JPH06140199A - Absorber for sor device - Google Patents

Abstract

PURPOSE:To provide an absorber which can be used also to SOR light of high energy and constituted in a small size. CONSTITUTION:In an absorber 30, a plate X-ray absorbing part 31 having a light receiving surface 31a obliquely formed to the advancing direction of SOR light 40 is formed of oxygen free copper. The X-ray absorbing part 31 is formed in a thickness capable of absorbing the SOR light 40. Cooling passages 54 are formed on both sides with the X-ray absorbing part 31 in-between, and cooling water 58 is sent to them, respectively.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an absorber for shielding SOR light in an SOR (synchrotron radiation) device, which is capable of shielding high energy SOR light.

[0002]

2. Description of the Related Art In recent years, small synchrotrons are expected to be applied as synchrotron radiation (SOR) devices to various fields such as creation of ultra-ultra LSI circuits, diagnosis in the medical field, molecular analysis and structural analysis. .

An outline of a compact synchrotron radiation device is shown in FIG. An electron beam generated by a charged particle generator (electron gun, etc.) 10 is accelerated to near the speed of light by a linear accelerator (linac) 12, deflected by a deflecting electromagnet 16 of a beam transport unit 14, and accumulated via an inflector 18. Ring 22
Is injected inside. The electron beam incident on the storage ring 22 is converged by the converging electromagnets 23 (for vertical direction) and 25 (for horizontal direction) while being given energy in the high-frequency acceleration cavity 21, and is deflected by the deflection electromagnet 24 to be stored in the storage ring 22. Keep going around. The SOR light generated when being deflected by the deflection electromagnet 24 is sent to, for example, the exposure device 28 through the beam channel 26, and is used as a light source or the like for creating an ultra-super LSI circuit.

Inside the beam channel 26, an absorber is provided for blocking the SOR light and stopping its emission. An example of the structure of the absorber is shown in a side view in FIG.
The absorber 30 is made of water-cooled oxygen-free copper or the like. The absorber 30 is connected to the rod 32. The rod 32 penetrates the flange 34 and is pulled out to the outside.
It is vacuum-sealed by a bellows 36 and connected to a cylinder 38. When stopping the emission of the SOR light 40, the cylinder 3
By driving 8 downwardly, the absorber 30 is moved onto the SOR optical axis 42 of the beam channel 26 to block the SOR light 40 as shown. When the SOR light 40 is emitted, by driving the cylinder 38 upward, the absorber 30 is retracted from the SOR light optical axis 42 and the SOR light 40 is emitted.

The absorber has S in addition to the beam channel.
It is appropriately arranged at a place where the OR light needs to be shielded. For example, in the storage ring 22, as shown in the plan view of FIG. 4, when the electron beam 44 passes through the beam orbit 48 and passes through the deflecting portion (position where the deflection electromagnet 24 is disposed) 46, its tangential direction. The SOR light 40 is emitted to. The storage ring 22 has a portion where the irradiation of the SOR light 40 must be avoided. For example, the bellows 50 may be inserted into the storage ring 22 for the purpose of absorbing its thermal expansion, but when the bellows 50 is irradiated with the SOR light 40, the bellows 50 is burned. Therefore, in such a place, the absorber 30 is arranged in front of it, and the bellows 50 is protected by blocking the SOR light 40 here.

In the conventional absorber 30, as shown in FIG. 3, the light receiving surface is oriented at right angles to the SOR optical axis 42.

[0007]

For example, in a relatively large synchrotron having a particle beam energy of 8 GeV, a beam current of 100 mA and a bending radius of 23.2 m, the SO
Since the energy of the R light is high, the absorber 30 having the structure shown in FIG. 3 cannot be used because the surface of the position 52 irradiated with the SOR light 40 may become extremely hot and melt. .

Therefore, in order to solve such a problem, an absorber having a structure shown in FIG. 5 has been conventionally proposed. This is because the light receiving surface 30a of the absorber 30 is formed obliquely with respect to the traveling direction of the SOR light 40.
By obliquely receiving light, the light receiving area is expanded (that is, the light receiving density is reduced), and local heat generation is prevented. The heat generation of the light receiving surface 30a is cooled by the cooling water 58 flowing through the cooling flow path 54 formed on the back surface thereof.

However, in the absorber 30 of FIG. 5, the greater the intensity of the SOR light, the shallower the angle of the light receiving surface 30a and the wider the light receiving area, so the depth D becomes large, and the weight of the absorber 30 is correspondingly increased. As the number of the absorbers increases, there is a problem that the arrangement space for the absorber 30 needs to be wide.

The present invention solves such problems in the prior art and can be used without dissolving even high energy SOR light and can be constructed in a small size. Is to provide.

[0011]

The absorber according to the present invention is arranged at a position where the SOR light should be shielded.
The inside of the X-ray absorption portion has a light-receiving surface obliquely arranged with respect to the traveling direction of light, and a cavity is formed on both sides of the X-ray absorption portion, and a cooling fluid is flown into these cavities. It will be.

[0012]

According to the present invention, since the X-ray absorbing portion obliquely receives the SOR light, the light receiving area is enlarged, the light receiving density is reduced, and local heat generation is prevented. Moreover, since the X-ray absorbing section is cooled from both sides thereof, it can be cooled efficiently. Therefore, if the intensity of the SOR light is the same, the light receiving surface can be made upright as compared with the absorber of FIG. 5, and the depth of the absorber can be made smaller and the size can be reduced, and the weight can be reduced. It is possible to reduce the installation space.

[0013]

An embodiment of the present invention will be described below. Here, a case where the present invention is applied to an absorber in the beam channel (FIG. 3) will be described. In FIG. 1A, the absorber 30 is connected to the rod 32. The rod 32 penetrates the flange 34 and is pulled out to the outside, is vacuum-sealed by a bellows 36, and is connected to a cylinder 38. When the emission of the SOR light 40 is stopped, the absorber 30 is driven by driving the cylinder 38 downward.
The SOR optical axis 4 of the beam channel 26 as shown.
2 so that the SOR light 40 is blocked. SOR light 40
When the light is emitted, the cylinder 38 is driven upward to retract the absorber 30 from the SOR optical axis 42 and emit the SOR light 40.

The absorber 30 is composed of a block of oxygen-free copper or the like. As shown in FIG. 1C, a light receiving surface 31 is formed in the absorber 30 in the traveling direction of the SOR light 40.
The plate-shaped X-ray absorbing portion 31 in which a is formed obliquely is made of oxygen-free copper or the like. The X-ray absorbing portion 31 is formed to have a thickness capable of absorbing the SOR light 40. A cooling passage 54 is formed on both sides of the X-ray absorbing portion 31 so as to sandwich it. As shown in FIG. 1B, each cooling flow path 54 is formed along the SOR light irradiation position 52. Cooling water 58 flows through the cooling passages 54 through the passages 56 formed in the rod 32.

The incident surface 30a of the absorber 30 is formed as thin as possible (for example, about 100 μm) so that as much of the SOR light 40 as possible is transmitted (that is, heat is not generated by SOR light absorption). However, if the entire incident surface 30a is thinned, the strength is weakened. Therefore, as shown in FIG. 1C, only the portion 30a 'on which the SOR light 40 strikes is formed thin.

According to the above structure, most (for example, 95%) of the SOR light 40 incident on the absorber 30 is transmitted through the incident surface 30a. The transmitted SOR light 40 is received by the X-ray absorber 31 and most of it is absorbed. X-ray absorber 3
The portion that cannot be completely absorbed by 1 is absorbed by the back surface portion 30b of the absorber 30. In this case, the X-ray absorption unit 31 is S
Since the OR light 40 is received obliquely, the light receiving area is enlarged, the light receiving density is reduced, and local heat generation is prevented. Moreover, since the X-ray absorbing portion is cooled by the cooling water 58 that is passed through the cooling flow passages 54 on both sides thereof, it can be cooled efficiently. Therefore, if the intensity of the SOR light 40 is the same, the light receiving surface 31a can be set up in comparison with the light receiving surface 30a of the absorber in FIG. Can be converted. Therefore, the weight of the absorber 30 can be reduced, and the space for disposing the absorber can be reduced.

[0017]

[Modification] The X-ray absorber 31 may be composed of one sheet, or may be composed of a plurality of sheets as shown in FIG. Cooling water flows as a cooling flow path 54 between the X-ray absorbing parts 31. In this case, each X-ray absorbing portion 31 is thinly formed so that the X-ray absorbing portions 31 as a whole sequentially absorb the SOR light 40.
By doing so, the amount of SOR light absorbed by the X-ray absorbing portions 31 in each stage is small, and the amount of heat generation can be further reduced.

[0018]

As described above, according to the present invention, since the X-ray absorbing portion obliquely receives the SOR light, the light receiving area is expanded, the light receiving density is reduced, and local heat generation is prevented. It Moreover, since the X-ray absorbing section is cooled from both sides thereof, it can be cooled efficiently. Therefore, if the intensity of the SOR light is the same, the light receiving surface can be made upright as compared with the absorber of FIG. 5, and the depth of the absorber can be made smaller and the size can be reduced, and the weight can be reduced. It is possible to reduce the installation space.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of the present invention.

FIG. 2 is a plan view showing an outline of an SOR device.

FIG. 3 is a side sectional view showing a configuration example of an absorber.

FIG. 4 is a plan view showing another arrangement example of the absorber.

FIG. 5 is a diagram showing a conventional absorber.

FIG. 6 is a side view showing another embodiment of the present invention.

[Explanation of symbols]

 40 SOR Light 42 SOR Light Traveling Direction (SOR Optical Axis) 54 Cooling Channel (Cavity) 31 X-Ray Absorbing Section 58 Cooling Water (Cooling Fluid)

Claims (1)

[Claims] 1. An X-ray absorption section which has an X-ray absorption section which is arranged at a position where the SOR light should be shielded and whose light-receiving surface is obliquely arranged with respect to the traveling direction of the SOR light. Is an absorber of a SOR device in which cavities are formed on both sides of the cylinder, and a cooling fluid is caused to flow in these cavities.