JPH0581800U - Beam shutter for SOR device - Google Patents

Abstract

(57) [Abstract] [Purpose] A radiation shielding material that constitutes a beam shutter is arranged outside the beam channel to prevent the degree of vacuum in the vacuum chamber from being lowered by degassing from the shielding material. [Structure] Branch from the storage ring 22 of the SOR device to S
In the beam channel 26 through which the OR light 36 is guided,
Through-hole 35 for beam channel of concrete wall 33 that separates synchrotron chamber 30 and SOR light utilization area 32
The bellows 70, 71 are inserted in the position immediately before the above to form the beam channel movable portion 78. A radiation shielding material 80 is connected to the lower surface of the beam channel movable portion 78 so that the actuator 84 can move the radiation shielding material 80 up and down. The SOR light 36 can be emitted by moving the radiation shield 80 downward. When there is a large amount of radiation such as when an electron beam is incident, the radiation shielding material 80 is moved upward to shield the radiation.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a beam shutter in an SOR (synchrotron radiation) device, and prevents the degree of vacuum in the vacuum chamber of the SOR device from decreasing due to degassing from the radiation shielding material that constitutes the beam shutter. ..

[0002]

[Prior Art]

 The SOR device is expected to be applied to various fields such as creation of ultra-ultra LSI circuits, diagnosis in the medical field, molecular analysis, structural analysis.

FIG. 2 shows an outline of the SOR device. An electron beam generated by a charged particle generator (electron gun, etc.) 10 is accelerated to near the speed of light by a linear accelerator (linac) 12, deflected by a deflection electromagnet 16 of a beam transport unit 14, and passed through an inflector 18. It is incident on the storage ring 22. The electron beam incident on the storage ring 22 is converged by the focusing electromagnets 23 (for vertical direction) and 25 (for horizontal direction) while being given energy by the high-frequency acceleration cavity 21, and is deflected by the deflection electromagnet 24 to be accumulated. Keep going around. The SOR light generated when being deflected by the deflecting electromagnet 24 is sent to, for example, the exposure device 28 through the beam channel 26 and is used as a light source or the like for producing an ultra-ultra LSI circuit.

A configuration example of the beam channel 26 is shown in FIG. From the deflection position of the storage ring 22 arranged in the synchrotron chamber 30, the vacuum chamber forming the beam channel 26 is branched in the tangential direction thereof, and the SOR light emitted from the electron beam 34 circulating around the storage ring 22 is branched. 36 is led. The beam channel 26 is guided to the SOR light utilization area 32 through a concrete wall 33 which separates the synchrotron chamber 30 and the SOR light utilization area 32 and prevents radiation from entering the SOR light utilization area 32. .. The gap of the beam channel through hole 35 of the concrete wall 33 is sealed with a lead block 37.

In the beam channel 26 in the synchrotron chamber 30, from the upstream side thereof, a manual valve 38, an absorber 40, an FCV (Fast Closing Valve) 42, an ADL (Acoustic Delay Line) 44, A beam shutter 46 and the like are provided. The manual valve 38 blocks the storage ring 22 and the beam channel 26 when the beam channel 26 is maintained. The absorber 40 is for blocking the SOR light 36, and is composed of a block of water-cooled oxygen-free copper or the like. When the SOR light 36 is blocked, it is driven by the drive device so as to enter the SOR light optical axis in the beam channel 26, and to escape from the SOR light optical axis when the SOR light 36 is emitted.

The FCV 42, together with the ADL 44, blocks the beam channel 26 in the event of an air inflow accident from the end of the beam channel 26 or the like to prevent the beam from flowing into the storage ring 22, and a pressure increase is detected downstream of the beam channel 26. When this happens, the ADL 44 delays the inflow of air and shuts off the FCV 42 at high speed during that time.

