JPH0586616B2 - - Google Patents

Info

Publication number
JPH0586616B2
JPH0586616B2 JP60061238A JP6123885A JPH0586616B2 JP H0586616 B2 JPH0586616 B2 JP H0586616B2 JP 60061238 A JP60061238 A JP 60061238A JP 6123885 A JP6123885 A JP 6123885A JP H0586616 B2 JPH0586616 B2 JP H0586616B2
Authority
JP
Japan
Prior art keywords
electron beam
deflector
deflection
electrode
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60061238A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61220259A (ja
Inventor
Akio Ito
Kazuo Ookubo
Yoshiaki Goto
Toshihiro Ishizuka
Kazuyuki Ozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60061238A priority Critical patent/JPS61220259A/ja
Publication of JPS61220259A publication Critical patent/JPS61220259A/ja
Publication of JPH0586616B2 publication Critical patent/JPH0586616B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60061238A 1985-03-26 1985-03-26 電子ビ−ム装置 Granted JPS61220259A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60061238A JPS61220259A (ja) 1985-03-26 1985-03-26 電子ビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60061238A JPS61220259A (ja) 1985-03-26 1985-03-26 電子ビ−ム装置

Publications (2)

Publication Number Publication Date
JPS61220259A JPS61220259A (ja) 1986-09-30
JPH0586616B2 true JPH0586616B2 (OSRAM) 1993-12-13

Family

ID=13165447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60061238A Granted JPS61220259A (ja) 1985-03-26 1985-03-26 電子ビ−ム装置

Country Status (1)

Country Link
JP (1) JPS61220259A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3291880B2 (ja) * 1993-12-28 2002-06-17 株式会社日立製作所 走査形電子顕微鏡
US6667476B2 (en) 1998-03-09 2003-12-23 Hitachi, Ltd. Scanning electron microscope

Also Published As

Publication number Publication date
JPS61220259A (ja) 1986-09-30

Similar Documents

Publication Publication Date Title
US4600839A (en) Small-dimension measurement system by scanning electron beam
US3626184A (en) Detector system for a scanning electron microscope
US4352985A (en) Scanning ion microscope
US4236073A (en) Scanning ion microscope
US6541780B1 (en) Particle beam current monitoring technique
GB1564526A (en) Mass spectrometer
JPH01223384A (ja) 透過電離箱組立体、電離放射線ビームのずれ検出、補正装置とずれ検出方法、及び線形電子加速器
US3180986A (en) Measuring systems for electron diffraction patterns
JPH0586616B2 (OSRAM)
JP2678059B2 (ja) 電子ビーム装置
JP2947440B2 (ja) 電子エネルギ損失同時計測装置
JPS63205041A (ja) 電子線装置
JPS62219534A (ja) 粒子ゾンデを使用する時間に関係する信号の測定方法と装置
US4882480A (en) Apparatus for detecting the position of incidence of particle beams including a microchannel plate having a strip conductor with combed teeth
US3488494A (en) Ion microscope the image of which represents the intensity of secondary radiation as a function of the position of the primary ions causing the radiation
JPS6360496B2 (OSRAM)
JPH0341402Y2 (OSRAM)
JPH0821351B2 (ja) 電子ビ−ムのアライメント方法
JP2528906B2 (ja) 電圧測定装置
JPH0734366Y2 (ja) 反射高速電子回折装置
JPS61232544A (ja) 電位検出装置
JPH0336029Y2 (OSRAM)
JPH08273587A (ja) 高周波誘導結合プラズマ質量分析装置
JPS637655B2 (OSRAM)
JPH02119035A (ja) 荷電粒子線偏向角度測定装置