JPH0577321B2 - - Google Patents

Info

Publication number
JPH0577321B2
JPH0577321B2 JP63239135A JP23913588A JPH0577321B2 JP H0577321 B2 JPH0577321 B2 JP H0577321B2 JP 63239135 A JP63239135 A JP 63239135A JP 23913588 A JP23913588 A JP 23913588A JP H0577321 B2 JPH0577321 B2 JP H0577321B2
Authority
JP
Japan
Prior art keywords
resistance
thin film
concentration
alloy
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63239135A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0287501A (ja
Inventor
Sadao Yoshizaki
Shizuka Takeyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUSUMU IND CO Ltd
Original Assignee
SUSUMU IND CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUSUMU IND CO Ltd filed Critical SUSUMU IND CO Ltd
Priority to JP63239135A priority Critical patent/JPH0287501A/ja
Publication of JPH0287501A publication Critical patent/JPH0287501A/ja
Publication of JPH0577321B2 publication Critical patent/JPH0577321B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Adjustable Resistors (AREA)
JP63239135A 1988-09-24 1988-09-24 電気抵抗材料 Granted JPH0287501A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63239135A JPH0287501A (ja) 1988-09-24 1988-09-24 電気抵抗材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63239135A JPH0287501A (ja) 1988-09-24 1988-09-24 電気抵抗材料

Publications (2)

Publication Number Publication Date
JPH0287501A JPH0287501A (ja) 1990-03-28
JPH0577321B2 true JPH0577321B2 (show.php) 1993-10-26

Family

ID=17040294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63239135A Granted JPH0287501A (ja) 1988-09-24 1988-09-24 電気抵抗材料

Country Status (1)

Country Link
JP (1) JPH0287501A (show.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2782288B2 (ja) * 1991-06-19 1998-07-30 進工業株式会社 電気抵抗材料

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62109301A (ja) * 1985-11-08 1987-05-20 株式会社日立製作所 感熱記録ヘツド
JPS62165302A (ja) * 1986-01-16 1987-07-21 進工業株式会社 高抵抗材料

Also Published As

Publication number Publication date
JPH0287501A (ja) 1990-03-28

Similar Documents

Publication Publication Date Title
EP0090048B1 (en) Humidity sensor
JPH0371641B2 (show.php)
US4063211A (en) Method for manufacturing stable metal thin film resistors comprising sputtered alloy of tantalum and silicon and product resulting therefrom
US5001454A (en) Thin film resistor for strain gauge
US4100524A (en) Electrical transducer and method of making
US3203830A (en) Electrical resistor
JPH0577321B2 (show.php)
JPH0666162B2 (ja) 歪ゲージ用薄膜抵抗体
US5227231A (en) Electrical resistive material
Ayerdi et al. Ceramic pressure sensor based on tantalum thin film
JP4622522B2 (ja) 金属抵抗体材料、抵抗薄膜、スパッタリングターゲット、薄膜抵抗器およびその製造方法
JPS6152420B2 (show.php)
JP2001110602A (ja) 薄膜抵抗体形成方法及びセンサ
Schabowska et al. Electrical conduction in Cr-SiO cermet thin films
RU2069324C1 (ru) Термометр сопротивления
JPH0770367B2 (ja) 歪ゲージ用薄膜抵抗体
JP2562610B2 (ja) 歪ゲ−ジ用薄膜抵抗体
JPS62165302A (ja) 高抵抗材料
JP3664655B2 (ja) 高比抵抗材料とその製造方法
Olson et al. Nitrides of Chromium and Chromium‐Titanium Alloys: New Film‐Type Resistance Elements
Schnelle et al. Thickness dependence of resistivity and its temperature coefficient of polycrystalline bismuth films
JP2004303804A (ja) ３元合金材料
JPS6236622B2 (show.php)
JPS63147305A (ja) 金属薄膜抵抗体
JP4121270B2 (ja) ４元合金材料からなるｎｔｃサーミスタ、及び同材料を用いた抵抗器

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081026

Year of fee payment: 15

EXPY Cancellation because of completion of term