JPH0610252Y2 - 検出装置 - Google Patents

検出装置

Info

Publication number
JPH0610252Y2
JPH0610252Y2 JP12929090U JP12929090U JPH0610252Y2 JP H0610252 Y2 JPH0610252 Y2 JP H0610252Y2 JP 12929090 U JP12929090 U JP 12929090U JP 12929090 U JP12929090 U JP 12929090U JP H0610252 Y2 JPH0610252 Y2 JP H0610252Y2
Authority
JP
Japan
Prior art keywords
scale
displacement amount
displacement
sensor holder
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12929090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0383818U (https=
Inventor
利勝 寺島
Original Assignee
株式会社エヌ・イー・アール
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社エヌ・イー・アール filed Critical 株式会社エヌ・イー・アール
Priority to JP12929090U priority Critical patent/JPH0610252Y2/ja
Publication of JPH0383818U publication Critical patent/JPH0383818U/ja
Application granted granted Critical
Publication of JPH0610252Y2 publication Critical patent/JPH0610252Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP12929090U 1990-11-30 1990-11-30 検出装置 Expired - Lifetime JPH0610252Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12929090U JPH0610252Y2 (ja) 1990-11-30 1990-11-30 検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12929090U JPH0610252Y2 (ja) 1990-11-30 1990-11-30 検出装置

Publications (2)

Publication Number Publication Date
JPH0383818U JPH0383818U (https=) 1991-08-26
JPH0610252Y2 true JPH0610252Y2 (ja) 1994-03-16

Family

ID=31676929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12929090U Expired - Lifetime JPH0610252Y2 (ja) 1990-11-30 1990-11-30 検出装置

Country Status (1)

Country Link
JP (1) JPH0610252Y2 (https=)

Also Published As

Publication number Publication date
JPH0383818U (https=) 1991-08-26

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