JPH0611463Y2 - High frequency probe - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a high frequency probe.

[Prior Art] FIG. 7 (a) is a partially cutaway front view showing a conventional high-frequency probe, and FIG. 7 (b) is a sectional view taken along line BB of FIG. 7 (a).

The signal conductor 10a and the ground conductor 10 of the coaxial transmission line 10
b is extended on one plate-shaped dielectric body 11, and the film-shaped signal conductor 12 corresponding to the signal conductor 10a is formed at the center of the plate-shaped dielectric body 11, and the film-shaped signal conductors 12 are formed on both sides thereof. A constant characteristic impedance (normally 5
Membrane ground conductors 13a and 13b corresponding to the ground conductor 10b forming 0 Ω) are formed.

The plate-shaped dielectric 11 is fixedly connected to the coaxial transmission line 10 by the connection fitting 13.

[Problems to be Solved by the Invention] However, in the high-frequency probe having such a structure, a plurality of contacts (the film-shaped signal conductor 12 and the film) on the same plane on the high-frequency probe side are brought into contact with the object to be measured or shown in the drawing. It is difficult to simultaneously make parallel contact with a plurality of contact points on the side of the object to be measured, since it is difficult to obtain a good contact state because the conductors 13a and 13b for forming a ground are integrated into a single structure.

The present invention has been conceived in order to eliminate these drawbacks, and an object thereof is to provide a high frequency probe capable of easily and surely contacting the high frequency probe and the object to be measured.

[Means for Solving the Problems] In order to achieve the above object, the high-frequency probe of the present invention includes a signal conductor (10a) and a grounding conductor (10).
a coaxial transmission line (10) composed of b) and a flexible end fixed to a signal conductor of the coaxial transmission line so that a tip end thereof can swing, and an object to be measured ( 5) A plate-shaped dielectric body (1) having a signal-shaped signal conductor (2) whose tip portion is freely contactable with the signal terminal, and arranged vertically to both side surfaces of the plate-shaped dielectric body, and It is provided with a plate-shaped grounding conductor (3) which is fixed to a grounding conductor of a coaxial transmission line and has a free-end portion which can be swung, and which always forms a constant characteristic impedance with the film-shaped signal conductor. It is characterized by that.

Further, in order to terminate or monitor the input signal, the film-shaped signal conductor (2) is folded back near the tip (1a) on the surface of the plate-shaped dielectric (1), and the plate-shaped dielectric is formed from the folded back tip. A film-shaped signal conductor is provided up to the tip (1aa) of (1), a film-shaped ground conductor (3a) is formed between the folded film-shaped signal conductors (2), and the film-shaped ground conductor (3) is formed.
It is also possible to form a constant characteristic impedance between the signal conductor (2) and the two plate-shaped grounding conductors (3) provided on both side surfaces of a) and the plate-shaped dielectric body (1). it can.

[Operation] The plate-shaped dielectric 1 and the plate-shaped grounding conductor 3 are not integrated structure and have flexibility individually, and the plate-shaped grounding conductor 3 is flexible with respect to the plate-shaped dielectric 1 vertically. Film conductor 1 on the plate-shaped dielectric 1 serving as a high-frequency probe, since
The plate-shaped grounding conductor 3 always maintains a constant impedance and can easily contact the object to be measured, so that a stable contact state can be maintained.

[Embodiment] Hereinafter, a high frequency probe of the present invention will be described with reference to the drawings.

1 (a) is a partially cutaway plan view showing an embodiment of the present invention, FIG. 1 (b) is a sectional view taken along the line AA of FIG. 1 (a), and FIG. 1 (c) is the same. It is CC sectional view taken on the line of FIG.

As shown in the figure, a plate-shaped dielectric 1 is provided at one end of the coaxial transmission line 10.

The plate-shaped dielectric 1 is formed in a plate shape having a narrowed end when viewed from a plan view, and the film-shaped signal conductor 2 is formed in the center on one surface (upper surface) of the plate-shaped dielectric 1. . One end of the film-shaped signal conductor 2 is connected to the signal conductor 10a of the coaxial transmission line 10 by soldering or the like to establish electrical conduction.

Further, as shown in FIG. 1 (c), plate-shaped grounding conductors 3 are vertically provided on both sides of the plate-shaped dielectric 1 so as to be perpendicular to the plate-shaped dielectric 1. The plate-shaped earth conductors 3 are
When viewed from the side, the tip is formed in a minute size, and the coaxial transmission line 1
Each of them is connected to the grounding conductor 10b of 0 by the connecting metal fitting 4 by soldering or the like to achieve electrical continuity. Also, near the tip of the grounding conductors 3 and 3, contact portions 3b and 3b are provided.
Are formed.