The beam shutter 46 prevents the radiation from entering the SOR light utilization area 32 through the beam channel through hole 35 when the electron beam is incident on the storage ring 22. That is, when the electron beam is incident on the storage ring 22, many electron beams collide with the inner wall surface of the storage ring 22, and various kinds of radiation pass through the wall surface of the storage ring 22 and enter the synchrotron chamber 30 in four directions. Scatter on. Most of the scattered radiation is shielded by the concrete wall 33 surrounding the synchrotron chamber 30, but a part of it may leak to the SOR light utilization area 32 through the beam channel through hole 35. Therefore, the beam shutter 46 is arranged immediately in front of the beam channel through hole 35 and is closed when the electron beam is incident, thereby preventing the leakage of radiation to the SOR light utilization area 32.

The configuration of the conventional beam shutter 46 is shown in FIG. The beam shutter 46 is composed of a lead block 50. The beam shutter 46 is connected to the rod 52. The rod 52 penetrates the flange 54 and is drawn out to the outside, is vacuum-sealed by the bellows 56, and is connected to the cylinder 58. By driving the cylinder 58 downward when an electron beam is incident, the beam shutter 46 moves onto the SOR optical axis 60 of the beam channel 26 as shown in FIG. 4, and penetrates at a position just before the concrete wall 33. The entire hole 35 is blocked and the radiation 62 is blocked to prevent leakage to the SOR light utilization area 32. When the normal operation is started after the injection of the electron beam 34 and the SOR light 36 is guided to the SOR light utilizing area 32, the beam shutter 46 is moved from above the SOR light optical axis 60 by driving the cylinder 58 upward. It is retracted and the SOR light 36 is emitted.

[0009]

[Problems to be solved by the device]

 Since the conventional beam shutter 46 is housed in the beam channel 26, it serves as a degassing source, which is one of the causes that make it difficult to maintain the ultrahigh vacuum state in the storage ring 22.

The present invention solves the above-mentioned problems in the conventional technique, and prevents the vacuum degree in the vacuum chamber of the SOR device from being lowered by degassing from the radiation shielding material forming the beam shutter. It is trying to provide the beam shutter of.

[0011]

[Means for Solving the Problems]

 This invention is to install bellows on both sides at a position before the beam channel that branches from the deflection position of the storage ring of the SOR device and guides the SOR light through the concrete wall that separates the synchrotron chamber and the SOR light utilization area. And a beam channel movable part that is inserted so as to form a part of the beam channel and that can be retracted from the optical axis while blocking the inside of the beam channel from the outside air, and outside the beam channel. A radiation shielding material that is placed and moves in the beam channel movable section to enter or exit the beam channel optical axis after being retracted so as to block the beam channel through hole through which the beam channel penetrates. It must be equipped.

[0012]

[Action]

 According to this invention, the movable part of the beam channel is arranged by the bellows so as to be retractable from the axis of the beam channel, and the radiation shielding material is introduced from the outside of the beam channel to the position where the movable part of the beam channel is retracted. Since the through hole for the beam channel in the wall is blocked, it is possible to shield the radiation without housing the radiation shielding material in the beam channel. Therefore, degassing from the radiation shielding material can be completely prevented from entering the vacuum chamber of the SOR device, and the inside of the vacuum chamber can be maintained at an ultrahigh vacuum.

[0013]

【Example】

 One embodiment of this invention is shown in a side view in FIG. In FIG. 1, (a) shows a state where radiation is not shielded when the SOR light is emitted, and (b) shows a state where radiation is shielded when the electron beam is incident. From the deflection position 23 of the storage ring 22 arranged in the synchrotron chamber 30, the vacuum chamber forming the beam channel 26 is branched in the tangential direction thereof, and the electron beam 34 circulating around the storage ring 22 is radiated. The SOR light 36 is guided. The beam channel 26 is guided to the SOR light utilization area 32 by penetrating a concrete wall 33 that separates the synchrotron chamber 30 and the SOR light utilization area 32 and prevents radiation from entering the SOR light utilization area 32. .. The gap of the through hole 35 for the beam channel of the concrete wall 33 is sealed with a lead block 37.

