JPH0566416A - Liquid crystal display body - Google Patents

Abstract

PURPOSE:To obtain the liquid crystal display body which has high repair probability by forming plural electric conduction parts on electrodes on both sides of a broken part of an electrode electric conductor. CONSTITUTION:After electrode exposed parts 104, 105, 106, and 107 are formed on both sides of the broken place 109 of the electrode electric conductor 102, a thin film 108 is deposited to connect the broken place 109, thereby forming the electric conduction parts.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display used for a display of a TV or a personal computer. More specifically, the present invention relates to a liquid crystal display body having a high display quality in which disconnection is corrected.

[0002]

2. Description of the Related Art Conventionally, a liquid crystal display has been attracting attention as a next main candidate for a display of a TV or a personal computer, and a TFT type liquid crystal display has been a favorite in the field of high-definition video such as a high-definition TV. I've been told.

In the liquid crystal displays in these high definition video fields,
The electrode wiring width and the switching element size are miniaturized, and as many display pixels as possible in display performance are arranged in a limited substrate size. For example, SID 90 Digest,
pp. In the liquid crystal display using the amorphous Si-TFT described in 338, an element having 1.2 million pixels is formed in a diagonal of 5.5 ″, and SID 90 Diges is used.
t, pp. In the liquid crystal display of the poly-Si-TFT method described in 315, a pixel density of 300 / mm ² or more has already been reported.

FIG. 4 shows a cross-sectional view of an element in one pixel portion of a typical poly-Si-TFT type liquid crystal display. Quartz substrate 40
A Si gate electrode 401, an Al (aluminum) source line 402, and an ITO transparent pixel electrode 403 are formed on the substrate 5. The TFT4 is selected by the selection signal applied to the gate line.
When 04 is turned on, the video signal applied to the source line can be input to the pixel electrode to drive the liquid crystal.

[0005]

However, in the above-mentioned high-definition liquid crystal display body, the width of the electrode wiring is as narrow as several μm, there are many defects such as disconnection, and the yield rate is low in the unbroken panel, which has no problem in display. In the case of high-definition TVs, personal computers, etc., the substrate size is large and the density is high, so it cannot be easily manufactured. Regarding the technique for correcting such disconnection, SPIE Vol. 774pp101 (19
The technique and apparatus called laser CVD described in 87) is known, and this can be corrected with a high probability for correction of light-shielding property such as correction of a semiconductor photomask.
In order to repair the electrode 102 under the insulating film 103 such as SiO ₂ as shown in FIG. 1, it is necessary to electrically correct the connection with a low resistance, and the heat of the laser destroys the insulating film to remove the underlying electrode. It is necessary to make a connection after exposing, and it is the actual situation that the success probability of the correction is extremely low if the holes are simply made by laser and the film is made by the laser CVD.

Therefore, the present invention solves the above problems, and an object of the present invention is to provide a liquid crystal display having a high probability of correcting a disconnection.

[0007]

In order to solve the above-mentioned problems, a liquid crystal display of the present invention has a plurality of electrical conductions on both sides of a broken portion of an electrode wiring on a substrate having a switching element for driving a liquid crystal. A portion is formed, and the disconnection point is connected through the electrically conductive portion.

[0008]

According to the present invention, the disconnection point is surely connected.

[0009]

The present invention will be described in detail with reference to the following examples.

(Embodiment 1) FIG. 1 is a sectional view showing the structure of a broken portion of a poly-Si-TFT substrate according to the liquid crystal display of the present invention. 3,000 Å thick p (poly) on quartz substrate 101
In order to correct and connect the disconnection portion 109 formed in the -Si gate electrode 102, two contact holes 104, 105, 1 are formed from the SiO ₂ film 103 having a film thickness of 7000Å.
Nos. 06 and 107 are perforated by pulse laser processing, and a Co CVD film 108 having a film thickness of about 2000 Å is selectively formed thereon.

FIG. 2 is a front view of the same substrate, in which electrodes 202 and 203 on both sides are connected 201 (for example, a CVD CVD film) through four contact holes 104, 105, 106 and 107. The diameter of the contact hole depends on the laser power and time, but a diameter of 2 to 5 μm is possible. On the other hand, the Co CVD film has a sheet resistance of 5
There was no problem with short connections below Ω / □.

The basic structure of the correction device used in this example is the same as that described in the above cited document, and 523 nm pulsed light from a YLF laser was irradiated to make holes in the SiO ₂ film. Further, for film deposition, while flowing He gas containing Co organic metal as an electrode raw material, 51% of Ar ⁺ laser was used.
4 nm continuous light was used. When a normal TN liquid crystal is sandwiched between the counter substrate and the TFT substrate in which the disconnection of the gate line is corrected by the above method, and a display signal is inputted by forming a liquid crystal panel, there is no display defect on the line. It was confirmed that it was corrected electrically. When the number of contact holes is one, the probability of successful repair is extremely low, and it is not necessary to simply make a hole for drawing, and a high repair rate was obtained for the first time by the redundant wiring repair as in the present invention.

(Embodiment 2) FIG. 3 is a front view of an arrangement of a broken portion of a substrate according to another embodiment of the present invention, showing a case where the present invention is particularly effective. The disconnection part 301 of the gate line is T
When a sufficient contact portion cannot be formed in the central portion of the electrode because it is close to the FT element 302 and the source line 303, a plurality of contact holes 305, 306, 307, 308 are formed in the insulating film in the peripheral portion of the disconnection 301. Increased conduction probability.

When the present invention is not used, the number of defects frequently increases due to the occurrence of a new short between the source line and the gate line rather than the probability of repairing the disconnection, whereas the application of the present invention significantly improves the correction probability. Was done. Furthermore, in another embodiment of the present invention, it is applied to the Ta gate electrode of the amorphous Si-TFT substrate, and the same effect is obtained. Therefore, the scope of the present invention is not limited to the above embodiment, and wiring and wiring It is clear that there is an effect of increasing the correction probability regardless of the type of material.

[0015]

As is apparent from the above, according to the present invention, it is possible to correct the disconnection of the electrode wiring with a high correction probability,
It is possible to provide defect-free and high-quality liquid crystal displays for the fields of personal computer displays such as high-definition TVs.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a configuration of a disconnection portion of the present invention.

FIG. 2 is a front layout view of a substrate of the present invention.

FIG. 3 is a front layout view of a disconnection portion of the present invention.

FIG. 4 is a sectional view of a conventional element.

[Explanation of symbols]

101 quartz substrate 102 p-si gate electrode 103 SiO ₂ 104 to 107 contact hole 108 Co CVD film 109 disconnecting section 201 connected 202 and 203 on both sides electrodes 301 a gate line disconnection unit 302 TFT element 303 the source line 304 pixel electrode 401 Si gate electrode 402 Al source line 403 ITO transparent electrode 404 TFT 405 Quartz substrate

Continuation of the front page (51) Int.Cl. ⁵ Identification number Office reference number FI Technical indication location H01L 29/784 H04N 5/66 102 A 7205-5C

Claims (1)

[Claims] 1. A plurality of electrically conductive portions are formed on both sides of a disconnected portion of an electrode wiring on a substrate having a switching element for driving a liquid crystal, and the disconnected portion is connected through the electrically conductive portion. Liquid crystal display body characterized by.