JPH0541413Y2 - - Google Patents

Description

[Detailed explanation of the idea] [Industrial application field] The present invention relates to a high frequency probe.

[Prior Art] FIG. 4 is a plan view showing a conventional high frequency probe.

The object to be measured 5 such as an IC has a plurality of signal terminals 5a.
A ground terminal 5b is provided.

The high frequency probe is, for example, a signal terminal 5a.
A plurality of coaxial transmission lines 10 are used corresponding to the number of coaxial transmission lines 10, and the signal conductors 10a contact the signal terminals 5a, and the ground conductors 10b of these coaxial transmission lines 10 are commonly connected by soldering with a wire 11. It acts by contacting the ground terminal 5b.

[Problems to be solved by the invention] Therefore, the problems with the above-mentioned high frequency probe are as follows: 1) Each signal conductor 10a and the ground conductor 10b are both the signal terminal 5a and the ground terminal 5b.
the inability to make good contact with
2) Furthermore, the signal conductor 10a of the coaxial transmission line 10
Since the probe directly serves as a probe, it cannot be used for small pitch signal terminals 5a. Regarding the problem 1), for example, the wire rod 11
has the function of holding each coaxial transmission line 10, so if this wire 11 has a certain thickness, each conductor 10a, 10b cannot uniformly contact each terminal 5a, 5b.

On the other hand, if a wire rod 11 having a small diameter is used in order to allow each conductor to move individually, the reactance at this portion increases, resulting in a disadvantage that, for example, the measured waveform is disturbed.

The present invention was devised in order to eliminate the above-mentioned drawbacks, and its purpose is to ensure that each probe and each terminal are in contact with each other, and to make it possible to use conventional small-diameter wires as ground conductors for terminals. It is an object of the present invention to provide a high frequency probe with less waveform disturbance compared to the conventional probe.

[Means for solving problems]

In order to achieve the above object, the high frequency probe of the present invention includes a signal conductor 10a and a ground conductor 10a.
a coaxial transmission line 10 consisting of a flexible coaxial transmission line 10, which is fixed to a signal conductor of the coaxial transmission line and whose tip part is swingable, and each signal of the object to be measured 5 is arranged on one surface. At least one plate-shaped dielectric body 1 on which a film-shaped signal conductor 2 is formed that can be freely contacted with the terminal 5a, and the plate-shaped dielectric body 1 is disposed perpendicularly on both sides of each of the plate-shaped dielectric bodies, and is arranged vertically on both sides of each of the plate-shaped dielectric bodies, and is connected to the coaxial transmission line. A plate-shaped grounding conductor 3 whose tip part is swingable while being fixed to the grounding conductor and always forms a constant characteristic impedance with the membrane-shaped signal conductor, and a flexible plate-shaped grounding conductor 3. a plate-shaped terminal ground conductor 6 which is formed, is fixed to the ground conductor of the coaxial transmission line, has conductivity at a ground potential as a whole, and covers the opposite surface of the film-shaped signal conductor of the plate-shaped dielectric; a contact portion 3b provided near the tip of the plate-shaped grounding conductor and contacting the plate-shaped terminal grounding conductor; and a contact portion 3b provided at the tip of the plate-shaped terminal grounding conductor;
Terminal portion 6b that contacts the ground terminal 5b of the object to be measured
It is characterized by having the following.

[Function] To explain the function of the above configuration, each film conductor 2 is attached to the signal terminal 5a of the object to be measured 5, and the terminal portion 6b of the ground conductor 6 for plate terminal is attached to the ground terminal 5b.
contacts and supplies the input signal to the object under test.

At this time, the plate-shaped dielectric 1 on which the film-shaped signal conductor 2 is formed, the plate-shaped ground conductor 3, and the plate-shaped terminal ground conductor 6 are not fixed to each other, and each is connected to the coaxial transmission line 10 separately. Since it is supported with flexibility, for example, when the plate-shaped terminal earth conductor 6 is lowered to bring the plate-shaped dielectric 1 into contact with the signal terminal 5a with respect to the planar object to be measured 5, the membrane The signal conductor contacts the signal terminal 5a, and the terminal portion 6
b can also come into contact with the ground terminal 5b, and both can be in a good contact state.

At the same time, the contact portion 3b of the plate-shaped ground conductor 3 is in contact with the plate-shaped terminal ground conductor 6, and the ground at the tip of the plate-shaped terminal ground conductor 3 can be connected to the plate-shaped terminal ground conductor 6 over a short distance. The characteristic impedance at the tip of the conductor 2 can be maintained.

[Example] Fig. 1a is a plan view showing a high frequency probe of the present invention, and Fig. 1b is a sectional view taken along line A--A in Fig. 1a.

As shown in these figures, a plurality of coaxial transmission lines 10 are used, and a signal conductor 1 of this coaxial transmission line 10 is used.
0a is soldered to a film-like signal conductor 2 formed on one surface (lower surface) of the plate-like dielectric 1. Further, the plate-shaped dielectric bodies 1 are provided in a number corresponding to the number of coaxial transmission lines 10, and each plate-shaped dielectric body 1 is formed in a tapered shape according to its tip.

Furthermore, the ground conductor 10b of the coaxial transmission line 10
is connected to the plate-shaped ground conductors 3, 3 by soldering via a fixture 4. The plate-shaped ground conductor 3 is provided perpendicularly to the side of each plate-shaped dielectric 1, and a contact portion 3b is formed at the tip thereof, and is in contact with the plate-shaped terminal ground conductor 6.

The film signal conductor 2 and the plate ground conductor 3 have a certain characteristic impedance (for example,
50Ω), the membrane signal conductor 2 is tapered toward the tip. In other words, the membrane signal conductor 2 and the plate-shaped ground conductors 3 on both sides of the membrane signal conductor 2 have a width that gradually approaches each other at a predetermined gap ratio toward the tip.

A plate-shaped terminal ground conductor 6 is provided on one surface (upper surface) of the plate-shaped ground conductor 3.
This ground conductor 6 for the plate-shaped terminal is also connected to the ground conductor 10b of the coaxial transmission line 10 by soldering via the fixture 4.

Therefore, each plate-shaped ground conductor 3 is electrically connected to the plate-shaped terminal ground conductor 6 via the contact portion 3b formed at the tip.

Also, what is shown in Figure 1c is B-B in Figure 1a.
It is a line arrow view, and the ground conductor 6 for the plate-shaped terminal includes:
A terminal portion 6b is provided upright at the tip.

Next, the operation of the above configuration will be explained.

Each film conductor 2 is connected to the signal terminal 5a of the object to be measured 5.
However, the ground terminal 5b has a plate terminal ground conductor 6.
The terminal portion 6b of the terminal 6b contacts and supplies an input signal to the object to be measured.

At this time, the plate-shaped dielectric 1 on which the film-shaped signal conductor 2 is formed and the plate-shaped signal grounding conductor 6 are not fixed to each other, and each is separately connected to the coaxial transmission line 10.
For example, as shown in FIG. 2 (operation diagram corresponding to FIG. 1 c),
The plate-shaped dielectric body 1 is also not affected by the amount of deflection of the plate-shaped terminal earth conductor, and the film-shaped signal conductor 2 portion can come into contact with the signal terminal 5a with a predetermined amount of deflection.

At the same time, in this state, the contact portion 3b at the tip of the plate-shaped ground conductor 3 maintains a state in contact with the plate-shaped terminal ground conductor 6, and the ground potential of the ground terminal 5b and each plate-shaped ground conductor 3 are kept at the same potential. In addition, the ground at the tip of the plate-shaped ground conductor 3 can be connected to the ground terminal 5b via the plate-shaped terminal ground conductor 6 and the terminal part 6b over a short distance, and the ground at the tip of the membrane-shaped signal conductor 2 can be Characteristic impedance can be maintained.

In the above-mentioned embodiment, an example in which there is one ground terminal 5b has been described, but as shown in FIG. 5, terminal portions 6b, 6b may be provided on both sides of the plate-shaped terminal ground conductor 6. It is also possible to have a structure in which one side of the plate-shaped terminal earth conductor 6 is brought into contact with the earth terminal, and the other side is held in contact with a portion other than the terminal.

[Effects of the invention] As explained above, according to the high frequency probe according to the invention, a common grounding of a plurality of coaxial transmission lines can be easily established, and contact with each terminal can be ensured.

In addition, the ground conductor for the plate terminal can be made larger in size, the distance between the signal conductor and the ground terminal can be shortened, and the reactance can be made smaller than before. It is possible to evaluate the high frequency characteristics of

[Brief explanation of the drawing]

FIG. 1a is a plan view showing a high frequency probe according to the present invention, FIG. 1b is a sectional view taken along line A-A in FIG. 1a, and FIG. 1c is a view taken along line B-B in FIG. , second
3 is a diagram showing the operation of the same probe, FIG. 3 is a diagram showing another embodiment of the present invention, and FIG. 4 is a plan view showing a conventional high-frequency probe. 1... Plate dielectric, 2... Film signal conductor, 3
... Plate earth conductor, 3b ... Contact part, 4 ... Fixing metal fittings, 5 ... Measured object, 5a ... Signal terminal, 5
b...Ground terminal, 6...Ground conductor for plate terminal, 10...Coaxial transmission line, 10a...Signal conductor, 10b...Ground conductor.

Claims (1)

[Claims for Utility Model Registration] A coaxial transmission line 10 composed of a signal conductor 10a and a ground conductor 10b, and a flexible end portion that is fixed to the signal conductor of the coaxial transmission line and can swing freely. and at least one plate-shaped dielectric 1 on one surface of which is formed a film-shaped signal conductor 2 that can freely contact each signal terminal 5a of the object to be measured 5; A plate that is arranged vertically on both sides, is fixed to the ground conductor of the coaxial transmission line, has a swingable tip, and always forms a constant characteristic impedance with the membrane signal conductor. A grounding conductor 3 is formed into a flexible plate shape, covers the opposite side of the film signal conductor of the plate-shaped dielectric, and is fixed to the grounding conductor of the coaxial transmission line so that the whole is at ground potential. A ground conductor 6 for a plate-shaped terminal having conductivity; and a contact portion 3b provided near the tip of the ground conductor for the plate-shaped terminal and in contact with the ground conductor for the plate-shaped terminal.
A high-frequency probe comprising: a terminal portion 6b that is provided at the tip of the plate-shaped terminal ground conductor and comes into contact with the ground terminal 5b of the object to be measured.