JPH0571672B2 - - Google Patents
Info
- Publication number
- JPH0571672B2 JPH0571672B2 JP8704785A JP8704785A JPH0571672B2 JP H0571672 B2 JPH0571672 B2 JP H0571672B2 JP 8704785 A JP8704785 A JP 8704785A JP 8704785 A JP8704785 A JP 8704785A JP H0571672 B2 JPH0571672 B2 JP H0571672B2
- Authority
- JP
- Japan
- Prior art keywords
- tip
- mold
- nozzle
- hole
- electroforming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002184 metal Substances 0.000 claims description 25
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 14
- 238000005323 electroforming Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 238000004070 electrodeposition Methods 0.000 claims description 6
- 230000000903 blocking effect Effects 0.000 claims 2
- 238000002788 crimping Methods 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000012212 insulator Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
【発明の詳細な説明】
本発明は、インクジエツトノヅル等の微小ノヅ
ルの製造方法に関する事であり、特に電鋳法によ
るものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing micro nodules such as inkjet nozzles, particularly by electroforming.
従来よりノヅルは、いろいろな方法で作られて
おり、電鋳によつても、流体が通る内面の滑らか
さ等の特長があつて種々の方法で製作されてい
る。 Conventionally, nozzles have been made using various methods, including electroforming, which has features such as a smooth inner surface that allows fluid to pass through.
その代表例を第1図及び第2図に示す。先ず第
1図について説明すると、先端のとがつた型1の
先端に孔をあけプラスチツク・ガラス等の絶縁棒
又はパイプ2を挿入した型を作り、通常の電鋳法
により、剥離処理等の前処理をした後、陰性につ
なぎこの上に銅・ニツケル等の金属Aを電着した
後、型より剥離してノヅルAを得る。又第2図の
方法は、先端に絶縁物を塗布する方法で、例え
ば、一定深さの焙融ワツクスの中に型1の先端を
浸漬し、絶縁物3を形成した型を使用し、上記と
同様に電鋳法によつてノヅルAを得る方法であ
る。 Representative examples are shown in FIGS. 1 and 2. First, to explain Fig. 1, a hole is made at the tip of a mold 1 with a sharp tip and an insulating rod or pipe 2 made of plastic or glass is inserted into the mold. After the treatment, it is connected to a negative electrode and a metal A such as copper or nickel is electrodeposited thereon, and then the nozzle A is obtained by peeling it off from the mold. The method shown in Fig. 2 is a method in which an insulating material is applied to the tip. For example, the tip of the mold 1 is immersed in molten wax to a certain depth, a mold with an insulating material 3 formed thereon is used, and the above-mentioned method is applied. This is a method of obtaining Nozzle A by electroforming method, similar to the above.
第1図の方法では、孔径は、保証できるが、型
1と絶縁棒2とをすき間なく嵌合させる事が困難
で、このすき間にも電着し、しばしば剥離が出来
なくなる事が起る。又此の方法で数10ミクロンの
孔径のノヅルを作る事は、量産上不可能に近い。
又第2図の方法では、絶縁物を一定に塗布する事
が困難であり、又電着の絶縁物上この張り出しに
よつても孔径が変化する欠点がある。又一般にノ
ヅルの孔径の小さい場合、ノヅル出口の板厚もう
すい事を要求されるが、上記従来の方法では、孔
の周囲は、逆に厚くなつてしまう欠点がある。 In the method shown in FIG. 1, the hole diameter can be guaranteed, but it is difficult to fit the mold 1 and the insulating rod 2 without a gap, and electrodeposition occurs even in this gap, often making it impossible to peel it off. Also, it is nearly impossible to create nozzles with a pore diameter of several tens of microns using this method in terms of mass production.
Furthermore, the method shown in FIG. 2 has the disadvantage that it is difficult to uniformly apply the insulator, and the pore diameter changes due to the overhang of the electrodeposited insulator. Generally, when the hole diameter of the nozzle is small, the thickness of the plate at the nozzle exit is also required to be thin, but the conventional method described above has the disadvantage that the area around the hole becomes thicker.
本発明の方法は、型1は単に先のとがつた単純
な形状のものを使い、ノヅル出口の板厚がうす
く、且つ高精度の孔径の微小ノヅルを電鋳によつ
て、製作する方法である。 In the method of the present invention, a mold 1 with a simple shape with a pointed tip is used, and a minute nozzle with a thin plate at the nozzle exit and a highly accurate hole diameter is manufactured by electroforming. be.
先ず第3図につき説明すると軟金属の基板4に
先端のとがつた型1を一定圧力でつきさした状態
で電鋳する。この時基板4にも電着Bするため先
端ノズル出口付近はうすくなる。電着Aと電着B
とは、鋭角で合さるため、電鋳では、パーテング
ラインが出来容易に分離する。 First, referring to FIG. 3, electroforming is performed with a mold 1 having a sharp tip inserted into a soft metal substrate 4 under a constant pressure. At this time, since the electrodeposition B is also applied to the substrate 4, the area near the exit of the tip nozzle becomes thin. Electrodeposition A and Electrodeposition B
and meet at an acute angle, so in electroforming, a parting line is created and they are easily separated.
第4図について説明すると硬金属の基板5とに
軟金属4を或る厚みに形成し、それに同様型をつ
きさす方法で、軟金属4の厚みを加減する事によ
り、つきさす深さを加減し、従つて孔径をより精
度良く製作するための方法である。 To explain Fig. 4, a soft metal 4 is formed to a certain thickness on a hard metal substrate 5, and a similar mold is inserted into the soft metal 4. By adjusting the thickness of the soft metal 4, the depth of insertion can be adjusted. Therefore, this is a method for manufacturing hole diameters with higher precision.
第5図はフオトフアブリケーシヨン等により孔
7をもつた金属板6を製作し、これに型1の先を
その孔に嵌込み同様電鋳して作るものである。 In FIG. 5, a metal plate 6 having a hole 7 is manufactured by photoablation or the like, and the tip of the mold 1 is fitted into the hole and electroformed in the same manner.
尚第6図に示す様に、型1は、必ずしも完全に
尖つた形でなくとも良く、先端に微小の平面8を
もたしても良い。 As shown in FIG. 6, the mold 1 does not necessarily have to have a completely pointed shape, and may have a minute flat surface 8 at the tip.
以下実施例を示す。 Examples are shown below.
実施例 1
第4図に基いて、鉄板5上に半田4を流し、こ
れを切削して40μの厚みとした。これに先端円錐
角60°をもつた型1を押しつけて半田4の中に挿
入し、電鋳した所48μφの孔をもつたノヅルを得
た。Example 1 Based on FIG. 4, solder 4 was poured onto an iron plate 5 and cut to a thickness of 40 μm. A mold 1 with a cone angle of 60° at the tip was pressed onto this, inserted into the solder 4, and electroformed to obtain a nozzle with a hole of 48 μφ.
実施例 2
第5図に基いて、先ず孔7をもつた基板6をス
テンレス板に公知の方法によつて、孔に相当する
部分にフオトレジストを形成し、これにニツケル
電鋳をして、40μφの孔7をもつた金属板6を作
つた。これに先端が円錐状をしたとがつた型1を
圧着した状態で、ニツケル電鋳Aした所定の厚み
まで電鋳した後、金属板6及び型1から剥した
処、前述の孔と同じ径の孔をもつた製品が得られ
た。Example 2 Based on FIG. 5, first, a substrate 6 having holes 7 was formed on a stainless steel plate by a known method, a photoresist was formed on the portion corresponding to the hole, and nickel electroforming was performed on this. A metal plate 6 with a hole 7 of 40 μφ was made. A die 1 with a sharp conical tip was crimped onto this, and after electroforming to a predetermined thickness using Nickel electroforming A, the hole was peeled off from the metal plate 6 and the die 1 and had the same diameter as the hole described above. A product with pores was obtained.
本発明の方法は、このように型の製作が容易な
ばかりでなく、高精度に量産が可能なノヅルの製
作法を提供するものである。 The method of the present invention provides a nozzle manufacturing method that not only facilitates mold manufacturing but also enables mass production with high precision.
