JPH0576540B2 - - Google Patents

Info

Publication number
JPH0576540B2
JPH0576540B2 JP62184272A JP18427287A JPH0576540B2 JP H0576540 B2 JPH0576540 B2 JP H0576540B2 JP 62184272 A JP62184272 A JP 62184272A JP 18427287 A JP18427287 A JP 18427287A JP H0576540 B2 JPH0576540 B2 JP H0576540B2
Authority
JP
Japan
Prior art keywords
raw material
electrons
electron beam
electron
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62184272A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6428367A (en
Inventor
Hisashi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP18427287A priority Critical patent/JPS6428367A/ja
Publication of JPS6428367A publication Critical patent/JPS6428367A/ja
Publication of JPH0576540B2 publication Critical patent/JPH0576540B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18427287A 1987-07-23 1987-07-23 Electron beam vapor deposition device Granted JPS6428367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18427287A JPS6428367A (en) 1987-07-23 1987-07-23 Electron beam vapor deposition device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18427287A JPS6428367A (en) 1987-07-23 1987-07-23 Electron beam vapor deposition device

Publications (2)

Publication Number Publication Date
JPS6428367A JPS6428367A (en) 1989-01-30
JPH0576540B2 true JPH0576540B2 (OSRAM) 1993-10-22

Family

ID=16150417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18427287A Granted JPS6428367A (en) 1987-07-23 1987-07-23 Electron beam vapor deposition device

Country Status (1)

Country Link
JP (1) JPS6428367A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12440235B2 (en) 2023-08-23 2025-10-14 Procept Biorobotics Corporation Automated image-guided tissue resection and treatment

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60165374A (ja) * 1984-02-09 1985-08-28 Matsushita Electronics Corp 電子ビ−ム蒸着装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12440235B2 (en) 2023-08-23 2025-10-14 Procept Biorobotics Corporation Automated image-guided tissue resection and treatment

Also Published As

Publication number Publication date
JPS6428367A (en) 1989-01-30

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