JPH0562925B2 - - Google Patents

Info

Publication number
JPH0562925B2
JPH0562925B2 JP8067487A JP8067487A JPH0562925B2 JP H0562925 B2 JPH0562925 B2 JP H0562925B2 JP 8067487 A JP8067487 A JP 8067487A JP 8067487 A JP8067487 A JP 8067487A JP H0562925 B2 JPH0562925 B2 JP H0562925B2
Authority
JP
Japan
Prior art keywords
pattern
side length
sin
converted
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8067487A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63246605A (ja
Inventor
Hidehiko Takano
Hitomi Iiizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Casio Computer Co Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Casio Computer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Casio Computer Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP8067487A priority Critical patent/JPS63246605A/ja
Publication of JPS63246605A publication Critical patent/JPS63246605A/ja
Publication of JPH0562925B2 publication Critical patent/JPH0562925B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP8067487A 1987-03-31 1987-03-31 長方形物体の辺長測定方法 Granted JPS63246605A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8067487A JPS63246605A (ja) 1987-03-31 1987-03-31 長方形物体の辺長測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8067487A JPS63246605A (ja) 1987-03-31 1987-03-31 長方形物体の辺長測定方法

Publications (2)

Publication Number Publication Date
JPS63246605A JPS63246605A (ja) 1988-10-13
JPH0562925B2 true JPH0562925B2 (cs) 1993-09-09

Family

ID=13724899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8067487A Granted JPS63246605A (ja) 1987-03-31 1987-03-31 長方形物体の辺長測定方法

Country Status (1)

Country Link
JP (1) JPS63246605A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6879017B2 (en) 1998-02-25 2005-04-12 Micron Technology, Inc. Methods and structures for metal interconnections in integrated circuits

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6879017B2 (en) 1998-02-25 2005-04-12 Micron Technology, Inc. Methods and structures for metal interconnections in integrated circuits
US7186664B2 (en) 1998-02-25 2007-03-06 Micron Technology, Inc. Methods and structures for metal interconnections in integrated circuits

Also Published As

Publication number Publication date
JPS63246605A (ja) 1988-10-13

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Legal Events

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EXPY Cancellation because of completion of term