JPS60260861A - Probe - Google Patents

Probe

Info

Publication number
JPS60260861A
JPS60260861A JP11639084A JP11639084A JPS60260861A JP S60260861 A JPS60260861 A JP S60260861A JP 11639084 A JP11639084 A JP 11639084A JP 11639084 A JP11639084 A JP 11639084A JP S60260861 A JPS60260861 A JP S60260861A
Authority
JP
Japan
Prior art keywords
probe
semiconductor pellet
strip line
part
formed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11639084A
Inventor
Shinya Niizaki
Takashi Saito
Hideo Yamamura
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11639084A priority Critical patent/JPS60260861A/en
Publication of JPS60260861A publication Critical patent/JPS60260861A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To transmit a signal of high frequency and high speed without distortion, and to inspect a semiconductor pellet of high frequency and high speed by structuring the part extending to the tip of a probe by a micro strip line.
CONSTITUTION: A micro strip line is formed by constituting one face of a base film 6 of a ground electric conductor, and providing a signal wire 7 on the other face. A dam 10 consisting of an organic substance is formed in the tip of a probe, namely, a contact part with a semiconductor pellet, and a contactor 9 is formed adjacently to said dam. The other end of the probe is connected to a probe card 2 consisting of a strip line structure. When executing an inspection, a force is applied to the probe part by using a probe holding jig 13 from the upper part of the probe, and the probe is brought into contact with a semiconductor pellet to be measure 1. In this case, the force applied to a terminal electrode 5 of the semiconductor pellet can be adjusted by adjusting the applied force of the probe holding jig 13.
COPYRIGHT: (C)1985,JPO&Japio
JP11639084A 1984-06-08 1984-06-08 Probe Pending JPS60260861A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11639084A JPS60260861A (en) 1984-06-08 1984-06-08 Probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11639084A JPS60260861A (en) 1984-06-08 1984-06-08 Probe

Publications (1)

Publication Number Publication Date
JPS60260861A true JPS60260861A (en) 1985-12-24

Family

ID=14685837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11639084A Pending JPS60260861A (en) 1984-06-08 1984-06-08 Probe

Country Status (1)

Country Link
JP (1) JPS60260861A (en)

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62177456A (en) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk Probe stylus for measuring electric characteristic of semiconductor wafer
JPS62177455A (en) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk Probe stylus for measuring electric characteristics of semiconductor wafer
JPS62177454A (en) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk Probe stylus for measuring electric characteristic of semiconductor wafer
JPS62179126A (en) * 1986-01-31 1987-08-06 Nippon Denshi Zairyo Kk Probe card for microwave
JPS62182672A (en) * 1986-01-07 1987-08-11 Yokogawa Hewlett Packard Ltd Testing probe
JPS62186544A (en) * 1986-02-12 1987-08-14 Tanaka Kikinzoku Kogyo Kk Probe for measuring electric characteristic of semiconductor wafer
JPS62186543A (en) * 1986-02-12 1987-08-14 Tanaka Kikinzoku Kogyo Kk Probe for measuring electric characteristic of semiconductor wafer
JPS62233774A (en) * 1986-04-03 1987-10-14 Matsushita Electric Ind Co Ltd Inspecting method for circuit board
JPS62261972A (en) * 1986-05-08 1987-11-14 Mitsubishi Electric Corp Substrate inspection device
JPS6365638A (en) * 1986-09-05 1988-03-24 Tektronix Inc Integrated circuit wafer prober
JPS644042A (en) * 1987-06-09 1989-01-09 Tektronix Inc Prober
JPS6414936A (en) * 1987-07-08 1989-01-19 Tokyo Electron Ltd Inspecting apparatus
JPH0252048U (en) * 1988-10-11 1990-04-13
JPH02210269A (en) * 1988-10-25 1990-08-21 Tokyo Electron Ltd Probe device
JPH02237131A (en) * 1989-03-10 1990-09-19 Maatec:Kk Apparatus and method for testing of semiconductor ic
US4975638A (en) * 1989-12-18 1990-12-04 Wentworth Laboratories Test probe assembly for testing integrated circuit devices
JPH03127845A (en) * 1989-10-13 1991-05-30 Fuji Electric Co Ltd Testing probe for integrated circuit device
US6759258B2 (en) 1997-05-09 2004-07-06 Renesas Technology Corp. Connection device and test system
JP2009294064A (en) * 2008-06-05 2009-12-17 Totoku Electric Co Ltd High frequency measuring probe
US7764075B2 (en) 2002-05-08 2010-07-27 Formfactor, Inc. High performance probe system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS499976A (en) * 1972-05-15 1974-01-29
JPS4917685A (en) * 1972-06-05 1974-02-16
JPS5718334A (en) * 1980-07-10 1982-01-30 Nippon Telegr & Teleph Corp <Ntt> Ic chip testing apparatus
JPS57204473A (en) * 1981-06-05 1982-12-15 Maikuro Component Tekunorojii Electric connector to electric device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS499976A (en) * 1972-05-15 1974-01-29
JPS4917685A (en) * 1972-06-05 1974-02-16
JPS5718334A (en) * 1980-07-10 1982-01-30 Nippon Telegr & Teleph Corp <Ntt> Ic chip testing apparatus
JPS57204473A (en) * 1981-06-05 1982-12-15 Maikuro Component Tekunorojii Electric connector to electric device

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62182672A (en) * 1986-01-07 1987-08-11 Yokogawa Hewlett Packard Ltd Testing probe
JPS62177456A (en) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk Probe stylus for measuring electric characteristic of semiconductor wafer
JPS62177455A (en) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk Probe stylus for measuring electric characteristics of semiconductor wafer
JPS62177454A (en) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk Probe stylus for measuring electric characteristic of semiconductor wafer
JPS62179126A (en) * 1986-01-31 1987-08-06 Nippon Denshi Zairyo Kk Probe card for microwave
JPS62186544A (en) * 1986-02-12 1987-08-14 Tanaka Kikinzoku Kogyo Kk Probe for measuring electric characteristic of semiconductor wafer
JPS62186543A (en) * 1986-02-12 1987-08-14 Tanaka Kikinzoku Kogyo Kk Probe for measuring electric characteristic of semiconductor wafer
JPS62233774A (en) * 1986-04-03 1987-10-14 Matsushita Electric Ind Co Ltd Inspecting method for circuit board
JPS62261972A (en) * 1986-05-08 1987-11-14 Mitsubishi Electric Corp Substrate inspection device
JPS6365638A (en) * 1986-09-05 1988-03-24 Tektronix Inc Integrated circuit wafer prober
JPS644042A (en) * 1987-06-09 1989-01-09 Tektronix Inc Prober
JPH0517705B2 (en) * 1987-06-09 1993-03-09 Tektronix Inc
JPS6414936A (en) * 1987-07-08 1989-01-19 Tokyo Electron Ltd Inspecting apparatus
JPH0252048U (en) * 1988-10-11 1990-04-13
JPH02210269A (en) * 1988-10-25 1990-08-21 Tokyo Electron Ltd Probe device
JPH02237131A (en) * 1989-03-10 1990-09-19 Maatec:Kk Apparatus and method for testing of semiconductor ic
JPH03127845A (en) * 1989-10-13 1991-05-30 Fuji Electric Co Ltd Testing probe for integrated circuit device
US4975638A (en) * 1989-12-18 1990-12-04 Wentworth Laboratories Test probe assembly for testing integrated circuit devices
US6759258B2 (en) 1997-05-09 2004-07-06 Renesas Technology Corp. Connection device and test system
US7285430B2 (en) 1997-05-09 2007-10-23 Hitachi, Ltd. Connection device and test system
US7541202B2 (en) 1997-05-09 2009-06-02 Renesas Technology Corp. Connection device and test system
US7764075B2 (en) 2002-05-08 2010-07-27 Formfactor, Inc. High performance probe system
US8614590B2 (en) 2002-05-08 2013-12-24 Charles A. Miller High performance probe system
JP2009294064A (en) * 2008-06-05 2009-12-17 Totoku Electric Co Ltd High frequency measuring probe

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