JPH06123824A - Semiconductor optical coupler and it assembling method - Google Patents

Abstract

PURPOSE:To make an optical coupling between a semiconductor light emitting element and a fiber stable for a long period by shielding the inside of an optical- fiber incorporating pipe from external air. CONSTITUTION:A stepped groove is provided on the end surface of the pipe 9 and a ring-shaped alloy member 15 made of Au and Sn is installed in the groove. Further, a metallic ring 10 made of the same material as the pipe 9 is fixed on the end surface of a ferrule 11 by resistance welding 14. Then, the ferrule 11 is installed on the end surface of the pipe 9 and positioned so that the optical coupling between the optical fiber 12 and semiconductor light emitting element 1 has maximum efficiency. After the ferrule is positioned, a high-frequency inductive heating coil is installed at a specific position in the vicinity of the pipe 9 and a high-frequency induction current is supplied to the heating coil to fuse the alloy member 15. The fused alloy member 15 fills the ferrule 11 and the groove of the pipe 9, which are uniformly joined and fixed. The alloy member 15 made of Au and Sn is in a ring shape, so the ferrule 11 and pipe 9 are joined uniformly to the entire circumference to secure airtightness in the pipe 9.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor optical coupler for coupling a semiconductor light emitting device and an optical fiber via a lens, and is particularly suitable for easily, reliably and stably fixing the optical fiber. The present invention relates to a semiconductor optical coupler and an assembling method thereof.

[0002]

2. Description of the Related Art As a conventional method for optically coupling and fixing an optical fiber and a semiconductor laser, Japanese Patent Laid-Open No. 63-16140.
There is a method disclosed in Japanese Patent No. 5 publication. FIG. 11 is a block diagram of an optical fiber fixing portion for explaining this fixing method.

In FIG. 11, a semiconductor laser 22 and a lens 21 are installed inside a base material 20. Further, on the upper part of the base material 20, a ferrule 11 containing an optical fiber 12 is installed via a ferrule fixing member 19.

The laser light emitted from the semiconductor laser 22 is condensed at the optical fiber tip position 16 via the lens 21 and is introduced into the optical fiber 12. The ferrule 11 and the ferrule fixing member 19 align the optical coupling between the semiconductor laser 22 and the optical fiber 12, and then use the YAG laser light 23 at the welding position or the ferrule fixing member 19 or. The structure is such that each is fixed to the upper portion of the base material 20 by welding.

[0005]

In the above-mentioned conventional structure, the ferrule 11 is used as the ferrule fixing member 19 and the ferrule is used as the ferrule fixing member 19.
The fixing members 19 are welded and fixed to the upper portion of the base member 20 by the YAG laser 23, and the fixing state is laser spot welding.

[0006] Such fixing by spot welding has a drawback that the inside of the base material 20 cannot be made airtight so as to be shielded from the outside air. Therefore, moisture may enter the inside of the base material 20, which may cause deterioration of the semiconductor laser 22. Further, there is a problem that moisture adheres to the surface of the lens 21 and optical coupling is lowered.

As a method of solving these problems, for example, the ferrule 11 and the ferrule fixing member 19 are attached to the YAG.
There is a method of welding and fixing the entire circumference with the laser 23. in this case,
To prevent misalignment during welding, first of all, ferrule 11
Then, the ferrule fixing member 19 is temporarily fixed by spot welding, and then fixed by whole circumference welding. According to this, the inside of the base material 20 can be made airtight without leaving a gap in the fixing portion.

However, in this method, since the welding process is performed twice, the assembly work time is increased and the cost is increased. Further, in the welding fixation by the YAG laser 23, there is a problem that welding cracks occur unless both materials are of the same kind.

An object of the present invention is to fix the ferrule and the pipe easily and surely and firmly, to secure the airtight state inside the pipe, and to keep the optical coupling between the semiconductor light emitting device and the optical fiber for a long time. It is an object of the present invention to provide a semiconductor optical coupler that can be stably maintained and a method for assembling the same.

[0010]

SUMMARY OF THE INVENTION The above-mentioned object is to secure the ferrule and the pipe easily and surely and firmly, and to secure the interior of the pipe in an airtight state in which it is shielded from the outside air. A ring-shaped metal member is inserted and fixed between the pipes, and then the semiconductor light emitting element and the optical fiber are aligned with each other, and then the ferrule and the pipe are made of an alloy member composed of Au and Sn using a heating device. It is achieved by joining and fixing.

The semiconductor optical coupler of the present invention includes a stem, a semiconductor light emitting element mounted in the center of the stem, a lens supported and fixed by a holder at a position facing the semiconductor light emitting element, and a lens. In a semiconductor optical coupler that has an optical fiber, a pipe connecting the stem and the ferrule, and optically couples the semiconductor light emitting element and the optical fiber via a lens, a ring-shaped member identical to the pipe is preliminarily used. It is characterized in that it is fixed on the reel side, and then the pipe and the ferrule are joined and fixed via a ring-shaped member.

In the present invention, (1) welding, caulking and press-fitting are used to join the ferrule and the ring-shaped member, and (2) the pipe and ferrule joined through the ring-shaped member are Joining and fixing with an alloy member composed of Au and Sn, (3) the alloy member composed of Au and Sn has a ring shape, a wire shape, a ribbon shape and a foil shape,
(4) The lens for optically coupling the semiconductor light emitting element and the optical fiber should be a gradient index front spherical rod lens or an aspherical lens. (5) Au and Sn on the end surface of the pipe or the end surface of the ring-shaped member. (6) Temporarily welding an alloy member made of Au and Sn into the groove or taper provided on the end face of the pipe or the end face of the ring-shaped member. After fixing and then aligning the pipe and the ring-shaped member, the alloy member made of Au and Sn is melted and fixed. (7) The material of the ring-shaped member is kovar, Fe
It is preferable to use Fe-based or stainless-based metal or ceramics such as -42Ni and SuS430.

The method for assembling a semiconductor optical coupler according to the present invention comprises a stem, a semiconductor light emitting element mounted at the center of the stem, a lens supported and fixed by a holder at a position facing the semiconductor light emitting element, and a ferrule. An optical fiber that is supported and fixed, a ferrule fixing member that supports and fixes a ferule, and a pipe that connects the stem and the ferrule fixing member are provided, and the semiconductor light emitting element and the optical fiber are connected via a lens. A semiconductor optical coupler for optical coupling is characterized in that a pipe and a ferrule are joined and fixed by an alloy member made of Au and Sn via a ferrule fixing member.

In this case, (1) a groove or a taper into which an alloy member made of Au and Sn can be inserted is provided on the end face of the ferrule fixing member or the pipe end face, and (2) the end face of the ferrule fixing member. Alternatively, an alloy member made of Au and Sn is temporarily fixed in a groove or a taper provided on the end surface of the pipe by welding, and then the ferrule fixing member and the pipe are aligned with each other. And melting and fixing an alloy member made of Sn and Sn, (3) the ferrule fixing member is made of the same metal material as that of the pipe, (4)
Alloy members made of Au and Sn are ring-shaped, wire-shaped,
It is preferable that the lens has a ribbon shape or a foil shape, and (5) the lens that optically couples the semiconductor light emitting element and the optical fiber is a gradient index front spherical rod lens or an aspherical lens.

[0015]

A stepped groove is provided on the end surface of the pipe to which the ferrule is fixed, and a ring-shaped alloy member of Au and Sn is placed in this groove. A ring-shaped metal member made of the same material as the pipe is fixed to the end surface of the ferrule by resistance welding in advance, and the ferrule with the ring-shaped metal member is placed on the end surface of the pipe.

In this state, the ferrule is aligned so that the laser light from the semiconductor light emitting element is taken into the optical fiber. After the alignment is completed, the alloy member made of Au and Sn is melted by the heating device to join and fix the ferrule and the pipe.

According to this structure, a heater is used instead of YAG laser welding, for example, a high frequency induction heating device.
The pipe and pipe are joined and fixed. By using the high-frequency induction heating device, the local area can be heated in a short time, so that the ferrule and the pipe can be fixed easily and surely.
Further, since the entire circumference is fixed by the ring-shaped alloy member, no gap is left in the fixing portion and the inside of the pipe can be kept airtight. As a result, deterioration of the semiconductor light emitting element and deterioration of optical coupling due to moisture adhering to the lens do not occur.

An alloy member having a high melting point, high strength, and excellent corrosion resistance is used for joining and fixing the ferrule and the pipe, and a ring-shaped metal member having the same material as the pipe is installed on the ferrule. Has a structure that reduces the thermal strain applied to the alloy member of Au and Sn. Therefore, there is no deterioration over time due to long-term use, and there is no displacement.

Further, as compared with the YAG laser welding fixing, the airtightness inside the pipe can be easily and surely secured, so that the assembling work time can be shortened and the cost can be reduced.

As a result, the ferrule and the pipe can be fixed easily and securely and firmly, the airtight state inside the pipe is secured, and the optical coupling between the semiconductor light emitting element and the optical fiber is stably maintained for a long period of time. be able to.

[0021]

Embodiments of the present invention will be described below with reference to FIGS.

In the embodiment shown in FIG. 1, a laser diode is used as a semiconductor light emitting element and a core diameter of 10 is used as an optical fiber.
μm single mode fiber (hereinafter referred to as fiber)
, An aspherical mold lens (hereinafter referred to as a lens) as a lens for optically coupling the semiconductor light emitting element and the optical fiber, and Au80 / Sn as an alloy member for joining the ferrule and the pipe.
20 (melting point 280 ° C.) is used.

In FIG. 1, the holder 4 having the aspherical lens 3 is arranged on the upper surface of the stem 6 so as to cover the semiconductor light emitting device 1 mounted on the heat sink 5 on the stem 6.
After adjusting so that the optical axis of the semiconductor light emitting element 1 and the optical axis of the lens 3 coincide with each other, they are joined to the stem 6 by resistance welding. The laser light emitted from the semiconductor light emitting element 1 is condensed by the aspherical lens 3. The tip 16 of the optical fiber 12 is arranged at this converging point.

