JPH0566962B2 - - Google Patents
Info
- Publication number
- JPH0566962B2 JPH0566962B2 JP14510485A JP14510485A JPH0566962B2 JP H0566962 B2 JPH0566962 B2 JP H0566962B2 JP 14510485 A JP14510485 A JP 14510485A JP 14510485 A JP14510485 A JP 14510485A JP H0566962 B2 JPH0566962 B2 JP H0566962B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- photoelectric conversion
- receiving surface
- interval
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 48
- 238000006243 chemical reaction Methods 0.000 claims description 32
- 238000005259 measurement Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14510485A JPS625109A (ja) | 1985-07-02 | 1985-07-02 | 光像間隔の測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14510485A JPS625109A (ja) | 1985-07-02 | 1985-07-02 | 光像間隔の測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS625109A JPS625109A (ja) | 1987-01-12 |
JPH0566962B2 true JPH0566962B2 (enrdf_load_stackoverflow) | 1993-09-22 |
Family
ID=15377466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14510485A Granted JPS625109A (ja) | 1985-07-02 | 1985-07-02 | 光像間隔の測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS625109A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102366468B1 (ko) * | 2021-06-28 | 2022-02-23 | 강구봉 | 리니어가이드 가공을 위한 롤링가공장치 |
-
1985
- 1985-07-02 JP JP14510485A patent/JPS625109A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102366468B1 (ko) * | 2021-06-28 | 2022-02-23 | 강구봉 | 리니어가이드 가공을 위한 롤링가공장치 |
Also Published As
Publication number | Publication date |
---|---|
JPS625109A (ja) | 1987-01-12 |
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