JPH06137625A - Air conditioning system - Google Patents

Abstract

PURPOSE:To effectually utilize a building of a semiconductor fabrication factory by eliminating an air conditioning machine chamber which does not directly contribute to fabrication of a semiconductor. CONSTITUTION:In a semiconductor fabrication factory, an air conditioner 1, which is conventionally disposed in an air conditioning machine chamber adjoining to a high purification area 8, is disposed in a return chamber 9 located below a floor of the high purification area 8. Further, in a building of the semiconductor fabrication factory, the air conditioning machine chamber is eliminated and an area of the high purification area 8 is widened for effectual utilization of the building.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air conditioning system, and more particularly to an air conditioning system that maintains the cleanliness and environment of a semiconductor manufacturing plant.

[0002]

2. Description of the Related Art FIG. 2 is a diagram showing an outline of an example of a conventional air conditioning system. As shown in FIG. 2, the conventional air conditioning system includes an air conditioning machine room 11 arranged adjacent to a high cleanliness area 8 which is a work room of a semiconductor manufacturing factory.
And the outside air introduction duct 3 for taking in air from the outside.

Further, the operation of this air conditioning system takes in the outside air from the outside air introduction duct 3 and the air in the high cleanliness area 8 from the air suction port 5, and the air conditioner 1 controls the temperature, humidity and cleanliness. The air is adjusted and blown through the muffling chamber 2 and the air supply duct 4 to the pressure equalizing air chamber 7 in the ceiling above the high cleanliness area 8. Next, the air blown to the air chamber 7 is blown out to the high cleanliness area 8 from the blowout filter 6 installed on the ceiling surface.

When the air thus adjusted passes through the high cleanliness area 8, it deprives the dust and heat staying in the room,
It again flows through the floor 10 to the return chamber 9 under the floor, returns from the air suction port 5 to the air conditioner 1 and circulates, and always maintains the temperature and cleanliness of the high cleanliness area 8.

[0005]

In this conventional air conditioning system, since the air conditioner 1 is installed in the air conditioning machine room 11 provided next to the high cleanliness area 8, one of the buildings of a semiconductor manufacturing factory is installed. Since the part is occupied by the air conditioning machine room 11, the high cleanliness area 8 for semiconductor manufacturing becomes narrow, and there is a problem that the building of the semiconductor manufacturing factory cannot be effectively utilized.

[0006] An object of the present invention is to provide an air conditioning system in which a high cleanliness area can be widened and a floor area of a building can be effectively used.

[0007]

The air conditioning system of the present invention is arranged under the floor of a high cleanliness area which is a working room, sucks the air and the outside air of the high cleanliness area, and at the same time, keeps the air at a constant temperature. An air conditioner for supplying the air is provided, and the air having a constant temperature is pressure-fed from the ceiling to the high cleanliness area through a filter.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings.

FIG. 1 is a diagram showing the outline of an embodiment of the air conditioning system of the present invention. In this air conditioning system, as shown in FIG. 1, the air conditioner 1 is installed in the return chamber 9 under the floor of the high cleanliness area 8.

The operation is the same as in the conventional example. First, the temperature, humidity and cleanliness of the outside air from the outside air introducing duct 3 and the air from the air intake port 5 are adjusted by the air conditioner 1.
Air is sent to a pressure-equalizing air chamber 7 behind the ceiling of the high-cleanliness area 8 via the muffling chamber 2 and the intake duct 4, and the high-cleanness area 8 is blown from the blow-out filter 6 installed on the ceiling surface.
Is blown out to. The air passing through the high cleanliness area 8 is
Dust and heat are taken away and through the floor 10, the return chamber 9 under the floor
To the air conditioner 1 for circulation again.

[0011]

As described above, according to the present invention, semiconductor manufacturing is conventionally performed by installing the air conditioning machine room 11 arranged next to the high cleanliness area 8 in the return chamber 9 under the floor of the high cleanliness area. In the factory building, there is no room where the air-conditioning machine room 11, which originally does not directly contribute to semiconductor manufacturing, is disposed, and the high cleanliness area 8 directly contributing to semiconductor manufacturing can be widened. It has an effect that can be effectively utilized.

[Brief description of drawings]

FIG. 1 is a diagram schematically showing an embodiment of an air conditioning system of the present invention.

FIG. 2 is a diagram showing an outline of an example of a conventional air conditioning system.

[Explanation of symbols]

 1 Air conditioner 2 Silence chamber 3 Outside air introduction duct 4 Air intake duct 5 Air inlet 6 Air outlet filter 7 Air chamber 8 High cleanliness area 9 Return chamber 10 Floor 11 Air conditioning machine room

Claims (1)

[Claims] 1. An air conditioner which is arranged under the floor of a high cleanliness area, which is a working room, sucks air and outside air in the high cleanliness area and supplies air having a normal temperature at a constant temperature. 2. The air conditioning system, wherein the air of 1. is pressure-fed from the ceiling to the high cleanliness area through a filter.