To install the optical fiber 12, a pipe 9 having a length suitable for arranging the optical fiber tip 16 at the laser light converging position is joined to the upper surface of the stem 6 at the joint portion 8 by resistance welding. Feer 1 with optical fiber 12 fixed
A metal ring 10 is fixed to the end face of the pipe 1. A ferrule 11 with the metal ring 10 is installed on the end face of the pipe 9 so that the laser light from the semiconductor light emitting device 1 can be taken into the optical fiber 12. -Align le 11

After the alignment is completed, the ring-shaped alloy member 15 made of Au and Sn placed between the ferrule 11 and the pipe 9 is melted and fixed by using a high frequency induction heating device. Since the alloy member 15 fixes the ferrule 11 and the pipe 9 on the entire circumference, the inside of the pipe 9 can be made airtight.

By using the high-frequency induction heating device, the local area can be heated in a short time, and the effect of heat on the periphery of the fixed part can be minimized, and the fixing can be performed in a short time. Therefore, even if the optical fiber 12 is installed in the vicinity of where the alloy member 15 is melted as in the embodiment shown in FIG.
The alloy member 15 can be melted without excessively heating 2. In addition, the fixing process using the high-frequency induction heating device is suitable for assembling and mass production because it has the advantage that the position fixing and the airtightness can be secured at the same time.

Next, FIGS. 2 and 3 show in detail the method of fixing the ferrule and the pipe with the alloy member of Au and Sn using the high frequency induction heating device.

In FIG. 2, a stepped groove 24 having an outer diameter of 5.1 mm and a height of 0.2 mm is provided on the end surface of the pipe 9. The ring-shaped alloy member 15 of Au and Sn is inserted and set in the groove 24. The alloy member 15 of Au and Sn is
The mixture ratio is 80% Au and 20% Sn, and has a ring shape with an outer diameter of 6.5 mm, an inner diameter of 5.1 mm and a thickness of 0.1 mm. The surface of the pipe 9 is coated with Ni plating or Ni-Au plating to improve the wettability of the alloy member 15 of Au and Sn.

On the other hand, a metal ring 10 made of the same material as the pipe 9 is fixed to the ferrule 11 by resistance welding 14 on the end face in contact with the pipe 9. The surface of the metal ring 10 is also coated with Ni plating similar to the pipe 9, or Ni-Au plating.

To fix the ferrule 11 and the pipe 9, first, attach the ferrule 11 with the metal ring 10 to the pipe 9.
The ferrule 11 is installed on the end face, and the ferrule 11 is finely adjusted so that the optical coupling efficiency between the optical fiber 12 and the semiconductor light emitting device 1 is maximized.

Next, the high-frequency induction heating coil 17 is connected to the foil.
It is installed at a predetermined position near the pipe 11 and the pipe 9. In this state, a high frequency induction current is passed through the heating coil 17 and the ferrule 1
1 and pipe 9 are heated. When the ferrule 11 and the pipe 9 are heated, the alloy member 15 of Au and Sn is melted, and FIG.
As shown in FIG. 1, the alloy member 15 of Au and Sn is a ferrule 1.
1 and the inside of the groove 24 of the pipe 9 are filled, and both are evenly bonded and fixed. Since the alloy member 15 of Au and Sn has a ring shape, the ferrule 11 and the pipe 9 can be joined uniformly over the entire circumference, and the airtightness inside the pipe 9 can be secured at the same time.

The optical fiber 12 is inserted into a through hole provided at the center of the ferrule 11 and fixed with an epoxy resin 13. The optical fiber 12 fixed in the ferrule 11.
The tip 1 to prevent reflections when taking in light
6 has an obliquely polished shape.

The amount of positional deviation between the semiconductor light emitting device 1 and the optical fiber 12 before and after melting the alloy member 15 of Au and Sn is as small as the optical coupling efficiency of 1 dB or less, which is not a problem in terms of characteristics. The airtightness in the pipe is 1 × 10 to ¹¹ Torr.
It has 1 / s or more and satisfies the specifications.

Further, the joint strength between the ferrule 11 and the pipe 9 fixed by the alloy member 15 of Au and Sn is about 1200N in tensile strength, which is more than that of the YAG laser welding fixed product (tensile strength 1000N). It has almost the same strength and high bonding strength.

Here, a Kovar material is used for the pipe 9 and the metal ring 10, but the material is not limited to this and, for example, Fe--Ni alloy or stainless alloy Su is used.
It may be S303 or SuS430. Further, when the alloy member 15 of Au and Sn is melted by the high frequency induction heating device and the ferrule 11 and the pipe 9 are joined and fixed, the alloy member 15
In order to prevent the oxidization of the above, it is advisable to join them in an atmosphere of nitrogen gas or argon gas.

