JPH057250Y2 - - Google Patents
Info
- Publication number
- JPH057250Y2 JPH057250Y2 JP16860985U JP16860985U JPH057250Y2 JP H057250 Y2 JPH057250 Y2 JP H057250Y2 JP 16860985 U JP16860985 U JP 16860985U JP 16860985 U JP16860985 U JP 16860985U JP H057250 Y2 JPH057250 Y2 JP H057250Y2
- Authority
- JP
- Japan
- Prior art keywords
- shroud
- stopper
- opening
- crucible
- molecular beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 238000002844 melting Methods 0.000 description 7
- 230000008018 melting Effects 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16860985U JPH057250Y2 (cg-RX-API-DMAC7.html) | 1985-10-30 | 1985-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16860985U JPH057250Y2 (cg-RX-API-DMAC7.html) | 1985-10-30 | 1985-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6275070U JPS6275070U (cg-RX-API-DMAC7.html) | 1987-05-14 |
| JPH057250Y2 true JPH057250Y2 (cg-RX-API-DMAC7.html) | 1993-02-24 |
Family
ID=31101643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16860985U Expired - Lifetime JPH057250Y2 (cg-RX-API-DMAC7.html) | 1985-10-30 | 1985-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057250Y2 (cg-RX-API-DMAC7.html) |
-
1985
- 1985-10-30 JP JP16860985U patent/JPH057250Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6275070U (cg-RX-API-DMAC7.html) | 1987-05-14 |
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