JPH02208572A - High frequency probe - Google Patents

High frequency probe

Info

Publication number
JPH02208572A
JPH02208572A JP2902689A JP2902689A JPH02208572A JP H02208572 A JPH02208572 A JP H02208572A JP 2902689 A JP2902689 A JP 2902689A JP 2902689 A JP2902689 A JP 2902689A JP H02208572 A JPH02208572 A JP H02208572A
Authority
JP
Japan
Prior art keywords
conductor
connector
tapered
center conductor
central
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2902689A
Other languages
Japanese (ja)
Other versions
JPH07104361B2 (en
Inventor
Yuhei Kosugi
小杉 勇平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1029026A priority Critical patent/JPH07104361B2/en
Publication of JPH02208572A publication Critical patent/JPH02208572A/en
Publication of JPH07104361B2 publication Critical patent/JPH07104361B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)

Abstract

PURPOSE:To make it possible to measure a place having a small occupying area readily by constituting a probe with a tapered flexible central conductor and a pair of tapered plate-spring type outer conductors which surround said central conductor. CONSTITUTION:In a central conductor 1, a tip part 1a is thin and the thickness becomes larger toward the root of the conductor. A tapered shape is provided from a tip part 2a toward a root in a plate spring type outer conductor 2. The central conductor 1 and the outer conductors 2 are assembled into a supporting part 3 which is formed as a unitary body together with a connector. The conductor 1 is made to penetrate through a cylindrical insulator 4 and connected to a central-conductor coupling part 5 of the connector. Both conductors 1 and 2 are flexible and generate contact pressures suitable for testing electrodes. Therefore high frequency measurement in a microstrip structure can be performed readily. Furthermore, the measuring circuit can be made compact, and the cost of the apparatus can be reduced.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はマイクロ波帯以上の高周波帯でマイクロストリ
ップ(Microstrip)線路の伝送路を伝播する
信号を外部からモニタする高周波プローブに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a high frequency probe for externally monitoring signals propagating in a microstrip line transmission path in a high frequency band higher than a microwave band.

〔従来の技術〕[Conventional technology]

従来、マイクロ波帯以上の高周波信号をモニタしようと
する場合、一般に用いられる手段としては、伝送線路の
信号をモニタすべき個所に方向性結合器を挿入し、信号
を取り出すという方法があった。この方法によれば確実
に一定の大きさの信号取り出しが可能であるが、方向性
結合器を用いるために大きなスペースを必要とし、コス
トもかかった。
Conventionally, when attempting to monitor high-frequency signals in the microwave band or above, a commonly used method was to insert a directional coupler at the point on the transmission line where the signal was to be monitored and extract the signal. According to this method, it is possible to reliably extract a signal of a certain magnitude, but the use of a directional coupler requires a large space and is costly.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

近年、マイクロ波回路はマイクロストリップ構造により
形成されることが多くなり、導波管の使用は限られた一
部にとどまるようになった。このマイクロストリップ回
路を用いた方向性結合器は、少なくとも^/4(λは波
長)の長さを必要とするため、大きな回路面積を占有し
てしまうという欠点があった。さらに、方向性結合器で
取り出した信号を外部の測定器や回路につなぎ込むため
にコネクタを用いる必要もあり、その上コネクタは通常
時無反射終端器(一般に線路の特性インビーダンスと等
・しい抵抗器を内部に仕込んだコネクタ付のもの)で終
端しておく必要がある。マイクロ波のコネクタや終端器
は非常に高価であるという問題もあった。
In recent years, microwave circuits have often been formed with a microstrip structure, and waveguides have been used only in a limited number of areas. A directional coupler using this microstrip circuit requires a length of at least ^/4 (λ is the wavelength), so it has the drawback of occupying a large circuit area. Furthermore, it is necessary to use a connector to connect the signal extracted by the directional coupler to an external measuring device or circuit, and in addition, the connector is usually equipped with a non-reflection terminator (generally due to the characteristic impedance of the line, etc.). (with a connector with a new resistor installed inside). Another problem was that microwave connectors and terminators were very expensive.

本発明の目的は、これらの欠点を除き、可撓性のある所
定の特性インピーダンス回路を用いて、少ない占有面積
で狭い個所の測定できると共に安価に構成できる高周波
プローブを提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to eliminate these drawbacks and provide a high-frequency probe that uses a flexible predetermined characteristic impedance circuit, can measure a narrow place with a small footprint, and can be constructed at low cost.