In FIG. 4, an alloy member of Au and Sn installed between the ferrule and the pipe is heated by a high frequency induction heating coil,
The appearance state when melted is shown.

The heating coil 17 has a hole with a diameter of 7 mm, and the ferrule 11 provided with the alloy member 15 of Au and Sn and the pipe 9 are inserted into this hole. In this state, the ferrule 11 is finely adjusted to align the optical fiber 12 and the semiconductor light emitting device 1 so that the optical coupling efficiency is maximized.

After the ferrule 11 is aligned, a high frequency induction current is passed through the heating coil 17 to heat the ferrule 11 and the pipe 9. Thereby, the alloy member 15 of Au and Sn is melted and the ferrule 11 and the pipe 9 are joined.

In the present invention, the metal ring 10 is joined to the end face of the ferrule 11, and Au and Sn are attached to the end face of the pipe 9.
The groove 24 into which the ring-shaped alloy member 15 is inserted is provided. A ferrule 11 with a metal ring 10 is installed on the end face of the pipe 9, and the ferrule 11 is positioned so that the laser light from the semiconductor light emitting device 1 is taken into the optical fiber 12. After the alignment, the alloy member 15 is melted and the ferrule 11 and the pipe 9 are joined and fixed using a high frequency induction heating device.

In this structure, the alloy member 15 is melted and the ferrule 11 and the pipe 9 are joined and fixed by a high frequency induction heating device. As a result, both can be fixed easily and securely, more firmly than the YAG laser welding fixed product, and further, the inside of the pipe 9 can be fixed in an airtight state in which the inside of the pipe 9 is shielded from the outside air without leaving a gap in the fixed portion. Therefore, there is no deterioration of the optical coupling due to deterioration of the semiconductor light emitting element 1 or adhesion of moisture to the lens 3.

Further, an alloy member 15 having a high melting point, high strength and excellent corrosion resistance is used for joining and fixing the ferrule 11 and the pipe 9, and the ferrule 11 has a metal ring 10 made of the same material as the pipe 9. Is installed to reduce the thermal strain that is repeatedly applied to the alloy member 15. For this reason, there is no creep or crack of the alloy member 15 due to long-term use and there is no deterioration over time, and there is no displacement.

Further, since the ferrule 11 and the pipe 9 can be fixed in a short time by a single joining process using the high frequency induction heating device, and the inside of the pipe 9 can be easily made airtight, the assembling work can be performed. It is possible to reduce time and cost.

Therefore, the ferrule 11 and the pipe 9 can be fixed easily and securely and firmly, and the inside of the pipe 9 can be kept airtight, and the optical coupling between the semiconductor light emitting device 1 and the optical fiber 12 can be maintained for a long time. Can be maintained stable.

Next, another embodiment of the present invention will be described with reference to FIG.

FIG. 5 shows a structure in which an optical fiber and a pipe are joined and fixed via a ferrule fixing member, and the structure of a semiconductor light emitting device, an aspherical lens and the like installed on the upper surface of the stem and the end surface of the pipe are provided. The groove shape and the like into which the alloy member of Au and Sn is inserted has the same configuration as that of the embodiment shown in FIG.

In FIG. 5, the optical fiber 12 is a fiber.
It is inserted into a through hole provided at the center of the tool 11 and fixed with an epoxy resin 13. A through hole is provided in the center of the ferrule fixing member 19, and the ferrule 11 is inserted into the through hole. The ferrule fixing member 19 on which the ferrule 11 is installed is arranged on the end surface of the pipe 9.

A groove 24 is provided in advance on the end surface of the pipe 9, and an alloy member 15 of Au and Sn is inserted and placed in the groove 24. In this state, the optical fiber 12 and the semiconductor light emitting device 1 are optically coupled, and the ferrule 11 and the ferrule fixing member 19 are horizontally oriented with respect to the optical axis of the laser light so that the coupling efficiency is maximized. Alternatively, align vertically.

After the alignment is completed, first, the ferrule 11 is temporarily fixed in the through hole of the ferrule fixing member 19 with resin,
Next, using a high frequency induction heating device, the ferrule fixing member 1
9 is fixed to the pipe 9 with an alloy member 15 of Au and Sn. Then, the ferrule 11 is attached to the ferrule fixing member 19
Of low melting point by using a high frequency induction heating device in the through hole of
It is fixed by an alloy member 18 of n and Sn.

The fixing of the ferrule 11 is not limited to the alloy member of In and Sn, but may be a member having a low melting point such as an alloy member of In, Pb and Sn or an alloy member of In, Pb and Ag.

According to this structure, the ferrule 11 to which the optical fiber 12 is fixed can be aligned in the horizontal direction with respect to the optical axis of the laser beam, even if the length of the pipe 9 is constant. The optical fiber tip 16 can be easily installed at the light collecting position. Further, a Kovar material is used as the material of the ferrule fixing member 19 and the pipe 9, so that the thermal strain applied to the alloy member 15 is reduced. Further, the ferrule fixing member 19 and the pipe 9 are connected to each other by an alloy member 15 of Au and Sn.
The same effect as that of the embodiment shown in FIG. 1 can be obtained by joining and fixing with.

Therefore, the optical fiber 12 can be fixed easily and surely and firmly, and the inside of the pipe 9 can be kept airtight and the optical coupling between the semiconductor light emitting device 1 and the optical fiber 12 can be stably maintained for a long period of time. You can

Further, in the present embodiment, the alloy member 15 of Au and Sn is melted by using the high frequency induction heating device to join and fix the ferrule 11 and the pipe 9, but only the method using the alloy member 15 is used. Instead of this, for example, a method in which YAG laser welding is used in combination may be used.

That is, first, the ferrule 11 with the metal ring 10 is installed on the end face of the pipe 9, and the ferrule 11 is positioned at a position where the optical coupling efficiency between the semiconductor light emitting device 1 and the optical fiber 12 is maximized. After the alignment is completed, the contact boundary between the metal ring 10 and the pipe 9 is irradiated with a YAG laser, and the ferrule 11 and the pipe 9 are welded and fixed at four peripheral points. Next, Au around the contact portion between the ferrule 11 and the pipe 9.
And the Sn alloy member 15 are installed, and in this state, the alloy member 15 is melted by the high frequency induction heating device and the ferrule 11
And the pipe 9 are joined and fixed.

According to this, first, the ferrule 11 and the pipe 9 are fixed by YAG laser welding without displacement, and then the alloy member 15 is melted by the high frequency induction heating device and the pipe 9 is melted.
The inside is airtight.

As a result, the ferrule 11 and the pipe 9 can be fixed more firmly than the alloy member 15 alone, and the airtightness can be easily secured. Therefore, the same effect as that of the embodiment shown in FIG. 1 can be obtained by the fixing method using both the YAG laser and the high frequency induction heating device. Further, the YAG laser welding points are not limited to the four surrounding points, and may be six points or eight points.

Next, another embodiment of the present invention will be described with reference to FIGS.
Will be described.

FIG. 6 is an enlarged view showing a portion where a ferrule and a pipe are joined and fixed by a ring-shaped alloy member made of Au and Sn. The figure shows Au and Sn in a groove provided on an end face of a metal ring. A ring-shaped alloy member made of Sn is temporarily fixed by welding.

In FIG. 6, the metal ring 10 is joined to the end surface of the ferrule 11 by resistance welding 14. A groove 24 is provided in advance on the end surface of the metal ring 10, and the alloy member 15 of Au and Sn is temporarily fixed in the groove 24.

The alloy member 15 is fixed in the groove 24 by welding 27. This makes the ferrule 1 with the metal ring 10
1, the alloy member 15 of Au and Sn is temporarily fixed.

Next, the ferrule 11 with the metal ring 10 to which the alloy member 15 of Au and Sn is fixed is arranged on the end face of the pipe 9 to maximize the optical coupling efficiency between the semiconductor light emitting device 1 and the optical fiber 12. Align the ferrule 11 so that

After the alignment is completed, the alloy member 15 of Au and Sn fixed to the metal ring 10 is melted by using the high frequency induction heating device, and the ferrule 11 and the pipe 9 are bonded and fixed.

According to this, since the alloy member 15 of Au and Sn is temporarily fixed in the groove 24 of the metal ring 10 by welding 27, the alloy member 15 of Au and Sn does not come out from the groove 24, and the assembling work is performed. Will be easier.

By installing the alloy member 15 by the welding 27 shown in this embodiment, the process from the installation of the alloy member 15 to the positioning and fixing of the ferrule 11 can be automated and the assembly work time can be shortened. Can be planned.

Further, the ferrule 11 and the pipe 9 are connected to Au and S.
The same effect as that of the embodiment shown in FIG. 1 can be obtained by joining and fixing with the n alloy member 15.

FIG. 7 shows a ring-shaped alloy member made of Au and Sn, and has a shape in which a part of this alloy member is cut.

As shown in FIG. 7, the alloy member 15 has a spring effect by inserting the split 26 into a part of the ring-shaped alloy member 15 made of Au and Sn. When this is inserted into the groove 24, the alloy member 15 is held and fixed in the groove 24 by the spring effect and does not fall off. By thus inserting the split 26 in the alloy member 15, the same effect as in FIG. 6 can be obtained.

FIG. 8 is an enlarged view showing a portion where the ferrule and the pipe are joined and fixed by an alloy member made of Au and Sn. In the figure, a taper-like groove is formed on the end face of the ferrule fixing member. It is provided by joining and fixing the ferrule fixing member and the pipe with a wire-shaped alloy member made of Au and Sn.

In FIG. 8, a taper groove 25 having an angle of 45 ° is provided on the end surface of the ferrule fixing member 19. The ferrule fixing member 19 with the taper groove 25 is installed on the end face of the pipe 9 so as to maximize the optical coupling efficiency between the semiconductor light emitting device 1 and the optical fiber 12.
The fixing member 19 is aligned.

