JPH0610672Y2 - エピタキシヤル成長炉 - Google Patents

エピタキシヤル成長炉

Info

Publication number
JPH0610672Y2
JPH0610672Y2 JP3005887U JP3005887U JPH0610672Y2 JP H0610672 Y2 JPH0610672 Y2 JP H0610672Y2 JP 3005887 U JP3005887 U JP 3005887U JP 3005887 U JP3005887 U JP 3005887U JP H0610672 Y2 JPH0610672 Y2 JP H0610672Y2
Authority
JP
Japan
Prior art keywords
furnace
epitaxial growth
temperature distribution
heater
growth furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3005887U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63137931U (enrdf_load_stackoverflow
Inventor
恒弘 海野
峰生 和島
尚史 楯
泰一郎 今野
洋 杉本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP3005887U priority Critical patent/JPH0610672Y2/ja
Publication of JPS63137931U publication Critical patent/JPS63137931U/ja
Application granted granted Critical
Publication of JPH0610672Y2 publication Critical patent/JPH0610672Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP3005887U 1987-03-02 1987-03-02 エピタキシヤル成長炉 Expired - Lifetime JPH0610672Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3005887U JPH0610672Y2 (ja) 1987-03-02 1987-03-02 エピタキシヤル成長炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3005887U JPH0610672Y2 (ja) 1987-03-02 1987-03-02 エピタキシヤル成長炉

Publications (2)

Publication Number Publication Date
JPS63137931U JPS63137931U (enrdf_load_stackoverflow) 1988-09-12
JPH0610672Y2 true JPH0610672Y2 (ja) 1994-03-16

Family

ID=30834521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3005887U Expired - Lifetime JPH0610672Y2 (ja) 1987-03-02 1987-03-02 エピタキシヤル成長炉

Country Status (1)

Country Link
JP (1) JPH0610672Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63137931U (enrdf_load_stackoverflow) 1988-09-12

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