JPH0575246B2 - - Google Patents

Info

Publication number
JPH0575246B2
JPH0575246B2 JP1924786A JP1924786A JPH0575246B2 JP H0575246 B2 JPH0575246 B2 JP H0575246B2 JP 1924786 A JP1924786 A JP 1924786A JP 1924786 A JP1924786 A JP 1924786A JP H0575246 B2 JPH0575246 B2 JP H0575246B2
Authority
JP
Japan
Prior art keywords
diffraction grating
light
diffracted
light beam
transmitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1924786A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62177421A (ja
Inventor
Masane Suzuki
Motonori Kanetani
Takayuki Saito
Kenji Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujinon Corp
Original Assignee
Fuji Photo Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Optical Co Ltd filed Critical Fuji Photo Optical Co Ltd
Priority to JP1924786A priority Critical patent/JPS62177421A/ja
Publication of JPS62177421A publication Critical patent/JPS62177421A/ja
Publication of JPH0575246B2 publication Critical patent/JPH0575246B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
JP1924786A 1986-01-31 1986-01-31 斜入射干渉計装置 Granted JPS62177421A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1924786A JPS62177421A (ja) 1986-01-31 1986-01-31 斜入射干渉計装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1924786A JPS62177421A (ja) 1986-01-31 1986-01-31 斜入射干渉計装置

Publications (2)

Publication Number Publication Date
JPS62177421A JPS62177421A (ja) 1987-08-04
JPH0575246B2 true JPH0575246B2 (ru) 1993-10-20

Family

ID=11994080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1924786A Granted JPS62177421A (ja) 1986-01-31 1986-01-31 斜入射干渉計装置

Country Status (1)

Country Link
JP (1) JPS62177421A (ru)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2090483A1 (en) * 1990-10-03 1992-04-04 Gerald E. Cohn Fabrication of multifunctional holographic optical elements and application in photometers
US5654798A (en) * 1995-01-19 1997-08-05 Tropel Corporation Interferometric measurement of surfaces with diffractive optics at grazing incidence
US5793488A (en) * 1995-07-31 1998-08-11 Tropel Corporation Interferometer with compound optics for measuring cylindrical objects at oblique incidence
US5719676A (en) * 1996-04-12 1998-02-17 Tropel Corporation Diffraction management for grazing incidence interferometer
US5684594A (en) * 1996-04-18 1997-11-04 Tropel Corporation Object fixturing in interferometer
US5889591A (en) * 1996-10-17 1999-03-30 Tropel Corporation Interferometric measurement of toric surfaces at grazing incidence
US5777738A (en) * 1997-03-17 1998-07-07 Tropel Corporation Interferometric measurement of absolute dimensions of cylindrical surfaces at grazing incidence

Also Published As

Publication number Publication date
JPS62177421A (ja) 1987-08-04

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