JPS6380146A - Clean room configuration - Google Patents

Abstract

PURPOSE:To get a better environment of a clean room as well as workability in the clean room in addition to air conditioning work and cleaning work by a method wherein an operating mechanism is installed within the clean room, the power supply and the controlling unit are installed in a room adjacent to the clean room to eliminate the power supply and the controlling unit from the clean room. CONSTITUTION:An operating mechanism 4 installed within a clean room 1 is composed of only operating units directly acting against a work such as by processing of the work, transporting it to a next stage and inspecting the processed work. A power supply and controlling unit 5 for transmitting and receiving an energy and a signal for operating the mechanism 4 just in compliance with an instruction are installed in an under-floor clean bit 2 just below the clean room 1, it may be installed in an adjoining room through a partition wall W in accordance with an installing plan and a layout of the operating mechanism and the like. The operating mechanism 4 and the power supply and controlling unit 5 are connected with a signal and driving system 6 through a floor 1a and the like.

Description

[Detailed Description of the Invention] Fields of Application The present invention is applicable to so-called clean room configurations in which dust generation is suppressed and environmental temperatures such as temperature and humidity are controlled to such as in factories for semiconductor manufacturing, medicine, bioproduct manufacturing, etc. Regarding.

For example, in the manufacturing of semiconductors, a single device is prepared for each process, and this is installed in a clean room where dust is extremely reduced and temperature and humidity are completely controlled. . A lot of money is spent on managing and adjusting the air supplied to the room. In addition, in conventional manufacturing machinery, the working section for actually processing and processing the workpiece, its power source, control section, etc. are all manufactured as a single unit for each individual device. By the way, since the power supply section and the control section generate heat as they operate, it is common practice to take out the heated air using a cooling fan or the like. The heat generated by mechanical devices increases the temperature of the indoor air, and the use of fans and the like causes dust to be diffused into the room. Therefore, when a particularly high degree of cleanliness is required, a duct is installed to discharge the air outside the clean room. However, running the duct inside the room worsens the environment such as the indoor work space, and takes these into consideration. There were still problems to be solved, such as the need for strict air conditioning management.

OBJECT OF THE INVENTION The present invention has been provided in view of the above-mentioned points. By separating the machinery and equipment into functional units with the working parts as independent working mechanisms and connecting them with signal and drive systems such as power lines and piping, the power supply and
The aim is to eliminate the control unit and create an even better environment in the clean room, including air conditioning, cleaning, and workability.

<Example> The figure schematically shows the configuration of the present invention. 1 is a clean room as a work area, 2 is an underfloor clean pit directly under the room, and 3 is a temperature and humidity of 11! This is a machine room equipped with an air conditioner, etc. that performs air conditioning and dust removal (dust suction) if necessary. In addition to the above, although not shown in the drawings, necessary spaces and areas for constructing the clean room building A, such as power distribution and piping space, are provided. When the so-called down 70 type is adopted as the airflow control method for the clean room 1, the floor 1a of the clean room 1 is formed of, for example, a grating floor to allow ventilation. Reference numeral 4 denotes a working mechanism installed in the clean room 1, which includes operating parts that directly act on the workpiece, such as processing the workpiece (not shown), transporting it to the next process, and inspecting the processed workpiece. It consists only of 5 is connected to the working mechanism 4 by a signal/drive system 6 consisting of power lines, water piping, air piping, etc. as means necessary to operate the mechanism, and operates the mechanism 4 according to instructions. It is a power supply/control unit that sends and receives energy and signals, and in the example shown, it is installed in the underfloor clean pit 2 directly below the clean room 1, but depending on the arrangement plan and layout of the working mechanism, it may be installed in an adjacent room via the partition wall W. It is also good to set it up.

As mentioned above, the working mechanism body 4 and the power supply/control body 5 are located on the floor 1a.
Since the mechanism is normally configured independently as an individual device for each function, it is easy to configure the equipment. It is conceivable to install the power supply/control body 5 correspondingly to each mechanism body 4, but it is possible to install the power supply/control body 5 in correspondence with each mechanism body 4. It is also possible to install them all in one unit.

A duct 7 communicates the power supply/control unit 5 with the outside of the clean room building A, and discharges heat, dust, etc. generated inside the power supply/control unit 5 to the outside of the building A. Therefore, the fan device is built into the power supply/control body 5 or provided in the duct. Incidentally, if the floor 1a etc. does not have a grating structure but has a good isolation structure such as heat insulation, the duct 7 does not necessarily need to be provided, and the clean pit 2 may be treated as a mere space for exhaust heat or the like.

Effects> According to the present invention as described above, it is possible to have a clean room configuration that provides the following excellent effects.

(1) Work 8! Since the structure does not have a heat generating part such as a power source that is integrated with a conventional power supply/control body, the amount of heat generated is extremely small. It is possible to suppress the generation of dust in the clean room from itself.

(2) The above eliminates the need for equipment such as exhaust ducts in the clean room, making it possible to increase the space available as a work area.

(3) Since the space occupied by the mechanical equipment in the clean room is reduced, the clean room itself can be made relatively smaller, and control management of air conditioning and the like becomes easier.

(4) Since the power source and control unit are installed outside the clean room, the means for disposing of heat generation and dust generation can be simplified.

[Brief explanation of the drawing] The figure is a schematic diagram of a clean room configuration according to the present invention.

Claims (2)

[Claims] (1) Separate the working mechanism that processes and processes the workpiece from the power supply/control unit that instructs and controls its operation, and connect the mechanism and control unit with a signal/drive system using power lines, piping, etc. This is a clean room configuration in which the working mechanism is installed in a clean room, and the power supply and control unit are installed in a room adjacent to the clean room. (2) The clean room configuration according to claim 1, wherein the installation room for the power supply and control unit is an underfloor clean pit directly below the clean room.