JPH0611464Y2 - 抵抗測定用プローブ - Google Patents

抵抗測定用プローブ

Info

Publication number
JPH0611464Y2
JPH0611464Y2 JP1987181944U JP18194487U JPH0611464Y2 JP H0611464 Y2 JPH0611464 Y2 JP H0611464Y2 JP 1987181944 U JP1987181944 U JP 1987181944U JP 18194487 U JP18194487 U JP 18194487U JP H0611464 Y2 JPH0611464 Y2 JP H0611464Y2
Authority
JP
Japan
Prior art keywords
probe
main body
pin
electrode
probe pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987181944U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0187256U (hu
Inventor
一也 尾野間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1987181944U priority Critical patent/JPH0611464Y2/ja
Publication of JPH0187256U publication Critical patent/JPH0187256U/ja
Application granted granted Critical
Publication of JPH0611464Y2 publication Critical patent/JPH0611464Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
JP1987181944U 1987-12-01 1987-12-01 抵抗測定用プローブ Expired - Lifetime JPH0611464Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987181944U JPH0611464Y2 (ja) 1987-12-01 1987-12-01 抵抗測定用プローブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987181944U JPH0611464Y2 (ja) 1987-12-01 1987-12-01 抵抗測定用プローブ

Publications (2)

Publication Number Publication Date
JPH0187256U JPH0187256U (hu) 1989-06-08
JPH0611464Y2 true JPH0611464Y2 (ja) 1994-03-23

Family

ID=31473406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987181944U Expired - Lifetime JPH0611464Y2 (ja) 1987-12-01 1987-12-01 抵抗測定用プローブ

Country Status (1)

Country Link
JP (1) JPH0611464Y2 (hu)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5157426B2 (ja) * 2007-12-27 2013-03-06 富士通セミコンダクター株式会社 検査冶具及びそれを使用した静電容量測定方法
JP6046426B2 (ja) * 2012-09-13 2016-12-14 日置電機株式会社 基板検査装置および基板検査方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741169U (hu) * 1980-08-20 1982-03-05
JPS5768046A (en) * 1980-10-16 1982-04-26 Nec Corp Probe card
JPS5997469U (ja) * 1982-12-20 1984-07-02 株式会社東芝 半導体チツプ測定用探針
JPS62217165A (ja) * 1986-03-19 1987-09-24 Toshiba Corp 検査用接触体

Also Published As

Publication number Publication date
JPH0187256U (hu) 1989-06-08

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