〔課題を解決するための手段〕[Means to solve the problem]

本発明の高周波プローブは、先端が細く根元の太いテー
パ状の可撓性中心導体と、この中心導体を挟んで両側対
角方向に配設されテーパ状かつ板バネ状の1対の外導体
と、これら中心導体および外導体を各根元の部分で支持
する支持部材と、この支持部材と一体に形成され外部ケ
ーブルと接続されるコネクタ部とを備えたことを特徴と
する。
The high-frequency probe of the present invention has a tapered flexible central conductor with a thin tip and a thick base, and a pair of tapered and leaf spring-shaped outer conductors disposed diagonally on both sides of the central conductor. The present invention is characterized by comprising a support member that supports the center conductor and the outer conductor at their base portions, and a connector portion that is formed integrally with the support member and is connected to an external cable.

〔実施例〕〔Example〕

第1図(a)、(b)、(c)は本発明の一実施例の正
面図、側面図および縦断面図であり、断面図は信号伝播
軸の中心を含む断面を示している。第1図(c)におい
て、中心導体1は先端部1aが細く根元に向ってテーパ
状に太くなっている。この中心導体1の両側には外導体
2が平板状に配され、同じくその先端部2aから根元ヘ
テーパ状になっている。この外導体2を支持するプロー
ブの支持部3は、同時に手でこの高周波プローブをつか
む部分を兼ねる。この支持部3と一体に形成されたコネ
クタの外導体6は、本実施例ではネジを切ってあり、コ
ネクタの接続部となる。このコネクタの中心導体の結合
部5は、中心導体1につながっている。
FIGS. 1(a), 1(b), and 1(c) are a front view, a side view, and a vertical cross-sectional view of one embodiment of the present invention, and the cross-sectional views show a cross section including the center of the signal propagation axis. In FIG. 1(c), the center conductor 1 has a thin tip portion 1a and tapers toward the root. Outer conductors 2 are arranged in the form of a flat plate on both sides of the central conductor 1, and similarly taper from the tip 2a to the base. The support portion 3 of the probe that supports the outer conductor 2 also serves as a portion for gripping the high-frequency probe with the hand. The outer conductor 6 of the connector, which is integrally formed with the support portion 3, is threaded in this embodiment and serves as a connecting portion of the connector. A coupling portion 5 of the center conductor of this connector is connected to the center conductor 1.

ここで中心導体1と外導体2とがどのように支持され位
置関係を保っているか説明する。第1図(b)において
、支持部材3にはスロット3aが設けられ、このスロッ
トに可撓性の板バネ状の外導体2が挿入され、図示され
ていないがテーパネジで支持部材3の先端を締め込むこ
とにより、外導体2は支持部材3に強固に取付けられる
Here, a description will be given of how the center conductor 1 and the outer conductor 2 are supported and maintain their positional relationship. In FIG. 1(b), the support member 3 is provided with a slot 3a, into which the flexible leaf spring-shaped outer conductor 2 is inserted, and the tip of the support member 3 is fixed with a tapered screw (not shown). By tightening, the outer conductor 2 is firmly attached to the support member 3.

次に、中心導体1は円筒状の絶縁体4に挿入され、さら
にこの絶縁体4を支持部材3に穿った穴に挿入すること
によって支持されている。
Next, the center conductor 1 is inserted into a cylindrical insulator 4, and this insulator 4 is further inserted into a hole bored in the support member 3 to be supported.

この高周波プローブの先端部分より見た第1図(a>に
おいて、中心導体1に対し支持部材3が同心状に配され
、さらに支持部材3に板バネ状外導体2が挟まれている
In FIG. 1 (a) seen from the tip of this high-frequency probe, a support member 3 is arranged concentrically with respect to the center conductor 1, and a leaf spring-shaped outer conductor 2 is further sandwiched between the support member 3.

第2図(a)、(b)、(c)は第1図(C)のA−A
、B−B、C−C功各横断面を示す、断面A−Aは中心
導体1を支持している部分、断面B−Bは中間部分、断
面C−Cは先端に近い部分である。
Figures 2 (a), (b), and (c) are A-A in Figure 1 (C).
, B-B, and CC cross-sections. Cross-section A-A is the part supporting the center conductor 1, cross-section B-B is the middle part, and cross-section CC is the part near the tip.

第3図<a)、(b)は高周波プローブの線路構造によ
る電気力線の分布図であり、第3図(a)は先端に近い
部分、第3図(b)は中間部分を示している。この電磁
界分布は中心導体とその両側の外導体2の隙間部に集中
している。プローブの支持部では電磁界の分布は同軸状
となる。
Figures 3(a) and 3(b) are distribution diagrams of electric lines of force due to the line structure of the high-frequency probe. Figure 3(a) shows the part near the tip, and Figure 3(b) shows the middle part. There is. This electromagnetic field distribution is concentrated in the gap between the center conductor and the outer conductors 2 on both sides thereof. At the support of the probe, the electromagnetic field distribution is coaxial.

先端から根元、さらにコネクタへと電磁界はなめらかに
変化するようになっている。
The electromagnetic field changes smoothly from the tip to the base and then to the connector.

第4図(a)は本実施例の使用されるマイクロストリッ
プ構造部の平面図で、この信号伝送路上の信号をモニタ
すると仮定する。サブストレート10上に中心導体11
が配設され、中心導体11から高抵抗部12により分岐
して電極13が設けられ、この電極13の両脇には接地
ホール(Ground Via) 14が設けられてい
る。この状態で中心導体11を伝播する信号は抵抗部1
2が高抵抗であるためほとんど影響を受けない。
FIG. 4(a) is a plan view of the microstrip structure used in this embodiment, and it is assumed that a signal on this signal transmission path is to be monitored. Center conductor 11 on substrate 10
An electrode 13 is provided branching from the center conductor 11 through a high resistance portion 12, and ground vias 14 are provided on both sides of the electrode 13. In this state, the signal propagating through the center conductor 11 is
2 has a high resistance, so it is hardly affected.

次に、この信号をモニタする場合、第4図(b)に示す
ように、本実施例の高周波プローブを電極13と接地ホ
ール14に接触させる。プローブ中心導体1の先端部1
aを電極13に、プローブ外導体2の先端部2aを接地
ホール14に押し当てるようにする。この場合、プロー
ブの中心導体1も外導体2も、可撓性がありそれぞれ独
立に僅かに撓み変形することによって変形に応じた接触
圧を発生する。
Next, when monitoring this signal, the high frequency probe of this embodiment is brought into contact with the electrode 13 and the ground hole 14, as shown in FIG. 4(b). Tip part 1 of probe center conductor 1
a to the electrode 13, and the tip 2a of the probe outer conductor 2 to the ground hole 14. In this case, both the center conductor 1 and the outer conductor 2 of the probe are flexible and are slightly deflected and deformed independently, thereby generating contact pressure corresponding to the deformation.

これによって中心導体1と外導体2の双方に無理のない
接触が実現され、マイクロストリップ線路に存在する信
号は高抵抗部12を介してその−部が高周波プローブへ
取り出される。
This achieves a comfortable contact between the center conductor 1 and the outer conductor 2, and the negative portion of the signal present in the microstrip line is taken out to the high frequency probe via the high resistance section 12.

第5図は本実施例の高周波プローブを用いている状態の
等価回路図である。高抵抗部12の抵抗値をRhとし、
線路の特性インピーダンスZ。に対しRb>Zaになる
ように選定しておけば、主線路に対する高周波プローブ
の影響はほとんど無視することが出来る。
FIG. 5 is an equivalent circuit diagram when the high frequency probe of this embodiment is used. Let the resistance value of the high resistance part 12 be Rh,
Characteristic impedance Z of the line. If Rb>Za is selected, the influence of the high frequency probe on the main line can be almost ignored.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明の高周波プローブは、先端部
からコネクタ部まで同一特性インピーダンスが保たれ信
号伝播線路としての不連続は極めて小さい、先端部分は
中心導体と外導体ともども、なめらかに撓むため、マイ
クロストリップ構造における高周波の測定も容易に実施
することが出来る。
As explained above, the high frequency probe of the present invention maintains the same characteristic impedance from the tip to the connector, and discontinuities as a signal propagation line are extremely small.The tip bends smoothly with the center conductor and outer conductor. , high frequency measurements in microstrip structures can also be easily carried out.

本発明の高周波プローブによれば、大きな面積を有する
方向性結合器を回路に仕込んでおく必要はなく、測定回
路の小形化ができると共に、方向性結合器と共に必要な
信号取り出し用コネクタや終端器も必要とせず機器の価
格を引き下げる効果も大きい。
According to the high-frequency probe of the present invention, it is not necessary to incorporate a directional coupler having a large area into the circuit, and the measurement circuit can be made smaller. It also has a great effect of lowering the price of the equipment as it does not require any additional equipment.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)、(b)、(c)は本発明の一実施例の高
周波プローブの正面図、側面図および縦断面図、第2図
(a)、(b)、(c)は第1図のA−A、B−B、C
−Cの各断面図、第3図(a)、(b)は本実施例の高
周波プローブの線路の電界分布図、第4図(a)、(b
)は本実施例の高周波プローブの使用法を説明するマイ
クロストリップ線路の平面図およびそのモニタ時の斜視
図、第5図は本実施例の高周波プローブを含む等価回路
図である。 1・・・中心導体、1a・・・中心導体先端部、2・・
・外導体、2a・・・外導体先端部、3・・・支持部材
、4・・・円筒状絶縁体、5・・・コネクタ中心導体結
合部、6・・・外導体結合ネジ、10・・・サブストレ
ート(基板)、11・・・中心導体、12・・・高抵抗
部、13・・・電極、14・・・接地ホール。
FIGS. 1(a), (b), and (c) are a front view, a side view, and a vertical sectional view of a high-frequency probe according to an embodiment of the present invention, and FIGS. 2(a), (b), and (c) are A-A, B-B, C in Figure 1
-C cross-sectional views, FIGS. 3(a) and (b) are electric field distribution diagrams of the line of the high-frequency probe of this embodiment, and FIGS. 4(a) and (b).
) is a plan view of a microstrip line and a perspective view when monitoring the microstrip line for explaining how to use the high frequency probe of this embodiment, and FIG. 5 is an equivalent circuit diagram including the high frequency probe of this embodiment. 1... Center conductor, 1a... Center conductor tip, 2...
- Outer conductor, 2a... Outer conductor tip, 3... Support member, 4... Cylindrical insulator, 5... Connector center conductor coupling portion, 6... Outer conductor coupling screw, 10. ... Substrate (board), 11... Center conductor, 12... High resistance part, 13... Electrode, 14... Ground hole.

Claims (1)

【特許請求の範囲】[Claims] 先端が細く根元の太いテーパ状の可撓性中心導体と、こ
の中心導体を挟んで両側対角方向に配設されテーパ状か
つ板バネ状の1対の外導体と、これら中心導体および外
導体を各根元の部分で支持する支持部材と、この支持部
材と一体に形成され外部ケーブルと接続されるコネクタ
部とを備えたことを特徴とする高周波プローブ。
A tapered flexible center conductor with a thin tip and a thick base, a pair of tapered and leaf spring-shaped outer conductors arranged diagonally on both sides with this center conductor in between, and these center conductors and outer conductors. 1. A high-frequency probe comprising: a support member that supports the base member at each base; and a connector portion that is formed integrally with the support member and is connected to an external cable.
JP1029026A 1989-02-07 1989-02-07 High frequency probe Expired - Lifetime JPH07104361B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1029026A JPH07104361B2 (en) 1989-02-07 1989-02-07 High frequency probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1029026A JPH07104361B2 (en) 1989-02-07 1989-02-07 High frequency probe

Publications (2)

Publication Number Publication Date
JPH02208572A true JPH02208572A (en) 1990-08-20
JPH07104361B2 JPH07104361B2 (en) 1995-11-13

Family

ID=12264902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1029026A Expired - Lifetime JPH07104361B2 (en) 1989-02-07 1989-02-07 High frequency probe

Country Status (1)

Country Link
JP (1) JPH07104361B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1090302A (en) * 1996-09-11 1998-04-10 Kiyota Seisakusho:Kk Probe formed of metallic sheet
JP2001349903A (en) * 2000-06-07 2001-12-21 Noozeru Engineering Kk High frequency probe
KR20170010936A (en) * 2015-07-20 2017-02-02 한국전자통신연구원 Radio frequency probe apparatus
JPWO2015037741A1 (en) * 2013-09-13 2017-03-02 株式会社テクノプローブ Probes and probe cards
WO2020217729A1 (en) * 2019-04-26 2020-10-29 日置電機株式会社 Probe device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295274A (en) * 1976-02-06 1977-08-10 Nippon Telegr & Teleph Corp <Ntt> Coaxial probe for high frequency measurement
JPS63124668U (en) * 1987-02-06 1988-08-15

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295274A (en) * 1976-02-06 1977-08-10 Nippon Telegr & Teleph Corp <Ntt> Coaxial probe for high frequency measurement
JPS63124668U (en) * 1987-02-06 1988-08-15

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1090302A (en) * 1996-09-11 1998-04-10 Kiyota Seisakusho:Kk Probe formed of metallic sheet
JP2001349903A (en) * 2000-06-07 2001-12-21 Noozeru Engineering Kk High frequency probe
JPWO2015037741A1 (en) * 2013-09-13 2017-03-02 株式会社テクノプローブ Probes and probe cards
KR20170010936A (en) * 2015-07-20 2017-02-02 한국전자통신연구원 Radio frequency probe apparatus
WO2020217729A1 (en) * 2019-04-26 2020-10-29 日置電機株式会社 Probe device
US12000862B2 (en) 2019-04-26 2024-06-04 Hioki E.E. Corporation Probe apparatus

Also Published As

Publication number Publication date
JPH07104361B2 (en) 1995-11-13

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