JPH057773Y2 - - Google Patents
Info
- Publication number
- JPH057773Y2 JPH057773Y2 JP1986101253U JP10125386U JPH057773Y2 JP H057773 Y2 JPH057773 Y2 JP H057773Y2 JP 1986101253 U JP1986101253 U JP 1986101253U JP 10125386 U JP10125386 U JP 10125386U JP H057773 Y2 JPH057773 Y2 JP H057773Y2
- Authority
- JP
- Japan
- Prior art keywords
- base
- piezoelectric vibrator
- thin
- axis
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000005530 etching Methods 0.000 description 9
- 238000000206 photolithography Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 241000700605 Viruses Species 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986101253U JPH057773Y2 (fr) | 1986-06-30 | 1986-06-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986101253U JPH057773Y2 (fr) | 1986-06-30 | 1986-06-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS637815U JPS637815U (fr) | 1988-01-19 |
JPH057773Y2 true JPH057773Y2 (fr) | 1993-02-26 |
Family
ID=30971830
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986101253U Expired - Lifetime JPH057773Y2 (fr) | 1986-06-30 | 1986-06-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH057773Y2 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4960060B2 (ja) * | 2006-10-26 | 2012-06-27 | 京セラクリスタルデバイス株式会社 | 水晶振動板及びその製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5327740B2 (fr) * | 1972-09-27 | 1978-08-10 | ||
JPS59128814A (ja) * | 1983-01-13 | 1984-07-25 | Nippon Dempa Kogyo Co Ltd | 圧電振動子 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5327740U (fr) * | 1976-08-18 | 1978-03-09 |
-
1986
- 1986-06-30 JP JP1986101253U patent/JPH057773Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5327740B2 (fr) * | 1972-09-27 | 1978-08-10 | ||
JPS59128814A (ja) * | 1983-01-13 | 1984-07-25 | Nippon Dempa Kogyo Co Ltd | 圧電振動子 |
Also Published As
Publication number | Publication date |
---|---|
JPS637815U (fr) | 1988-01-19 |
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