JPH0575242B2 - - Google Patents

Info

Publication number
JPH0575242B2
JPH0575242B2 JP60280417A JP28041785A JPH0575242B2 JP H0575242 B2 JPH0575242 B2 JP H0575242B2 JP 60280417 A JP60280417 A JP 60280417A JP 28041785 A JP28041785 A JP 28041785A JP H0575242 B2 JPH0575242 B2 JP H0575242B2
Authority
JP
Japan
Prior art keywords
measurement
phase delay
wavelength
distance
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60280417A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62138704A (ja
Inventor
Toshitsugu Ueda
Eiji Ogita
Katsumi Isozaki
Katsuya Ikezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP60280417A priority Critical patent/JPS62138704A/ja
Publication of JPS62138704A publication Critical patent/JPS62138704A/ja
Publication of JPH0575242B2 publication Critical patent/JPH0575242B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
JP60280417A 1985-12-13 1985-12-13 測長器 Granted JPS62138704A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60280417A JPS62138704A (ja) 1985-12-13 1985-12-13 測長器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60280417A JPS62138704A (ja) 1985-12-13 1985-12-13 測長器

Publications (2)

Publication Number Publication Date
JPS62138704A JPS62138704A (ja) 1987-06-22
JPH0575242B2 true JPH0575242B2 (enExample) 1993-10-20

Family

ID=17624754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60280417A Granted JPS62138704A (ja) 1985-12-13 1985-12-13 測長器

Country Status (1)

Country Link
JP (1) JPS62138704A (enExample)

Also Published As

Publication number Publication date
JPS62138704A (ja) 1987-06-22

Similar Documents

Publication Publication Date Title
US4005936A (en) Interferometric methods and apparatus for measuring distance to a surface
US4759628A (en) Wavelength scanning interferometry and interferometer employing laser diode
GB2305239A (en) Hetrodyne-interferometer arrangement having variable frequency lasers
JPH039202A (ja) 測長方法及び装置
JP2828162B2 (ja) 絶対測定用の干渉測定方法およびこの方法に適したレーザー干渉計装置
JPS62135703A (ja) 測長器
JP2829966B2 (ja) レーザドツプラ速度計
JPH0575241B2 (enExample)
US6507404B1 (en) Method and apparatus for measuring optical wavelength
JP2935325B2 (ja) マルチプローブ変位測定装置
GB2244808A (en) Method and apparatus for interferometric measurement
JPS62138704A (ja) 測長器
JP2002039714A (ja) 位置検出装置
JPS62215803A (ja) 測長器
US20090147265A1 (en) Detection system for detecting translations of a body
US5384638A (en) Sampling-type optical voltage detector utilizing movement of interference fringe
JPH079364B2 (ja) 測長器
JPH06117810A (ja) 外乱補正機能付きアブソリュ−ト測長器
JPH0695004B2 (ja) 3次元形状測定装置
JPH0641845B2 (ja) 測長器
JPS62135708A (ja) 3次元形状測定装置
JPH0695003B2 (ja) 測長器
JPH01210804A (ja) 面間隔測定方法
JPH0641844B2 (ja) 測長器
JPH0716982Y2 (ja) 光周波数変化測定装置