JPH0555540U - Beam channel shield structure for SOR device - Google Patents

Abstract

(57) [Abstract] [Purpose] When guiding the SOR light generated in the synchrotron room to the clean room through the beam channel, the synchrotron room is formed through the gap between the beam channel through holes formed in the radiation shielding wall that blocks the synchrotron room and the clean room. Prevents dusty air from entering the clean room. The beam channel 26 is guided from the synchrotron chamber 3 to the clean room 5 through a through hole 30 in the radiation shielding wall 4. The beam channel 26 and the radiation shielding wall 4 are hermetically connected by the closing means 44, and the through hole 30 is formed.
The gap 32 is closed to prevent air from entering the clean room 5 from the synchrotron room 3. By constructing a part of the beam channel 26 with the bellows 40 and 42, it is possible to absorb the movement of the beam channel 26 due to thermal expansion or the like, and prevent the beam channel 26 from being subjected to an excessive force by being connected by the closing means 44. To prevent.

Description

[Detailed description of the device]

[0001]

[Industrial application]

 The present invention relates to the structure of a portion of a SOR device in which a beam channel for emitting SOR light penetrates a radiation shielding wall, and prevents dust-containing air in a synchrotron chamber from entering a clean room to which a beam channel is guided. It is a thing.

[0002]

[Prior Art]

 In recent years, the synchrotron is expected to be applied as a synchrotron radiation (SOR) device to various fields such as creation of ultra-ultra LSI circuits, diagnosis in the medical field, molecular analysis, and structural analysis.

FIG. 2 is a plan view showing the outline of the SOR device. The synchrotron 1 is housed in a synchrotron chamber 3 surrounded by an outer wall 2. The electron beam generated by the charged particle generator (electron gun, etc.) 10 is accelerated by the linear accelerator (linac) 12 to near the speed of light, deflected by the deflection electromagnet 16 of the beam transport unit 14, and stored through the inflector 18. It is incident on the product ring 22. The electron beam incident on the storage ring 22 is focused by the focusing electromagnets 23 (for vertical direction) and 25 (for horizontal direction) while being given energy in the high-frequency accelerating cavity 21, and is deflected by the deflection electromagnet 24 to be stored in the storage ring 22. Keep going around. The SOR light 29 generated when being deflected by the deflecting electromagnet 24 is sent to the clean room 5 through the beam channel 26, and is used as, for example, a light source for lithography for making an ultra-LSI circuit in the exposure device 28.

The synchrotron chamber 3 and the clean room 5 are shielded by a radiation shield wall 4 so that the radiation emitted from the synchrotron 1 does not enter the clean room 5, and the beam channel 26 is formed in the radiation shield wall 4. It is guided to the clean room 5 through the through hole 30.

The structure of the through hole 30 of the radiation shielding wall 4 is shown in an enlarged scale in FIG. A gap 32 is provided between the through hole 30 and the beam channel 26 to allow the beam channel 26 to be inserted into and removed from the through hole 30, and a lead block 34 is provided in the gap 32 to prevent radiation from leaking into the clean room 5. The lead hair 36 is filled.

[0006]

[Problems to be solved by the device]

 Although the lead block 34 and the lead bristles 36 in FIG. 3 can shield the radiation, they are not airtight structures and have a drawback that dust-containing air 38 in the synchrotron chamber 3 enters the clean room 5. It was

This invention solves the drawbacks of the prior art and provides a shield channel penetrating structure for a beam channel of a SOR device that prevents dust-laden air in a synchrotron chamber from entering a clean room. To do.

[0008]

[Means for Solving the Problems]

 According to a first aspect of the present invention, there is provided a radiation shielding wall which shields a synchrotron chamber for housing a synchrotron and a clean room, and a beam channel through which SOR light emitted from the synchrotron is guided through the radiation shielding wall. Through the through hole formed in the radiation shield wall to guide it to the clean room, the bellows inserted on both sides of the beam channel of the portion passing through the through hole, and the radiation shield wall and the bellows of the beam channel. It comprises a closing means for connecting the sandwiched portion and airtightly closing the gap between the through hole and the beam channel to airtightly shut off the synchrotron chamber and the clean room.

According to a second aspect of the present invention, a radiation shielding wall that shields the synchrotron chamber that houses the synchrotron and the clean room, and a beam channel that guides SOR light emitted from the synchrotron are provided in the radiation shielding wall. A through hole formed in the radiation shielding wall for penetrating into the clean room through the through hole, and the radiation shielding wall and the beam channel are connected via a bellows to form the through hole and the beam channel. And a closing means for airtightly closing the synchrotron chamber and the clean room by airtightly closing the gap with the airtightness and allowing the relative movement of the beam channel with respect to the radiation shielding wall by the bellows. It is a thing.

[0010]

[Action]

 According to this invention, since the gap between the through-hole and the beam channel is airtightly closed by the closing means to airtightly shut off the synchrotron chamber and the clean room, dust-containing air in the synchrotron chamber is removed. It is possible to prevent the entry into the clean room. Further, since the bellows is inserted, the relative movement of the beam channel with respect to the radiation shielding wall is not hindered regardless of the presence of the blocking means.

[0011]

【Example】

 (Embodiment 1) An embodiment of the invention described in claim 1 is shown in FIG. This is an enlarged view of the portion of the radiation shielding wall 4 of the SOR device of FIG. 2 as in the case of FIG. Further, FIG. 4 shows a view taken along the line AA of FIG.

