JPH04127577U - high frequency measurement probe - Google Patents

Abstract

(57) [Summary] (with modifications) [Purpose] To provide a high-frequency measurement probe that can input and take out high-frequency signals into a hybrid IC, etc., without deteriorating them. [Structure] A microstrip line is formed on an insulating plate made of a dielectric material, and contacts made of a conductive spring material are attached to a signal line 13 and a ground conductor 12 that constitute the microstrip line.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This idea can be used, for example, to test the operation of devices such as hybrid ICs. This invention relates to high frequency measurement probes.

0002

[Conventional technology]

3 to 5 show the structure of a conventional probe. 1 in the figure indicates the probe card. vinegar. This probe card 1 is composed of an insulating plate, and has an opening 2 formed in the center. A plurality of probes 3 are attached to the opening 2 in a protruding manner. Tip of probe 3 makes electrical contact with the object to be measured 4 to perform measurements.

0003 The object to be measured 4 is an element such as a hybrid IC, and the upper surface of the object to be measured 4 is An electrical input/output terminal and a power supply terminal are formed on the terminal, and the tip of the probe 3 is connected to this terminal. Connect electrically to a measuring device, etc. by making electrical contact. The conventional probe 3 has a metal blade 3A and a metal blade 3A as shown in FIGS. 4 and 5. It consists of a contact 3B made of conductive spring material attached to the tip of the blade 3A. It will be done. The metal blade 3A is made of a good electrical conductor such as copper or copper. The conductive spring material attached to the tip of the spring is corroded, such as palladium. It is made of difficult spring material.

0004 A conductive layer 5 is formed in the shape of an island along the opening 2 on the probe card 1. A metal blade 3A is attached to the layer 5 by soldering or the like. Each probe 3 is connection to the contacts 7 using the printed wiring pattern 6 formed on the cable card 1. Or in a high frequency circuit, it is electrically connected to the contact 7 by a coaxial cable 8, It is connected to a measuring device etc. through the contact 7.

[0005]

[Problem that the idea aims to solve]

The conventional probe 3 has a contact formed by a metal blade 3A and a conductive spring material. 3B, impedance matching is possible for high frequency signals. I haven't taken it yet. Therefore, if there is a circuit that sends and receives high-frequency signals, It has the disadvantage that it distorts the waveform and makes it impossible to perform accurate measurements.

[0006] The purpose of this invention is to provide high-frequency signals with impedance matching. The aim is to provide a high-frequency measurement probe that can send and receive signals.

[0007]

[Means to solve the problem]

In this idea, the blade is an insulated blade made of a dielectric plate. Form a microstrip line on the board. Microstrip line signal line A contact made of conductive spring material is attached to the grounding conductor. Free end of contact The part is supported by protruding from the end of the insulating blade, and the electrode of the object to be measured is attached to the free end. be contacted.

[0008] According to the configuration of this invention, the microstrip line extends to the contact mounting area. Since a signal path is formed, impedance matching is achieved at the insulating blade. can be maintained in a stable condition. However, in the contact part, there is a signal contact and a grounding contact. Since the contacts are close to each other and extend toward the object to be measured, set the facing distance appropriately. By selecting the impedance as impedance can be approximated.

[0009] Therefore, according to this invention, almost the entire area from the contact part to the blade exit part is Probes can be constructed with impedance matching across the body.

0010

【Example】

An embodiment of this invention is shown in FIGS. 1 and 2. In the figure, 1 is a probe card, 2 is a The opening 5 is formed on the top surface of the probe card 1. Shows a conductive layer. In this example, the conductive layer 5 is a ground conductor. 10 shows a high frequency measurement probe according to this invention. High frequency measurement using this idea The probe 10 includes an insulating blade 11 made of a dielectric plate and an insulating blade 11 made of a dielectric plate. A ground conductive layer 12 formed on the entire surface of one surface and a shape formed on the other surface of the insulating blade 11. The signal line 13 constituting the microstrip line that has been A signal contact 14 whose end side is electrically and mechanically connected, and an electrically connected ground conductive layer 12. and a mechanically connected ground contact 15.

[0011] The insulating blade 11 has a high dielectric constant and forms a microstrip line. For example, a ceramic plate can be used. Insulation consisting of ceramic plates The blade 11 is in the form of a strip, and one surface is coated for microstrip lines. A ground conductive layer 12 is deposited. The other side of the insulating blade 11 has a micro A signal line 13 constituting a strip line is formed. The signal line 13 is a printed wiring pattern. It is formed by a turn and extends toward the tip of the insulating blade 11. be done.

0012 A signal contact is attached to the signal wire 13 formed by extending from the tip of the insulating blade 11. Install 14. This attachment can be done using soldering, welding, or the like. signal The contactor 14 contacts one side of the insulating blade only at the part that contacts the signal line 13. Then, it is bent from this contact part and placed along the bottom part of the insulating blade 11. protrudes forward from the tip.

[0013] The grounding contact 15 is a conductive block attached to the grounding conductive layer 12 by soldering or the like. One end is attached to and supported by the bottom surface of the rack 16. The conductive block 16 is for grounding. By selecting an appropriate value for the gap G between the feeler 15 and the signal contact 14, the ground contact 15. The conductive block 16 is made of copper or copper. It is composed of a conductor.

[0014] The center conductor and outer conductor of the coaxial cable 17 are connected to the signal line 13 and the ground conductive layer 12. Connect the contacts 14 and 15 through the coaxial cable 17 to the contacts shown in FIG. Connect to 7. The insulating blade 11 connects the ground conductive layer 12 to the conductive layer 5 formed on the probe card 1. Solder it and fix it on the probe card 1.

[0015] As mentioned above, according to this invention, up to the mounting support parts of the contacts 14 and 15 are coaxial. Electrical communication is carried out by cable 17 and signal line 13 that constitutes a microstrip line. A route is constructed. As is well known, the microstrip line has an insulating blade 11. By appropriately setting the dielectric constant of the dielectric plate constituting the signal line 13 and the line width of the signal line 13, Therefore, the characteristic impedance can be set arbitrarily. Therefore, microstri The characteristic impedance of the top line and the coaxial cable 17 can be matched. Wear.

[0016] In addition, in this invention, the signal contact 14 and the ground contact 15 are placed close to each other. By setting the facing distance G to an appropriate value, the parts of contacts 14 and 15 can be The characteristic impedance of the microstrip line is also the same as that of the microstrip line. The characteristic impedance of the axial cable can be approximated.

[0017]

[Effect of the idea]

Therefore, according to this invention, the coaxial cable 17 is connected from the tips of the contacts 14 and 15. The characteristic impedance between the connecting parts is the characteristic impedance of the coaxial cable 17. can be matched to As a result, by using it in circuits that send and receive high-frequency signals, the signals being sent and received are distorted. It is possible to send and receive high frequency signals without causing any reflections or the like. Therefore By using the high frequency measurement probe invented by It is possible to precisely adjust high frequency hybrid ICs, etc., and its effects can be put to practical use. It's a big deal to offer.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing an embodiment of this invention.

FIG. 2 is a plan view showing an embodiment of the invention.

FIG. 3 is a plan view for explaining a conventional technique.

FIG. 4 is an enlarged plan view for explaining a conventional technique.

FIG. 5 is an enlarged side view for explaining a conventional technique.

[Explanation of symbols]

10 probe 11 Insulated blade 12 Ground conductor 13 Signal line 14 Signal contact 15 Ground contact 16 Conductive block

Claims (1)

[Scope of utility model registration request] [Claim 1] A. B. an insulating blade made of a dielectric plate having a grounding conductive layer adhered to the entire surface of one surface and signal lines constituting a microstrip line formed on the other surface; a signal contact formed of a conductive spring material, one end of which is electrically and mechanically connected to the signal line formed on the insulating blade, a free end of which is supported by protruding from the insulating blade; One end side is electrically and mechanically connected to the grounding conductive layer of the insulating blade, the free end is supported by protruding from the insulating blade along the signal contact, and the grounding layer is formed of a conductive spring material. with a contactor,
A high frequency measurement probe constructed by