JPH0582536B2 - - Google Patents

Info

Publication number
JPH0582536B2
JPH0582536B2 JP20376784A JP20376784A JPH0582536B2 JP H0582536 B2 JPH0582536 B2 JP H0582536B2 JP 20376784 A JP20376784 A JP 20376784A JP 20376784 A JP20376784 A JP 20376784A JP H0582536 B2 JPH0582536 B2 JP H0582536B2
Authority
JP
Japan
Prior art keywords
acoustic wave
surface acoustic
frequency
wave element
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20376784A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6180024A (ja
Inventor
Kenkichi Takadera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP20376784A priority Critical patent/JPS6180024A/ja
Publication of JPS6180024A publication Critical patent/JPS6180024A/ja
Publication of JPH0582536B2 publication Critical patent/JPH0582536B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP20376784A 1984-09-27 1984-09-27 表面弾性波圧力センサ Granted JPS6180024A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20376784A JPS6180024A (ja) 1984-09-27 1984-09-27 表面弾性波圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20376784A JPS6180024A (ja) 1984-09-27 1984-09-27 表面弾性波圧力センサ

Publications (2)

Publication Number Publication Date
JPS6180024A JPS6180024A (ja) 1986-04-23
JPH0582536B2 true JPH0582536B2 (OSRAM) 1993-11-19

Family

ID=16479477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20376784A Granted JPS6180024A (ja) 1984-09-27 1984-09-27 表面弾性波圧力センサ

Country Status (1)

Country Link
JP (1) JPS6180024A (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10049461A1 (de) * 2000-10-06 2002-04-11 Bosch Gmbh Robert Kraftsensor
CN100338451C (zh) 2002-03-21 2007-09-19 传感技术有限公司 结合有表面声波器件的压力监测器
GB2426590B (en) * 2005-05-26 2009-01-14 Transense Technologies Plc Pressure sensor
JP4882692B2 (ja) * 2006-11-16 2012-02-22 パナソニック電工株式会社 圧力センサ
EP2056087A4 (en) * 2006-10-02 2011-11-30 Panasonic Elec Works Co Ltd PRESSURE SENSOR
JP4835700B2 (ja) 2009-01-26 2011-12-14 株式会社デンソー 弾性表面波式圧力センサ

Also Published As

Publication number Publication date
JPS6180024A (ja) 1986-04-23

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