JPH0585224B2 - - Google Patents
Info
- Publication number
- JPH0585224B2 JPH0585224B2 JP3360602A JP36060291A JPH0585224B2 JP H0585224 B2 JPH0585224 B2 JP H0585224B2 JP 3360602 A JP3360602 A JP 3360602A JP 36060291 A JP36060291 A JP 36060291A JP H0585224 B2 JPH0585224 B2 JP H0585224B2
- Authority
- JP
- Japan
- Prior art keywords
- diameter pipe
- nozzle
- small diameter
- large diameter
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 claims description 18
- 239000002904 solvent Substances 0.000 claims description 16
- 239000007788 liquid Substances 0.000 description 28
- 238000000576 coating method Methods 0.000 description 23
- 239000011248 coating agent Substances 0.000 description 21
- 239000003795 chemical substances by application Substances 0.000 description 9
- 239000002244 precipitate Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Nozzles (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3360602A JPH0596222A (ja) | 1991-12-27 | 1991-12-27 | 液滴下用ノズル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3360602A JPH0596222A (ja) | 1991-12-27 | 1991-12-27 | 液滴下用ノズル |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57151351A Division JPS5939363A (ja) | 1982-08-30 | 1982-08-30 | 液滴下用ノズル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0596222A JPH0596222A (ja) | 1993-04-20 |
| JPH0585224B2 true JPH0585224B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-12-06 |
Family
ID=18470118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3360602A Granted JPH0596222A (ja) | 1991-12-27 | 1991-12-27 | 液滴下用ノズル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0596222A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6076979A (en) * | 1997-07-25 | 2000-06-20 | Dainippon Screen Mfg. Co., Ltd. | Method of and apparatus for supplying developing solution onto substrate |
-
1991
- 1991-12-27 JP JP3360602A patent/JPH0596222A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0596222A (ja) | 1993-04-20 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19940601 |