JPH08101298A - Valve and apparatus for taking out synchrotron radiation - Google Patents

Abstract

PURPOSE: To take out a light from different wavelength regions using only one light take-out line without requiring a plurality of light take-out lines depending on the wavelength of synchrotron radiation and to simplify the switching. CONSTITUTION: The gate valve 41 of a synchrotron radiation take-out valve 40, which can be opened/closed freely while being vacuum sealed, is disposed in a light take-out line. A through hole 45 is made through the valve plug 44 of the gate valve 41 in order to fix a metal film 47 transmitting hard X-rays. The gate valve 41 is operated such that the valve plug 44 is closed in case of hard X-rays and the synchrotron radiation passed through the metal film 47 under vacuum sealed state is utilized whereas the valve plug 44 is opened in case of soft X-rays and the synchrotron radiation is utilized under the state of a vacuum chamber having no metal film 47. With such structure, synchrotron radiation can be utilized over a wide range using a single light take-out line and the switching can be made easily by opening/closing the valve.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a synchrotron radiation extraction valve and a synchrotron radiation extraction device, and a wide range of radiation from a soft X-ray having a long wavelength to a hard X-ray having a long wavelength is provided by interposing a single radiation extraction line. The light can be easily switched and extracted.

[0002]

2. Description of the Related Art In recent years, with the research and development of particle accelerators,
Creation of ultra-ultra LSI circuits using the extracted synchrotron radiation,
It is expected to be applied to various fields such as diagnosis, molecular analysis and structural analysis in the medical field.

For example, a cyclotron radiation (SOR) device, which is one of the small particle accelerators, has an electron beam generated by an electron generator (electron gun, etc.) 10 that is linear as shown in FIG. It is accelerated to near the speed of light by an accelerator (linac) 12, is deflected by a deflecting electromagnet 16 of a beam transport unit 14, and is incident on a storage ring 22 of a synchrotron via an inflector 18. The electron beam incident on the storage ring 22 is converged by the converging electromagnet 23 while being given energy in the high-frequency acceleration cavity 21, and is deflected by the deflecting electromagnet 24.
It is deflected by and is continuously circulated in the storage ring 22 composed of a vacuum duct, and becomes a stored state. Bending electromagnet 24
The SOR light 29 generated when being deflected by is emitted through the window 32 at the tip of the light extraction line 26.

The window 32 for emitting the SOR light 29 needs a function of emitting the SOR light 29 while blocking the high vacuum inside the light extraction line 26 and the low vacuum outside or the atmosphere. The window of 29 is formed by using a thin metal film such as beryllium having a high transmittance and a high mechanical strength (hereinafter, referred to as a metal film window 32).

The SOR light 29 emitted in this manner is sent to, for example, the exposure device 28 and is used as a light source or the like for producing an ultra-super LSI circuit.

The radiated light used as a light source for forming such an ultra-ultra LSI circuit is in a short hard X-ray region having a wavelength of about 5 to 10 angstroms, and is emitted through a metal film window 32 such as beryllium. Even if the light is taken out from the take-out line 26, necessary light can be taken out and unnecessary light can be removed.

[0007]

However, in a large synchrotron radiation device, a hard X-ray having a short wavelength (wavelength of 0.01 to 1 angstrom) to a soft X-ray having a long wavelength (wavelength of 1 to 1) is used.
It is considered to use radiated light in a wide range of up to 00 angstrom), and if soft X-rays with a long wavelength are to be extracted through a metal film window such as beryllium, the longer the wavelength, the more difficult it is to transmit and use. There is a problem that you can not.

Therefore, it is necessary to install a plurality of light extraction lines 26 according to the wavelength of emitted light,
Alternatively, it is necessary to remove the metal film window 32 attached to the flange at the tip of the light extraction line 26 and connect it to a device that utilizes radiated light in a simple chamber state without a metal window, which cannot be removed remotely. Therefore, there is a problem that the worker must attach and detach at the light extraction line 26.

The present invention has been made in view of the above problems and does not require a plurality of light extraction lines depending on the wavelength of emitted light, and one light extraction line can extract light of different wavelength regions. An object of the present invention is to provide a radiation light extraction valve and a radiation light extraction device that can be easily switched.

[0010]

A synchrotron radiation extraction valve according to the present invention comprises a valve chamber of a gate valve which constitutes a vacuum chamber, and a valve body which can be inserted into and removed from a valve seat in the valve chamber to shut off the vacuum chamber. A metal film which is provided in a through hole formed in the valve body and can transmit hard X-rays, and a cooling pipe which is provided around the metal film of the valve body and cools the metal film. It is characterized by.

Further, the radiant light extraction device of the present invention is a radiant light extraction device for extracting the radiated light emitted from the storage ring. A gate valve is provided, a through hole is formed in the valve body of the gate valve, and a metal film capable of vacuum sealing and transmitting hard X-rays is attached to the through hole.

