JPH0590429A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH0590429A
JPH0590429A JP3248714A JP24871491A JPH0590429A JP H0590429 A JPH0590429 A JP H0590429A JP 3248714 A JP3248714 A JP 3248714A JP 24871491 A JP24871491 A JP 24871491A JP H0590429 A JPH0590429 A JP H0590429A
Authority
JP
Japan
Prior art keywords
resin
cap
making
sealing
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3248714A
Other languages
Japanese (ja)
Inventor
Tomoaki Hirokawa
友明 廣川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP3248714A priority Critical patent/JPH0590429A/en
Publication of JPH0590429A publication Critical patent/JPH0590429A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16152Cap comprising a cavity for hosting the device, e.g. U-shaped cap
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16195Flat cap [not enclosing an internal cavity]

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PURPOSE:To dissolve disuniformity of resin, poor foaming by making the sealing surface of a case or a substrate and a cap to have a proper tilt angle - shape. CONSTITUTION:An adhesive surface of a ceramic cap 12 has a raised triangular form while an adhesive surface on the side of a ceramic case 11 has a recessed triangular form. Here, the raised surface is required to have an acuter angle than that of the recessed surface, and thereby resin inside the adhesive surface flows in a fixed direction at the time of adhesion followed by dissolution of disuniformity of resin and poor foaming. Further, the damage to resin can be reduced by making the adhesion surface a curved surface. In this case, application uniformity of resin is improved by making the side of the cap 22 a recessed surface in order to apply adhesive resin 13 to the side of the cap 22. Further, resin is intentionally made to flow by making the raised surface to have a smaller curvature than that of the recessed surface.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、半導体装置に関し、特
に、キャップの封止時に樹脂を用いる半導体装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device, and more particularly to a semiconductor device which uses a resin when sealing a cap.

【0002】[0002]

【従来の技術】従来の半導体装置では、図3に示される
如く、筒状壁を持つセラミックスケース31と平面セラ
ミックスキャップ32により素子封止を行う場合、また
は図4に示される如く、平面セラミックスケース41と
筒状壁をもつセラミックスキャップ42により素子封止
を行う場合等が知られている。
2. Description of the Related Art In a conventional semiconductor device, as shown in FIG. 3, elements are sealed by a ceramic case 31 having a cylindrical wall and a flat ceramic cap 32, or as shown in FIG. It is known that the element is sealed with 41 and a ceramics cap 42 having a cylindrical wall.

【0003】上記いずれの場合等でも封着面はケース及
びキャップ共に平面形状であり、互いの封着は樹脂によ
り行われる。
In any of the above cases, the sealing surface of both the case and the cap is flat, and the mutual sealing is performed by resin.

【0004】樹脂の接着方法については、特開昭63−
190345号公報に開示されているように、接着前処
理として、低圧処理と高圧処理を交互に行うことにより
接着樹脂の気泡発生や厚みばらつきの防止を行う方法が
提案されている。
A method for adhering resin is disclosed in JP-A-63-
As disclosed in Japanese Patent No. 190345, as a pre-bonding treatment, a method has been proposed in which low-pressure treatment and high-pressure treatment are alternately performed to prevent generation of air bubbles and variation in thickness of the adhesive resin.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、従来の
封止技術では、接着面が互いに平面なるが故に、樹脂内
の気泡の逃げ道がなく封止前に低圧脱気等を行っても封
止後に接着面に気泡が残る課題があった。
However, in the conventional sealing technique, since the bonding surfaces are mutually flat, there is no escape route for air bubbles in the resin, and even if low-pressure degassing is performed before sealing, after sealing. There was a problem that air bubbles remained on the adhesive surface.

【0006】本発明は従来の上記実情に鑑みてなされた
ものであり、従って本発明の目的は、従来の技術に内在
する上記課題を解決することを可能とした新規な半導体
装置を提供することにある。
The present invention has been made in view of the above conventional circumstances, and therefore, an object of the present invention is to provide a novel semiconductor device capable of solving the above problems inherent in the conventional art. It is in.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
に、本発明に係る半導体装置は、ケースまたは基板及び
キャップの封止・封着面に適当な傾斜角・形状を備えて
構成される。
In order to achieve the above object, a semiconductor device according to the present invention is configured such that the sealing / sealing surfaces of a case or a substrate and a cap are provided with appropriate inclination angles and shapes. .

