JPH0565771B2 - - Google Patents

Info

Publication number
JPH0565771B2
JPH0565771B2 JP31491889A JP31491889A JPH0565771B2 JP H0565771 B2 JPH0565771 B2 JP H0565771B2 JP 31491889 A JP31491889 A JP 31491889A JP 31491889 A JP31491889 A JP 31491889A JP H0565771 B2 JPH0565771 B2 JP H0565771B2
Authority
JP
Japan
Prior art keywords
filter
clean room
cleanliness
air
room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP31491889A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03175224A (ja
Inventor
Hidekatsu Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Reinetsu KK
Original Assignee
Hitachi Reinetsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Reinetsu KK filed Critical Hitachi Reinetsu KK
Priority to JP31491889A priority Critical patent/JPH03175224A/ja
Publication of JPH03175224A publication Critical patent/JPH03175224A/ja
Publication of JPH0565771B2 publication Critical patent/JPH0565771B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP31491889A 1989-12-04 1989-12-04 クリーンルームにおける清浄度制御装置 Granted JPH03175224A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31491889A JPH03175224A (ja) 1989-12-04 1989-12-04 クリーンルームにおける清浄度制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31491889A JPH03175224A (ja) 1989-12-04 1989-12-04 クリーンルームにおける清浄度制御装置

Publications (2)

Publication Number Publication Date
JPH03175224A JPH03175224A (ja) 1991-07-30
JPH0565771B2 true JPH0565771B2 (enrdf_load_stackoverflow) 1993-09-20

Family

ID=18059213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31491889A Granted JPH03175224A (ja) 1989-12-04 1989-12-04 クリーンルームにおける清浄度制御装置

Country Status (1)

Country Link
JP (1) JPH03175224A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0676672B1 (en) * 1994-04-08 2003-06-11 Canon Kabushiki Kaisha Processing method and apparatus for a resist-coated substrate
JP6731379B2 (ja) * 2017-06-06 2020-07-29 株式会社日立産機システム ファンフィルタユニット、無菌装置およびクリーンルーム
CN107842969A (zh) * 2017-11-22 2018-03-27 奥普家居股份有限公司 一种具有旁通门的新风机

Also Published As

Publication number Publication date
JPH03175224A (ja) 1991-07-30

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Legal Events

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LAPS Cancellation because of no payment of annual fees