[0012]

According to the synchrotron radiation extraction valve of the present invention, the valve chamber of the gate valve is constituted by a vacuum chamber, a through hole is formed in the valve body, and a metal film capable of transmitting hard X-rays is attached. Cooling pipes are arranged in the surrounding valve zone to allow cooling. In the case of hard X-rays by operating the valve element similar to the gate valve, the valve is closed and the metal film is inserted in a vacuum sealed state through a metal film. The transmitted radiant light can be used, and in the case of soft X-ray, the radiated light can be used in the state of a simple vacuum chamber without a metal film by opening the valve, and only one light extraction line is required.
Switching can be easily done by opening and closing the valve body, and the heating of the metal film associated with the extraction of the emitted light can be cooled.

Further, according to the radiant light extraction apparatus of the present invention, a gate valve that can be opened and closed and can be vacuum-sealed is provided in the light extraction line, and a through hole is formed in the valve body of the gate valve to transmit hard X-rays. If a hard X-ray is operated by operating the gate valve, the radiant light transmitted through the metal film can be used in a vacuum sealed state by operating the gate valve. In the case of a line, radiant light can be used in a chamber without a metal film by opening the valve, and only one light extraction line is required, and switching can be easily done by opening and closing the gate valve. .

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings. 1 and 2 relate to an embodiment of a radiant light extraction valve of the present invention. FIG. 1 is a sectional view and a front view of the radiant light extraction valve, and FIG. 2 is a partial perspective view of the radiant light extraction valve.

This radiant light extraction valve 40 is a single light extraction line 26 (see FIG. 4) that radiates a wide range of radiant light, from radiant light in a hard X-ray region having a short wavelength to radiant light in a soft X-ray region having a long wavelength. ) It is installed and switched to be used for taking out.

The emitted light extraction valve 40 is composed of a gate valve 41 provided at the tip of the light extraction line 26.

The valve chamber 42 of the gate valve 41, which is the emitted light extraction valve 40, is formed as a vacuum chamber so that it can be vacuum-sealed, and valve seats 43 are formed on both sides of the valve chamber 42. The valve seat 44 of the
By making close contact with both sides, the upstream side and the downstream side can be vacuum-sealed.

A through hole 45 is formed in the valve body 44 of the gate valve 41 for penetrating the upstream side and the downstream side of the emitted light extraction line 26, and an optical path of the emitted light is formed even when the valve body 44 is closed. I can do it. A concave portion 46 having a diameter larger than that of the through hole 45 is formed on the downstream side of the valve body 44. The concave portion 46 can transmit radiated light in the hard X-ray region having a short wavelength and can be vacuumed. A metal film 47 such as beryllium that can be sealed is a mounting frame 48.
It is attached with a bolt 49 or the like.

A metal film 47 attached to the valve body 44
Therefore, the cooling pipe 50 is arranged so as to surround the metal film 47, and both ends of the cooling pipe 50 are led out to the upper portion of the valve body 44 so that the valve body 44 can be opened and closed. It is connected via a flexible tube 51 to a cooling water inlet 52 and an outlet 53 fixed to the outside of the valve chamber 42 in a hermetically sealed state.

Further, an opening / closing mechanism 55 is attached to the upper part of the valve chamber 42 for opening / closing the valve body 44 via the valve rod 54 integrated with the valve body 44, and the valve body 44 can be opened / closed by remote control. There is. In this way, the emitted light extraction valve 40 of the present invention is constructed.

Next, the radiant light extraction device 60 of the present invention is used.
As shown in FIG. 3 by way of example, the radiant light extraction line 26 is connected to the upstream side via flanges 56 at both ends of the valve chamber 42 of the gate valve 41 of the radiant light extraction valve 40 having the above-described configuration. In addition, depending on the wavelength of the radiant light used on the downstream side of the radiant light extraction valve 40, the hard X
When using a wire, an experimental device for use under atmospheric conditions 6
1 and the like are connected, and when utilizing a soft X-ray having a long wavelength, an experimental device 62 used in a vacuum state is connected and configured.

In this synchrotron radiation extraction device 60, an experiment was carried out in which the synchrotron radiation extraction valve 40 was used in the light extraction line 26 on the upstream side of the gate valve 41 in the inflow of air due to the damage of the metal film 47 or in the vacuum state. A shock wave delay tube, a high-speed cutoff valve, or an ordinary gate valve is installed as necessary in order to minimize the influence on the synchrotron radiation device due to the inflow of air due to damage to the device 61 or the like.

According to the radiation light extraction valve 40 and the radiation light extraction device 60 including the radiation light extraction valve 40, when the radiation light in the hard X-ray region having a short wavelength is used among the radiation light, Since the emitted light can be transmitted through the metal film 47 formed of a metal thin film of beryllium having a short wavelength and unnecessary light can be removed, the valve body 44 of the gate valve 41 of the emitted light extraction valve 40 is closed. Used as a closed state.

