JPH0560809U - Slicing machine - Google Patents

Abstract

(57) [Summary] [Purpose] While improving the cleaning and cooling effects of the cutting edge,
(EN) Provided is a slicing machine in which dirty coolant liquid does not stay on a blade base metal part. [Structure] A pair of upper and lower air nozzles 26, 26 are provided on the downstream side of the coolant liquid nozzle 24 in rotation of the blade,
While cutting the ingot 18 while supplying the coolant liquid to the blade base metal portion 14, the air nozzles 26, 2
Air is blown from 6 to the blade edge and the base metal portion 14 so as to face the circumferential blade 16. The air blown to the inner peripheral blade 16 promotes cleaning and cooling of the blade edge with the coolant. Further, the air blown to the base metal portion 14 immediately and forcibly discharges the dirty coolant liquid to the outside of the circumference of the blade 14 without staying in the base metal portion 14. As a result, the blade edge is prevented from being clogged and the cooling effect is enhanced. Further, since the contaminated coolant liquid does not stay, good cutting can be continued.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a slicing machine, and more particularly to a slicing machine for manufacturing semiconductor wafers by cutting a semiconductor ingot into thin pieces.

[0002]

[Prior Art]

 In a conventional slicing machine, an inner peripheral blade or an outer peripheral blade is rotated at high speed and pressed against an ingot to manufacture a semiconductor wafer. In this case, the inner blade is cut while supplying the coolant. The coolant liquid supplied to the inner peripheral blade cleans and cools the blade edge, cleans the blade surface, and is discharged to the outside of the blade circumference by the centrifugal force that rotates the blade.

[0003]

[Problems to be solved by the device]

 However, the conventional slicing machine has the following drawbacks. Since the cutting position of the thin film inner peripheral blade is unstable and a large amount of coolant cannot be applied, it is easy for the blade edge to become clogged and insufficient cooling. Further, due to the surface tension with the blade base metal part, the coolant liquid is less likely to be discharged to the outside of the blade circumference, and the dirty coolant liquid tends to be discharged only after rotating the inner peripheral blade of the blade several times. If cutting is performed without the coolant being discharged quickly in this way, there is a high possibility that a dirty coolant will make a bad cut, and at the same time, once the dirty coolant that has been discharged to the outside of the inner peripheral blade is discharged. May not be removed outside the circumference of the blade and may wrap around the inner circumference again and cause defective cutting.

Further, the pressing means (for example, an air pad) that corrects the displacement of the blade is generally arranged near the blade inner peripheral blade with a slight gap from the blade surface in order to enhance its action and effect. If the cutting chips entrained in the coolant liquid enter the gap, the air pressure of the pressing means cannot be adjusted normally. Further, the chips entering the gap may damage the base metal part of the blade and shorten the life of the blade.

The present invention has been made in view of the above circumstances, and provides a slicing machine that improves the cleaning and cooling effects of the blade edge and prevents the contaminated coolant liquid from accumulating on the blade base metal portion. With the goal.

[0006]

[Means for Solving the Problems]

 In order to achieve the above object, the present invention provides a slicing machine that cuts an ingot into thin flakes with a blade inner peripheral blade while supplying a coolant from a coolant nozzle, and faces the inner peripheral blade in the vicinity of the coolant nozzle. And at least one air nozzle is provided.

[0007]

[Action]

 According to the present invention, at least one air nozzle is provided on the downstream side of the coolant liquid nozzle in the blade rotation direction to cut the ingot while supplying the coolant liquid to the inner peripheral blade and the blade base metal portion, and at the same time, to the inner periphery from the air nozzle. Blow air against the blade edge and base metal part facing the blade.

The air blown to the inner peripheral blade promotes cleaning and cooling of the blade edge with the coolant. Further, the air blown to the base metal portion immediately and forcibly discharges the dirty coolant liquid to the outside of the blade circumference without staying in the base metal portion. As a result, the cutting edge is prevented from being clogged, the cooling efficiency of the cutting edge is improved, and the dirty coolant is quickly discharged to the outside of the blade circumference, so that good cutting can be continued.

[0009]

【Example】

 Hereinafter, preferred embodiments of a slicing machine according to the present invention will be described in detail with reference to the accompanying drawings. In FIG. 1, a chuck body 12 is fixedly attached to the upper end of the spindle 10, and a motor (not shown) is further connected to the lower end of the spindle 10, whereby the spindle 10 and the chuck body 12 rotate. It is like this.

