JPH058568B2 - - Google Patents

Info

Publication number
JPH058568B2
JPH058568B2 JP60018743A JP1874385A JPH058568B2 JP H058568 B2 JPH058568 B2 JP H058568B2 JP 60018743 A JP60018743 A JP 60018743A JP 1874385 A JP1874385 A JP 1874385A JP H058568 B2 JPH058568 B2 JP H058568B2
Authority
JP
Japan
Prior art keywords
layer
inp
temperature
diffraction grating
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60018743A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61179525A (ja
Inventor
Tooru Nishibe
Masami Iwamoto
Junichi Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60018743A priority Critical patent/JPS61179525A/ja
Publication of JPS61179525A publication Critical patent/JPS61179525A/ja
Publication of JPH058568B2 publication Critical patent/JPH058568B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/2909—
    • H10P14/24—
    • H10P14/3218—
    • H10P14/3221—
    • H10P14/3418—
    • H10P14/3421—
    • H10P14/3444—

Landscapes

  • Semiconductor Lasers (AREA)
JP60018743A 1985-02-04 1985-02-04 気相成長方法 Granted JPS61179525A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60018743A JPS61179525A (ja) 1985-02-04 1985-02-04 気相成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60018743A JPS61179525A (ja) 1985-02-04 1985-02-04 気相成長方法

Publications (2)

Publication Number Publication Date
JPS61179525A JPS61179525A (ja) 1986-08-12
JPH058568B2 true JPH058568B2 (OSRAM) 1993-02-02

Family

ID=11980134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60018743A Granted JPS61179525A (ja) 1985-02-04 1985-02-04 気相成長方法

Country Status (1)

Country Link
JP (1) JPS61179525A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3977920B2 (ja) * 1998-05-13 2007-09-19 富士通株式会社 半導体装置の製造方法
JP6031783B2 (ja) * 2012-03-12 2016-11-24 富士通株式会社 半導体装置の製造方法
JP2016219667A (ja) * 2015-05-22 2016-12-22 住友電気工業株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS61179525A (ja) 1986-08-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term