JPH0588678U - Lifting device and cleaning device for grating - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide a lifting device for a grating plate that can efficiently lift the grating plates laid on the floor of a clean room one by one. [Structure] The moving carriage 12 is moved to the vicinity of a cleaning target grating plate (lift target grating plate) 22. Next, the lifting target grating plate 22 is fixed to the connecting jig 18 with the screw rod 46 of the connecting jig 18, the cylindrical body 50, and the stopper member 52. Then, the pulling rope 32 of the spring balancer 14 is unwound by a predetermined amount, and the suction pad 16 sucks the upper surface of the plate 42 of the connecting jig 18. And the tow rope 3 of the spring balancer 14
2 is wound up by a predetermined amount, and the grating plate 22 is lifted via the suction pad 16 and the connecting jig 16. As a result, the grating plates 22 spread on the floor surface 24 can be efficiently lifted one by one without resorting to manual work.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lifting device and a cleaning device for a grating plate, and more particularly to a lifting device and a cleaning device for a grating plate that is spread on the floor surface of a clean room or the like.

[0002]

[Prior Art]

 Precision equipment such as semiconductors is manufactured in a clean room because it requires a dust-free environment during manufacturing. Generally, the floor surface of a clean room is covered with a lattice-shaped grating plate having a predetermined size, and the clean air blown from the ceiling surface can be smoothly sucked into the underfloor chamber by this grating plate. Depending on the size of the clean room, this grating board is used in the unit of thousands to tens of thousands.

Incidentally, the grating plate is regularly cleaned because dust and the like generated during semiconductor manufacturing adheres to the lower surface and the like. Conventional cleaning of grating plates is performed by manually lifting the spread grating plates one by one from the floor surface and carrying them to the outside of a clean room. , It is cleaned by wiping it with chamois. Then, the cleaned grating is carried into the clean room and fitted into the removed part of the floor.

[0004]

[Problems to be solved by the device]

 However, it takes a lot of labor to manually lift the grating plates spread on the floor surface, and as the number of grating plates increases, the operator becomes exhausted and the cleaning work efficiency deteriorates. There are drawbacks. The present invention has been made in view of the above circumstances, and provides a lifting device and a cleaning device for a grating plate that can efficiently lift the grating plates spread on the floor one by one and can be cleaned on the spot. The purpose is to do.

[0005]

[Means for solving the problem]

 In order to achieve the above-mentioned object, the present invention provides a movable carriage that can travel on a floor formed by laminating a large number of lattice-shaped grating plates each having a predetermined size, and a movable carriage. The grating plate lifting means having the upper end thereof attached, the suction means mounted to the lower end of the grating plate lifting means, the upper surface thereof being sucked by the suction means, and the lower surface thereof being connectable with the grating plate. And a connecting means provided with a connecting tool.

[0006]

[Action]

 According to the present invention, first, the movable carriage is moved to the vicinity of the cleaning target grating plate (lift target grating plate). Next, the lifting target grating plate is connected to the connecting means by the connecting tool of the connecting means. Then, the upper surface of the connecting means is sucked by the suction means attached to the lower end of the grating plate lifting means. Then, the grating plate lifting means is operated to lift the grating plate. This makes it possible to efficiently lift the grating plates spread on the floor one by one without resorting to manual work.

Next, a procedure for connecting the connecting means to the grating plate will be described. First, the stopper members fixed to the lower portions of the plurality of screw rods loosely fitted in the respective cylindrical bodies from the respective openings of the plate member are inserted into the lattice-shaped openings of the grating plate. Next, the screw rod is rotated by a predetermined amount to bring the stopper member into contact with the lower surface of the grating plate. Next, the tightening nuts of the screw rods are tightened to sandwich the grating plate between the tubular body and the stopper member. Then, the suction member is sucked onto the upper surface of the plate member. As a result, the grating plate can be lifted while being securely fixed to the connecting means.

Further, the grating plate lifted by the grating plate lifting means is housed in a cleaning box provided on the movable carriage in a hermetically sealed state, and pressure air is supplied from the pressure air supply means to the cleaning box to thereby apply the grating plate. The dust and the like adhering to is peeled and removed. As a result, the grating plate can be cleaned inside the clean room without having to carry it outside the clean room, so that the grating plate can be cleaned efficiently in a short time. Further, the pressure air supplied to the cleaning box is exhausted by removing dust and the like in the air by an exhaust means. This can prevent dust and the like removed during cleaning of the grating plate from re-scattering in the clean room.

On the other hand, a cleaning device for the grating plate is provided separately from the device for lifting the grating plate, and the grating plate lifted by the device for lifting the grating plate is cleaned by the device for cleaning the grating plate. good. That is, the grating plate lifted by the grating plate lifting device is housed in the cleaning box provided on the moving carriage of the grating plate cleaning device, and this grating plate is held by the rotation holding means. Then, pressure air is supplied from the pressure air supply means to the grating plate to remove dust and the like adhering to one surface side of the grating plate. Then, after cleaning one side of the grating plate, the rotation maintaining means rotates the grating plate by 180 ° to clean the other side. The pressure air supplied to the washing box is sucked by the exhaust means provided in the moving carriage to remove dust and the like in the air, and then is exhausted to the outside.

[0010]

【Example】

 Hereinafter, preferred embodiments of a lifting device and a cleaning device for a grating according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 shows a first embodiment of a grating plate lifting device 10 according to the present invention. The grating plate lifting device 10 includes a moving carriage 12, a spring balancer 14, a suction pad 16 and a connecting jig. And a tool 18.

The movable carriage 12 can move on a floor surface 24 formed by casting casters 20, 20 ... And a plurality of grating plates 22 laid on the lower portion of the movable carriage 12 and at the rear (right side in the figure). A hand-pushing arm 26 for manually moving the moving carriage 12 is fixed to (). A vacuum pump 28, which will be described later, is mounted on the moving carriage 12.

An inverted L-shaped arm 30 is erected on the front portion (left side in the figure) of the movable carriage 12, and an upper end portion of the spring balancer 14 described above is provided at a tip portion 30 a of the arm 30. Fixed. The spring balancer 14 can wind up the tow rope 32 attached to the lower part thereof with a predetermined towing force. A hook 34 is fixed to the lower end of the tow rope 32, and the hook 34 is hung on a hook 38 fixed to a support plate 36. The suction pad 16 described above is fixed to the lower surface of the support plate 34 with the suction surface 16a facing downward. The suction pad 16 is connected to the above-mentioned vacuum pump 28 via a hose 40, and the plate 42 of the connecting jig 28 can be sucked by operating the vacuum pump 28. A valve 44 is provided in the middle of the hose 40, and the suction force of the suction pad 16 can be adjusted by the valve 44.

As shown in FIG. 2, the connecting jig 18 has the plate 42 formed in a rectangular shape and four screw rods 46, 46 .... The threaded rods 46, 46 ... Are loosely fitted in the openings 48, 48 ... Formed near the corners 42a, 42a. The cylindrical bodies 50, 50, ..., Which are fixed to the lower surface of the plate 42 so as to communicate with each other, are also loosely fitted. Further, a stopper member 52 formed in a rectangular parallelepiped is fixed to the lower end portion of the screw rod 46. The stopper member 52 has such a size that it can be inserted into a lattice-shaped opening (not shown) of the grating plate 22 shown in FIG. 1 and contacts the lower surface 22a of the grating plate 22 when the screw rod 46 is rotated by a predetermined amount. It is formed in a size that allows contact. A tightening nut 54 is screwed into each of the screw rods 46.

Next, the operation of the grating plate lifting device 10 configured as described above will be described. First, the moving carriage 12 is moved to the vicinity of the cleaning target grating plate (lift target grating plate) 22, and the connecting jig 18 is connected to the lift target grating plate 22. At this time, the connecting jig 18 is in a state of being separated from the suction pad 16.