An outer peripheral edge of a donut-shaped blade 14 is pulled up on the chuck body 12, and an inner peripheral blade 16 is formed on an inner peripheral edge of the blade 14. The inner peripheral blade 16 is composed of fine diamond abrasive grains or the like. Further, the outer peripheral edge of the blade 14 can be adjusted in tension by a known tensioning mechanism (not shown) of the chuck body 12.

The upper end of the semiconductor ingot 18 is fixed to a work support (not shown). Further, the ingot 18 can be moved in the cutting feed direction (XX direction) by the cutting feed mechanism, and the work support table further has a work indexing direction (Z-Z direction) by the work indexing mechanism. ) Can be moved to. The cutting feed mechanism and the work indexing mechanism are driven by a command signal from a controller (not shown).

Further, as shown in FIGS. 1 and 2, a pair of air pads 20, 20 are arranged on the upper surface of the blade. Further, a pair of non-contact type blade sensors 22 and 22 are arranged in proximity to the air pads 20 and 20. Further, a coolant nozzle 24 is provided facing the inner peripheral blade, and a pair of upper and lower air nozzles 26, 26 facing the inner peripheral blade are provided on the downstream side of the coolant nozzle 24 in the blade rotation direction.

The operation of the slicing machine configured as described above is carried out as follows. As shown in FIG. 2, the coolant is supplied from the coolant nozzle 24 to the rotating inner peripheral blade 16 and the blade base metal portion 14, and at the same time, the air nozzles 26, 26 are opposed to the inner peripheral blade 16 so that the blade tip 16 Also, the ingot 18 is cut while blowing air on the blade base metal portion 14.

The air blown to the inner peripheral blade 16 promotes cleaning and cooling of the blade edge with the coolant. Further, as shown in FIGS. 2 and 3, the air 26A blown onto the blade base metal portion is cleaned by the air nozzle being disposed downstream of the coolant nozzle in the rotation direction of the blade 14 so that the base metal portion can be cleaned. The polluted coolant liquid 24A is immediately and forcibly discharged outside the circumference of the blade 14 without accumulating on the base metal portion.

As a result, the effect of preventing clogging of the cutting edge is improved, the cooling effect of the cutting edge is enhanced, and the dirty coolant liquid does not remain on the base metal part of the blade, so that good cutting can be continued. At the same time, chips do not enter the gap between the air pad and the blade surface, and the blade is not damaged by the chips. In the above embodiment, a pair of air nozzles is arranged on the downstream side of the coolant nozzle in the blade rotation direction, but a single upper or lower air nozzle may be used, or on the downstream side of the coolant nozzle, and in addition to the air pad and blade sensor. A plurality of air nozzles may be further arranged at a position that does not adversely affect the action of.

[0016]

[Effect of the device]

 As described above, in the slicing machine according to the present invention, at least one air nozzle is provided on the downstream side of the coolant nozzle in the blade rotation direction so as to face the inner peripheral blade. As a result, the effect of preventing clogging of the cutting edge can be improved, the cooling effect of the cutting edge can be enhanced, and the dirty coolant does not remain on the blade base metal part, so that good cutting can be continued.

Further, the chips are prevented from entering the gap between the air pad and the blade surface, and the air pressure of the air pad can be adjusted normally. Further, the cutting chips do not damage the base metal of the blade, and the life of the blade can be extended.

[Brief description of drawings]

FIG. 1 is a schematic view of the vicinity of a blade of a slicing machine according to the present invention.

2 is a plan view of a blade of the slicing machine of FIG. 1 and an explanatory view of the present invention.

FIG. 3 is an explanatory diagram of the present invention.

[Explanation of symbols]

 14 ... Blade 16 ... Inner peripheral blade 18 ... Ingot 24 ... Coolant nozzle 25 ... Air nozzle

Claims (2)

[Scope of utility model registration request] 1. A slicing machine that cuts an ingot into thin flakes with a blade inner peripheral blade while supplying a coolant from a coolant nozzle, wherein at least one air nozzle is provided near the coolant nozzle and faces the inner peripheral blade. Slicing machine characterized by having. 2. The slicing machine according to claim 1, wherein at least one of the air nozzles is provided downstream of the coolant nozzle in the blade rotation direction.