The gate valve 4 of this synchrotron radiation extraction valve 40
When the valve body 44 of No. 1 is closed, the upstream side of the emitted light extraction line 26 can be vacuum-blocked by the valve body 44, and the metal film 47 of beryllium that blocks the through hole 45 formed in the valve body 44 is transmitted. The emitted light can be extracted.

On the other hand, in the case where the emitted light in the soft X-ray region having a long wavelength is used among the emitted light, the required emitted light should be blocked and transmitted by the metal film 47 formed of a metal thin film of beryllium having a long wavelength. Can not be.

Therefore, the valve body 44 of the gate valve 41 of the emission light extraction valve 40 installed in the light extraction line 26 is used in an open state.

The gate valve 4 of this synchrotron radiation extraction valve 40
When the valve body 44 of No. 1 is opened, the valve body 44 is pulled up above the valve chamber 42, the upstream side and the downstream side of the gate valve 41 are directly connected, and the state is the same as that of a normal vacuum chamber. As a result, the emitted light can be taken out and used by the experimental device 61 in a vacuum state.

Therefore, the radiation light extraction valve 40 and the radiation light extraction device 6 including the radiation light extraction valve 40 are provided.
According to 0, a wide range of emitted light from the long soft X-rays to the short hard X-rays extracted from the synchrotron radiation device can be used in one light extraction line 26, and
It suffices to operate the gate valve 41 of the emitted light extraction valve 40 according to the wavelength, and the switching can be easily performed.

[0029]

As described above in detail with reference to one embodiment, according to the synchrotron radiation extraction valve of the present invention, the valve chamber of the gate valve is constituted by a vacuum chamber and a through hole is formed in the valve body. A metal film that can transmit hard X-rays was attached, and a cooling pipe was placed around the valve body around this metal film so that it could be cooled. Can use the radiant light that passes through the metal film in a vacuum sealed state with the valve closed, and in the case of soft X-ray, use the radiated light in the state of a simple vacuum chamber without the metal film by opening the valve. It is possible to use a wide range of emitted light with one light extraction line, and switching can be easily done by opening and closing the valve body, and heating of the metal film accompanying extraction of the emitted light is performed by supplying and discharging the cooling liquid to the cooling pipe. Can be cooled,
The reliability of the metal film can be improved.

Further, according to the radiant light extraction apparatus of the present invention, a gate valve which can be opened and closed and can be vacuum-sealed is provided in the light extraction line, and a through hole is opened in the valve body of the gate valve to transmit the hard X-ray. Since a metal film that can be used is attached, by operating the gate valve, in the case of hard X-rays, the valve can be closed and radiated light that passes through the metal film in a vacuum sealed state can be used, resulting in a soft X-ray. In the case of a line, radiated light can be used in the state of a simple vacuum chamber without a metal film by opening a valve, a wide range of radiated light can be used with one light extraction line, and switching is also possible. It can be easily done by opening and closing the valve.

[Brief description of drawings]

FIG. 1 is a sectional view and a front view of an embodiment of a synchrotron radiation extraction valve of the present invention.

FIG. 2 is a partial perspective view of an embodiment of the emitted light extraction valve of the present invention.

3A and 3B are cross-sectional views of a radiant light extraction valve according to an embodiment of the present invention in a closed state and an opened state, respectively.

FIG. 4 is a plan view showing an outline of an example of a synchrotron radiation device to which the present invention is applied.

[Explanation of symbols]

 26 Light extraction line 29 SOR light 32 Metal film window 40 Radiant light extraction valve 41 Gate valve 42 Valve chamber 43 Valve seat 44 Valve body 45 Through hole 46 Recess 47 Metal film 48 Mounting frame 49 Bolt 50 Cooling pipe 51 Expansion pipe 52 Cooling water Inlet 53 Cooling water outlet 54 Valve rod 55 Opening / closing mechanism 56 Flange 60 Synchrotron radiation extraction device 61 Atmospheric experimental device 62 Vacuum experimental device

Claims (2)

[Claims] 1. A valve chamber of a gate valve constituting a vacuum chamber, a valve body which can be inserted into and removed from a valve seat in the valve chamber to shut off a vacuum chamber, and a through hole formed in the valve body. And a cooling pipe that is provided around the metal film of the valve body and cools the metal film. 2. A radiant light extraction device for extracting radiated light emitted from a storage ring, wherein the radiant light extraction line is provided with a gate valve which can be opened and closed and which can be vacuum-sealed so as to be opened when a soft X-ray is extracted. Through-hole is formed in the valve body, and a metal film capable of vacuum sealing and transmitting hard X-rays is attached to the through-hole.