JPH0578918B2 - - Google Patents

Info

Publication number
JPH0578918B2
JPH0578918B2 JP60252268A JP25226885A JPH0578918B2 JP H0578918 B2 JPH0578918 B2 JP H0578918B2 JP 60252268 A JP60252268 A JP 60252268A JP 25226885 A JP25226885 A JP 25226885A JP H0578918 B2 JPH0578918 B2 JP H0578918B2
Authority
JP
Japan
Prior art keywords
sputtering
ion beam
film
chamber
support means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60252268A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62113388A (ja
Inventor
Masanori Watanabe
Kenji Okamoto
Kyotake Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Shingijutsu Kaihatsu Jigyodan
Original Assignee
Fujitsu Ltd
Shingijutsu Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Shingijutsu Kaihatsu Jigyodan filed Critical Fujitsu Ltd
Priority to JP60252268A priority Critical patent/JPS62113388A/ja
Publication of JPS62113388A publication Critical patent/JPS62113388A/ja
Publication of JPH0578918B2 publication Critical patent/JPH0578918B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electroluminescent Light Sources (AREA)
JP60252268A 1985-11-11 1985-11-11 薄膜型ｅｌ素子の製造方法及びスパツタ装置 Granted JPS62113388A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60252268A JPS62113388A (ja) 1985-11-11 1985-11-11 薄膜型ｅｌ素子の製造方法及びスパツタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60252268A JPS62113388A (ja) 1985-11-11 1985-11-11 薄膜型ｅｌ素子の製造方法及びスパツタ装置

Publications (2)

Publication Number Publication Date
JPS62113388A JPS62113388A (ja) 1987-05-25
JPH0578918B2 true JPH0578918B2 (enrdf_load_stackoverflow) 1993-10-29

Family

ID=17234875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60252268A Granted JPS62113388A (ja) 1985-11-11 1985-11-11 薄膜型ｅｌ素子の製造方法及びスパツタ装置

Country Status (1)

Country Link
JP (1) JPS62113388A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7803254B2 (en) * 2004-12-30 2010-09-28 E. I. Du Pont De Nemours And Company Processes for forming electronic devices and electronic devices formed by such processes

Also Published As

Publication number Publication date
JPS62113388A (ja) 1987-05-25

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees