JPH07151943A - Optical integrated circuit package and its assembly method - Google Patents

Optical integrated circuit package and its assembly method

Info

Publication number
JPH07151943A
JPH07151943A JP5299582A JP29958293A JPH07151943A JP H07151943 A JPH07151943 A JP H07151943A JP 5299582 A JP5299582 A JP 5299582A JP 29958293 A JP29958293 A JP 29958293A JP H07151943 A JPH07151943 A JP H07151943A
Authority
JP
Japan
Prior art keywords
optical
integrated circuit
optical fiber
optical integrated
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5299582A
Other languages
Japanese (ja)
Inventor
Kazuyuki Fukuda
和之 福田
Makoto Shimaoka
誠 嶋岡
Yasutoshi Yagyu
泰利 柳生
Tetsuo Kumazawa
鉄雄 熊澤
Toshiya Yuhara
敏哉 油原
Tatsuya Kumagai
達也 熊谷
Toshio Iizuka
寿夫 飯塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP5299582A priority Critical patent/JPH07151943A/en
Publication of JPH07151943A publication Critical patent/JPH07151943A/en
Pending legal-status Critical Current

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  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
  • Light Receiving Elements (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

PURPOSE:To provide an optical integrated circuit package which is an optical integrated circuit constituted to optically couple a semiconductor light emitting element and optical fibers via an optical integrated circuit substrate, stably and easily executes the optical coupling and does not generate a change in the output light of the optical fibers even in long-term use and an assembly method therefor. CONSTITUTION:The optical integrated circuit substrate 1 is fixed at the center in the package 3 previously provided with through-holes 4 at side walls in order to stably and easily optically couple an LD 10 and the optical fiber 2b via an optical waveguide. A stem 13 mounted with the LD 10 and a spherical lens 11 for coupling and a ferrule supporting member 15 holding and fixing two pieces of the optical fibers 2b for emission are installed into the through-holes 4 on the side walls of the package 3. The stem 13 and the ferrule supporting member 15 are positionally adjusted and fixed in such a manner that the optical axes of the LD 10 and the optical fibers 2b are aligned via the optical waveguide. As a result, the optical coupling of the LD 10 and the optical fibers 2b is stably and easily executed. Mispositioning does not arise and always the stable output light is obtd. in spite of the long-term use.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光集積回路と半導体発
光素子及び光ファイバとの光結合方法に係り、特に光結
合を安定かつ容易に行い、しかも光結合部を気密封止す
る光集積回路パッケージ及びその組立て方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical coupling method for an optical integrated circuit, a semiconductor light emitting device and an optical fiber, and more particularly to an optical integrated circuit for stably and easily performing optical coupling and hermetically sealing the optical coupling portion. The present invention relates to a circuit package and a method of assembling the same.

【0002】[0002]

【従来の技術】光集積回路基板と半導体発光素子を接続
する方法として、特開昭62-17712号に記載されているよ
うに、図9の接続構造がある。この方法は、まず光集積
回路基板1の端部にレンズ28を設置するための溝29
をエッチングで形成し、光導波路18に対してレンズ2
8を最適位置に設置する。次に、レンズ28を設置した
光導波路18に対して半導体発光素子10を光結合すべ
く位置調整する。
2. Description of the Related Art As a method for connecting an optical integrated circuit substrate and a semiconductor light emitting element, there is a connection structure shown in FIG. 9 as described in JP-A-62-17712. In this method, first, a groove 29 for installing a lens 28 at the end of the optical integrated circuit board 1 is formed.
To form a lens 2 for the optical waveguide 18 by etching.
Install 8 in the optimum position. Next, the position of the semiconductor light emitting device 10 is adjusted so as to be optically coupled to the optical waveguide 18 on which the lens 28 is installed.

【0003】また、光集積回路基板と光ファイバとを接
続する方法としては、特公平4- 69923号に記載されてい
るように、図10の接続方法がある。この方法は、まず
二枚の光集積回路基板1を互いに接着剤で貼り合わせ、
回路基板1の両端面に入射用の光ファイバ2aと出射用
の光ファイバ2bとが嵌合されるように円筒状溝23を
ドリルで形成する。次に、貼り合わせた二枚の光集積回
路基板1を分離し、先に設けた円筒状溝23の位置に合
わせて光導波路18を形成する。その後、円筒状溝23
部内に光ファイバ2a、2bを接着剤24で固定し、光
導波路18と光結合する。
As a method for connecting the optical integrated circuit board and the optical fiber, there is a connecting method shown in FIG. 10 as described in Japanese Patent Publication No. 4-69923. In this method, first, two optical integrated circuit boards 1 are bonded to each other with an adhesive,
A cylindrical groove 23 is formed by a drill so that the optical fiber 2a for incidence and the optical fiber 2b for emission are fitted to both end surfaces of the circuit board 1. Next, the two laminated optical integrated circuit boards 1 are separated, and the optical waveguide 18 is formed at the position of the cylindrical groove 23 previously provided. Then, the cylindrical groove 23
The optical fibers 2a and 2b are fixed in the inside with an adhesive 24 and optically coupled with the optical waveguide 18.

【0004】[0004]

【発明が解決しようとする課題】上記従来方法によれ
ば、図9に示されている溝29は、フォトリソグラフに
より形成され、光集積回路基板1と光導波路18の面方
向での光軸は精度良く一致するが、光導波路18の厚さ
方向では高さが必ずしも一致しない。また、図10に示
す構造では、溝23に光ファイバ2a、2bを固定する
とき、光集積回路基板1との光結合調整を行うことがで
きず結合効率が低くなる。さらに、これらの構造では、
光集積回路基板1に溝29、23を設けるための加工プ
ロセスが増えることになり量産性の点で問題がある。ま
た、光集積回路基板1に接合するレンズ28あるいは光
ファイバ2a、2bは、下側のみの固定となるため、接
合部材として接着剤24を使用した場合、接着剤24の
硬化収縮あるいは径年劣化により、レンズ28及び光フ
ァイバ2a、2bが溝29、23内から浮き上がり光結
合の劣化を引き起こす原因となる。
According to the above conventional method, the groove 29 shown in FIG. 9 is formed by photolithography, and the optical axes of the optical integrated circuit substrate 1 and the optical waveguide 18 in the plane direction are The heights of the optical waveguides 18 do not necessarily coincide with each other in the thickness direction of the optical waveguides 18, although they coincide with each other with high accuracy. Further, in the structure shown in FIG. 10, when the optical fibers 2a and 2b are fixed in the groove 23, the optical coupling with the optical integrated circuit board 1 cannot be adjusted, and the coupling efficiency becomes low. Furthermore, in these structures,
This increases the number of processing processes for forming the grooves 29 and 23 in the optical integrated circuit board 1, which is problematic in terms of mass productivity. Further, the lens 28 or the optical fibers 2a and 2b bonded to the optical integrated circuit board 1 is fixed only on the lower side. Therefore, when the adhesive 24 is used as the bonding member, the adhesive 24 cures and shrinks or deteriorates with age. As a result, the lens 28 and the optical fibers 2a and 2b are lifted from the inside of the grooves 29 and 23 and cause deterioration of optical coupling.

【0005】本発明の目的は、光集積回路と半導体発光
素子及び光ファイバとの光結合を安定かつ容易に行い、
しかも光結合部を気密封止する光集積回路パッケージ及
びその組立て方法を提供することにある。
An object of the present invention is to stably and easily perform optical coupling between an optical integrated circuit, a semiconductor light emitting element and an optical fiber.
Moreover, it is an object of the present invention to provide an optical integrated circuit package that hermetically seals an optical coupling portion and an assembling method thereof.

【0006】[0006]

【課題を解決するための手段】上記目的は、光集積回路
基板にレンズ固定用あるいはファイバ固定用溝を加工せ
ず、半導体発光素子と光ファイバとの光結合を行うため
に、あらかじめケース内に固定した光集積回路基板の光
入射端及び光出射端に、結合用レンズ付き半導体発光素
子光源と二本の光ファイバを支持した出射用光ファイバ
支持部材とを位置調整し、角型ケース側壁に設けた貫通
孔部に固定することにより達成される。また、入射用及
び出射用の光ファイバ支持部材を角型ケース側壁に設け
た貫通孔部に固定することによっても達成される。
SUMMARY OF THE INVENTION The above object is to provide a semiconductor light emitting element and an optical fiber in advance in a case in order to optically couple a semiconductor light emitting element and an optical fiber without processing a lens fixing or fiber fixing groove in an optical integrated circuit board. At the light incident end and the light emitting end of the fixed optical integrated circuit board, the position of the semiconductor light emitting element light source with a coupling lens and the emitting optical fiber supporting member supporting two optical fibers are adjusted, and the side wall of the rectangular case is adjusted. This is achieved by fixing the through hole provided. It can also be achieved by fixing the input and output optical fiber support members to the through holes provided in the side wall of the rectangular case.

【0007】[0007]

【作用】結合用レンズと半導体発光素子を搭載したステ
ムと、二本の出射用光ファイバを保持固定した光ファイ
バ支持部材は、ケース側壁に設けた貫通孔部にそれぞれ
設置する。結合用レンズ付き半導体発光素子光源及び出
射用光ファイバは、あらかじめケース内に固定した光集
積回路基板の光入射部及び光出射部と位置調整を行う。
光集積回路基板を介して半導体発光素子と光ファイバと
の光結合効率が最大になった位置で、ステム及び光ファ
イバ支持部材をケース側壁の貫通孔部にAu-Sn はんだな
どの接合部材あるいはYAGレーザで溶接固定する。
The stem on which the coupling lens and the semiconductor light emitting element are mounted, and the optical fiber support member holding and fixing the two outgoing optical fibers are respectively installed in the through holes provided on the side wall of the case. The position of the semiconductor light-emitting device light source with the coupling lens and the emission optical fiber is adjusted with respect to the light incident portion and the light emission portion of the optical integrated circuit substrate fixed in advance in the case.
At the position where the optical coupling efficiency between the semiconductor light emitting device and the optical fiber is maximized through the optical integrated circuit board, the stem and the optical fiber supporting member are connected to the through hole of the side wall of the case with a joining member such as Au-Sn solder or YAG. Weld and fix with laser.

【0008】この構造によれば、光集積回路基板を加工
せずに光結合でき、光集積回路基板と光結合した半導体
発光素子及び光ファイバを、ステム及び光ファイバ支持
部材を介してケース側壁に確実に固定できるため位置ず
れを起こすことはない。また、半導体発光素子からの光
を結合用レンズを介して光集積回路基板に入射している
ため、光結合を高効率で、しかも容易に行うことができ
る。さらに、光集積回路基板をケース内に収納できるた
め、光結合部を気密封止でき長期の信頼性に対して安定
した光結合が得られる。
According to this structure, the optical integrated circuit board can be optically coupled without processing, and the semiconductor light emitting device and the optical fiber optically coupled to the optical integrated circuit board are provided on the side wall of the case via the stem and the optical fiber supporting member. Since it can be securely fixed, there is no displacement. Further, since the light from the semiconductor light emitting element is incident on the optical integrated circuit substrate via the coupling lens, the optical coupling can be performed with high efficiency and easily. Further, since the optical integrated circuit board can be housed in the case, the optical coupling part can be hermetically sealed, and stable optical coupling can be obtained for long-term reliability.

【0009】[0009]

【実施例】以下、本発明の実施例を図1から図8により
説明する。
Embodiments of the present invention will be described below with reference to FIGS.

【0010】以下に示す実施例では、半導体発光素子と
してレーザダイオード(以下LDと呼ぶ)を、光ファイ
バとして偏波面保存型光ファイバ(以下光ファイバと呼
ぶ)を、光集積回路基板としてLiNbO3材を用いている。
In the embodiments described below, a laser diode (hereinafter referred to as LD) is used as a semiconductor light emitting element, a polarization-maintaining optical fiber (hereinafter referred to as optical fiber) is used as an optical fiber, and a LiNbO 3 material is used as an optical integrated circuit substrate. Is used.

