JPH0562464B2 - - Google Patents

Info

Publication number
JPH0562464B2
JPH0562464B2 JP58243817A JP24381783A JPH0562464B2 JP H0562464 B2 JPH0562464 B2 JP H0562464B2 JP 58243817 A JP58243817 A JP 58243817A JP 24381783 A JP24381783 A JP 24381783A JP H0562464 B2 JPH0562464 B2 JP H0562464B2
Authority
JP
Japan
Prior art keywords
groove
trench
depression
polysilicon
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58243817A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60136328A (ja
Inventor
Motonori Kawaji
Toshihiko Takakura
Akihisa Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP24381783A priority Critical patent/JPS60136328A/ja
Publication of JPS60136328A publication Critical patent/JPS60136328A/ja
Publication of JPH0562464B2 publication Critical patent/JPH0562464B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP24381783A 1983-12-26 1983-12-26 半導体装置 Granted JPS60136328A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24381783A JPS60136328A (ja) 1983-12-26 1983-12-26 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24381783A JPS60136328A (ja) 1983-12-26 1983-12-26 半導体装置

Publications (2)

Publication Number Publication Date
JPS60136328A JPS60136328A (ja) 1985-07-19
JPH0562464B2 true JPH0562464B2 (cs) 1993-09-08

Family

ID=17109365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24381783A Granted JPS60136328A (ja) 1983-12-26 1983-12-26 半導体装置

Country Status (1)

Country Link
JP (1) JPS60136328A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5094973A (en) * 1987-11-23 1992-03-10 Texas Instrument Incorporated Trench pillar for wafer processing
EP0317786A3 (en) * 1987-11-23 1991-01-16 Texas Instruments Incorporated Constant width trench for wafer processing
US5448102A (en) * 1993-06-24 1995-09-05 Harris Corporation Trench isolation stress relief

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5384692A (en) * 1976-12-29 1978-07-26 Fujitsu Ltd Semiconductor device
JPS5643171U (cs) * 1979-09-10 1981-04-20
JPS58168256A (ja) * 1982-03-30 1983-10-04 Fujitsu Ltd 半導体装置

Also Published As

Publication number Publication date
JPS60136328A (ja) 1985-07-19

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