JPH0585855B2 - - Google Patents

Info

Publication number
JPH0585855B2
JPH0585855B2 JP60056643A JP5664385A JPH0585855B2 JP H0585855 B2 JPH0585855 B2 JP H0585855B2 JP 60056643 A JP60056643 A JP 60056643A JP 5664385 A JP5664385 A JP 5664385A JP H0585855 B2 JPH0585855 B2 JP H0585855B2
Authority
JP
Japan
Prior art keywords
pressure
strain gauge
diaphragm
seal cap
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60056643A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61213741A (ja
Inventor
Mineo Takayama
Sumio Yokota
Hiroshi Usuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nagano Keiki Seisakusho KK
Original Assignee
Nagano Keiki Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nagano Keiki Seisakusho KK filed Critical Nagano Keiki Seisakusho KK
Priority to JP5664385A priority Critical patent/JPS61213741A/ja
Publication of JPS61213741A publication Critical patent/JPS61213741A/ja
Publication of JPH0585855B2 publication Critical patent/JPH0585855B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP5664385A 1985-03-20 1985-03-20 圧力検出装置 Granted JPS61213741A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5664385A JPS61213741A (ja) 1985-03-20 1985-03-20 圧力検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5664385A JPS61213741A (ja) 1985-03-20 1985-03-20 圧力検出装置

Publications (2)

Publication Number Publication Date
JPS61213741A JPS61213741A (ja) 1986-09-22
JPH0585855B2 true JPH0585855B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-12-09

Family

ID=13033020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5664385A Granted JPS61213741A (ja) 1985-03-20 1985-03-20 圧力検出装置

Country Status (1)

Country Link
JP (1) JPS61213741A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61269034A (ja) * 1985-05-23 1986-11-28 Omron Tateisi Electronics Co ゲ−ジ圧検出用圧力センサ
WO1989003592A1 (en) * 1987-10-07 1989-04-20 Kabushiki Kaisha Komatsu Seisakusho Semiconducteur thin-film pressure sensor and method of producing the same
EP0407587A4 (en) * 1988-09-30 1992-03-11 Kabushiki Kaisha Komatsu Seisakusho Pressure sensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS585232Y2 (ja) * 1978-03-17 1983-01-28 豊田工機株式会社 圧力変換器
JPS56155341U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-04-22 1981-11-19

Also Published As

Publication number Publication date
JPS61213741A (ja) 1986-09-22

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees