JPH0610607Y2 - 電子ビーム発生装置 - Google Patents

電子ビーム発生装置

Info

Publication number
JPH0610607Y2
JPH0610607Y2 JP17959687U JP17959687U JPH0610607Y2 JP H0610607 Y2 JPH0610607 Y2 JP H0610607Y2 JP 17959687 U JP17959687 U JP 17959687U JP 17959687 U JP17959687 U JP 17959687U JP H0610607 Y2 JPH0610607 Y2 JP H0610607Y2
Authority
JP
Japan
Prior art keywords
electron beam
beam generator
observation window
axis
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17959687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0186053U (enrdf_load_stackoverflow
Inventor
等 河野
正徳 津田
泰弘 中井
Original Assignee
神鋼電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 神鋼電機株式会社 filed Critical 神鋼電機株式会社
Priority to JP17959687U priority Critical patent/JPH0610607Y2/ja
Publication of JPH0186053U publication Critical patent/JPH0186053U/ja
Application granted granted Critical
Publication of JPH0610607Y2 publication Critical patent/JPH0610607Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP17959687U 1987-11-27 1987-11-27 電子ビーム発生装置 Expired - Lifetime JPH0610607Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17959687U JPH0610607Y2 (ja) 1987-11-27 1987-11-27 電子ビーム発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17959687U JPH0610607Y2 (ja) 1987-11-27 1987-11-27 電子ビーム発生装置

Publications (2)

Publication Number Publication Date
JPH0186053U JPH0186053U (enrdf_load_stackoverflow) 1989-06-07
JPH0610607Y2 true JPH0610607Y2 (ja) 1994-03-16

Family

ID=31471143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17959687U Expired - Lifetime JPH0610607Y2 (ja) 1987-11-27 1987-11-27 電子ビーム発生装置

Country Status (1)

Country Link
JP (1) JPH0610607Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0186053U (enrdf_load_stackoverflow) 1989-06-07

Similar Documents

Publication Publication Date Title
JP5822767B2 (ja) イオン源装置及びイオンビーム生成方法
JP7349011B2 (ja) 電子銃及び電子顕微鏡
JP2007073517A (ja) Ｘ線又はｅｕｖを発生させるための装置
US6686590B2 (en) Low-vacuum scanning electron microscope
JPH0459737B2 (enrdf_load_stackoverflow)
JPH0610607Y2 (ja) 電子ビーム発生装置
JP4262158B2 (ja) 低真空走査電子顕微鏡
US4020387A (en) Field emission electron gun
US3931519A (en) Field emission electron gun
US3931517A (en) Field emission electron gun
US5866974A (en) Electron beam generator with magnetic cathode-protection unit
JPH01265443A (ja) Ｘ線露光装置
JPS61208799A (ja) 高速原子線源装置
JPH01161699A (ja) 高速原子線源
JPS60230347A (ja) 荷電粒子照射装置
US3925664A (en) Field emission electron gun
JPS62180942A (ja) 高速原子線源
SU908193A1 (ru) Источник ионов
KR960030348A (ko) 다중음극 전자빔 플라즈마 식각 장치
JPH06338279A (ja) 電子銃
JPH0661126A (ja) 電子ビーム装置及びオリフィス形成方法
JP2702235B2 (ja) 薄膜形成装置
JPH01209633A (ja) 高速原子線源
JPH04255654A (ja) パルス電子銃
JPS6338200A (ja) 高速原子線源