第1図及び第2図は従来の方法の実施例を示し
た断面図、第3図から第6図は本発明の実施例を
示す。第3図は、軟金属を用いた場合の断面図、
第4図は、軟金属と硬金属を重ねて用いた時の断
面図、第5図は、基板に孔を設けた実施例の断面
図、第6図は、型の先端に平旦面を設けた場合の
断面図である。
符号の説明、1……型、2……絶縁棒、3……
絶縁物、4……軟金属の基板、5……硬金属の基
板、6……孔をもつた基板、7……孔、8……型
の先端の平旦面、A……型についた電着物、B…
…基板についた電着物。
1 and 2 are sectional views showing an embodiment of a conventional method, and FIGS. 3 to 6 show an embodiment of the present invention. Figure 3 is a cross-sectional view when soft metal is used;
Figure 4 is a cross-sectional view when soft metal and hard metal are used in layers, Figure 5 is a cross-sectional view of an example in which a hole is provided in the substrate, and Figure 6 is a cross-sectional view of an example in which a hole is provided in the substrate. FIG. Explanation of symbols, 1...Type, 2...Insulating rod, 3...
Insulator, 4...Substrate of soft metal, 5...Substrate of hard metal, 6...Substrate with hole, 7...Hole, 8...Flat surface of tip of mold, A...Electricity attached to mold Kimono, B...
...electrodeposition on the board.
Claims (1)
板にその先端のみ、つきさすか、硬金属の基板の
上に設けた軟金属層に、つきさすか、先端を金属
板に設けた孔の中に密閉状に入れるか、又は円錐
状はしているが先端のとがつていない平たい部分
を金属板に圧着するかの方法で、該型の先端部分
のみを電着せぬよう遮断して、電鋳を施して作
る、微小ノズルの製造方法。 2 先端のとがつた形のノズルの型を軟金属の基
板にその先端部分を一定圧力で一定巾つきさした
状態で電鋳して作る、特許請求の範囲第1項記載
の微小ノズルの製造方法。 3 硬金属の基板上に一定の厚みの軟金属層を形
成し、先端のとがつた形のノズルの型のその先端
部分を該軟金属に該硬金属までつきさし、それに
電鋳を施して作る、特許請求の範囲第1項記載の
微小ノズルの製造方法。 4 孔を持つた金属板を製作し、該孔に先端のと
がつた形のノズルの型のその先端を密閉状に入
れ、その部分を遮断し、電鋳を施して作る、特許
請求の範囲第1項記載の微小ノズルの製造方法。 5 円錐形はしているが先端のとがつていない、
平らな形のノズルの型の先端を基板に圧着して、
電鋳を施して作る、特許請求の範囲第1項記載の
微小ノズルの製造方法。[Scope of Claims] 1. A nozzle mold with a sharp tip is attached to a soft metal substrate with only its tip, or a nozzle with a sharp tip is attached to a soft metal layer provided on a hard metal substrate. Only the tip of the mold is sealed by inserting the mold into a hole made in a metal plate, or by crimping a conical but flat part without a sharp tip to the metal plate. A method of manufacturing a micro nozzle by electroforming and blocking the electrodeposition. 2. A method for manufacturing a micronozzle according to claim 1, which is made by electroforming a nozzle mold with a sharp tip onto a soft metal substrate with the tip portion attached to a constant width under a constant pressure. . 3 Form a soft metal layer of a certain thickness on a hard metal substrate, insert the tip of a nozzle mold with a sharp tip into the soft metal up to the hard metal, and electroform it. , a method for manufacturing a micro nozzle according to claim 1. 4. The scope of the claim, which is made by manufacturing a metal plate with a hole, inserting the tip of a nozzle mold with a pointed tip into the hole in a sealed manner, blocking that part, and performing electroforming. 2. The method for manufacturing a micronozzle according to item 1. 5 It has a conical shape but has a blunt tip.
Press the tip of the flat nozzle mold onto the substrate,
A method for producing a micro nozzle according to claim 1, which is produced by electroforming.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8704785A JPS61246396A (en) | 1985-04-23 | 1985-04-23 | Production of tiny nozzle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8704785A JPS61246396A (en) | 1985-04-23 | 1985-04-23 | Production of tiny nozzle |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61246396A JPS61246396A (en) | 1986-11-01 |
JPH0571672B2 true JPH0571672B2 (en) | 1993-10-07 |
Family
ID=13904025
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8704785A Granted JPS61246396A (en) | 1985-04-23 | 1985-04-23 | Production of tiny nozzle |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61246396A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011080157A (en) * | 2010-12-22 | 2011-04-21 | Luzcom:Kk | Ultrafine nozzle and method for producing the same |
-
1985
- 1985-04-23 JP JP8704785A patent/JPS61246396A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61246396A (en) | 1986-11-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |