Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co LtdfiledCriticalNippon Electric Co Ltd
Priority to JP1565083ApriorityCriticalpatent/JPS59141812A/ja
Publication of JPS59141812ApublicationCriticalpatent/JPS59141812A/ja
Publication of JPH0568128B2publicationCriticalpatent/JPH0568128B2/ja
H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
H03H9/174—Membranes
Landscapes
Physics & Mathematics
(AREA)
Acoustics & Sound
(AREA)
Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits
(AREA)