After the alignment, Au and Sn are covered so as to cover the taper groove 25 provided on the end face of the ferrule fixing member 19.
The wire-shaped alloy member 15 made of is wound and installed. In this state, the alloy member 1 is used by using the high frequency induction heating device.
5 is melted and the felt fixing member 19 and the pipe 9 are joined and fixed.

According to this, the taper groove 25 is provided on the end surface of the ferrule fixing member 19, and the molten alloy member 15 of Au and Sn is filled in this portion. Therefore, the amount of the alloy member 15 to be filled can be reduced as compared with the rectangular groove 24, and even if the amount is small, the entire circumference can be uniformly filled, so that the joining and fixing can be reliably performed.

By thus forming the taper shape 25 into the groove filled with the alloy member 15, the cost can be reduced. Further, even in the shape of the taper-shaped groove 25, the same effect as that of the embodiment shown in FIG. 5 can be obtained.

FIG. 9 is an enlarged view showing a portion where a ferrule and a pipe are joined and fixed by an alloy member made of Au and Sn. In the figure, a groove is formed on the end face of the ferrule fixing member, and Au is provided there. And a foil-shaped alloy member made of Sn and Sn is installed.

In FIG. 9, a groove 24 is provided on the end surface of the ferrule fixing member 19. Feru fixing member 19
Is installed on the end face of the pipe 9 so that the optical coupling efficiency between the semiconductor light emitting device 1 and the optical fiber 12 is maximized.
1 and the ferrule fixing member 19 are aligned. After alignment, the groove 2 provided on the end face of the ferrule fixing member 19
The foil-shaped alloy member 15 made of Au and Sn is wound around the inside of the unit 4. In this state, the alloy member 15 is melted by using a high frequency induction heating device to join and fix the ferrule fixing member 19 and the pipe 9.

The number of times the foil-shaped alloy member 15 is wound is not limited to once, but may be twice or three times. According to this, the amount of the alloy member 15 can be reduced, and moreover, the ferrule fixing member 19 can be used.
Since the pipe 9 and the pipe 9 can be reliably joined and fixed, the same effect as that of the embodiment shown in FIGS. 5 and 8 can be obtained.

FIG. 10 shows that the ferrule and the pipe are Au and Sn.
FIG. 3 is an enlarged view showing a portion to be joined and fixed with an alloy member made of, which shows a groove provided inside the end face of the pipe.

In FIG. 10, the metal ring 10 is fixed to the end surface of the ferrule 11 by resistance welding 14. A groove 24 into which the ring-shaped alloy member 15 made of Au and Sn is inserted is provided inside the end surface of the pipe 9, and the alloy member 15 is installed in this groove 24.

A ferrule 11 with a metal ring 10 is arranged on the end surface of the pipe 9 on which the alloy member 15 is installed, and the semiconductor light emitting device 1 and the optical fiber 12 are aligned so as to maximize the optical coupling efficiency. . After the alignment, the alloy member 15 is melted by using a high frequency induction heating device to melt the ferrule 1.
1 and the pipe 9 are joined and fixed.

According to this, since the groove 24 for inserting the ring-shaped alloy member 15 made of Au and Sn is provided inside the end surface of the pipe 9, a gas for preventing the alloy member 15 from oxidizing is injected into the pipe 9. This makes it possible to bond and fix the ferrule 11 and the pipe 9 without oxidizing the alloy member 15 of Au and Sn without making the outside air into the atmosphere of the antioxidant gas.

After melting and fixing the alloy member 15 by joining, the YAG is formed on the contact boundary between the ferrule 11 and the pipe 9.
Both can be more firmly fixed by irradiating and fixing the laser. Furthermore, since the inside of the pipe 9 can be kept airtight, the same effect as that of the embodiment shown in FIG. 1 can be obtained.

Next, another embodiment of the present invention will be described with reference to FIGS.
2 will be described.

The embodiment shown in FIGS. 11 and 12 has the same structure and assembling method as the embodiment shown in FIG.

FIG. 11 shows a ferrule and a pipe with Au and Sn.
FIG. 3 is an enlarged view showing a portion to be joined and fixed by a ring-shaped alloy member made of, which shows a metal ring fixed to the end face of the ferule by press fitting.

In FIG. 11, a step portion for installing the metal ring 10 is provided in advance on the end surface of the ferrule 11, and the metal ring 10 is inserted into this step portion by press fitting 28. The metal ring 10 installed by the press fit 28 is tightly fixed in the step portion. By fixing the metal ring 10 to the ferrule 11 using the press-fitting method 28 as described above, the ferrule 11 and the metal ring 10 can be integrated.

Further, FIG. 12 shows that the felt and the pipe are Au.
FIG. 3 is an enlarged view showing a portion to be joined and fixed by a ring-shaped alloy member made of Sn and Sn, in which the metal ring is fixed to the end face of the ferrule by caulking.

In FIG. 12, a metal ring 10 having a center hole suitable for penetrating an optical fiber holding portion protruding from the end surface of the ferrule 11 is installed on the end surface of the ferrule 11.

In this state, the metal ring 10 installed on the end face of the ferrule 11 is externally pressed and deformed by a die to make the ferrule.
Closely fix it to the end face of RU 11. By fixing the metal ring 10 to the ferrule 11 by using the caulking method 29 as described above, the ferrule 11 and the metal ring 10 can be integrated.

As in these structures, the metal ring 10 is fixed to the end surface of the ferrule 11 by the press fitting method 28 and the caulking method 29, and the ferrule 11 with the metal ring 10 and the pipe 9 are made of an alloy member of Au and Sn. By joining and fixing at 15, the same effect as that of the embodiment shown in FIG. 2 can be obtained.

Therefore, the optical fiber 12 can be fixed easily and surely and firmly, and the inside of the pipe 9 can be kept airtight and the optical coupling between the semiconductor light emitting device 1 and the optical fiber 12 can be stably maintained for a long period of time. You can

Although the embodiment shown in the present invention is applied to the coaxial type semiconductor optical coupler with the pin protruding, in which the semiconductor light emitting device 1 and the optical fiber 12 are housed in a cylindrical container, The present invention is not limited to this, and it is also applicable to a semiconductor optical coupler having an optical fiber fixing portion such as a Butter-fly type in which a pin is laid out in a rectangular container or a Dual In Line type in which a pin 7 is exposed. .

Further, the ring-shaped alloy member 15 of Au and Sn is used.
Although the groove 24 for inserting and installing is provided on the end surface of the pipe 9, a similar groove 24 portion is formed on the end surface of the metal ring 10 fixed to the ferrule 11 by resistance welding 14 or on the end surface of the ferrule fixing member 19. May be provided.

Further, a mixed member of Au and Sn is used as the alloy member 15 for joining and fixing the ferrule 11 and the pipe 9, but it is not limited to this and, for example, Au and G are used.
You may use the mixing member of e, Sn, and Sb.

[0092]

According to the present invention, the ferrule and the pipe are joined and fixed by the alloy member of Au and Sn using the high frequency induction heating device.

According to this, the ferrule and the pipe can be easily and surely fixed by using the high frequency induction heating device, and the inside of the pipe can be kept airtight. As a result, there is no deterioration of the semiconductor light emitting element or deterioration of optical coupling due to the influence of moisture adhering to the lens surface.

Further, for joining and fixing the ferrule and the pipe, an alloy member such as Au and Sn having a high melting point, a high strength and an excellent corrosion resistance is used, and the thermal strain applied to the alloy member is further reduced. Therefore, there is no deterioration over time due to long-term use, and there is no displacement.

Further, by using the high frequency induction heating device, the ferrule and the pipe can be fixed in a short time in a single process, and the inside of the pipe can be completely hermetically sealed, so that the assembling work time is shortened and the cost is reduced. Can be achieved.

Therefore, according to the semiconductor optical coupler and the method for assembling the same of the present invention, a fiber containing an optical fiber is used.
The pipe and the pipe can be fixed easily and securely and firmly, and the airtight state inside the pipe is secured to obtain high reliability for long-term use without deteriorating the optical coupling between the semiconductor light emitting element and the optical fiber. be able to.

[Brief description of drawings]

FIG. 1 is a structural vertical sectional view of a semiconductor optical coupler according to an embodiment of the present invention.

FIG. 2 is a structural vertical sectional view showing an optical fiber fixing portion of the semiconductor optical coupler of the present invention.

FIG. 3 is an enlarged vertical cross-sectional view showing a fixing portion of a ferrule and a pipe.

FIG. 4 is an external perspective view showing a positional relationship between a semiconductor optical coupler and a high frequency induction heating coil.

FIG. 5 is a structural vertical cross-sectional view of an optical fiber fixing portion of a semiconductor optical coupler showing another embodiment of the present invention.

FIG. 6 is an enlarged vertical cross-sectional view of a ferrule and a pipe fixing portion in which an alloy member is installed in a metal ring groove by welding.

FIG. 7 is an external perspective view showing a shape in which a ring-shaped alloy member made of Au and Sn is split.

FIG. 8 is an enlarged vertical cross-sectional view of a fer and a pipe fixing portion in which an alloy member is installed in a taper groove.

FIG. 9 is an enlarged vertical cross-sectional view of a ferrule having an alloy member installed in a groove and a pipe fixing portion.

FIG. 10 is a vertical cross section of a fer and a pipe fixing portion in which an alloy member is installed in a pipe groove.

FIG. 11 is a structure of an optical fiber fixing part in which a metal ring is press-fitted and fixed to an end face of a ferrule.

FIG. 12 shows a structure of an optical fiber fixing part in which a metal ring is caulked and fixed to an end surface of a ferrule.