【0011】図1及び図2において、LD10はステム
13上の所定位置に搭載する。結合用球レンズ11を取
り付けたレンズキャップ12はLD10との光軸を一致
させるように位置調整し、ステム13上面に固定する。
出射用の光ファイバ2bは円柱状のフェルール16内に
二本設置し、このフェルール16をフェルール支持部材
15で保持固定する。あらかじめパッケージ3の両側壁
には、パッケージ3内に収納する光集積回路基板1の光
軸に中心を一致させた貫通孔4を設けている。光集積回
路基板1の上面にはY字型の光導波路18を形成してお
り、この光集積回路基板1をパッケージ3低部に設けた
台座9上の所定位置に固定する。光集積回路基板1をパ
ッケージ3内に固定した後、パッケージ3側壁の貫通孔
4部にステム13とフェルール支持部材15を設置す
る。光集積回路基板1の光導波路18を介して、LD1
0と光ファイバ2bとが光結合するように、ステム13
及びフェルール支持部材15を貫通孔4部でXY方向に
位置調整する。LD10と光ファイバ2bとの光結合効
率が最大になる位置で、ステム13とフェルール支持部
材15をパッケージ3側壁にAu-Sn はんだなどの接合部
材7あるいはYAG溶接で全周を溶接固定する。
In FIGS. 1 and 2, the LD 10 is mounted on the stem 13 at a predetermined position. The lens cap 12 to which the coupling spherical lens 11 is attached is adjusted in position so that the optical axis of the LD 10 and the optical axis of the LD 10 coincide with each other, and is fixed to the upper surface of the stem 13.
Two optical fibers 2b for emission are installed in a cylindrical ferrule 16, and the ferrule 16 is held and fixed by a ferrule support member 15. In advance, through holes 4 are provided on both side walls of the package 3 so that their centers coincide with the optical axis of the optical integrated circuit board 1 housed in the package 3. A Y-shaped optical waveguide 18 is formed on the upper surface of the optical integrated circuit board 1, and the optical integrated circuit board 1 is fixed at a predetermined position on a pedestal 9 provided in the lower portion of the package 3. After fixing the optical integrated circuit board 1 in the package 3, the stem 13 and the ferrule support member 15 are installed in the through hole 4 portion of the side wall of the package 3. LD1 via the optical waveguide 18 of the optical integrated circuit board 1
0 and the optical fiber 2b are optically coupled so that the stem 13
And the ferrule support member 15 is positionally adjusted in the XY directions at the through-hole 4 part. At the position where the optical coupling efficiency between the LD 10 and the optical fiber 2b is maximized, the stem 13 and the ferrule support member 15 are welded and fixed to the side wall of the package 3 by a joining member 7 such as Au-Sn solder or YAG welding.

【0012】図3は光集積回路基板1に形成した光導波
路18とフェルール16内に配列した二本の光ファイバ
2bとの光結合構造の実施例を示す。光集積回路基板1
の上面にはY字型の光導波路18を形成する。このY字
型に二分岐した光導波路18の間隔は0.65mmである。フ
ェルール16内に配列した二本の光ファイバ2bは二分
岐した光導波路18間と等しい間隔で、光ファイバ2b
の偏波方向を一致させて固定する。ここでは、光ファイ
バ2bの外径は90μm で、フェルール16には92μm の
貫通孔を形成し、この孔内に光ファイバ2bを挿入し固
定する。
FIG. 3 shows an embodiment of the optical coupling structure of the optical waveguide 18 formed on the optical integrated circuit substrate 1 and the two optical fibers 2b arranged in the ferrule 16. Optical integrated circuit board 1
A Y-shaped optical waveguide 18 is formed on the upper surface of the. The Y-shaped bifurcated optical waveguide 18 has an interval of 0.65 mm. The two optical fibers 2b arranged in the ferrule 16 are arranged at the same intervals as those of the two optical waveguides 18 which are branched.
The polarization directions of are aligned and fixed. Here, the outer diameter of the optical fiber 2b is 90 μm, a through hole of 92 μm is formed in the ferrule 16, and the optical fiber 2b is inserted and fixed in this hole.

【0013】光集積回路パッケージの組立ては、まずパ
ッケージ3内底部に設けた台座9上に光集積回路基板1
を固定する。パッケージ3の両側壁には、光集積回路基
板1を収納する前に、あらかじめ光集積回路基板1上面
に形成した光導波路18の光軸に対して、中心を一致さ
せた貫通孔4を設けておき、この貫通孔4部にLD10
を搭載したステム13と、出射用光ファイバ2bを保持
したフェルール支持部材15を設置する。LD10と出
射用光ファイバ2b先端は、あらかじめ光導波路18の
光入射部26端と出射部27端に対して、所定の距離を
保つようにZ方向を調整する。LD10から発振したレ
ーザ光は結合用球レンズ11で集光する。集光したレー
ザ光を光導波路18の入射部26に効率良く入射するよ
うに、ステム13を貫通孔4部でXY方向に調節する。
光導波路18に入射したレーザ光はY字型光導波路18
出射部27から出射する。このレーザ光の出射部27に
は、フェル−ル支持部材15内に固定した二本の光ファ
イバ2b先端を設置し、光導波路18から出射したレー
ザ光を取り入れるようにフェルール支持部材15を貫通
孔4部でXY方向に調節する。LD10と光ファイバ2
bとの光結合効率が最大になる位置で、ステム13及び
フェルール支持部材15をパッケージ3側壁に接合部材
7あるいはYAG溶接で全周を溶接固定する。なお、ス
テム13及びフェルール支持部材15を接合する接合部
材7としては、Au-Sn 、Au-Ge あるいはPb-Sn を用い、
高周波誘導加熱による加熱手段で溶融し固定する。ま
た、ここでは半導体発光素子10と光導波路18の光結
合に結合用球レンズ11を用いているが、これに限られ
るものでなくロッドレンズあるいは非球面レンズを使用
しても良い。
To assemble the optical integrated circuit package, first, the optical integrated circuit board 1 is mounted on the pedestal 9 provided at the bottom of the package 3.
To fix. Before housing the optical integrated circuit board 1, the through holes 4 are formed on both side walls of the package 3 so that the centers of the optical waveguides 18 formed on the upper surface of the optical integrated circuit board 1 are aligned with each other. Every time, LD10
The stem 13 on which is mounted and the ferrule support member 15 holding the emitting optical fiber 2b are installed. The LD 10 and the tip of the emitting optical fiber 2b are adjusted in advance in the Z direction so as to maintain a predetermined distance from the end of the light incident portion 26 and the end of the emitting portion 27 of the optical waveguide 18. The laser light emitted from the LD 10 is condensed by the coupling spherical lens 11. The stem 13 is adjusted in the XY directions by the through holes 4 so that the condensed laser light is efficiently incident on the incident portion 26 of the optical waveguide 18.
The laser light incident on the optical waveguide 18 is the Y-shaped optical waveguide 18
The light is emitted from the emission unit 27. At the laser light emitting portion 27, the ends of the two optical fibers 2b fixed in the ferrule support member 15 are installed, and the ferrule support member 15 is penetrated through the ferrule support member 15 so as to take in the laser light emitted from the optical waveguide 18. Adjust in XY direction with 4 parts. LD10 and optical fiber 2
The stem 13 and the ferrule support member 15 are welded and fixed to the side wall of the package 3 by the joining member 7 or YAG welding at the position where the optical coupling efficiency with b is maximized. As the joining member 7 for joining the stem 13 and the ferrule support member 15, Au-Sn, Au-Ge or Pb-Sn is used,
It is melted and fixed by heating means by high frequency induction heating. Although the coupling spherical lens 11 is used for optical coupling between the semiconductor light emitting device 10 and the optical waveguide 18 here, the invention is not limited to this, and a rod lens or an aspherical lens may be used.

【0014】本発明では、光集積回路基板1に形成した
光導波路18を介して、LD10と光ファイバ2bとの
光結合を行うように、ステム13及びフェルール支持部
材15を調整固定する。この構造によれば、LD10と
光ファイバ2bをパッケージ3側壁に設置したステム1
3及びフェルール支持部材15を介して高強度の接合部
材7あるいはYAG溶接で強固に固定するため、位置ず
れを起こすことはなく光導波路18と安定した光結合を
維持できる。また、LD10と光ファイバ2bは光導波
路18に対してあらかじめZ方向を調整するため、フェ
ルール支持部材15をパッケージ3側壁のXY方向の調
整だけで容易に光結合を行うことができる。また、LD
10と光導波路18との光結合を結合用球レンズ11を
介して行っているため、光結合を高効率で、しかも容易
に行うことができる。さらに、ステム13及びフェルー
ル支持部材15をパッケージ3側壁に全周固定するた
め、光集積回路基板1及びLD10と光ファイバ2bと
の光結合部を、パッケージ3内に気密封止することがで
き安定した光結合を得ることができる。したがって、光
集積回路パッケージの光結合を安定かつ容易に行うこと
ができる。
In the present invention, the stem 13 and the ferrule support member 15 are adjusted and fixed so as to optically couple the LD 10 and the optical fiber 2b via the optical waveguide 18 formed on the optical integrated circuit board 1. According to this structure, the stem 1 in which the LD 10 and the optical fiber 2b are installed on the side wall of the package 3
3 and the ferrule support member 15 are used to firmly fix the member 7 with high-strength joining member 7 or YAG welding, so that a stable optical coupling with the optical waveguide 18 can be maintained without causing positional displacement. Further, since the LD 10 and the optical fiber 2b adjust the Z direction in advance with respect to the optical waveguide 18, the ferrule support member 15 can be easily optically coupled only by adjusting the side wall of the package 3 in the XY directions. Also, LD
Since the optical coupling between the optical waveguide 10 and the optical waveguide 18 is performed via the coupling spherical lens 11, the optical coupling can be performed with high efficiency and easily. Further, since the stem 13 and the ferrule support member 15 are fixed to the side wall of the package 3 all around, the optical coupling part between the optical integrated circuit board 1 and the LD 10 and the optical fiber 2b can be hermetically sealed in the package 3 and stable. The optical coupling can be obtained. Therefore, the optical coupling of the optical integrated circuit package can be stably and easily performed.

【0015】次に、本発明の他の実施例を図4から図8
により説明する。
Next, another embodiment of the present invention will be described with reference to FIGS.
Will be described.

【0016】図4に示す実施例は、光集積回路基板1上
面に形成した光導波路18とフェルール16内に配列し
た二本の光ファイバ2bとの光結合の構造を示す。光フ
ァイバ2bの固定は以下のように行う。まず、上下半分
に切断した半円筒状のフェルール16を二つ用意し、そ
れぞれのフェルール切断面21にV字型の溝20を二列
形成する。フェルール16のV字型溝20部には二本の
光ファイバ2bを、偏波方向を合わせて設置する。次
に、他方のフェルール16の切断面21と、既に光ファ
イバ2bを設置したフェルール切断面21とを貼り合わ
せ、V溝20部で光ファイバ2bを挟むように固定す
る。光ファイバ2bとV溝20部の隙間には接合部材2
2を充填する。V字型の溝20間隔は0.65mmで、Y字型
の光導波路18の間隔と等しく、エッチング加工あるい
は機械加工で形成する。
The embodiment shown in FIG. 4 shows a structure of optical coupling between the optical waveguide 18 formed on the upper surface of the optical integrated circuit substrate 1 and the two optical fibers 2b arranged in the ferrule 16. The optical fiber 2b is fixed as follows. First, two semi-cylindrical ferrules 16 cut into upper and lower halves are prepared, and two rows of V-shaped grooves 20 are formed on each ferrule cutting surface 21. Two optical fibers 2b are installed in the V-shaped groove 20 of the ferrule 16 with their polarization directions aligned. Next, the cut surface 21 of the other ferrule 16 and the ferrule cut surface 21 on which the optical fiber 2b has already been installed are bonded together, and fixed so that the optical fiber 2b is sandwiched between the V-shaped grooves 20. The joining member 2 is provided in the gap between the optical fiber 2b and the V groove 20.
Fill 2. The interval between the V-shaped grooves 20 is 0.65 mm, which is equal to the interval between the Y-shaped optical waveguides 18 and is formed by etching or machining.

【0017】図5に示す実施例は、二本の光ファイバ2
b素線を融着して配列した構造を示す。二本の光ファイ
バ2bを融着固定する方法は、まず二本の光ファイバ2
bを偏波方向を一致させて整列し、この光ファイバ2b
を加熱バーナで加熱溶融しながら左右に引っ張る。二本
の光ファイバ2bは加熱部分で互いに融着し合い、コア
19の間隔を狭める。融着した二本の光ファイバ2bの
コア19間隔が、Y字型光導波路18間と等しい距離に
なったところで加熱及び引っ張りを止める。この融着し
た二本の光ファイバ2bを、フェルール16内及び光フ
ァイバ保持部材5で支持固定することにより、図3及び
図4で示した実施例と同様の方法で光導波路18との光
結合を行うことができる。
In the embodiment shown in FIG. 5, two optical fibers 2 are used.
The structure which fused and arranged the b strand is shown. The method of fusion-fixing the two optical fibers 2b is as follows.
b are aligned so that the polarization directions are aligned, and the optical fiber 2b
While heating and melting with a heating burner, pull to the left and right. The two optical fibers 2b are fused to each other at the heating portion to narrow the interval between the cores 19. When the distance between the cores 19 of the two fused optical fibers 2b becomes equal to that between the Y-shaped optical waveguides 18, heating and pulling are stopped. By supporting and fixing the two fused optical fibers 2b in the ferrule 16 and the optical fiber holding member 5, optical coupling with the optical waveguide 18 is performed in the same manner as in the embodiment shown in FIGS. 3 and 4. It can be performed.

【0018】図6及び図7に示す実施例は、光集積回路
基板1を固定する台座9上に半導体発光素子10と結合
用球レンズ11とを搭載したステム13を設置し、光導
波路18との光結合を行った構造を示す。
In the embodiment shown in FIGS. 6 and 7, the stem 13 having the semiconductor light emitting element 10 and the coupling spherical lens 11 mounted thereon is installed on the pedestal 9 for fixing the optical integrated circuit substrate 1, and the optical waveguide 18 is provided. 2 shows a structure in which photocoupling is performed.

【0019】図6において、LD10と結合用球レンズ
11はステム13上の所定位置に設置する。光集積回路
基板1を固定する台座9には、あらかじめステム13を
配置するステム設置部25あるいは段差部を設けてお
き、この部分にステム13を固定する。このステム設置
部25の高さは、台座9上に固定する光集積回路基板1
の光導波路18の光軸と、ステム13に搭載したLD1
0との光軸が一致するように調節している。LD10と
光導波路18の光結合はLD10から発振したレーザ光
を結合用球レンズ11で集束し、このレーザ光を光導波
路18入射部26に効率良く集光する位置にステム13
を調整する。調整した後、ステム13を台座9上にAu-S
n はんだなどの接合部材で固定する。また、図7におい
ては光集積回路基板1を固定する台座9の端面にステム
13を固定し、ステム13を台座9端面でXY方向に調
節して光導波路18との光結合を行う構造であり、図6
に示した実施例と同様の組立てで行う。これらの構造に
よれば、光集積回路基板1とLD10を搭載したステム
13を同一台座9上に設置でき、しかも高強度の接合部
材で強固に固定できるため、位置ずれを起こすことはな
い。また、ステム13を台座9上に固定する構造である
ため、ステム13形状を小さくすることができ、パッケ
ージ3の小型化を図ることができる。
In FIG. 6, the LD 10 and the coupling spherical lens 11 are set at predetermined positions on the stem 13. The pedestal 9 for fixing the optical integrated circuit board 1 is provided with a stem installation portion 25 or a step portion for arranging the stem 13 in advance, and the stem 13 is fixed to this portion. The height of the stem installation portion 25 is the same as that of the optical integrated circuit board 1 fixed on the pedestal 9.
Optical axis of the optical waveguide 18 and LD1 mounted on the stem 13
The optical axis is adjusted so that it coincides with 0. For optical coupling between the LD 10 and the optical waveguide 18, the laser light oscillated from the LD 10 is focused by the coupling spherical lens 11, and the stem 13 is placed at a position where the laser light is efficiently focused on the incident portion 26 of the optical waveguide 18.
Adjust. After adjusting, place the stem 13 on the base 9 by Au-S.
n Secure with a joining member such as solder. Further, in FIG. 7, the stem 13 is fixed to the end surface of the pedestal 9 for fixing the optical integrated circuit board 1, and the stem 13 is adjusted in the XY direction at the end surface of the pedestal 9 to optically couple with the optical waveguide 18. , Fig. 6
The assembly is performed in the same manner as the embodiment shown in FIG. According to these structures, the optical integrated circuit board 1 and the stem 13 on which the LD 10 is mounted can be installed on the same pedestal 9, and can be firmly fixed by a high-strength joining member, so that no positional deviation occurs. Further, since the stem 13 is fixed on the pedestal 9, the shape of the stem 13 can be reduced, and the package 3 can be downsized.

【0020】図8に示す実施例は、光導波路18の入射
部26及び出射部27に光ファイバ2a、2bを設置し
光結合を行った構造を示す。入射用及び出射用の光ファ
イバ2a、2bは光ファイバガイド6を有した光ファイ
バ支持部材5に保持固定する。光ファイバ2a、2bは
ファイバガイド6内に接合部材8で固定し、出射用の光
ファイバ支持部材5には二本の光ファイバ2bを設置す
る。光集積回路基板1は、側壁に貫通孔4を有したパッ
ケージ3内の台座9上に固定する。パッケージ3側壁の
貫通孔4は、パッケージ3内に収納した光集積回路基板
1上面に形成したY字型光導波路18の光軸に合わせて
設けており、この貫通孔4に入射用及び出射用の光ファ
イバ2a、2bを保持固定した光ファイバ支持部材5を
設置する。入射用及び出射用の光ファイバ2a、2bの
先端は、あらかじめ光導波路18の光入射部26端と光
出射部27端に対して、所定の距離を保つようにZ方向
を調節して設置する。入射用の光ファイバ支持部材5
は、光導波路18の入射部26に光ファイバ2aから出
射したレーザ光を取り入れるように貫通孔4部でXY方
向に調整する。また、出射用の光ファイバ支持部材5も
同様に、二分岐した光導波路18から出射したレーザ光
を二本の光ファイバ2bに取り入れるように貫通孔4部
でXY方向に調整する。入射用の光ファイバ2aと出射
用の光ファイバ2bとの光結合効率が最大になる位置で
それぞれの光ファイバ支持部材5をパッケージ3側壁に
Au-Sn はんだなどの高強度の接合部材7あるいはYAG
溶接で全周を溶接固定する。この構造によれば、光ファ
イバ支持部材5をパッケージ3側壁に強固に固定できる
ため位置ずれを起こすことはなく光ファイバ出力の劣化
を防ぐことができる。また、ここで示した出射用の光フ
ァイバ保持の構造については、図3、図4及び図5示し
た実施例の光ファイバ配列構造を用いても良い。
The embodiment shown in FIG. 8 shows a structure in which the optical fibers 2a and 2b are installed in the entrance portion 26 and the exit portion 27 of the optical waveguide 18 to perform optical coupling. The input and output optical fibers 2a and 2b are held and fixed to an optical fiber support member 5 having an optical fiber guide 6. The optical fibers 2a and 2b are fixed in the fiber guide 6 by a joining member 8, and two optical fibers 2b are installed on the emitting optical fiber supporting member 5. The optical integrated circuit board 1 is fixed on a pedestal 9 in a package 3 having a through hole 4 in a side wall. The through hole 4 on the side wall of the package 3 is provided in alignment with the optical axis of the Y-shaped optical waveguide 18 formed on the upper surface of the optical integrated circuit substrate 1 housed in the package 3, and the through hole 4 is used for incidence and emission. The optical fiber supporting member 5 holding and fixing the optical fibers 2a and 2b is installed. The tips of the input and output optical fibers 2a and 2b are installed in advance by adjusting the Z direction so as to maintain a predetermined distance between the light incident portion 26 end and the light emitting portion 27 end of the optical waveguide 18. . Incident optical fiber support member 5
Is adjusted in the XY directions at the through-hole 4 so that the laser light emitted from the optical fiber 2a is introduced into the incident portion 26 of the optical waveguide 18. Similarly, the output optical fiber support member 5 is also adjusted in the XY directions at the through holes 4 so that the laser light emitted from the bifurcated optical waveguide 18 is introduced into the two optical fibers 2b. Each optical fiber support member 5 is attached to the side wall of the package 3 at a position where the optical coupling efficiency between the optical fiber 2a for incidence and the optical fiber 2b for emission is maximized.
Au-Sn solder or other high-strength joining member 7 or YAG
Weld the entire circumference by welding. According to this structure, since the optical fiber supporting member 5 can be firmly fixed to the side wall of the package 3, the optical fiber output can be prevented from being deteriorated without causing the positional deviation. As for the structure for holding the optical fiber for emission shown here, the optical fiber array structure of the embodiment shown in FIGS. 3, 4 and 5 may be used.

