JPH0575328B2 - - Google Patents

Info

Publication number
JPH0575328B2
JPH0575328B2 JP62263103A JP26310387A JPH0575328B2 JP H0575328 B2 JPH0575328 B2 JP H0575328B2 JP 62263103 A JP62263103 A JP 62263103A JP 26310387 A JP26310387 A JP 26310387A JP H0575328 B2 JPH0575328 B2 JP H0575328B2
Authority
JP
Japan
Prior art keywords
calculation means
target
displacement
image
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62263103A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01105103A (ja
Inventor
Hikari Ando
Yoshiaki Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP62263103A priority Critical patent/JPH01105103A/ja
Publication of JPH01105103A publication Critical patent/JPH01105103A/ja
Publication of JPH0575328B2 publication Critical patent/JPH0575328B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP62263103A 1987-10-19 1987-10-19 光学式変位測定装置 Granted JPH01105103A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62263103A JPH01105103A (ja) 1987-10-19 1987-10-19 光学式変位測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62263103A JPH01105103A (ja) 1987-10-19 1987-10-19 光学式変位測定装置

Publications (2)

Publication Number Publication Date
JPH01105103A JPH01105103A (ja) 1989-04-21
JPH0575328B2 true JPH0575328B2 (cg-RX-API-DMAC7.html) 1993-10-20

Family

ID=17384865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62263103A Granted JPH01105103A (ja) 1987-10-19 1987-10-19 光学式変位測定装置

Country Status (1)

Country Link
JP (1) JPH01105103A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH01105103A (ja) 1989-04-21

Similar Documents

Publication Publication Date Title
CN1205077A (zh) 五轴/六轴激光测量系统
JP2004531739A (ja) 厚さを光学的にモニタリングする装置および方法
US4969744A (en) Optical angle-measuring device
JP2732849B2 (ja) 干渉測長器
JPH048724B2 (cg-RX-API-DMAC7.html)
JPH0575328B2 (cg-RX-API-DMAC7.html)
US5471302A (en) Interferometric probe for distance measurement utilizing a diffraction reflecting element as a reference surface
JPH0226164B2 (cg-RX-API-DMAC7.html)
JPH0575327B2 (cg-RX-API-DMAC7.html)
JPH0629691B2 (ja) 光学式変位測定装置
JP2008520997A (ja) 物体の動きを検出する光学システム
EP0331353A2 (en) Detecting change in location of a moving source of electromagnetic radiation
JP2009186254A (ja) 光線角度検出器
US20250237498A1 (en) Optical spatial probe
TWI427270B (zh) 應用一維電耦合裝置之多光束位移量測干涉儀系統
JPH04268412A (ja) 位置変化測定装置及びその使用方法
JPH07122566B2 (ja) 光学式変位測定装置
JPH079364B2 (ja) 測長器
JP3319666B2 (ja) エッジ検出装置
JPH069285Y2 (ja) レ−ザ測長装置
GB2236178A (en) Monitoring arrangements
JPS6041287B2 (ja) 微小角測定方法
JP2524048B2 (ja) 変位計測装置
JPH055610A (ja) 計測装置
JPH06221853A (ja) 位置検出装置