JPH0577353B2 - - Google Patents

Info

Publication number
JPH0577353B2
JPH0577353B2 JP62108340A JP10834087A JPH0577353B2 JP H0577353 B2 JPH0577353 B2 JP H0577353B2 JP 62108340 A JP62108340 A JP 62108340A JP 10834087 A JP10834087 A JP 10834087A JP H0577353 B2 JPH0577353 B2 JP H0577353B2
Authority
JP
Japan
Prior art keywords
contact
film
ground plane
etching
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62108340A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63273370A (ja
Inventor
Yoshifusa Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62108340A priority Critical patent/JPS63273370A/ja
Publication of JPS63273370A publication Critical patent/JPS63273370A/ja
Publication of JPH0577353B2 publication Critical patent/JPH0577353B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP62108340A 1987-04-30 1987-04-30 接地面コンタクトの形成方法 Granted JPS63273370A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62108340A JPS63273370A (ja) 1987-04-30 1987-04-30 接地面コンタクトの形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62108340A JPS63273370A (ja) 1987-04-30 1987-04-30 接地面コンタクトの形成方法

Publications (2)

Publication Number Publication Date
JPS63273370A JPS63273370A (ja) 1988-11-10
JPH0577353B2 true JPH0577353B2 (enrdf_load_stackoverflow) 1993-10-26

Family

ID=14482208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62108340A Granted JPS63273370A (ja) 1987-04-30 1987-04-30 接地面コンタクトの形成方法

Country Status (1)

Country Link
JP (1) JPS63273370A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63273370A (ja) 1988-11-10

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