JPH0587763B2 - - Google Patents

Info

Publication number
JPH0587763B2
JPH0587763B2 JP62293745A JP29374587A JPH0587763B2 JP H0587763 B2 JPH0587763 B2 JP H0587763B2 JP 62293745 A JP62293745 A JP 62293745A JP 29374587 A JP29374587 A JP 29374587A JP H0587763 B2 JPH0587763 B2 JP H0587763B2
Authority
JP
Japan
Prior art keywords
conductive film
light
transparent conductive
optical microscope
ito film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62293745A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01136002A (ja
Inventor
Itaru Takano
Akyoshi Fujimori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OKU SEISAKUSHO CO Ltd
Original Assignee
OKU SEISAKUSHO CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OKU SEISAKUSHO CO Ltd filed Critical OKU SEISAKUSHO CO Ltd
Priority to JP62293745A priority Critical patent/JPH01136002A/ja
Publication of JPH01136002A publication Critical patent/JPH01136002A/ja
Publication of JPH0587763B2 publication Critical patent/JPH0587763B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP62293745A 1987-11-20 1987-11-20 透明導電膜の位置検出方法ならびにその装置 Granted JPH01136002A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62293745A JPH01136002A (ja) 1987-11-20 1987-11-20 透明導電膜の位置検出方法ならびにその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62293745A JPH01136002A (ja) 1987-11-20 1987-11-20 透明導電膜の位置検出方法ならびにその装置

Publications (2)

Publication Number Publication Date
JPH01136002A JPH01136002A (ja) 1989-05-29
JPH0587763B2 true JPH0587763B2 (show.php) 1993-12-17

Family

ID=17798689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62293745A Granted JPH01136002A (ja) 1987-11-20 1987-11-20 透明導電膜の位置検出方法ならびにその装置

Country Status (1)

Country Link
JP (1) JPH01136002A (show.php)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0621771B2 (ja) * 1987-12-25 1994-03-23 大日本スクリーン製造株式会社 透明電極膜パターンの検出方法
JP2550863B2 (ja) * 1993-06-23 1996-11-06 日本電気株式会社 光ディスク原盤観察装置
JP3379200B2 (ja) * 1994-03-25 2003-02-17 株式会社ニコン 位置検出装置
JP2004223437A (ja) * 2003-01-24 2004-08-12 Toppan Printing Co Ltd カラーレジスト塗布ムラ検査装置
JP2009276167A (ja) * 2008-05-14 2009-11-26 Panasonic Corp 画像認識装置及び画像認識方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60249325A (ja) * 1984-05-25 1985-12-10 Hitachi Ltd 投影露光装置
JPS62169414A (ja) * 1986-01-22 1987-07-25 Hitachi Tokyo Electron Co Ltd 露光装置
JPH06101427B2 (ja) * 1986-01-24 1994-12-12 株式会社ニコン 露光装置

Also Published As

Publication number Publication date
JPH01136002A (ja) 1989-05-29

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