JPH061233Y2 - プラズマ粉体処理装置 - Google Patents
プラズマ粉体処理装置Info
- Publication number
- JPH061233Y2 JPH061233Y2 JP1989065413U JP6541389U JPH061233Y2 JP H061233 Y2 JPH061233 Y2 JP H061233Y2 JP 1989065413 U JP1989065413 U JP 1989065413U JP 6541389 U JP6541389 U JP 6541389U JP H061233 Y2 JPH061233 Y2 JP H061233Y2
- Authority
- JP
- Japan
- Prior art keywords
- powder
- reaction gas
- plasma
- reactor
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Silicon Compounds (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Powder Metallurgy (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989065413U JPH061233Y2 (ja) | 1988-06-24 | 1989-06-06 | プラズマ粉体処理装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63-82908 | 1988-06-24 | ||
| JP8290888 | 1988-06-24 | ||
| JP1989065413U JPH061233Y2 (ja) | 1988-06-24 | 1989-06-06 | プラズマ粉体処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0257143U JPH0257143U (enrdf_load_stackoverflow) | 1990-04-25 |
| JPH061233Y2 true JPH061233Y2 (ja) | 1994-01-12 |
Family
ID=31718320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989065413U Expired - Lifetime JPH061233Y2 (ja) | 1988-06-24 | 1989-06-06 | プラズマ粉体処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH061233Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060021385A (ko) | 2003-06-20 | 2006-03-07 | 가부시키가이샤 호소카와 훈타이 기쥬쓰켄큐쇼 | 파우더 처리 방법, 파우더 처리 장치, 및 다공질 과립의제조 방법 |
| CN113122821B (zh) * | 2020-01-15 | 2023-05-30 | 株洲弗拉德科技有限公司 | 一种搅拌式粉体真空气相沉积炉 |
-
1989
- 1989-06-06 JP JP1989065413U patent/JPH061233Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0257143U (enrdf_load_stackoverflow) | 1990-04-25 |
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