【0021】以上、図4から図8に示した実施例は、図
1及び図2に示した実施例と同様の構成及び組立てを行
うため、図1及び図2の実施例と同様の効果を得ること
ができる。したがって、光導波路を介して半導体発光素
子と光ファイバとの光結合を安定かつ容易に行い、位置
ずれによる光ファイバ出力の劣化を防ぐとともに、長期
間の使用に対しても高い信頼性を得ることができる。
Since the embodiment shown in FIGS. 4 to 8 has the same structure and assembly as the embodiment shown in FIGS. 1 and 2, the same effects as those of the embodiment shown in FIGS. 1 and 2 are obtained. Obtainable. Therefore, the optical coupling between the semiconductor light emitting device and the optical fiber can be stably and easily performed through the optical waveguide, the deterioration of the optical fiber output due to the positional deviation can be prevented, and the high reliability can be obtained even for long-term use. You can

【0022】[0022]

【発明の効果】以上、本発明によれば、光集積回路基板
をパッケージ内に設置し、光集積回路基板を介して半導
体発光素子と光ファイバとの光結合を容易に行うことが
できる。
As described above, according to the present invention, the optical integrated circuit board can be installed in the package, and the optical coupling between the semiconductor light emitting element and the optical fiber can be easily performed through the optical integrated circuit board.

【0023】この構造によれば、光集積回路との光結合
を高効率で行うことができ、しかも半導体発光素子と光
ファイバを強固に固定できるため、光ファイバ出力の劣
化を防ぐことができる。また、半導体発光素子及び光フ
ァイバは光集積回路基板に対して、あらかじめZ方向の
調節を行っているため、光結合を容易に行うことができ
る。さらに、光集積回路との光結合部をパッケージ内に
気密封止できるため、安定した光結合を得ることができ
る。
According to this structure, the optical coupling with the optical integrated circuit can be performed with high efficiency, and the semiconductor light emitting element and the optical fiber can be firmly fixed, so that the deterioration of the output of the optical fiber can be prevented. Further, since the semiconductor light emitting element and the optical fiber are adjusted in the Z direction with respect to the optical integrated circuit board in advance, optical coupling can be easily performed. Further, since the optical coupling portion with the optical integrated circuit can be hermetically sealed in the package, stable optical coupling can be obtained.

【0024】したがって、本発明の光集積回路パッケー
ジは、光集積回路基板を介して半導体発光素子と光ファ
イバとの光結合を容易にでき、長期の使用に対し高い信
頼性を得ることができる。
Therefore, the optical integrated circuit package of the present invention can facilitate optical coupling between the semiconductor light emitting device and the optical fiber via the optical integrated circuit substrate, and can obtain high reliability for long-term use.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の光集積回路パッケージの光
結合の構造上面図。
FIG. 1 is a structural top view of an optical coupling of an optical integrated circuit package according to an embodiment of the present invention.

【図2】本発明の一実施例の光集積回路パッケージの構
造横断面図。
FIG. 2 is a structural cross-sectional view of an optical integrated circuit package according to an embodiment of the present invention.

【図3】光集積回路と光ファイバの光結合を示した構造
斜視図。
FIG. 3 is a structural perspective view showing optical coupling between an optical integrated circuit and an optical fiber.

【図4】光集積回路と光ファイバの光結合を示した構造
斜視図。
FIG. 4 is a structural perspective view showing optical coupling between an optical integrated circuit and an optical fiber.

【図5】二本の光ファイバを融着して配列した構造斜視
図。
FIG. 5 is a structural perspective view in which two optical fibers are fused and arranged.

【図6】光集積回路と半導体発光素子の光結合を示した
構造横断面図。
FIG. 6 is a structural cross-sectional view showing optical coupling between an optical integrated circuit and a semiconductor light emitting device.

【図7】光集積回路と半導体発光素子の光結合を示した
構造横断面図。
FIG. 7 is a structural cross-sectional view showing optical coupling between an optical integrated circuit and a semiconductor light emitting device.

【図8】光集積回路と光ファイバの光結合を示した構造
横断面図。
FIG. 8 is a structural cross-sectional view showing optical coupling between an optical integrated circuit and an optical fiber.

【図9】従来の光集積回路と半導体発光素子との接続方
法を示す構造上面図。
FIG. 9 is a structural top view showing a conventional method of connecting an optical integrated circuit and a semiconductor light emitting element.

【図10】従来の光集積回路と光ファイバとの接続方法
を示す構造斜視図。
FIG. 10 is a structural perspective view showing a conventional method for connecting an optical integrated circuit and an optical fiber.

【符号の説明】[Explanation of symbols]

1 光集積回路基板 2a 入射用光ファイバ 2b 出射用光ファイバ 3 パッケージ 4 貫通孔 5 光ファイバ支持部材 6 光ファイバガイド 7 接合部材 8 接合部材 9 台座 10 半導体発光素子 11 結合用球レンズ 12 レンズキャップ 13 ステム 14 モニタ用フォトダイオード 15 フェルール支持部材 16 フェルール 17 接合部材 18 光導波路 19 コア部 20 V溝 21 フェルール切断面 22 接合部材 23 円筒状溝 24 接着剤 25 ステム設置部 26 光導波路入射部 27 光導波路出射部 28 レンズ 29 溝 30 光デバイス 1 Optical Integrated Circuit Board 2a Input Optical Fiber 2b Output Optical Fiber 3 Package 4 Through Hole 5 Optical Fiber Support Member 6 Optical Fiber Guide 7 Joining Member 8 Joining Member 9 Pedestal 10 Semiconductor Light Emitting Element 11 Coupling Ball Lens 12 Lens Cap 13 Stem 14 Photodiode for monitor 15 Ferrule support member 16 Ferrule 17 Joining member 18 Optical waveguide 19 Core part 20 V groove 21 Ferrule cut surface 22 Joining member 23 Cylindrical groove 24 Adhesive 25 Stem installation part 26 Optical waveguide entrance part 27 Optical waveguide Emitting part 28 Lens 29 Groove 30 Optical device

───────────────────────────────────────────────────── フロントページの続き (72)発明者 熊澤 鉄雄 茨城県土浦市神立町502番地 株式会社日 立製作所機械研究所内 (72)発明者 油原 敏哉 茨城県日立市日高町5丁目1番1号 日立 電線株式会社日高工場内 (72)発明者 熊谷 達也 茨城県日立市日高町5丁目1番1号 日立 電線株式会社日高工場内 (72)発明者 飯塚 寿夫 茨城県日立市日高町5丁目1番1号 日立 電線株式会社日高工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tetsuo Kumazawa 502 Jinritsucho, Tsuchiura-shi, Ibaraki Prefecture Machinery Research Institute, Hiritsu Manufacturing Co., Ltd. (72) Inventor Toshiya Yubara 5-1-1, Hidaka-cho, Hitachi, Ibaraki No. Hitachi Cable Co., Ltd. Hidaka Plant (72) Inventor Tatsuya Kumagai 5-1-1 Hidaka Town, Hitachi City, Ibaraki Prefecture Hitachi Cable Co., Ltd. Hidaka Plant (72) Inventor Hisao Iizuka Hitachi City, Hidaka, Ibaraki Prefecture 5-1-1, Machi, Hitachi Cable Co., Ltd. Hidaka Factory

Claims (11)

【特許請求の範囲】[Claims] 【請求項1】光集積回路基板と、前記光集積回路基板へ
入射する半導体発光素子光源と、前記光集積回路基板か
ら出射する光を伝送する光ファイバと、これらを収納す
る角型ケ−スとからなる光集積回路パッケージにおい
て、前記角型ケ−スの中央に前記光集積回路基板を設置
し、前記角型ケ−スの片側側壁の貫通孔内に、前記半導
体発光素子光源を装着し、前記角型ケ−スのもう一方の
側壁の貫通孔内に前記光ファイバを保持固定した光ファ
イバ支持部材を装着し、前記光集積回路基板を介して前
記半導体発光素子と前記光ファイバとが光結合するよう
に配置固定したことを特徴とする光集積回路パッケー
ジ。
1. An optical integrated circuit board, a semiconductor light emitting device light source that enters the optical integrated circuit board, an optical fiber that transmits light emitted from the optical integrated circuit board, and a square case that houses these. In the optical integrated circuit package consisting of, the optical integrated circuit board is installed in the center of the square case, and the semiconductor light emitting device light source is mounted in the through hole of one side wall of the square case. The optical fiber support member holding and fixing the optical fiber is mounted in the through hole of the other side wall of the square case, and the semiconductor light emitting element and the optical fiber are connected via the optical integrated circuit board. An optical integrated circuit package, which is arranged and fixed so as to be optically coupled.
【請求項2】光集積回路基板と、前記光集積回路基板へ
入射する半導体発光素子光源と、前記光集積回路基板か
ら出射する光を伝送する光ファイバと、これらを収納す
る角型ケ−スとからなる光集積回路パッケージにおい
て、前記角型ケ−スの中央に設けた台座上に前記光集積
回路基板と前記半導体発光素子光源を設置し、前記角型
ケ−ス側壁の貫通孔内に、前記光ファイバを支持した光
ファイバ支持部材を装着し、前記光集積回路基板を介し
て前記半導体発光素子と前記光ファイバとが光結合する
ように配置固定したことを特徴とする光集積回路パッケ
ージ。
2. An optical integrated circuit board, a semiconductor light emitting device light source that enters the optical integrated circuit board, an optical fiber that transmits light emitted from the optical integrated circuit board, and a square case that houses these. In the optical integrated circuit package consisting of, the optical integrated circuit board and the semiconductor light-emitting device light source are installed on a pedestal provided in the center of the square case, and in the through hole of the side wall of the square case. An optical integrated circuit package, wherein an optical fiber supporting member supporting the optical fiber is attached, and the semiconductor light emitting device and the optical fiber are arranged and fixed so as to be optically coupled to each other via the optical integrated circuit substrate. .
【請求項3】請求項1または2において、前記光集積回
路基板と前記半導体発光素子光源との光結合をレンズを
介して行うことを特徴とする光集積回路パッケージ。
3. The optical integrated circuit package according to claim 1, wherein the optical integrated circuit substrate and the semiconductor light emitting device light source are optically coupled through a lens.
【請求項4】光集積回路基板と、前記光集積回路基板へ
入射及び出射する光を伝送する光ファイバと、これらを
収納する角型ケ−スとからなる光集積回路パッケージに
おいて、前記角型ケ−スの中央に前記光集積回路基板を
設置し、前記角型ケ−スの片側側壁の貫通孔内に、入射
用光ファイバを支持した入射用光ファイバ支持部材を装
着し、前記角型ケ−スのもう一方の側壁の貫通孔内に出
射用光ファイバを支持した出射用光ファイバ支持部材を
装着し、前記光集積回路基板を介して前記入射用光ファ
イバと前記出射用光ファイバとが光結合するように配置
固定したことを特徴とする光集積回路パッケージ。
4. An optical integrated circuit package comprising an optical integrated circuit board, an optical fiber for transmitting light entering and exiting the optical integrated circuit board, and a square case for housing these, wherein the square type The optical integrated circuit board is installed at the center of the case, and an incident optical fiber supporting member supporting an incident optical fiber is mounted in the through hole of one side wall of the rectangular case, An output optical fiber support member supporting an output optical fiber is mounted in the through hole of the other side wall of the case, and the input optical fiber and the output optical fiber are provided via the optical integrated circuit board. An optical integrated circuit package characterized in that it is arranged and fixed so as to be optically coupled.
【請求項5】請求項1、2または4において、前記光集
積回路基板から出射する光を伝送する光ファイバが複数
本であることを特徴とする光集積回路パッケージ。
5. The optical integrated circuit package according to claim 1, wherein there are a plurality of optical fibers for transmitting the light emitted from the optical integrated circuit board.
【請求項6】請求項1、2または4において、光集積回
路基板から出射する光を伝送する光ファイバは、偏波面
保存型光ファイバであることを特徴とする光集積回路パ
ッケージ。
6. The optical integrated circuit package according to claim 1, wherein the optical fiber for transmitting the light emitted from the optical integrated circuit substrate is a polarization-maintaining optical fiber.
【請求項7】請求項5において、光ファイバは円柱状の
光ファイバ支持部材内に配列した孔及び溝に接着により
設置したことを特徴とする光集積回路パッケージ。
7. The optical integrated circuit package according to claim 5, wherein the optical fiber is installed by adhesion in holes and grooves arranged in a cylindrical optical fiber supporting member.
【請求項8】請求項1、2または4において、前記光集
積回路基板を収納する角型ケース内は、気密封止するこ
とを特徴とする光集積回路パッケージ。
8. The optical integrated circuit package according to claim 1, wherein the inside of the rectangular case accommodating the optical integrated circuit board is hermetically sealed.
【請求項9】請求項1、2または4において、前記角型
ケ−ス及び前記光ファイバ支持部材の材質を鋼、コバ−
ルまたはステンレス合金としたことを特徴とする光集積
回路パッケ−ジ。
9. The material of the square case and the optical fiber supporting member according to claim 1, 2 or 4, is steel or cover.
Optical integrated circuit package characterized by being made of a stainless steel or a stainless alloy.
【請求項10】請求項1において、半導体発光素子光源
及び光ファイバ支持部材は、あらかじめ角型ケース側壁
に設けた貫通孔内に設置し、角型ケース内に固定した光
集積回路基板の光軸に対して、半導体発光素子と光ファ
イバとの光軸が一致するように、半導体発光素子光源及
び光ファイバ支持部材を位置調整し、半導体発光素子光
源及び光ファイバ支持部材を角型ケ−ス側壁にAu-Sn 、
Au-Ge 、もしくはPb-SnはんだあるいはYAG溶接で固
定したことを特徴とする光集積回路パッケージの組立て
方法。
10. The optical axis of an optical integrated circuit substrate according to claim 1, wherein the semiconductor light emitting device light source and the optical fiber supporting member are installed in through holes provided in the side wall of the rectangular case in advance and fixed in the rectangular case. On the other hand, the position of the semiconductor light emitting element light source and the optical fiber supporting member is adjusted so that the optical axes of the semiconductor light emitting element and the optical fiber coincide with each other, and the semiconductor light emitting element light source and the optical fiber supporting member are attached to the square case side wall. Au-Sn,
A method for assembling an optical integrated circuit package, characterized by being fixed by Au-Ge or Pb-Sn solder or YAG welding.
【請求項11】請求項4において、入射用光ファイバ支
持部材及び出射用光ファイバ支持部材は、あらかじめ角
型ケース側壁に設けた貫通孔部に設置し、角型ケース内
に固定した光集積回路基板の光軸に対して、入射用光フ
ァイバと出射用光ファイバとの光軸が一致するように、
入射用及び出射用の光ファイバ支持部材を位置調整し、
入射用光ファイバ支持部材及び出射用の光ファイバ支持
部材を角型ケ−スにAu-Sn 、Au-Ge 、もしくはPb-Sn は
んだあるいはYAG溶接で固定したことを特徴とする光
集積回路パッケージの組立て方法。
11. The optical integrated circuit according to claim 4, wherein the incident optical fiber support member and the output optical fiber support member are installed in through holes provided in the side wall of the rectangular case in advance and fixed in the rectangular case. With respect to the optical axis of the substrate, so that the optical axis of the incident optical fiber and the optical axis of the output coincide,
Adjust the position of the optical fiber support member for incidence and emission,
An optical integrated circuit package characterized in that an input optical fiber support member and an output optical fiber support member are fixed to a square case by Au-Sn, Au-Ge, or Pb-Sn solder or YAG welding. How to assemble.
JP5299582A 1993-11-30 1993-11-30 Optical integrated circuit package and its assembly method Pending JPH07151943A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5299582A JPH07151943A (en) 1993-11-30 1993-11-30 Optical integrated circuit package and its assembly method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5299582A JPH07151943A (en) 1993-11-30 1993-11-30 Optical integrated circuit package and its assembly method

Publications (1)

Publication Number Publication Date
JPH07151943A true JPH07151943A (en) 1995-06-16

Family

ID=17874506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5299582A Pending JPH07151943A (en) 1993-11-30 1993-11-30 Optical integrated circuit package and its assembly method

Country Status (1)

Country Link
JP (1) JPH07151943A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005250118A (en) * 2004-03-04 2005-09-15 Hitachi Cable Ltd Wavelength multiplexing optical transmitter module
JP2007052281A (en) * 2005-08-18 2007-03-01 Sony Corp Optical communication module and optical communication network
WO2010010833A1 (en) 2008-07-24 2010-01-28 田中貴金属工業株式会社 Au-Ga-In BRAZING FILLER METAL

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005250118A (en) * 2004-03-04 2005-09-15 Hitachi Cable Ltd Wavelength multiplexing optical transmitter module
JP2007052281A (en) * 2005-08-18 2007-03-01 Sony Corp Optical communication module and optical communication network
WO2010010833A1 (en) 2008-07-24 2010-01-28 田中貴金属工業株式会社 Au-Ga-In BRAZING FILLER METAL
US9604317B2 (en) 2008-07-24 2017-03-28 Tanaka Kikinzoku Kogyo K.K. Au—Ga—In brazing material

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