a perspective view of a slider according to a fourth embodiment.

FIG. 11 is a perspective view showing another method of limiting the track width.

FIG. 12 is a perspective view showing a state in which the outer shape is processed in the above.

FIG. 13 is a perspective view of the completed magnetic head slider of the above.

FIG. 14 is a perspective view of another magnetic head slider.

FIG. 15 is a perspective view showing a state where a large substrate of a pair of substrates is grooved in a conventional magnetic head manufacturing process.

FIG. 16 is a perspective view showing a state in which a pair of substrates are joined together in the above.

[FIG. 17] In the same as above, a groove for determining a track width is formed,
It is a perspective view of the state where glass was filled.

FIG. 18 is a perspective view showing a state in which an air bearing portion is formed in the above.

FIG. 19 is a perspective view of a conventional magnetic head slider.

FIG. 20 is a perspective view of another conventional magnetic head slider.

[Explanation of symbols]

 (1a) Large board (1b) Small board (2) Depth end restriction groove (3) Notch (4) Glass (5) Winding groove (6) Gap spacer (7) Air bearing part

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[Procedure amendment]

[Submission date] June 11, 1992

[Procedure Amendment 1]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 1

[Correction method] Change

[Correction content]

[Figure 1]

[Procedure Amendment 2]

[Document name to be corrected] Drawing

[Name of item to be corrected] Fig. 19

[Correction method] Change

[Correction content]

FIG. 19

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Satoshi Ota 2-18 Keihan Hondori, Moriguchi City, Osaka Prefecture Sanyo Electric Co., Ltd. (72) Inventor Fukumoto 2-18, Keihan Hondori, Moriguchi City, Osaka Sanyo Electric Co., Ltd. Within the corporation

Claims (2)

[Claims] 1. An air bearing portion made of a ferromagnetic oxide.
In a magnetic head slider comprising a slider body (12) having (7) and a winding yoke (13) made of a ferromagnetic oxide and joined to the slider body, one side surface of the yoke (13) , Or both sides are yoke (13) and slider body (12)
A flying-type magnetic head slider characterized by being covered with a non-magnetic material integrally bonded to the. 2. A large and small pair of a ferromagnetic oxide substrate (1a) processed into a slider body, and a ferromagnetic oxide substrate (1b) processed into a winding yoke after being glass-bonded to the substrate. Winding groove (5) on the abutting surface of at least one of the
To form both substrates (1a) (1) through the gap spacer (6).
b) is joined to form a welded wafer (1), and then the small substrate (1b) side of the wafer (1) is cut through the front and back sides, leaving the yoke corresponding part, air bearing part processing,
In a method for manufacturing a flying magnetic head slider that performs outer shape processing such as track processing, in a butting surface (11) of a small substrate (1b) to be processed into a winding yoke, it is orthogonal to a winding groove (5), and Groove-shaped notches (3) (3) are opened at intervals smaller than the working width of the winding part (16) including the yoke, and the glass is formed in the notches (3).
After filling (4) and joining both large and small substrates (1a) and (1b),
A method of manufacturing a magnetic head slider including a step of scraping the front surface of b) until the glass (4) at the bottom of the notch (3) is exposed.