Next, a procedure for connecting the connecting jig 18 to the grating plate 22 will be described with reference to FIG. First, the stopper members 52, 52 ... Are inserted into the lattice-shaped openings of the grating plate 22 shown in FIG. Next, when the stopper members 52, 52 ... Are inserted respectively, the screw rods 46, 46 ... Are rotated by a predetermined amount so that the stopper members 52, 52 ... Abut the lower surface 22a of the grating plate 22. Next, the tightening nuts 54, 54 ... Of the screw rods 46, 46 ... Are tightened to sandwich the grating plate 22 between the lower end surfaces of the cylinders 50, 50 ... And the stopper members 52, 52. As a result, the grating plate 22 can be securely fixed to the connecting jig 18.

Next, after fixing the connecting jig 18 to the grating plate 22, the pulling rope 32 of the spring balancer 14 shown in FIG. 1 is rewound, and the suction surface 16 a of the suction pad 16 is connected to the plate of the connecting jig 18. It contacts the upper surface of 42. Then, the vacuum pump 28 is operated to adsorb the upper surface of the connecting jig 18. Then, the tow rope 32 is wound up by the spring balancer 14. This allows the grating plate 22 to be lifted from the floor surface 24.

Therefore, by using the grating plate lifting device 10 of this embodiment, the grating plates 22 spread on the floor surface 24 can be efficiently lifted one by one without resorting to manual work. The lifted grating plate 22 is moved together with the grating plate lifting device 10 by a grating plate cleaning device 56 shown in FIGS. 3 and 4 to remove dust and the like attached to the grating plate 22. To be done. A cleaning box 60 is mounted on the moving carriage 58 of the grating plate cleaning device 56. Inside the cleaning box 60, there are provided three small diameter pipes 62 on which the grating plate 22 is placed. Further, in the cleaning box 60, rod-shaped nozzles 66, 66 having a plurality of pressure air outlets 64, 64 formed in the axial direction thereof are arranged, and the rod-shaped nozzles 66, 66 are connected to a blower device 68. ing. Therefore, when the blower device 68 is operated, the pressure air blown out from the pressure air blowout holes 64, 64 of the rod-shaped nozzles 66, 66 causes dust and the like to adhere to the grating plate 22 placed on the pipes 62, 62. Can be removed by peeling. Further, the pressure air blown into the cleaning box 60 is exhausted after dust and the like in the pressure air are removed by a filter (not shown) attached to the exhaust passage 70.

As described above, by using the grating plate cleaning device 56 together with the grating plate lifting device 10, the grating plate 22 can be cleaned inside the clean room without having to carry it outside the clean room. .. Further, since the pressurized air supplied to the cleaning box 60 is exhausted by removing dust and the like in the air, it is possible to prevent dust and the like removed during cleaning of the grating plate 22 from re-scattering in the clean room. it can.

FIG. 5 shows a second embodiment of the grating plate lifting device 72 according to the present invention. The same or similar members as those of the first embodiment shown in FIG. 1 are designated by the same reference numerals. explain. A cleaning box 74 is fixed to the front part of the movable carriage 12. The cleaning box 74 is configured such that the bottom portion can be opened and closed by swinging the pair of bottom plates 76, 76 about hinges 78, 78 as fulcrums.

A case 82 supporting the upper end of the air cylinder 80 is fixed to the upper portion of the cleaning box 74. The cylinder rod 84 of the air cylinder 80 is penetrated through the upper opening 74a of the cleaning box 74, and the support plate 36 for supporting the suction pad 16 is fixed to the tip of the cylinder rod 84. The suction pad 16 is connected to a vacuum pump 28 via a hose 40, and the connection jig 18 shown in FIG. 2 can be sucked by operating the vacuum pump 28. The support plate 36, the suction pad 16, and the connecting jig 18 are housed in a cleaning box 74.

Further, in the cleaning box 74, a rod-shaped nozzle 88 having a plurality of pressure air blowing holes 86, 86, etc. formed in its axial direction is arranged, and the rod-shaped nozzle 88 is connected to an air supply source (not shown). Has been done. On the other hand, an exhaust passage 90 is opened on the side surface of the washing box 74, and the exhaust passage 90 is communicated with an exhaust port 94 via an air amplifier 92 formed on the moving carriage 12 side. The exhaust port 94 is opened to the outside of the moving carriage 12. A HEPA filter 96 for removing dust and the like in the air is provided between the air amplifier 92 and the exhaust port 94.