【0008】[0008]

【実施例】次に本発明をその好ましい各実施例について
図面を参照しながら具体的に説明する。
BEST MODE FOR CARRYING OUT THE INVENTION The present invention will now be specifically described with reference to the drawings for each of its preferred embodiments.

【0009】図1は本発明による第1の実施例を示す断
面図である。
FIG. 1 is a sectional view showing a first embodiment according to the present invention.

【0010】図1を参照するに、参照番号11はセラミ
ックケース、12はセラミックキャップ、13は封着樹
脂、14は半導体素子、15はボンディングワイヤをそ
れぞれ示している。
Referring to FIG. 1, reference numeral 11 is a ceramic case, 12 is a ceramic cap, 13 is a sealing resin, 14 is a semiconductor element, and 15 is a bonding wire.

【0011】本第1の実施例では、セラミックキャップ
12の接着面が凸状の三角形となっており、セラミック
ケース11側の接着面が凹状の三角形となっている。こ
こで必要なことは凸面が凹面より鋭角を有することであ
り、これにより接着面内での樹脂が接着時に一定方向へ
流れ、これに伴い樹脂の不均一性、気泡不良が解消され
る。
In the first embodiment, the bonding surface of the ceramic cap 12 is a convex triangle, and the bonding surface on the ceramic case 11 side is a concave triangle. What is required here is that the convex surface has a sharper angle than the concave surface, so that the resin in the bonding surface flows in a certain direction at the time of bonding, and accordingly nonuniformity of the resin and bubble defects are eliminated.

【0012】図2は本発明による第2の実施例を示す断
面図である。
FIG. 2 is a sectional view showing a second embodiment according to the present invention.

【0013】図中参照番号は図1と同じ要素には同一の
番号を付している。本第2の実施例では接着面形状を曲
面状としており、こうすることにより樹脂へのダメージ
を低減すると共に、さらにこの場合には、接着樹脂13
をキャップ22側に塗布する為にキャップ側を凹面とす
ることにより樹脂の塗布均一性が向上する効果がある。
本実施例でも、凸面を凹面の曲率よりも小さくすること
により樹脂を外側へ意図的に流れる様にすることは前記
第1の実施例と同様である。
In the figure, the same reference numerals are given to the same elements as those in FIG. In the second embodiment, the shape of the adhesive surface is a curved surface, which reduces damage to the resin, and in this case, the adhesive resin 13
In order to apply the resin to the cap 22 side, by making the cap side concave, there is an effect that the resin application uniformity is improved.
Also in this embodiment, the resin is intentionally allowed to flow outward by making the convex surface smaller than the curvature of the concave surface, as in the first embodiment.

【0014】[0014]

【発明の効果】以上説明したように、本発明によれば、
ケースもしくは基板及びキャップの封止・封着面に適当
な傾斜角・形状を持つことにより、特に粘度が高い樹脂
を接着剤として用いた場合に、接着面内での樹脂が一定
方向へ流れ、これにより樹脂の不均一性、気泡不良を解
消することができる。
As described above, according to the present invention,
By having an appropriate inclination angle and shape on the sealing / sealing surface of the case or the substrate and the cap, the resin in the bonding surface flows in a certain direction when a resin having a particularly high viscosity is used as an adhesive. As a result, non-uniformity of the resin and bubble defects can be eliminated.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による第1の実施例を示す断面図であ
る。
FIG. 1 is a sectional view showing a first embodiment according to the present invention.

【図2】本発明による第2の実施例を示す断面図であ
る。
FIG. 2 is a sectional view showing a second embodiment according to the present invention.

【図3】従来技術の第1の例を示す断面図である。FIG. 3 is a sectional view showing a first example of the prior art.

【図4】従来技術の第2の例を示す断面図である。FIG. 4 is a sectional view showing a second example of the prior art.

【符号の説明】[Explanation of symbols]

11、21、31、41…セラミックケース 12、22、32…セラミックキャップ 13…封着樹脂 14…半導体素子 15…ボンディングワイヤ 11, 21, 31, 41 ... Ceramic case 12, 22, 32 ... Ceramic cap 13 ... Sealing resin 14 ... Semiconductor element 15 ... Bonding wire

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 半導体装置、特にキャップの封止時に樹
脂を用いる半導体装置において、ケースもしくは基板及
びキャップの封止・封着面に所定の傾斜形状を持つこと
を特徴とする半導体装置。
1. A semiconductor device, in particular, a semiconductor device using a resin for sealing a cap, wherein a sealing or sealing surface of a case or a substrate and a cap has a predetermined inclined shape.
【請求項2】 前記封止・封着面の前記傾斜形状を凹・
凸状の三角形状としたことを更に特徴とする請求項1に
記載の半導体装置。
2. The inclined shape of the sealing / sealing surface is concave.
The semiconductor device according to claim 1, further comprising a convex triangular shape.
【請求項3】 前記封止・封着面の前記傾斜形状を凹・
凸状の曲面状としたことを更に特徴とする請求項1に記
載の半導体装置。
3. The inclined shape of the sealing / sealing surface is concave.
The semiconductor device according to claim 1, further comprising a convex curved surface.
JP3248714A 1991-09-27 1991-09-27 Semiconductor device Pending JPH0590429A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3248714A JPH0590429A (en) 1991-09-27 1991-09-27 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3248714A JPH0590429A (en) 1991-09-27 1991-09-27 Semiconductor device

Publications (1)

Publication Number Publication Date
JPH0590429A true JPH0590429A (en) 1993-04-09

Family

ID=17182252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3248714A Pending JPH0590429A (en) 1991-09-27 1991-09-27 Semiconductor device

Country Status (1)

Country Link
JP (1) JPH0590429A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0798764A3 (en) * 1996-03-28 2002-06-12 NEC Compound Semiconductor Devices, Ltd. Hollow package manufacturing method and apparatus
JP2005505141A (en) * 2001-09-28 2005-02-17 オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング Sealing member for OLED device
WO2016143845A1 (en) * 2015-03-11 2016-09-15 田中貴金属工業株式会社 Sealing cap for electronic component
WO2020149188A1 (en) * 2019-01-17 2020-07-23 三菱電機株式会社 Semiconductor device and method for manufacturing semiconductor device
US20220236512A1 (en) * 2019-08-08 2022-07-28 Mitsubishi Electric Corporation Optical sensor module

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0798764A3 (en) * 1996-03-28 2002-06-12 NEC Compound Semiconductor Devices, Ltd. Hollow package manufacturing method and apparatus
JP2005505141A (en) * 2001-09-28 2005-02-17 オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング Sealing member for OLED device
WO2016143845A1 (en) * 2015-03-11 2016-09-15 田中貴金属工業株式会社 Sealing cap for electronic component
JP2016171143A (en) * 2015-03-11 2016-09-23 田中貴金属工業株式会社 Electronic component encapsulation cap
KR20170106467A (en) * 2015-03-11 2017-09-20 다나카 기킨조쿠 고교 가부시키가이샤 Cap for sealing electronic parts
CN107408536A (en) * 2015-03-11 2017-11-28 田中贵金属工业株式会社 Electronic component sealing cap
US10103077B2 (en) 2015-03-11 2018-10-16 Tanaka Kikinzoku Kogyo K.K. Sealing cap for electronic component
WO2020149188A1 (en) * 2019-01-17 2020-07-23 三菱電機株式会社 Semiconductor device and method for manufacturing semiconductor device
JPWO2020149188A1 (en) * 2019-01-17 2021-09-30 三菱電機株式会社 Semiconductor devices and manufacturing methods for semiconductor devices
US20220236512A1 (en) * 2019-08-08 2022-07-28 Mitsubishi Electric Corporation Optical sensor module

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