JPH0562293B2 - - Google Patents

Info

Publication number
JPH0562293B2
JPH0562293B2 JP57209047A JP20904782A JPH0562293B2 JP H0562293 B2 JPH0562293 B2 JP H0562293B2 JP 57209047 A JP57209047 A JP 57209047A JP 20904782 A JP20904782 A JP 20904782A JP H0562293 B2 JPH0562293 B2 JP H0562293B2
Authority
JP
Japan
Prior art keywords
circuit
width
histogram
value
setting value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57209047A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5999238A (ja
Inventor
Chiaki Fukazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57209047A priority Critical patent/JPS5999238A/ja
Publication of JPS5999238A publication Critical patent/JPS5999238A/ja
Publication of JPH0562293B2 publication Critical patent/JPH0562293B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP57209047A 1982-11-29 1982-11-29 表面検査装置 Granted JPS5999238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57209047A JPS5999238A (ja) 1982-11-29 1982-11-29 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57209047A JPS5999238A (ja) 1982-11-29 1982-11-29 表面検査装置

Publications (2)

Publication Number Publication Date
JPS5999238A JPS5999238A (ja) 1984-06-07
JPH0562293B2 true JPH0562293B2 (OSRAM) 1993-09-08

Family

ID=16566369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57209047A Granted JPS5999238A (ja) 1982-11-29 1982-11-29 表面検査装置

Country Status (1)

Country Link
JP (1) JPS5999238A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5569883B2 (ja) * 2011-06-10 2014-08-13 独立行政法人国立高等専門学校機構 研削工具の砥面検査システム及び方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56114747A (en) * 1980-02-14 1981-09-09 Nippon Steel Corp Surface inspection device

Also Published As

Publication number Publication date
JPS5999238A (ja) 1984-06-07

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