Next, the operation of the grating plate lifting device 72 configured as described above will be described. First, the moving carriage 12 is moved to the vicinity of the lifting target grating plate 22, and the connecting jig 18 is connected to the lifting target grating plate 22. The procedure for connecting the connecting jig 18 to the grating plate 22 is the same as that in the first embodiment, and therefore its explanation is omitted.

Next, after fixing the connecting jig 18 to the grating plate 22, the bottom plates 76, 76 of the cleaning box 74 are opened and fixed at the position shown by the chain double-dashed line in the figure. Then, the cylinder rod 84 of the air cylinder 80 is extended to bring the suction surface 16 a of the suction pad 16 into contact with the upper surface of the plate 42 of the connecting jig 18. Then, the vacuum pump 28 is operated to adsorb the upper surface of the connecting jig 18. Then, the cylinder rod 84 is contracted to lift the grating plate 22 from the floor surface 24, and when it reaches the position shown in FIG.

Next, after closing the bottom plates 76, 76 and sealing the cleaning box 74, an air supply source (not shown) is operated to blow out pressure air from the pressure air outlets 86, 86 ... Of the rod-shaped nozzle 88. Dust and the like adhering to the grating plate 22 is peeled and removed. The HEPA filter 96 attached to the air amplifier 92 removes dust and the like from the pressure air blown into the cleaning box 74, and the air is exhausted from the exhaust port 94 to the outside of the moving carriage 12.

As described above, in the second embodiment, the cleaning box 74 is provided on the moving carriage 12 to clean the grating plate 22 in a lifted state, so that the grating plate 22 is different from the first embodiment. Can be efficiently cleaned in a short time. In addition, since the pressure air supplied to the cleaning box 74 is exhausted by removing the dust and the like in the air, it is possible to prevent the dust and the like removed during the cleaning of the grating plate 22 from re-scattering in the clean room. It can be prevented.

Further, as shown in FIG. 2, the connecting jig 18 sandwiches the grating plate 22 between the lower end surfaces of the cylinders 50, 50 ... And the stopper members 52, 52. The upper surface 22b (FIG. 5) of the grating plate 22 can be fixed without being in close contact with the lower surface of the plate 42. That is, the connecting jig 18 is devised so that the cleaning area of the grating plate 22 can be widened.

FIG. 6 shows an embodiment of a cleaning device 100 for a grating board according to the present invention. In the drawing, the cleaning device 100 for the grating is provided with a cleaning box 104, an air cleaning device 106, etc. on a moving carriage 102. The cleaning box 104 is formed to have a size capable of accommodating the grating plate 22, and a pair of doors 108, 108 capable of sealing the cleaning box 104 are opened and closed by hinges 110, 110 on the upper part thereof. Installed. The doors 108 and 108 are formed of a transparent acrylic plate so that the inside of the cleaning box 104 can be visually observed from the outside of the cleaning box 104.

Further, in the cleaning box 104, a rotation holding mechanism 112 for the grating plate 22 is arranged. The rotation holding mechanism 112 is capable of chucking and holding the grating plate 22 by the sandwiching member 116 by rotating the grating fixing lever 114, and rotating the grating rotating handle 118 to rotate the grating plate. It can be rotated in the direction of the arrow in the figure while holding 22.

On the other hand, the pressure air blowing nozzle 120 is attached to the upper part in the cleaning box 104. The pressure air blowing nozzle 120 is connected to an air adjusting device 126 via a pipe 122 and a hose 124 which are movable in the left-right direction in the figure. The air adjusting device 126 is connected to an air supply source (not shown). The amount of pressurized air supplied can be adjusted. A flexible tube 127 is attached to the connecting portion of the washing box 104 of the pipe 122 so as to seal the pipe 122 and the connecting portion of the washing box 104. As a result, when the pipe 122 reciprocates in the left-right direction, it is possible to prevent the air in the cleaning box 104 from leaking from the connecting portion of the cleaning box 104. Reference numeral 128 is a manual lever for moving the pipe 122.