Then, in order to maintain a constant characteristic impedance (for example, 50Ω) at the tip of the high-frequency probe formed by the film-shaped signal conductor 2 and the plate-shaped grounding conductors 3 and 3, the tip goes to the tip of the film-shaped signal conductor 2. As it becomes tapered. That is, the film-shaped signal conductor 2 and the plate-shaped grounding conductors 3, 3 on both sides of the film-shaped signal conductor 2 are gradually close to each other with a predetermined gap ratio toward the tip.

As a result, the distance between the film-shaped signal conductor 2 and the plate-shaped ground conductors 3 and 3 at the tip portion can be arbitrarily changed.
(That is, the pitch between terminals of the object to be measured can be arbitrarily determined) Next, the operation of the above configuration will be described.

The ground conductors 3, 3 contact the contact points 3b, 3b of the ground conductors 3, 3 and the film-shaped signal conductor 2 in the vicinity of the object to be measured 5, and supply an input signal to the object to be measured.

At this time, the plate-shaped dielectric 1 on which the film-shaped signal conductor 2 is formed
, And the plate-shaped grounding conductors 3 are not fixed to each other, but each of them is separately supported by the coaxial transmission line 10 with flexibility, so that, for example, FIG. As shown in the operation diagram corresponding to (c)), for example, only by appropriately pressing the film-shaped signal conductor 2 and the plate-shaped ground conductors 3 and 3 against the flat object 5 to be measured, both Good contact. Therefore, the electrical connection between the DUT 5 and the high frequency probe can be stably performed.

Next, FIG. 3 is a partially cutaway plan view showing a second embodiment of the present invention.

In this embodiment, two coaxial transmission lines 10 are provided, one for supplying the input signal and one for monitoring or terminating the input signal.

The film-shaped signal conductor 2 folded back at the tip is formed on the plate-shaped dielectric 1. This film-shaped signal conductor 2
A film-shaped signal conductor is further formed from the folded-back portion to the tip. One ends of the film-shaped signal conductors 2 are connected to the signal conductors 10a of the two coaxial transmission lines 10, respectively.

Further, the plate-shaped ground conductors 3, 3 are provided on both sides of the plate-shaped dielectric 1 and in the center of the folded film-shaped signal conductor 2, the film-shaped ground conductors that similarly perform the function of grounding. Conductor 3a
And the plate-shaped grounding conductors 3, 3 are connected to the grounding conductor 10b of the coaxial transmission line together with the film-shaped grounding conductor 3a by the connection fitting 4.

As described above, the plate-shaped grounding conductors 3 and 3 are formed in a taper shape with the film-shaped grounding conductor 3a maintaining a constant gap ratio with the film-shaped signal conductor 2 to maintain a constant characteristic impedance. Has become.

The operation of the above-described configuration will be described. The plate-shaped dielectric 1 on which the film-shaped signal conductor 2 is formed and the plate-shaped ground conductors 3 and 3 are not fixed to each other and have flexibility. Each of these can make good contact with the object to be measured.

Further, the input signal can be supplied by one coaxial transmission line 10 and can be monitored or terminated by the other coaxial transmission line 10.

Next, FIGS. 4 (a) to 4 (d) show a third embodiment of the present invention. This embodiment is an improvement of the second embodiment shown in FIG. 3, and the same components as those in the second embodiment are designated by the same reference numerals as those in FIG. 3 and their description is omitted. To do.

As shown in FIGS. 4 (a), (b), and (d), the high-frequency probe of this embodiment has two plate-shaped grounding conductors 3, 3 as connecting means near the tip thereof. It is characterized in that it is connected to and electrically connected to the central film-shaped earth conductor 3a by two gold wires 6 and 6, respectively. That is, the gold wire 6 has one end fixed to the tip of the film-shaped grounding conductor 3a to maintain electrical continuity, and the other end to the edge portion close to the contact portion 3b of the plate-shaped grounding conductor 3. It is fixed. Therefore, the plate-shaped dielectric 1 and the plate-shaped grounding conductor 3
Even if and oscillate relatively, the electrical connection between the earths will not be interrupted. In addition, this high frequency probe
As shown in FIGS. (B) and (c), the gold wire 6 is in contact with the object to be measured 5 at the most distal end.
You will never directly touch.

The high-frequency probe of the present embodiment has the same actions and effects as those of the second embodiment, and can exhibit the following effects which are more excellent than those of the second embodiment. That is, in the structure in which the ground is in the open state as in the second embodiment shown in FIG. 3, the characteristics do not extend to high frequencies, and as shown in FIG. Causes a dip. However, since this embodiment has the structure as described above, there is an effect that the characteristics are improved up to a high frequency (for example, 12 GHz) as shown in FIG. 5 (b).

In addition, in this embodiment, two gold wires 6 are used as connecting means.
However, the number of the gold wires 6 is not limited to two, and a band-shaped gold ribbon may be used to connect the grounds to each other. Further, the material of the wire and the ribbon is not limited to gold, and may be gold alloy. As a fourth embodiment, as shown in FIGS. 6 (a) and 6 (b), a through hole 7 is provided in the plate-shaped dielectric 1 and the film-shaped earth conductor 3a is connected through the through hole 7 to the plate-shaped dielectric. You may make it electrically lead to the other surface of the body 1, and connect this to the plate-shaped grounding conductor 3 by another film-shaped grounding conductor 8 and the gold wire 9 provided at the tip on the same surface. . Also in the case of this embodiment, a gold ribbon can be used instead of the gold wire 9, and the number thereof is arbitrary. Similarly, the material of the ribbon and the wire may be a gold alloy.

Incidentally, instead of the coaxial transmission line 10 described in each of the above-mentioned embodiments, a transmission line such as a coplanar, a microstrip or a triplate may be used.

[Advantages of the Invention] As described above, according to the high frequency probe of the present invention, the signal conductor and the ground conductor are formed separately and each has flexibility, so It has the effect of being able to make good contact.

[Brief description of drawings]

FIG. 1 (a) is a partially cutaway plan view showing an embodiment of the high frequency probe of the present invention, and FIG. 1 (b) is a sectional view taken along the line AA of FIG. 1 (a). (C) is cc of FIG.
FIG. 2 is a partially cutaway plan view showing a second embodiment of the present invention, and FIG. 4 (a) is a third embodiment of the present invention. Is a plan view showing a state in which the high-frequency probe of the embodiment is in contact with an object to be measured, and FIG. 6C is a front view of the tip in FIG. FIG. 5D is a view taken along the line dd ′ in FIG. 5B, FIG. 5A is a graph showing insertion loss in the second embodiment, and FIG. 5B is insertion loss in the third embodiment. FIG. 6 (a) is a sectional view showing a fourth embodiment of the present invention, FIG. 6 (b) is a top view in FIG. 6 (a),
FIG. 7 (a) is a partially cutaway plan view showing a conventional high-frequency probe, and FIG. 7 (b) is a sectional view taken along line BB of FIG. 7 (a). DESCRIPTION OF SYMBOLS 1 ... Plate dielectric, 2 ... Membrane signal conductor, 3 ... Plate ground conductor, 3a ... Membrane ground conductor, 3b ... Contact part, 4 ... Connection fitting, 5 ... Measured object, 6 ... Connection means As a wire, 7 ... through hole constituting connecting means, 8 ... another film ground conductor constituting connecting means, 9 ... Gold wire constituting connecting means, 10 ... Coaxial transmission line, 10a ... Signal conductor 10b ... conductor for grounding.

Claims (5)

[Scope of utility model registration request] 1. A coaxial transmission line (10) comprising a signal conductor (10a) and a grounding conductor (10b), and a tip end portion which is flexible and fixed to the signal conductor of the coaxial transmission line. And a plate-like dielectric (1) having a film-shaped signal conductor (2) formed on one surface thereof, the tip of which is in contact with the signal terminal of the DUT (5). It is arranged vertically to both side surfaces of the plate-shaped dielectric, is fixed to the ground conductor of the coaxial transmission line, and has a free-end portion, and has a constant characteristic impedance with the film-shaped signal conductor. High-frequency probe having a plate-shaped grounding conductor (3) on which the ridge is formed. 2. In order to terminate or monitor an input signal, the film-shaped signal conductor (2) is folded back near the tip (1a) on the surface of the plate-shaped dielectric (1), and a plate is formed from the folded back tip. A film-shaped signal conductor is provided up to the tip (1aa) of the film-shaped dielectric (1), and a film-shaped ground conductor (3a) is formed between the folded film-shaped signal conductors (2). Registering a utility model in which a constant characteristic impedance is formed between the conductor (3a) and the two conductors (3) for grounding the plate and the signal conductor (2) provided on both sides of the dielectric plate (1). A high frequency probe according to claim 1. 3. A utility model registration claim according to claim 2, wherein said film-shaped grounding conductor (3a) and said plate-shaped grounding conductor (3) are electrically connected by a connecting means in the vicinity of the tip. High frequency probe. 4. One end of a gold wire (6) as a connecting means is fixed to the tip of the film-shaped grounding conductor (3a), and the other end of the gold wire (6) is fixed to the plate-shaped grounding conductor (3). ) The high frequency probe according to claim 3, which is fixed to the tip of the utility model. 5. A through hole (7) formed in the plate dielectric (1), and the film-like grounding conductor (3a) on the opposite surface of the plate dielectric (1) through the through hole (7). And a gold wire (9) for connecting the conductor tip of the other film-shaped grounding conductor (8) to the plate-shaped grounding conductor (3). The high-frequency probe according to claim 3, wherein the utility model is registered as a connection means.