FIG. 13 is a structural vertical sectional view showing an optical fiber fixing portion of a conventional semiconductor optical coupler.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Semiconductor light emitting element, 2 ... Light receiving element, 3 ... Aspherical mold lens, 4 ... Holder-, 5 ... Heat sink, 6 ... Stem, 7 ... Pin, 8 ... Resistance welding, 9 ... Pipe, 10 ... Metal Ring, 11 ... Ferrule, 12 ... Optical fiber, 13 ...
Resin, 14 ... Resistance welding, 15 ... Ring alloy member of Au and Sn, 16 ... Optical fiber tip, 17 ... High frequency induction heating coil, 18 ... Low melting point solder, 19 ... Feru fixing member, 20 ... Base material, 21 ... Lens, 22 ... Semiconductor laser,
23 ... YAG laser welding, 24 ... groove, 25 ... taper groove,
26 ... Splitting, 27 ... Welding, 28 ... Press-fitting fixing, 29 ... Caulking fixing.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tetsuo Kumazawa 502 Jinritsu-cho, Tsuchiura-shi, Ibaraki Machinery Research Institute Ltd. (72) Inventor Yasushi Yagyu 502 Jinre-machi, Tsuchiura-shi, Ibaraki Nitate Manufacturing Co., Ltd. Mechanical Research Laboratory (72) Inventor Yasuhisa Senba 190 Kashiwagi, Komoro-shi, Nagano Inside the Komoro Plant, Eastern Hitachi Semiconductor Co., Ltd.

Claims (14)

[Claims] 1. A stem, a semiconductor light emitting device mounted in the center of the stem, a lens supported and fixed by a holder at a position facing the semiconductor light emitting device, and an optical fiber supported and fixed by a ferrule. In a semiconductor optical coupler which has a pipe connecting the stem and the ferrule, and optically couples the semiconductor light emitting element and the optical fiber via the lens, a ring-shaped member identical to the pipe is previously formed. Fixed on the ferrule side,
Next, a semiconductor optical coupler characterized in that the pipe and the ferrule are joined and fixed via the ring-shaped member. 2. The semiconductor optical coupler according to claim 1, wherein welding, caulking and press fitting are used to join the ferrule and the ring-shaped member. 3. The pipe according to claim 1, wherein the pipe and the ferrule to be joined via the ring-shaped member are Au and S.
A semiconductor optical coupler characterized by being joined and fixed by an alloy member made of n. 4. The semiconductor optical coupler according to claim 3, wherein the alloy member made of Au and Sn has a ring shape, a wire shape, a ribbon shape, or a foil shape. 5. The semiconductor optical coupler according to claim 1, wherein the lens for optically coupling the semiconductor light emitting element and the optical fiber is a gradient index front spherical rod lens or an aspherical lens. . 6. The semiconductor optical coupler according to claim 1, wherein a groove or a taper into which an alloy member made of Au and Sn can be inserted is provided on an end surface of the pipe or an end surface of the ring-shaped member. 7. The alloy member comprising Au and Sn is temporarily fixed by welding in a groove or a taper provided on the end surface of the pipe or the end surface of the ring-shaped member according to claim 6, A semiconductor optical coupler, wherein the alloy member made of Au and Sn is melted and fixed after the pipe and the ring-shaped member are aligned with each other. 8. A semiconductor optical coupler according to claim 1, wherein the ring-shaped member is made of Fe-based metal such as kovar, Fe-42Ni, and SuS430, or ceramics. 9. A stem, a semiconductor light emitting element mounted in the center of the stem, a lens supported and fixed by a holder at a position facing the semiconductor light emitting element, and an optical fiber supported and fixed by a ferrule. It has a ferrule fixing member supporting and fixing the ferrule and a pipe connecting the stem and the ferrule fixing member, and optically couples the semiconductor light emitting device and the optical fiber through the lens. In the semiconductor optical coupler, the method for assembling the semiconductor optical coupler is characterized in that the pipe and the ferrule are joined and fixed by an alloy member made of Au and Sn via the ferrule fixing member. 10. A semiconductor optical coupling according to claim 9, wherein a groove or a taper into which the alloy member made of Au and Sn can be inserted is provided on the end face of the ferrule fixing member or the end face of the pipe. Assembly method. 11. The alloy member comprising Au and Sn is temporarily fixed by welding in a groove or a taper provided on an end surface of the ferrule fixing member or an end surface of the pipe, Next, after assembling the ferrule fixing member and the pipe, the alloy member made of Au and Sn is melted and fixed, and the method for assembling a semiconductor optical coupler. 12. The method of assembling a semiconductor optical coupler according to claim 9, wherein the ferrule fixing member is made of the same metal material as the pipe. 13. The method for assembling a semiconductor optical coupler according to claim 7, wherein the alloy member made of Au and Sn has a ring shape, a wire shape, a ribbon shape, or a foil shape. 14. A semiconductor optical coupler according to claim 7, wherein the lens for optically coupling the semiconductor light emitting element and the optical fiber is a gradient index front spherical rod lens or an aspherical lens. Assembly method.