The air cleaning device 106 has an intake port 130, an air amplifier 132, a first filter 134, a second filter 136, and an exhaust port 138. The intake port 130 is formed at the bottom of the cleaning box 104. When the air amplifier 132 is driven, the air in the cleaning box 104 can be forcibly sucked and the discharged air can be increased.

The first filter 134 can remove relatively large dust contained in the air sucked in through the air amplifier 132, and the second filter 136 contains the comparatively large dust. Small dust can be removed. The air that has passed through the second filter 136 is discharged to the outside through the exhaust port 138. Next, the operation of the grating plate cleaning device 100 configured as described above will be described.

First, the grating plate cleaning device 100 is moved to the vicinity of the grating plate lifting device 10 shown in FIG. 1, and the grating plate 22 lifted by the grating plate lifting device 10 is moved to the grating plate lifting device 10. Clean with the cleaning device 100. That is, the doors 108, 108 of the cleaning box 104 of the cleaning device 100 for the grating plate are opened and the grating plate 22 lifted by the lifting device 10 for the grating plate shown by the chain double-dashed line in the drawing is stored in the cleaning box 104. Then, the grating plate 22 is held by the rotation holding mechanism 112. At this time, the pressure air blowing nozzle 120 is in a state in which the pipe 122 is moved and positioned rightward in the drawing so as not to interfere with the housing of the grating plate 22.

Next, after closing the doors 108, 108, the pressure air blowing nozzle 120 is appropriately moved to supply the pressure air toward the grating plate 22 and adhere to the upper surface side of the grating plate 22. Remove dust, etc. Then, after cleaning the upper surface side of the grating plate 22, the rotation holding mechanism 112 rotates the grating plate 22 by 180 ° to clean the lower surface side. The pressurized air supplied to the cleaning box 104 is sucked from the intake port 130 of the air cleaning device 106 and passes through the first and second filters 134 and 136 to remove dust in the air. Is discharged into the clean room.

As a result, in this embodiment, since the grating plate 22 can be cleaned inside the clean room without carrying it outside the clean room, the grating plate 22 can be cleaned efficiently in a short time. You can Further, since the pressurized air supplied to the washing box 104 is made to be an ovule by removing dust and the like in the air by the air purifying device 106, the dust and the like removed at the time of cleaning the grating plate 22 can be stored in a clean room. It can be prevented from re-scattering.

[0035]

[Effect of the device]

 As described above, according to the lifting device of the grating plate according to the present invention, the movable carriage is moved to the vicinity of the lifting grating plate to be lifted, and the lifting target grating plate is connected to the connecting means by the connecting means of the connecting means. The upper surface of the connecting means is sucked by the suction means of the grating plate lifting means, and the grating plate is lifted by the grating plate lifting means. This makes it possible to lift the grating plates spread on the floor one by one efficiently without resorting to manual work.

Further, in order to connect the connecting means to the grating plate, a stopper member fixed to the lower part of the plurality of screw rods is inserted into the lattice-like openings of the grating plate, and the screw rods are positioned by the rollers. The stopper member is brought into contact with the lower surface of the grating plate by rotating a fixed amount, and the tightening nut of each screw rod is tightened to sandwich the grating plate between the tubular body and the stopper member. As a result, the grating plate can be securely fixed to the connecting means.

Further, the grating plate lifted by the grating plate lifting means is housed in a cleaning box provided on the moving carriage in a sealed state, and pressure air is supplied from the pressure air supply means to the cleaning box to remove dust adhering to the grating plate. Etc. are removed by peeling. This allows the grating plate to be cleaned inside the clean room without having to carry it outside the clean room, so that the grating plate can be cleaned efficiently in a short time. Further, since the pressure air supplied to the washing box is exhausted by removing dust and the like in the air by the exhaust means, the dust and the like removed at the time of cleaning the grating plate is re-scattered in the clean room. Can be prevented.