The synchrotron chamber 3 and the clean room 5 are shielded by the radiation shielding wall 4 so that the radiation emitted from the synchrotron 1 does not enter the clean room 5, and the beam channel 26 is formed in the radiation shielding wall 4. It is guided to the clean room 5 through the through hole 30.

A gap 32 is provided between the through hole 30 and the beam channel 26, and the gap 32 is filled with a lead block 34 and lead bristles 36 so that radiation does not leak to the clean room 5.

The beam channel 26 is divided into a portion 26 a to be inserted into the through hole 30 and portions 26 b and 26 c on both sides of the portion 26 a, which are connected to each other by bellows 40 and 42 to form an ultrahigh beam inside the beam channel 26. While maintaining the vacuum, the portions 26b 1 and 26c 2 can move to some extent with respect to the portion 26a.

A closing means 44 made of a disk-shaped metal plate is fitted in the shield wall penetrating portion 26 a of the beam channel 26, and is hermetically connected by a full-circumferential weld 46. The circular outer peripheral portion of the closing means 44 is airtightly connected to the radiation shielding wall 4 by the bolt 48 to close the gap 32.

According to the above configuration, the radiation that enters from the synchrotron chamber 3 is shielded by the lead block 34 and the lead bristles 36. Further, the synchrotron chamber 3 and the clean room 5 are airtightly shut off by the closing means 44, and the dust-containing air from the synchrotron chamber 3 is closed by the closing means 44 and does not enter the clean room 5. Further, since the movement of the beam channel 26 due to thermal expansion and the like is absorbed by the bellows 40, 42, the portion 26a of the beam channel 26 and the radiation shielding wall 4 are firmly connected by the closing means 44. No unreasonable force is applied to the beam channel 26 or the like.

(Embodiment 2) An embodiment of the invention according to claim 2 is shown in FIG. The same parts as those in the embodiment of FIG. 1 are designated by the same reference numerals. This is one in which a bellows 52 is inserted in the closing means itself. That is, the closing means 50 is made of metal and is formed into a generally cylindrical shape, and the beam channel 26 is inserted therein. A bellows 52 is inserted in the middle of the closing means 50. The right end of the closing means 50 is airtightly joined to the beam channel 26 by a welding 54 around the entire circumference. The circular outer peripheral portion of the right end portion of the closing means 50 is airtightly connected to the shielding wall 4 by the bolt 56 to close the gap 32.

According to the above configuration, the radiation that enters from the synchrotron chamber 3 is shielded by the lead block 34 and the lead bristles 36. Further, the synchrotron chamber 3 and the clean room 5 are airtightly shut off by the closing means 44, and the air containing dust from the synchrotron chamber 3 is closed by the closing means 50 and does not enter the clean room 5. Further, since the bellows 52 absorbs the movement of the beam channel 26 such as thermal expansion, even if the beam channel 26 and the radiation shielding wall 4 are connected by the closing means 50, an unreasonable force is applied to the beam channel 26 and the like. It doesn't take. Further, the bellows 52 need not be for ultra-high vacuum as in the embodiment shown in FIG.

[0019]

[Effect of the device]

 As described above, according to the present invention, the clogging means hermetically closes the gap between the through hole and the beam channel to hermetically shut off the synchrotron chamber and the clean room. It is possible to prevent the contained air from entering the clean room. Moreover, since the bellows is inserted, the relative movement of the beam channel with respect to the radiation shielding wall is not obstructed regardless of the presence of the blocking means.

[Brief description of drawings]

1 is a plan view showing an embodiment of the invention according to claim 1, and is an enlarged view of a radiation shield wall penetrating portion of a beam channel 26 in the SOR apparatus of FIG.

FIG. 2 is a plan view showing an outline of an SOR device.

FIG. 3 is a plan view showing a conventional beam channel shield wall penetrating structure.

4 is a cross-sectional view taken along the line AA of FIG.

FIG. 5 is a plan view showing another embodiment of the device according to claim 2;

[Explanation of symbols]

 1 synchrotron 3 synchrotron chamber 4 radiation shielding wall 5 clean room 26 beam channel 29 SOR light 30 through hole 32 gap 40, 42, 52 bellows 44, 50 closing means

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display location H05H 13/04 Z 9014-2G

Claims (2)

[Scope of utility model registration request] 1. A radiation shielding wall which shields a synchrotron chamber containing a synchrotron and a clean room, and a beam channel through which SOR light emitted from the synchrotron is guided to the clean room through the radiation shielding wall. A through hole formed in the radiation shielding wall, a bellows inserted on both sides of the beam channel in a portion passing through the through hole, and a portion sandwiched between the radiation shielding wall and the bellows of the beam channel. A beam channel shield wall penetrating structure of a SOR device, comprising: a closing means that is connected to airtightly closes a gap between the through hole and the beam channel to airtightly close the synchrotron chamber and the clean room. 2. A radiation shielding wall which shields the synchrotron chamber containing the synchrotron and a clean room, and a beam channel through which SOR light emitted from the synchrotron is guided to the clean room through the radiation shielding wall. For this purpose, the through hole formed in the radiation shielding wall, the radiation shielding wall and the beam channel are connected to each other through a bellows, and the gap between the through hole and the beam channel is airtightly closed to seal the synchrotron chamber. And a closing means for airtightly shutting off the clean room and allowing the relative movement of the beam channel with respect to the radiation shielding wall by the bellows.
A structure for penetrating a shielding wall of a beam channel of an OR device.