JPH0597352A - Vertical transport device for clean room - Google Patents

Abstract

PURPOSE:To prevent the air contamination for the part such as a semiconductor body loaded on a dolly by dividing-constituting a shaft to each shaft for elevator and machine through a partitioning wall having a vertical slit and leading the clean air into the shaft for machine from the shaft for elevator. CONSTITUTION:A shaft 7 is constituted by dividing into an elevator shaft 6 and a shaft 9 for machine by a partitioning wall 12 having a vertical slit, and a dolly transfer device 13 is constituted from a dolly supporting part 14 in the elevator shaft 8 and a connection part which penetrates through the machine part and the vertical slit of the partitioning wall 12 in the shaft 9 for machine. The clean air (a) is supplied from a circulation air conditioner 24 to the blow- out port 18 of the elevator shaft 8 through a superhigh performance filter 27, and then supplied into the elevator shaft 8 in average form from the air feeding hole on an air feeding wall 20 through an air feeding passage 19. Further, the clean air (a) is led into the shaft for machine through the vertical slit on the partitioning wall 12, and led to a contaminated air port containing the dust supplied from the machine part 15 and an elevator means 17, and is returned into the circulation air conditioner 24 from an exhaust passage 21 and an air exhaust port 25 through the exhaust air wall 22.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vertical transfer device for a clean room, which is arranged between a plurality of isolated clean rooms and vertically transfers a trolley transfer device having a trolley on which parts such as semiconductors are mounted.

[0002]

2. Description of the Related Art Recently, in a factory, a clean room for keeping the amount of dust in the room extremely small is adopted because of demands for precision of parts to be manufactured. For example, as the degree of integration of semiconductor chips increases, the cleanliness of clean rooms in semiconductor manufacturing plants is required to increase. If multiple clean rooms are laid out in a factory or if they are laid out on multiple floors, a vertical transfer device for clean rooms is installed to transport people and goods between the clean rooms on multiple floors. It is necessary to keep the cleanliness of the clean room high inside the equipment as well, and to protect the conveyed parts cleanly.

As a vertical conveying device for a clean room that meets such a demand, for example, one disclosed in Japanese Patent Laid-Open No. 3-152004 is known. This vertical transport device for a clean room is provided with a filter on the rear surface side of the load storage unit with its front and rear surfaces opened, and an air supply path is formed behind this filter via a partition wall. An air blower is provided that allows the discharge section to communicate with each other and clean air that has passed through the load storage section to be sucked through the suction section, and forms an air recovery path behind the partition wall through the outer panel of the main body. The recovery passage is connected to the compartment in which the blower is arranged.

[0004]

However, in the conventional vertical conveying device for a clean room, although clean air is supplied to the load storage section by the filter, the load storage section is
Since the front facing the aisle is open, and the machinery such as the lift in the aisle and the luggage on the cargo storage are located in the same space, part of the dust generated by the machinery will adhere to the luggage. ,
There was a problem that the luggage was contaminated.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a vertical transfer device for a clean room which prevents contamination of vertically transferred loads.

[0006]

SUMMARY OF THE INVENTION According to the present invention, a shaft having a carry-in station and a carry-out station into which a carriage is carried in and out is connected to a carry-in station and a carry-out station via a partition wall having a vertical slit. The shaft and the machine shaft are divided into parts, and the shaft has a bogie support located in the lifting shaft and a machine part located in the machine shaft, and the bogie support and the machine part form a connecting part. The carriage transfer device integrated through the above is provided so as to be vertically movable by penetrating the connecting portion in the vertical slit of the partition wall of the shaft, and the carriage transfer device is vertically moved in the machine shaft. Elevating means is provided so as to be freely movable, and a large number of air supply holes are formed along a wall surface of the elevating shaft so that an air supply path along the wall surface is formed separately from the inside of the elevating shaft. An air supply wall is provided, and an air outlet communicating with the air supply path and supplied with clean air is provided at the top or bottom of the shaft for raising and lowering, and the inside of the machine shaft is contaminated along the wall of the machine shaft. An exhaust wall having a large number of exhaust holes was provided so as to form an exhaust path for discharging air away from the inside of the machine shaft, and the machine shaft was provided with an exhaust port communicating with the exhaust path and discharging polluted air. It is characterized by

[0007]

In the present invention, clean air is supplied to the air outlet of the lifting shaft. The clean air is supplied to the inside of the lifting shaft evenly through the air supply holes of the lifting shaft and into the lifting shaft, and then passes through the vertical slits of the partition wall from inside the lifting shaft to the inside of the mechanical shaft. Be led to.

While the flow of clean air from the inside of the lifting shaft to the inside of the mechanical shaft is formed,
Even if dust or the like is generated in the mechanical shaft of the trolley transfer device from the mechanical part of the trolley transfer device and the air in the mechanical shaft is contaminated, the clean air flowing in the mechanical shaft is contaminated with dust. It becomes air and goes to the exhaust wall. The polluted air is guided to the exhaust path through the exhaust hole of the exhaust wall and further to the exhaust port. That is, the contaminated air generated by dust or the like generated in the mechanical part of the carriage transfer device or the elevating means in the machine shaft does not flow into the elevating shaft.

[0009]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 4 show a vertical transfer device for a clean room according to an embodiment of the present invention.

In FIG. 4, reference numeral 1 indicates the first building, and reference numeral 2 indicates the second building. The first building 1 includes the first vertical transfer device 3 for clean room and the clean room 1A. The second clean room vertical transfer device 4 and the clean room 2A are installed in the building 2, respectively, and the first clean room vertical transfer device 3 and the second clean room vertical transfer device 4 are connected via the linear clean tube 5. It is connected. In the linear clean tube 5, a trolley 6 which can travel is arranged.

1 to 4, the first vertical transfer device 3 for a clean room has a shaft 7, and the shaft 7 is composed of a lifting shaft 8 and a machine shaft 9. A loading station 10 connected to the linear clean tube 5 is provided above the lifting shaft 8.
At the lower part of the lifting shaft 8, a carry-out station 11 connected to the clean room 1A is provided.

The shaft 7 is divided into a lifting shaft 8 and a machine shaft 9 through a partition wall 12 having a vertical slit 12A. Shaft 7
A trolley transfer device 13 is provided therein so as to be movable in the vertical direction. The trolley transfer device 13 includes a trolley support part 14 located in the lifting shaft 8 and a machine part 15 located in the machine shaft 9. , Vertical slit 1 on the partition wall 12 of the shaft 7
2A and the connecting part 16 which penetrates.

A carriage transfer device 13 is installed in the machine shaft 9.
An elevating means 17 is provided for vertically moving the. That is, the elevating means 17 has a hoisting device 17A arranged in the upper part of the mechanical shaft 9 and a rope body 17B that is paid out from the hoisting device 17A.
In the middle of, the mechanical section 15 of the carriage transfer device 13 is attached.

The top portion 8A of the lifting shaft 8
A blow-out port 18 to which clean air is supplied is formed. Along the wall surface 8C of the lifting shaft 8, the outlet 18
An air supply wall 20 through an air supply path 19 that guides clean air from the
Are arranged in parallel at a predetermined distance from the wall surface 8C, and the air supply wall 20 has a large number of air supply holes 20A (FIG. 4).

Along the wall surface 9C of the machine shaft 9, an exhaust path 21 for discharging the contaminated air in the machine shaft 9
The exhaust wall 22 is disposed through the exhaust wall 22 and has a large number of exhaust holes 22A.

An exhaust port 23 communicating with the inside of the exhaust path 21 is provided at the upper end of the wall surface 9C of the mechanical shaft 9.
The circulation air conditioner 24 is installed on the floor 1C of the first building 1.
Is installed, and the circulation side of the circulation air conditioner 24 is connected to the duct 2
It is connected to the exhaust port 23 via 5. The air supply side of this circulation air conditioner 24 is connected via a duct 26 to the inlet of an ultra-high performance filter 27 consisting of a HEPA filter installed on the top 8A of the shaft 7, and further, of the ultra-high performance filter 27. The outlet portion is connected to the air outlet 18.

Therefore, in this embodiment, for example,
From the second vertical transport device 4 for clean room, the dolly 6 containing the components is transported in the linear clean tube 5, and arrives at the loading station 10 of the shaft 7 of the vertical transport device 3 for the first clean room. At the carry-in station 10, the carriage 6 that has arrived at the end of the linear clean tube 5 is operated by the shuttle fork mechanism of the carriage transfer device 13 that is located at the carry-in station 10.
Transfer to the trolley transfer device 13.

Next, a hoisting device 17A for the lifting means 17
When the carriage is driven, the carriage transfer device 13 carrying the carriage 6 descends in the shaft 7 and reaches the carry-out station 11. At the carry-out station 11, the carriage 6 on the carriage transfer device 13 is carried out to the clean room 1A.

On the other hand, clean air (a) is supplied from the circulation air conditioner 24 through the ultra-high performance filter 27 to the lifting shaft 8
Is supplied to the air outlet 18 of The clean air (a) is supplied into the elevating shaft 8 on average through the air supply holes 20A of the air supply wall 20 through the air supply path 19 of the elevating shaft 8, and further, from the inside of the elevating shaft 8 to the partition wall 12. Is guided into the mechanical shaft 9 through the vertical slit 12A.

While the flow of the clean air (a) from the inside of the lifting shaft 8 to the inside of the mechanical shaft 9 is formed, the mechanical portion 15 of the carriage transfer device 13 and the vertical movement of Even if dust or the like is generated from the means 17 and the air in the machine shaft 9 is contaminated, the clean air (a) flowing in the machine shaft 9 is contaminated air (b) containing dust or the like.
And goes to the exhaust wall 22. The polluted air (b) is guided to the exhaust path 21 via the exhaust wall 22, further guided to the exhaust port 23, and recirculates to the circulation air conditioner 24 via the duct 25.

Therefore, the contaminated air (B) generated by dust and the like generated from the mechanical portion 15 of the carriage transfer device 13 and the elevating means 17 in the mechanical shaft 9 does not flow into the elevating shaft 8.

According to the above structure, the flow of clean air (a) is formed from the lifting shaft 8 to the machine shaft 9. Even if dust or the like is generated in the mechanical shaft 9 and the air in the mechanical shaft 9 is contaminated, the generated contaminated air (b) is guided to the exhaust path 21 from the mechanical shaft 9 through the exhaust wall 22. Get burned.

Therefore, the contaminated air (b) generated in the machine shaft 9 does not flow into the lifting shaft 8, and the lifting shaft 8 is always kept in a clean state.
Wrap the dolly 6 on board 3 with clean air (a)
It is possible to prevent air pollution of parts such as semiconductors loaded in the.

In this embodiment, the air outlet 18 to which the clean air (a) is supplied is formed at the top portion 8A of the lifting shaft 8, and the clean air (a) descends in the air supply path 19. While being supplied into the lifting shaft 8 via the air supply wall 20, a blowout port to which clean air is supplied may be formed in the bottom portion 8B of the lifting shaft 8.

[0025]

As described above, according to the present invention,
A flow of clean air is formed from the lifting shaft to the machine shaft. Dust etc. is generated in the machine shaft,
Even if the clean air that flows into the mechanical shaft is contaminated,
The polluted air generated by changing from the clean air is guided from the inside of the mechanical shaft to the exhaust path through the exhaust wall.

Therefore, the contaminated air generated in the machine shaft does not flow into the lifting shaft, and the lifting shaft is always kept in a clean state, and the carriage mounted on the carriage transfer device is wrapped in clean air. It is possible to prevent the components such as semiconductors loaded on the trolley from being contaminated with air.

[Brief description of drawings]

FIG. 1 is a side view showing the inside of a vertical transfer device for a clean room according to an embodiment of the present invention.

FIG. 2 is a front view showing the inside of the vertical transport device for the clean room.

FIG. 3 is a plan view showing the inside of the carriage transfer device of the vertical transfer device for the clean room.

FIG. 4 is a layout diagram of the vertical transfer device for the clean room.

[Explanation of symbols]

 3 Vertical Cleaner for the First Clean Room 6 Carriage 7 Shaft 8 Elevating Shaft 8A Top 8B Bottom 9 Machine Shaft 10 Carry-in Station 11 Carry-out Station 12 Partition Wall 12A Vertical Slit 13 Carriage Transfer Device 14 Carriage Support 15 Machinery 16 Connection part 18 Air outlet 19 Air supply path 20 Air supply wall 20A Air supply hole 21 Exhaust path 22 Exhaust wall 22A Exhaust hole 23 Exhaust port a Clean air

Claims (1)

[Claims] 1. A shaft having a carry-in station and a carry-out station for carrying in and out a carriage is divided into a lifting shaft and a machine shaft connected to the carry-in station and the carry-out station via a partition wall having a vertical slit. The trolley transfer, in which the trolley support part located inside the lifting shaft and the machine part located inside the machine shaft are integrated in the shaft, and the trolley support part and the machine part are integrated via the connecting part. A mounting device is provided in a vertical slit of a partition wall of the shaft so as to be vertically movable by penetrating the connecting portion, and an elevating means for vertically moving the cart transfer device is provided in the machine shaft. An air supply wall having a large number of air supply holes is provided along the wall surface of the lifting shaft so as to form an air supply path along the wall surface separately from the inside of the lifting shaft. An outlet for communicating clean air to the air supply path is provided at the top or bottom of the shaft, and an exhaust path for discharging the contaminated air in the machine shaft is provided along the wall surface of the machine shaft for the machine. A vertical transfer device for a clean room, characterized in that an exhaust wall having a large number of exhaust holes is formed so as to be formed separately from the inside of the shaft, and an exhaust port that communicates with an exhaust path and exhausts polluted air is provided on a mechanical shaft. ..