On the other hand, a grating plate cleaning device is provided separately from the grating plate lifting device, and the grating plate lifted by the grating plate lifting device is cleaned by the grating plate cleaning device. Has the same effect. That is, the grating plate lifted by the grating plate lifting device is housed in the cleaning box provided on the moving carriage of the grating plate cleaning device, and this grating plate is held by the rotation holding means. Then, pressure air is supplied from the pressure air supply means toward the grating plate to remove dust and the like adhering to one side of the grating plate, and after cleaning one side of the grating plate, the rotation holding is performed. Rotate the grating plate 180 ° by means to clean the other side. The pressurized air supplied to the cleaning box is sucked by the exhaust means provided on the moving carriage to remove dust and the like in the air and then exhausted to the outside. It is possible to prevent the removed dust and the like from re-scattering in the clean room.

[Brief description of drawings]

FIG. 1 is a first part of a lifting device for a grating board according to the present invention.
Front view showing an embodiment

FIG. 2 is a perspective view showing an embodiment of a grating plate connecting jig applied to a grating plate lifting device according to the present invention.

FIG. 3 is a front view showing an embodiment of a cleaning device for a grating plate.

FIG. 4 is a right side view of FIG.

FIG. 5 is a second part of a lifting device for a grating board according to the present invention.
Sectional view showing an embodiment

FIG. 6 is a sectional view showing an embodiment of a cleaning device for a grating plate according to the present invention.

[Explanation of symbols]

 10 ... Lifting device for grating plate 12 ... Moving carriage 14 ... Spring balancer 16 ... Adsorption pad 18 ... Connecting jig 22 ... Grating plate 28 ... Vacuum pump 42 ... Plate 46 ... Screw rod 50 ... Cylindrical body 52 ... Stopper member 74 ... Cleaning box 80 ... Air cylinder 84 ... Cylinder rod 86 ... Pressure air blowing hole 88 ... Nozzle 100 ... Grating plate cleaning device 104 ... Washing box 106 ... Air cleaning device 120 ... Pressure air blowing nozzle

Claims (4)

[Scope of utility model registration request] 1. A movable carriage capable of traveling on a floor formed by laminating a large number of lattice-shaped grating plates formed in a predetermined size, and a grating having an upper end attached to the movable carriage. A plate lifting means, a suction means attached to a lower end portion of the grating plate lifting means, a coupling means having a suction means having an upper surface sucked and a lower surface provided with a coupling tool capable of coupling with the grating plate, A lifting device for a grating plate, comprising: 2. The connecting means corresponds to a plate member having its upper surface adsorbed by the adsorbing means and a plurality of openings formed around the adsorbing means at predetermined intervals, and each of the openings of the plate member. The tubular body fixed to the lower surface of the plate member, the threaded rod loosely fitted into the tubular body through each opening of the plate member, and the tightening nut screwed onto the upper portion of each threaded rod And a stopper member that is fixed to the bottom of each screw rod and is inserted into the lattice-shaped opening of the grating plate, and abuts against the lower surface of the grating plate by rotating the screw rod by a predetermined amount, The lifting device for a grating plate according to claim 1, wherein the grating plate is sandwiched between the tubular body and the stopper member by tightening the tightening nut. 3. A cleaning box for housing the grating plate lifted by the grating plate lifting means in a sealed state, and pressure air supply means for supplying pressure air to the cleaning box to remove dust and the like adhering to the grating plate. 3. The grating plate according to claim 1, further comprising: an exhaust unit for sucking the compressed air supplied to the cleaning box, removing dust and the like in the air and exhausting the compressed air. Lifting device. 4. A movable carriage that can move on a floor formed by laying a plurality of grid-shaped grating plates formed in a predetermined size, and the movable carriage is provided on the movable carriage and seals the grating plate. Cleaning box to be stored in a state, rotation holding means provided in the cleaning box for rotatably holding the stored grating plate, and grating plate movably provided in the cleaning box and held by the rotation holding means Pressure air supply means for supplying pressure air toward, and an exhaust means provided in the movable carriage for inhaling the pressure air supplied to the cleaning box, removing dust and the like in the air, and exhausting the air. A cleaning device for a grating board, which comprises: