JPH06140198A - Absorber for sor device - Google Patents

Abstract

PURPOSE:To provide an absorber which is usable also to SOR light of high energy without being melted. CONSTITUTION:In an absorber 30, a plurality of cooling passages 54 are formed along the advancing direction of SOR light 40. To the cooling passages 54, cooling water 58 is sent through a passage 56 formed in a rod 32. The parts nipped by the surface 30a of the absorber 30 and the cooling passages 54 and the part sandwiched by the mutual cooling passages 54 form X-ray absorbing parts 56-1, 56-2, 56-3,.... The X-ray absorbing parts 56-1, 56-2, 56-3... of each layer are formed thin to disperse X-ray absorbing quantity.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an absorber for shielding SOR light in an SOR (synchrotron radiation) device, which is capable of shielding high energy SOR light.

[0002]

2. Description of the Related Art In recent years, small synchrotrons are expected to be applied as synchrotron radiation (SOR) devices to various fields such as creation of ultra-ultra LSI circuits, diagnosis in the medical field, molecular analysis and structural analysis. .

An outline of a compact synchrotron radiation device is shown in FIG. An electron beam generated by a charged particle generator (electron gun, etc.) 10 is accelerated to near the speed of light by a linear accelerator (linac) 12, deflected by a deflecting electromagnet 16 of a beam transport unit 14, and accumulated via an inflector 18. Ring 22
Is injected inside. The electron beam incident on the storage ring 22 is converged by the converging electromagnets 23 (for vertical direction) and 25 (for horizontal direction) while being given energy in the high-frequency acceleration cavity 21, and is deflected by the deflection electromagnet 24 to be stored in the storage ring 22. Keep going around. The SOR light generated when being deflected by the deflection electromagnet 24 is sent to, for example, the exposure device 28 through the beam channel 26, and is used as a light source or the like for creating an ultra-super LSI circuit.

Inside the beam channel 26, an absorber is provided for blocking the SOR light and stopping its emission. An example of the structure of the absorber is shown in a side view in FIG.
The absorber 30 is made of water-cooled oxygen-free copper or the like. The absorber 30 is connected to the rod 32. The rod 32 penetrates the flange 34 and is pulled out to the outside.
It is vacuum-sealed by a bellows 36 and connected to a cylinder 38. When stopping the emission of the SOR light 40, the cylinder 3
By driving 8 downwardly, the absorber 30 is moved onto the SOR optical axis 42 of the beam channel 26 to block the SOR light 40 as shown. When the SOR light 40 is emitted, by driving the cylinder 38 upward, the absorber 30 is retracted from the SOR light optical axis 42 and the SOR light 40 is emitted.

The absorber has S in addition to the beam channel.
It is appropriately arranged at a place where the OR light needs to be shielded. For example, in the storage ring 22, as shown in the plan view of FIG. 4, when the electron beam 44 passes through the beam orbit 48 and passes through the deflecting portion (position where the deflection electromagnet 24 is disposed) 46, its tangential direction. The SOR light 40 is emitted to. The storage ring 22 has a portion where the irradiation of the SOR light 40 must be avoided. For example, the bellows 50 may be inserted into the storage ring 22 for the purpose of absorbing its thermal expansion, but when the bellows 50 is irradiated with the SOR light 40, the bellows 50 is burned. Therefore, in such a place, the absorber 30 is arranged in front of this, and the bellows 50 is protected by blocking the SOR light 40 here.

As shown in FIG. 5, the conventional absorber 30 is constructed such that a cooling flow passage 50 is formed along a SOR light irradiation position 52 in a block of oxygen-free copper or the like, and cooling water is passed through the cooling flow passage 50. It had been.

[0007]

For example, in a relatively large synchrotron having a particle beam energy of 8 GeV, a beam current of 100 mA and a bending radius of 23.2 m, the SO
Since the energy of the R light is high, the absorber 30 having the structure shown in FIG. 5 cannot be used because the surface of the position 52 irradiated with the SOR light 40 may become extremely hot and melt. .

The present invention intends to solve the above problems in the prior art and to provide an absorber of an SOR device which can be used without dissolving even high energy SOR light.

[0009]

The absorber according to the present invention is arranged at a position where the SOR light should be shielded.
It has X-ray absorbing portions arranged in a plurality of layers in the traveling direction of light, and a cooling fluid is caused to flow in a space formed between the X-ray absorbing portions of the plurality of layers.

[0010]

The amount of heat generated by the absorber increases in accordance with the amount of X-ray energy absorbed by blocking the SOR light.
According to this invention, since the absorber is composed of a plurality of layers, the energy absorption (that is, the amount of heat generation) due to the SOR light shielding is dispersed in each layer, and moreover, the cooling fluid is flown between the layers, so that the cooling is efficiently performed. Therefore, it can be used without melting even high energy SOR light.

[0011]

An embodiment of the present invention will be described below. Here, a case where the present invention is applied to an absorber in the beam channel (FIG. 3) will be described. In FIG. 1A, the absorber 30 is connected to the rod 32. The rod 32 penetrates the flange 34 and is pulled out to the outside, is vacuum-sealed by a bellows 36, and is connected to a cylinder 38. When the emission of the SOR light 40 is stopped, the absorber 30 is driven by driving the cylinder 38 downward.
The SOR optical axis 4 of the beam channel 26 as shown.
2 so that the SOR light 40 is blocked. SOR light 40
When the light is emitted, the cylinder 38 is driven upward to retract the absorber 30 from the SOR optical axis 42 and emit the SOR light 40.

The absorber 30 is composed of a block of oxygen-free copper or the like. Inside the absorber 30, the SOR light 40
The plurality of cooling flow paths 54 at right angles to the traveling direction of
They are formed side by side on the R optical axis 42. Each cooling flow path 54
Is formed along the SOR light irradiation position 52, as shown in FIG. Cooling water 58 flows through the cooling passages 54 through the passages 56 formed in the rod 32.

As shown in FIG. 1C, the absorber 30
The portions sandwiched between the surface 30a of the cooling medium and the cooling flow passage 54 and the portions sandwiched between the cooling flow passages 54 are the X-ray absorbing portions 56-1 and 56.
-2, 56-3, ... The amount of heat generated by the SOR light shielding increases in accordance with the amount of energy absorbed, and the amount of energy absorbed increases in accordance with the thickness of the X-ray absorbing portion.
.. are made thin (for example, about 0.2 mm) to disperse the X-ray absorption amount. In particular, since the strong X-ray absorption portion 56-1 of the first layer is irradiated with the strong SOR light 40 which is not attenuated and is cooled only from one side, it is formed particularly thin (for example, about 100 μm). Thereby, the X-ray absorbing portion 56-of each layer
The amount of X-ray absorption at 1, 56-2, 56-3, ... Is 5%, 10%, 10%, etc., respectively, and the amount of X-ray absorption at one layer should be kept low. You can Moreover, the layers 56-1, 56-2, which are formed by X-ray absorption,
Since the heat generation of 56-3, ... Is efficiently cooled by the cooling water 58 flowing through the cooling flow path 54, even if the energy of the SOR light 40 is high, it can be used without melting the absorber 30.

The cooling channel 54 can be formed by drilling, for example. Further, the X-ray absorbing portion 56-1 of the first layer is formed to have a thinness of about 100 μm by cutting and polishing the surface of the absorber 30 as shown in FIG. 6 after forming the cooling flow path 54 by drilling or the like. can do.

[0015]

[Modification] Although the cooling channel 54 is formed in a circular cross section in the above embodiment, it may be formed in a quadrangular cross section as shown in FIG. In this case, if the X-ray absorption portion 56-1 of the first layer is thinly formed over the entire surface, the strength becomes weak. Therefore, only the portion 56-1a of the surface 30a of the absorber 30 that is irradiated with SOR light is thinly formed.

[0016]

As described above, according to the present invention, since the absorber is composed of a plurality of layers, energy absorption by SOR light shielding is dispersed in each layer, and a cooling fluid is flown between the layers. Since it is possible to cool efficiently, it can be used without melting even high energy SOR light.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of the present invention.

FIG. 2 is a plan view showing an outline of an SOR device.

FIG. 3 is a side sectional view showing a configuration example of an absorber.

FIG. 4 is a plan view showing another arrangement example of the absorber.

FIG. 5 is a diagram showing a conventional absorber.

6 is a sectional side view showing a method of manufacturing the absorber of FIG.

FIG. 7 is a side view showing another embodiment of the present invention.

[Explanation of symbols]

 40 SOR light 42 SOR light traveling direction (SOR optical axis) 54 Cooling flow path (space) 56-1, 56-2, 56-3 X-ray absorbing section 58 Cooling water (cooling fluid)

Claims (1)

[Claims] 1. An X-ray absorption section arranged at a position where the SOR light should be shielded, and arranged in a plurality of layers in the traveling direction of the SOR light. An absorber of a SOR device in which a cooling fluid is caused to flow in a space formed between each other.