A beam channel movable portion 78 having bellows 70 and 71 attached to both sides is inserted into the beam channel 35 located immediately in front of the concrete wall 33. The bellows 70 and 71 are constructed by connecting short bellows 73 and 74 on both sides of a short tube 72, respectively, so that the beam channel movable part 78 and the beam channel optical axis are different from those in the case of being constituted by a single bellows. I'm trying to make a big save from 60. A radiation blocking member 80 made of a lead block or the like is connected to the lower surface of the beam channel movable portion 78. The radiation shield 80 is attached to the tip of a movable rod 86 of an actuator 84 (for example, a hydraulic cylinder) installed on the floor 82, and is movable in the vertical direction. The beam channels 26 other than the beam channel moving part 78 are fixedly supported by a support (not shown) on the floor 82.

According to the above configuration, when the SOR light is emitted, the radiation shield 80 is retracted from the beam channel optical axis 60 by shortening the movable rod 86 of the actuator 84 as shown in FIG. 1A. The SOR light 36 is guided to the SOR light utilization area 32 through the beam channel 26.

Further, when the electron beam is incident or the like, if the movable rod 86 of the actuator 84 is extended as shown in FIG. 1B, the radiation shielding material 80 moves to the beam channel optical axis 60, and the storage ring. The radiation 62 radiated from 22 is shielded to prevent it from entering the SOR light utilization area 32 through the beam channel through hole 35. According to this, since the radiation shielding material 80 is arranged outside the beam channel 35, degassing from the radiation shielding material 80 does not lower the vacuum in the vacuum chambers 22 and 26, and the vacuum chambers 22 and 26 are not reduced. The inside of 22 and 26 can be maintained in an ultrahigh vacuum.

[0017]

[Example of change]

 In the above embodiment, the beam channel movable portion 78 is retracted upward, but the invention is not limited to this, and it may be retracted downward, leftward, rightward, or the like.

Further, in the above-described embodiment, the beam channel movable portion 78 is pushed up by the driving force of the radiation shielding material 80 so as to be retracted. However, a separate drive device for the beam channel movable portion 78 is provided to independently drive and retract the beam channel movable portion 78. You can also let it.

[0019]

[Effect of the device]

 According to this invention, the movable part of the beam channel is arranged by the bellows so as to be retractable from the axis of the beam channel, and the radiation shielding material is introduced from the outside of the beam channel to the position where the movable part of the beam channel is retracted. Since the through hole for the beam channel in the wall is blocked, it is possible to shield the radiation without housing the radiation shielding material in the beam channel. Therefore, degassing from the radiation shielding material can be completely prevented from entering the vacuum chamber of the SOR device, and the inside of the vacuum chamber can be maintained at an ultrahigh vacuum.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of the present invention.

FIG. 2 is a plan view showing an outline of an SOR device.

FIG. 3 is a plan view showing a specific configuration of the beam channel shown in FIG.

FIG. 4 is a sectional view showing a conventional beam shutter.

[Explanation of symbols]

 22 Storage ring 23 Deflection position 26 Beam channel 30 Synchrotron chamber 32 SOR light utilization area 33 Concrete wall 35 Through hole for beam channel 46 Beam shutter 60 Beam channel optical axis 70,71 Bellows 78 Beam channel movable part 80 Radiation shielding material

Claims (1)

[Scope of utility model registration request] 1. Bellows are mounted on both sides of the SOR device before the beam channel for branching the deflection position of the storage ring and guiding the SOR light penetrates through the concrete wall that separates the synchrotron chamber and the SOR light utilization area. And a beam channel movable part that is inserted so as to form a part of the beam channel and that can be retracted from the optical axis while blocking the outside air in the beam channel, and is disposed outside the beam channel. And a radiation shielding material that enters into and exits the optical axis of the beam channel after the beam channel movable portion is retracted, and blocks a beam channel through hole through which the beam channel penetrates. Beam shutter for SOR equipment.