JPH0568877B2 - - Google Patents
Info
- Publication number
- JPH0568877B2 JPH0568877B2 JP59239471A JP23947184A JPH0568877B2 JP H0568877 B2 JPH0568877 B2 JP H0568877B2 JP 59239471 A JP59239471 A JP 59239471A JP 23947184 A JP23947184 A JP 23947184A JP H0568877 B2 JPH0568877 B2 JP H0568877B2
- Authority
- JP
- Japan
- Prior art keywords
- aln
- glass
- substrate
- layer
- oxide layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23947184A JPS61119094A (ja) | 1984-11-15 | 1984-11-15 | 高熱伝導性回路基板の製造方法 |
DE85102159T DE3587481T2 (de) | 1984-02-27 | 1985-02-27 | Schaltungssubstrat mit hoher Wärmeleitfähigkeit. |
EP85102159A EP0153737B1 (en) | 1984-02-27 | 1985-02-27 | Circuit substrate having high thermal conductivity |
US06/706,280 US4659611A (en) | 1984-02-27 | 1985-02-27 | Circuit substrate having high thermal conductivity |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23947184A JPS61119094A (ja) | 1984-11-15 | 1984-11-15 | 高熱伝導性回路基板の製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28243294A Division JP2506270B2 (ja) | 1994-10-24 | 1994-10-24 | 高熱伝導性回路基板及び高熱伝導性外囲器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61119094A JPS61119094A (ja) | 1986-06-06 |
JPH0568877B2 true JPH0568877B2 (enrdf_load_html_response) | 1993-09-29 |
Family
ID=17045260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23947184A Granted JPS61119094A (ja) | 1984-02-27 | 1984-11-15 | 高熱伝導性回路基板の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61119094A (enrdf_load_html_response) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0725617B2 (ja) * | 1985-08-22 | 1995-03-22 | 住友電気工業株式会社 | 窒化アルミニウム基板およびその製造方法 |
US5352482A (en) * | 1987-01-22 | 1994-10-04 | Ngk Spark Plug Co., Ltd. | Process for making a high heat-conductive, thick film multi-layered circuit board |
US5070393A (en) * | 1988-12-23 | 1991-12-03 | Kabushiki Kaisha Toshiba | Aluminum nitride substrate for formation of thin-film conductor layer and semiconductor device using the substrate |
JPH02174184A (ja) * | 1988-12-26 | 1990-07-05 | Toshiba Corp | 厚膜回路基板 |
EP0381242B1 (en) * | 1989-02-03 | 1992-05-27 | Mitsubishi Materials Corporation | Substrate used for fabrication of thick film circuit |
JPH02207554A (ja) * | 1989-02-07 | 1990-08-17 | Mitsubishi Metal Corp | 放熱性のすぐれた半導体装置用基板 |
JP2615970B2 (ja) * | 1989-02-10 | 1997-06-04 | 三菱マテリアル株式会社 | 内部に導体、抵抗体を配線したA▲l▼N多層基板の製造方法 |
EP0688047A1 (en) | 1994-06-13 | 1995-12-20 | Mitsubishi Materials Corporation | Aluminium nitride substrate and method of producing the same |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5075208A (enrdf_load_html_response) * | 1973-11-07 | 1975-06-20 | ||
JPS578176A (en) * | 1980-06-20 | 1982-01-16 | Seiko Epson Corp | High speed thermal printer head |
JPS59121175A (ja) * | 1982-12-28 | 1984-07-13 | 株式会社東芝 | 放熱体の製造方法 |
-
1984
- 1984-11-15 JP JP23947184A patent/JPS61119094A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61119094A (ja) | 1986-06-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |